11/19/2011	9:33:07 AM	Main Vac valve closed
11/19/2011	9:33:26 AM	Main Vac valve opened
11/19/2011	9:34:01 AM	Recipe started at 9:33 AM
11/19/2011	9:34:01 AM	Helium valve closed
11/19/2011	9:34:01 AM	H2 valve closed
11/19/2011	9:34:01 AM	BCl3 valve closed
11/19/2011	9:34:01 AM	PH3 valve closed
11/19/2011	9:34:01 AM	SiCl4 pre valve closed
11/19/2011	9:34:01 AM	SiCl4 post valve closed
11/19/2011	9:34:01 AM	Main Vac valve closed
11/19/2011	9:34:01 AM	Bypass valve closed
11/19/2011	9:34:01 AM	Bubbler valve closed
11/19/2011	9:34:01 AM	Helium MFC set to  0.000000
11/19/2011	9:34:01 AM	H2 MFC set to  0.000000
11/19/2011	9:34:01 AM	BCl3 MFC set to  0.000000
11/19/2011	9:34:01 AM	PHl3 MFC set to  0.000000
11/19/2011	9:34:01 AM	SiCl4 MFC set to  0.000000
11/19/2011	9:34:01 AM	Bypass solenoid MFC set to  0.000000
11/19/2011	9:34:02 AM	Tube furnace set to 0
11/19/2011	9:34:05 AM	Helium valve closed
11/19/2011	9:34:05 AM	BCl3 valve closed
11/19/2011	9:34:05 AM	PH3 valve closed
11/19/2011	9:34:05 AM	SiCl4 pre valve closed
11/19/2011	9:34:05 AM	SiCl4 post valve closed
11/19/2011	9:34:05 AM	Main Vac valve closed
11/19/2011	9:34:05 AM	Bypass valve closed
11/19/2011	9:34:05 AM	Bubbler valve closed
11/19/2011	9:34:05 AM	H2 valve opened
11/19/2011	9:34:05 AM	Helium MFC set to  0.000000
11/19/2011	9:34:05 AM	H2 MFC set to  500.000000
11/19/2011	9:34:05 AM	BCl3 MFC set to  0.000000
11/19/2011	9:34:05 AM	PHl3 MFC set to  0.000000
11/19/2011	9:34:05 AM	SiCl4 MFC set to  0.000000
11/19/2011	9:34:05 AM	Bypass solenoid MFC set to  0.000000
11/19/2011	9:34:05 AM	Tube furnace set to 50
11/19/2011	9:35:13 AM	Helium valve closed
11/19/2011	9:35:13 AM	BCl3 valve closed
11/19/2011	9:35:13 AM	PH3 valve closed
11/19/2011	9:35:13 AM	SiCl4 pre valve closed
11/19/2011	9:35:13 AM	SiCl4 post valve closed
11/19/2011	9:35:13 AM	Main Vac valve closed
11/19/2011	9:35:13 AM	Bypass valve closed
11/19/2011	9:35:13 AM	H2 valve opened
11/19/2011	9:35:13 AM	Bubbler valve opened
11/19/2011	9:35:13 AM	Helium MFC set to  0.000000
11/19/2011	9:35:13 AM	H2 MFC set to  500.000000
11/19/2011	9:35:13 AM	BCl3 MFC set to  0.000000
11/19/2011	9:35:13 AM	PHl3 MFC set to  0.000000
11/19/2011	9:35:13 AM	SiCl4 MFC set to  0.000000
11/19/2011	9:35:13 AM	Bypass solenoid MFC set to  0.000000
11/19/2011	9:35:13 AM	Tube furnace set to 50
11/19/2011	9:35:14 AM	Helium valve closed
11/19/2011	9:35:14 AM	BCl3 valve closed
11/19/2011	9:35:14 AM	PH3 valve closed
11/19/2011	9:35:14 AM	SiCl4 pre valve closed
11/19/2011	9:35:14 AM	SiCl4 post valve closed
11/19/2011	9:35:14 AM	Main Vac valve closed
11/19/2011	9:35:14 AM	Bypass valve closed
11/19/2011	9:35:14 AM	H2 valve opened
11/19/2011	9:35:14 AM	Bubbler valve opened
11/19/2011	9:35:14 AM	Helium MFC set to  0.000000
11/19/2011	9:35:14 AM	H2 MFC set to  495.000000
11/19/2011	9:35:14 AM	BCl3 MFC set to  0.000000
11/19/2011	9:35:14 AM	PHl3 MFC set to  0.000000
11/19/2011	9:35:14 AM	SiCl4 MFC set to  0.000000
11/19/2011	9:35:14 AM	Bypass solenoid MFC set to  0.000000
11/19/2011	9:35:14 AM	Tube furnace set to 1000
11/19/2011	9:58:14 AM	Helium valve closed
11/19/2011	9:58:14 AM	BCl3 valve closed
11/19/2011	9:58:14 AM	PH3 valve closed
11/19/2011	9:58:14 AM	Main Vac valve closed
11/19/2011	9:58:14 AM	Bypass valve closed
11/19/2011	9:58:14 AM	H2 valve opened
11/19/2011	9:58:14 AM	SiCl4 pre valve opened
11/19/2011	9:58:14 AM	SiCl4 post valve opened
11/19/2011	9:58:14 AM	Bubbler valve opened
11/19/2011	9:58:14 AM	Helium MFC set to  0.000000
11/19/2011	9:58:14 AM	H2 MFC set to  495.000000
11/19/2011	9:58:14 AM	BCl3 MFC set to  0.000000
11/19/2011	9:58:14 AM	PHl3 MFC set to  0.000000
11/19/2011	9:58:14 AM	SiCl4 MFC set to  24.000000
11/19/2011	9:58:14 AM	Bypass solenoid MFC set to  0.000000
11/19/2011	9:58:14 AM	Tube furnace set to 1000
11/19/2011	10:19:44 AM	Helium valve closed
11/19/2011	10:19:44 AM	BCl3 valve closed
11/19/2011	10:19:44 AM	PH3 valve closed
11/19/2011	10:19:44 AM	SiCl4 pre valve closed
11/19/2011	10:19:44 AM	SiCl4 post valve closed
11/19/2011	10:19:44 AM	Main Vac valve closed
11/19/2011	10:19:44 AM	Bypass valve closed
11/19/2011	10:19:44 AM	H2 valve opened
11/19/2011	10:19:44 AM	Bubbler valve opened
11/19/2011	10:19:44 AM	Helium MFC set to  0.000000
11/19/2011	10:19:44 AM	H2 MFC set to  480.000000
11/19/2011	10:19:44 AM	BCl3 MFC set to  0.000000
11/19/2011	10:19:44 AM	PHl3 MFC set to  0.000000
11/19/2011	10:19:44 AM	SiCl4 MFC set to  0.000000
11/19/2011	10:19:44 AM	Bypass solenoid MFC set to  0.000000
11/19/2011	10:19:44 AM	Tube furnace set to 750
11/19/2011	10:29:44 AM	H2 valve closed
11/19/2011	10:29:44 AM	BCl3 valve closed
11/19/2011	10:29:44 AM	PH3 valve closed
11/19/2011	10:29:44 AM	SiCl4 pre valve closed
11/19/2011	10:29:44 AM	SiCl4 post valve closed
11/19/2011	10:29:44 AM	Main Vac valve closed
11/19/2011	10:29:44 AM	Bypass valve closed
11/19/2011	10:29:44 AM	Helium valve opened
11/19/2011	10:29:44 AM	Bubbler valve opened
11/19/2011	10:29:44 AM	Helium MFC set to  400.000000
11/19/2011	10:29:44 AM	H2 MFC set to  0.000000
11/19/2011	10:29:44 AM	BCl3 MFC set to  0.000000
11/19/2011	10:29:44 AM	PHl3 MFC set to  0.000000
11/19/2011	10:29:44 AM	SiCl4 MFC set to  0.000000
11/19/2011	10:29:44 AM	Bypass solenoid MFC set to  0.000000
11/19/2011	10:29:44 AM	Tube furnace set to 0
11/19/2011	10:36:54 AM	Run aborted at 10:36 AM
11/19/2011	10:36:54 AM	Helium valve closed
11/19/2011	10:36:54 AM	H2 valve closed
11/19/2011	10:36:54 AM	BCl3 valve closed
11/19/2011	10:36:54 AM	PH3 valve closed
11/19/2011	10:36:54 AM	SiCl4 pre valve closed
11/19/2011	10:36:54 AM	SiCl4 post valve closed
11/19/2011	10:36:54 AM	Bypass valve closed
11/19/2011	10:36:54 AM	Main Vac valve closed
11/19/2011	10:36:54 AM	Bubbler valve closed
11/19/2011	10:36:54 AM	Helium MFC set to  0.000000
11/19/2011	10:36:54 AM	H2 MFC set to  0.000000
11/19/2011	10:36:54 AM	BCl3 MFC set to  0.000000
11/19/2011	10:36:54 AM	PHl3 MFC set to  0.000000
11/19/2011	10:36:54 AM	SiCl4 MFC set to  0.000000
11/19/2011	10:36:54 AM	Tube furnace set to 0
11/19/2011	10:36:56 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/19/2011	10:36:56 AM	Recipe started at 10:36 AM
11/19/2011	10:36:57 AM	Helium valve closed
11/19/2011	10:36:57 AM	H2 valve closed
11/19/2011	10:36:57 AM	BCl3 valve closed
11/19/2011	10:36:57 AM	PH3 valve closed
11/19/2011	10:36:57 AM	SiCl4 pre valve closed
11/19/2011	10:36:57 AM	SiCl4 post valve closed
11/19/2011	10:36:57 AM	Main Vac valve closed
11/19/2011	10:36:57 AM	Bypass valve closed
11/19/2011	10:36:57 AM	Bubbler valve closed
11/19/2011	10:36:57 AM	Helium MFC set to  0.000000
11/19/2011	10:36:57 AM	H2 MFC set to  0.000000
11/19/2011	10:36:57 AM	BCl3 MFC set to  0.000000
11/19/2011	10:36:57 AM	PHl3 MFC set to  0.000000
11/19/2011	10:36:57 AM	SiCl4 MFC set to  0.000000
11/19/2011	10:36:57 AM	Bypass solenoid MFC set to  0.000000
11/19/2011	10:36:57 AM	Tube furnace set to 0
11/19/2011	10:37:00 AM	H2 valve closed
11/19/2011	10:37:00 AM	BCl3 valve closed
11/19/2011	10:37:00 AM	PH3 valve closed
11/19/2011	10:37:00 AM	SiCl4 pre valve closed
11/19/2011	10:37:00 AM	SiCl4 post valve closed
11/19/2011	10:37:00 AM	Main Vac valve closed
11/19/2011	10:37:00 AM	Bypass valve closed
11/19/2011	10:37:00 AM	Bubbler valve closed
11/19/2011	10:37:00 AM	Helium valve opened
11/19/2011	10:37:00 AM	Helium MFC set to  500.000000
11/19/2011	10:37:00 AM	H2 MFC set to  0.000000
11/19/2011	10:37:00 AM	BCl3 MFC set to  0.000000
11/19/2011	10:37:00 AM	PHl3 MFC set to  0.000000
11/19/2011	10:37:00 AM	SiCl4 MFC set to  0.000000
11/19/2011	10:37:00 AM	Bypass solenoid MFC set to  0.000000
11/19/2011	10:37:00 AM	Tube furnace set to 0
11/19/2011	10:37:00 AM	Helium valve closed
11/19/2011	10:37:00 AM	H2 valve closed
11/19/2011	10:37:00 AM	BCl3 valve closed
11/19/2011	10:37:00 AM	PH3 valve closed
11/19/2011	10:37:00 AM	SiCl4 pre valve closed
11/19/2011	10:37:00 AM	SiCl4 post valve closed
11/19/2011	10:37:00 AM	Main Vac valve closed
11/19/2011	10:37:00 AM	Bypass valve closed
11/19/2011	10:37:00 AM	Bubbler valve closed
11/19/2011	10:37:00 AM	Helium MFC set to  0.000000
11/19/2011	10:37:00 AM	H2 MFC set to  0.000000
11/19/2011	10:37:00 AM	BCl3 MFC set to  0.000000
11/19/2011	10:37:00 AM	PHl3 MFC set to  0.000000
11/19/2011	10:37:00 AM	SiCl4 MFC set to  0.000000
11/19/2011	10:37:00 AM	Bypass solenoid MFC set to  0.000000
11/19/2011	10:37:00 AM	Tube furnace set to 0
11/19/2011	10:37:01 AM	Run finished at 10:37 AM
11/19/2011	10:37:01 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/19/2011	10:41:55 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/19/2011	10:41:56 AM	Recipe started at 10:41 AM
11/19/2011	10:41:56 AM	Helium valve closed
11/19/2011	10:41:56 AM	H2 valve closed
11/19/2011	10:41:56 AM	BCl3 valve closed
11/19/2011	10:41:56 AM	PH3 valve closed
11/19/2011	10:41:56 AM	SiCl4 pre valve closed
11/19/2011	10:41:56 AM	SiCl4 post valve closed
11/19/2011	10:41:56 AM	Main Vac valve closed
11/19/2011	10:41:56 AM	Bubbler valve closed
11/19/2011	10:41:56 AM	Bypass valve opened
11/19/2011	10:41:56 AM	Helium MFC set to  0.000000
11/19/2011	10:41:56 AM	H2 MFC set to  0.000000
11/19/2011	10:41:56 AM	BCl3 MFC set to  0.000000
11/19/2011	10:41:56 AM	PHl3 MFC set to  0.000000
11/19/2011	10:41:56 AM	SiCl4 MFC set to  0.000000
11/19/2011	10:41:56 AM	Bypass solenoid MFC set to  0.000000
11/19/2011	10:41:56 AM	Tube furnace set to 0
11/19/2011	10:43:52 AM	Helium valve closed
11/19/2011	10:43:52 AM	H2 valve closed
11/19/2011	10:43:52 AM	BCl3 valve closed
11/19/2011	10:43:52 AM	PH3 valve closed
11/19/2011	10:43:52 AM	SiCl4 pre valve closed
11/19/2011	10:43:52 AM	SiCl4 post valve closed
11/19/2011	10:43:52 AM	Main Vac valve closed
11/19/2011	10:43:52 AM	Bubbler valve closed
11/19/2011	10:43:52 AM	Bypass valve opened
11/19/2011	10:43:52 AM	Helium MFC set to  0.000000
11/19/2011	10:43:52 AM	H2 MFC set to  0.000000
11/19/2011	10:43:52 AM	BCl3 MFC set to  0.000000
11/19/2011	10:43:52 AM	PHl3 MFC set to  0.000000
11/19/2011	10:43:52 AM	SiCl4 MFC set to  0.000000
11/19/2011	10:43:52 AM	Bypass solenoid MFC set to  0.000000
11/19/2011	10:43:53 AM	Tube furnace set to 0
11/19/2011	10:44:53 AM	Helium valve closed
11/19/2011	10:44:53 AM	H2 valve closed
11/19/2011	10:44:53 AM	BCl3 valve closed
11/19/2011	10:44:53 AM	PH3 valve closed
11/19/2011	10:44:53 AM	SiCl4 pre valve closed
11/19/2011	10:44:53 AM	SiCl4 post valve closed
11/19/2011	10:44:53 AM	Bypass valve closed
11/19/2011	10:44:53 AM	Bubbler valve closed
11/19/2011	10:44:53 AM	Main Vac valve opened
11/19/2011	10:44:53 AM	Helium MFC set to  0.000000
11/19/2011	10:44:53 AM	H2 MFC set to  0.000000
11/19/2011	10:44:53 AM	BCl3 MFC set to  0.000000
11/19/2011	10:44:53 AM	PHl3 MFC set to  0.000000
11/19/2011	10:44:53 AM	SiCl4 MFC set to  0.000000
11/19/2011	10:44:53 AM	Bypass solenoid MFC set to  0.000000
11/19/2011	10:44:53 AM	Tube furnace set to 0
11/19/2011	10:44:54 AM	Run finished at 10:44 AM
11/19/2011	10:44:54 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/19/2011	10:53:11 AM	Recipe started at 10:52 AM
11/19/2011	10:53:11 AM	Helium valve closed
11/19/2011	10:53:11 AM	H2 valve closed
11/19/2011	10:53:11 AM	BCl3 valve closed
11/19/2011	10:53:11 AM	PH3 valve closed
11/19/2011	10:53:11 AM	SiCl4 pre valve closed
11/19/2011	10:53:11 AM	SiCl4 post valve closed
11/19/2011	10:53:11 AM	Main Vac valve closed
11/19/2011	10:53:11 AM	Bubbler valve closed
11/19/2011	10:53:11 AM	Bypass valve opened
11/19/2011	10:53:11 AM	Helium MFC set to  0.000000
11/19/2011	10:53:11 AM	H2 MFC set to  0.000000
11/19/2011	10:53:11 AM	BCl3 MFC set to  0.000000
11/19/2011	10:53:11 AM	PHl3 MFC set to  0.000000
11/19/2011	10:53:11 AM	SiCl4 MFC set to  0.000000
11/19/2011	10:53:11 AM	Bypass solenoid MFC set to  0.000000
11/19/2011	10:53:11 AM	Tube furnace set to 180
11/19/2011	10:53:12 AM	Helium valve closed
11/19/2011	10:53:12 AM	H2 valve closed
11/19/2011	10:53:12 AM	BCl3 valve closed
11/19/2011	10:53:12 AM	PH3 valve closed
11/19/2011	10:53:12 AM	SiCl4 pre valve closed
11/19/2011	10:53:12 AM	SiCl4 post valve closed
11/19/2011	10:53:12 AM	Main Vac valve closed
11/19/2011	10:53:12 AM	Bubbler valve closed
11/19/2011	10:53:12 AM	Bypass valve opened
11/19/2011	10:53:12 AM	Helium MFC set to  0.000000
11/19/2011	10:53:12 AM	H2 MFC set to  0.000000
11/19/2011	10:53:12 AM	BCl3 MFC set to  0.000000
11/19/2011	10:53:12 AM	PHl3 MFC set to  0.000000
11/19/2011	10:53:12 AM	SiCl4 MFC set to  0.000000
11/19/2011	10:53:12 AM	Bypass solenoid MFC set to  0.000000
11/19/2011	10:53:12 AM	Tube furnace set to 150
11/19/2011	10:53:22 AM	Helium valve closed
11/19/2011	10:53:22 AM	H2 valve closed
11/19/2011	10:53:22 AM	BCl3 valve closed
11/19/2011	10:53:22 AM	PH3 valve closed
11/19/2011	10:53:22 AM	SiCl4 pre valve closed
11/19/2011	10:53:22 AM	SiCl4 post valve closed
11/19/2011	10:53:22 AM	Bypass valve closed
11/19/2011	10:53:22 AM	Bubbler valve closed
11/19/2011	10:53:22 AM	Main Vac valve opened
11/19/2011	10:53:22 AM	Helium MFC set to  0.000000
11/19/2011	10:53:22 AM	H2 MFC set to  0.000000
11/19/2011	10:53:22 AM	BCl3 MFC set to  0.000000
11/19/2011	10:53:22 AM	PHl3 MFC set to  0.000000
11/19/2011	10:53:22 AM	SiCl4 MFC set to  0.000000
11/19/2011	10:53:22 AM	Bypass solenoid MFC set to  0.000000
11/19/2011	10:53:22 AM	Tube furnace set to 180
11/19/2011	10:53:52 AM	H2 valve closed
11/19/2011	10:53:52 AM	BCl3 valve closed
11/19/2011	10:53:52 AM	PH3 valve closed
11/19/2011	10:53:52 AM	SiCl4 pre valve closed
11/19/2011	10:53:52 AM	SiCl4 post valve closed
11/19/2011	10:53:52 AM	Bypass valve closed
11/19/2011	10:53:52 AM	Bubbler valve closed
11/19/2011	10:53:52 AM	Helium valve opened
11/19/2011	10:53:52 AM	Main Vac valve opened
11/19/2011	10:53:52 AM	Helium MFC set to  20.000000
11/19/2011	10:53:52 AM	H2 MFC set to  0.000000
11/19/2011	10:53:52 AM	BCl3 MFC set to  0.000000
11/19/2011	10:53:52 AM	PHl3 MFC set to  0.000000
11/19/2011	10:53:52 AM	SiCl4 MFC set to  0.000000
11/19/2011	10:53:52 AM	Bypass solenoid MFC set to  0.000000
11/19/2011	10:53:52 AM	Tube furnace set to 180
11/19/2011	10:54:22 AM	Helium valve closed
11/19/2011	10:54:22 AM	H2 valve closed
11/19/2011	10:54:22 AM	BCl3 valve closed
11/19/2011	10:54:22 AM	PH3 valve closed
11/19/2011	10:54:22 AM	SiCl4 pre valve closed
11/19/2011	10:54:22 AM	SiCl4 post valve closed
11/19/2011	10:54:22 AM	Bypass valve closed
11/19/2011	10:54:22 AM	Bubbler valve closed
11/19/2011	10:54:22 AM	Main Vac valve opened
11/19/2011	10:54:22 AM	Helium MFC set to  0.000000
11/19/2011	10:54:22 AM	H2 MFC set to  0.000000
11/19/2011	10:54:22 AM	BCl3 MFC set to  0.000000
11/19/2011	10:54:22 AM	PHl3 MFC set to  0.000000
11/19/2011	10:54:22 AM	SiCl4 MFC set to  0.000000
11/19/2011	10:54:22 AM	Bypass solenoid MFC set to  0.000000
11/19/2011	10:54:22 AM	Tube furnace set to 150
11/19/2011	10:54:52 AM	H2 valve closed
11/19/2011	10:54:52 AM	BCl3 valve closed
11/19/2011	10:54:52 AM	PH3 valve closed
11/19/2011	10:54:52 AM	SiCl4 pre valve closed
11/19/2011	10:54:52 AM	SiCl4 post valve closed
11/19/2011	10:54:52 AM	Bypass valve closed
11/19/2011	10:54:52 AM	Bubbler valve closed
11/19/2011	10:54:52 AM	Helium valve opened
11/19/2011	10:54:52 AM	Main Vac valve opened
11/19/2011	10:54:52 AM	Helium MFC set to  20.000000
11/19/2011	10:54:52 AM	H2 MFC set to  0.000000
11/19/2011	10:54:52 AM	BCl3 MFC set to  0.000000
11/19/2011	10:54:52 AM	PHl3 MFC set to  0.000000
11/19/2011	10:54:52 AM	SiCl4 MFC set to  0.000000
11/19/2011	10:54:52 AM	Bypass solenoid MFC set to  0.000000
11/19/2011	10:54:53 AM	Tube furnace set to 180
11/19/2011	10:55:23 AM	Helium valve closed
11/19/2011	10:55:23 AM	H2 valve closed
11/19/2011	10:55:23 AM	BCl3 valve closed
11/19/2011	10:55:23 AM	PH3 valve closed
11/19/2011	10:55:23 AM	SiCl4 pre valve closed
11/19/2011	10:55:23 AM	SiCl4 post valve closed
11/19/2011	10:55:23 AM	Bypass valve closed
11/19/2011	10:55:23 AM	Bubbler valve closed
11/19/2011	10:55:23 AM	Main Vac valve opened
11/19/2011	10:55:23 AM	Helium MFC set to  0.000000
11/19/2011	10:55:23 AM	H2 MFC set to  0.000000
11/19/2011	10:55:23 AM	BCl3 MFC set to  0.000000
11/19/2011	10:55:23 AM	PHl3 MFC set to  0.000000
11/19/2011	10:55:23 AM	SiCl4 MFC set to  0.000000
11/19/2011	10:55:23 AM	Bypass solenoid MFC set to  0.000000
11/19/2011	10:55:23 AM	Tube furnace set to 150
11/19/2011	10:55:53 AM	H2 valve closed
11/19/2011	10:55:53 AM	BCl3 valve closed
11/19/2011	10:55:53 AM	PH3 valve closed
11/19/2011	10:55:53 AM	SiCl4 pre valve closed
11/19/2011	10:55:53 AM	SiCl4 post valve closed
11/19/2011	10:55:53 AM	Bypass valve closed
11/19/2011	10:55:53 AM	Bubbler valve closed
11/19/2011	10:55:53 AM	Helium valve opened
11/19/2011	10:55:53 AM	Main Vac valve opened
11/19/2011	10:55:53 AM	Helium MFC set to  20.000000
11/19/2011	10:55:53 AM	H2 MFC set to  0.000000
11/19/2011	10:55:53 AM	BCl3 MFC set to  0.000000
11/19/2011	10:55:53 AM	PHl3 MFC set to  0.000000
11/19/2011	10:55:53 AM	SiCl4 MFC set to  0.000000
11/19/2011	10:55:53 AM	Bypass solenoid MFC set to  0.000000
11/19/2011	10:55:53 AM	Tube furnace set to 150
11/19/2011	10:56:23 AM	Helium valve closed
11/19/2011	10:56:23 AM	H2 valve closed
11/19/2011	10:56:23 AM	BCl3 valve closed
11/19/2011	10:56:23 AM	PH3 valve closed
11/19/2011	10:56:23 AM	SiCl4 pre valve closed
11/19/2011	10:56:23 AM	SiCl4 post valve closed
11/19/2011	10:56:23 AM	Bypass valve closed
11/19/2011	10:56:23 AM	Bubbler valve closed
11/19/2011	10:56:23 AM	Main Vac valve opened
11/19/2011	10:56:23 AM	Helium MFC set to  0.000000
11/19/2011	10:56:23 AM	H2 MFC set to  0.000000
11/19/2011	10:56:23 AM	BCl3 MFC set to  0.000000
11/19/2011	10:56:23 AM	PHl3 MFC set to  0.000000
11/19/2011	10:56:23 AM	SiCl4 MFC set to  0.000000
11/19/2011	10:56:23 AM	Bypass solenoid MFC set to  0.000000
11/19/2011	10:56:23 AM	Tube furnace set to 150
11/19/2011	10:56:53 AM	H2 valve closed
11/19/2011	10:56:53 AM	BCl3 valve closed
11/19/2011	10:56:53 AM	PH3 valve closed
11/19/2011	10:56:53 AM	SiCl4 pre valve closed
11/19/2011	10:56:53 AM	SiCl4 post valve closed
11/19/2011	10:56:53 AM	Bypass valve closed
11/19/2011	10:56:53 AM	Bubbler valve closed
11/19/2011	10:56:53 AM	Helium valve opened
11/19/2011	10:56:53 AM	Main Vac valve opened
11/19/2011	10:56:53 AM	Helium MFC set to  20.000000
11/19/2011	10:56:53 AM	H2 MFC set to  0.000000
11/19/2011	10:56:53 AM	BCl3 MFC set to  0.000000
11/19/2011	10:56:53 AM	PHl3 MFC set to  0.000000
11/19/2011	10:56:53 AM	SiCl4 MFC set to  0.000000
11/19/2011	10:56:53 AM	Bypass solenoid MFC set to  0.000000
11/19/2011	10:56:53 AM	Tube furnace set to 180
11/19/2011	10:57:23 AM	Helium valve closed
11/19/2011	10:57:23 AM	H2 valve closed
11/19/2011	10:57:23 AM	BCl3 valve closed
11/19/2011	10:57:23 AM	PH3 valve closed
11/19/2011	10:57:23 AM	SiCl4 pre valve closed
11/19/2011	10:57:23 AM	SiCl4 post valve closed
11/19/2011	10:57:23 AM	Bypass valve closed
11/19/2011	10:57:23 AM	Bubbler valve closed
11/19/2011	10:57:23 AM	Main Vac valve opened
11/19/2011	10:57:23 AM	Helium MFC set to  0.000000
11/19/2011	10:57:23 AM	H2 MFC set to  0.000000
11/19/2011	10:57:23 AM	BCl3 MFC set to  0.000000
11/19/2011	10:57:23 AM	PHl3 MFC set to  0.000000
11/19/2011	10:57:23 AM	SiCl4 MFC set to  0.000000
11/19/2011	10:57:23 AM	Bypass solenoid MFC set to  0.000000
11/19/2011	10:57:24 AM	Tube furnace set to 150
11/19/2011	10:57:54 AM	H2 valve closed
11/19/2011	10:57:54 AM	BCl3 valve closed
11/19/2011	10:57:54 AM	PH3 valve closed
11/19/2011	10:57:54 AM	SiCl4 pre valve closed
11/19/2011	10:57:54 AM	SiCl4 post valve closed
11/19/2011	10:57:54 AM	Bypass valve closed
11/19/2011	10:57:54 AM	Bubbler valve closed
11/19/2011	10:57:54 AM	Helium valve opened
11/19/2011	10:57:54 AM	Main Vac valve opened
11/19/2011	10:57:54 AM	Helium MFC set to  20.000000
11/19/2011	10:57:54 AM	H2 MFC set to  0.000000
11/19/2011	10:57:54 AM	BCl3 MFC set to  0.000000
11/19/2011	10:57:54 AM	PHl3 MFC set to  0.000000
11/19/2011	10:57:54 AM	SiCl4 MFC set to  0.000000
11/19/2011	10:57:54 AM	Bypass solenoid MFC set to  0.000000
11/19/2011	10:57:54 AM	Tube furnace set to 150
11/19/2011	10:58:24 AM	Helium valve closed
11/19/2011	10:58:24 AM	H2 valve closed
11/19/2011	10:58:24 AM	BCl3 valve closed
11/19/2011	10:58:24 AM	PH3 valve closed
11/19/2011	10:58:24 AM	SiCl4 pre valve closed
11/19/2011	10:58:24 AM	SiCl4 post valve closed
11/19/2011	10:58:24 AM	Bypass valve closed
11/19/2011	10:58:24 AM	Bubbler valve closed
11/19/2011	10:58:24 AM	Main Vac valve opened
11/19/2011	10:58:24 AM	Helium MFC set to  0.000000
11/19/2011	10:58:24 AM	H2 MFC set to  0.000000
11/19/2011	10:58:24 AM	BCl3 MFC set to  0.000000
11/19/2011	10:58:24 AM	PHl3 MFC set to  0.000000
11/19/2011	10:58:24 AM	SiCl4 MFC set to  0.000000
11/19/2011	10:58:24 AM	Bypass solenoid MFC set to  0.000000
11/19/2011	10:58:24 AM	Tube furnace set to 150
11/19/2011	10:58:54 AM	H2 valve closed
11/19/2011	10:58:54 AM	BCl3 valve closed
11/19/2011	10:58:54 AM	PH3 valve closed
11/19/2011	10:58:54 AM	SiCl4 pre valve closed
11/19/2011	10:58:54 AM	SiCl4 post valve closed
11/19/2011	10:58:54 AM	Bypass valve closed
11/19/2011	10:58:54 AM	Bubbler valve closed
11/19/2011	10:58:54 AM	Helium valve opened
11/19/2011	10:58:54 AM	Main Vac valve opened
11/19/2011	10:58:54 AM	Helium MFC set to  20.000000
11/19/2011	10:58:54 AM	H2 MFC set to  0.000000
11/19/2011	10:58:54 AM	BCl3 MFC set to  0.000000
11/19/2011	10:58:54 AM	PHl3 MFC set to  0.000000
11/19/2011	10:58:54 AM	SiCl4 MFC set to  0.000000
11/19/2011	10:58:54 AM	Bypass solenoid MFC set to  0.000000
11/19/2011	10:58:54 AM	Tube furnace set to 150
11/19/2011	10:59:24 AM	Helium valve closed
11/19/2011	10:59:24 AM	H2 valve closed
11/19/2011	10:59:24 AM	BCl3 valve closed
11/19/2011	10:59:24 AM	PH3 valve closed
11/19/2011	10:59:24 AM	SiCl4 pre valve closed
11/19/2011	10:59:24 AM	SiCl4 post valve closed
11/19/2011	10:59:24 AM	Bypass valve closed
11/19/2011	10:59:24 AM	Bubbler valve closed
11/19/2011	10:59:24 AM	Main Vac valve opened
11/19/2011	10:59:24 AM	Helium MFC set to  0.000000
11/19/2011	10:59:24 AM	H2 MFC set to  0.000000
11/19/2011	10:59:24 AM	BCl3 MFC set to  0.000000
11/19/2011	10:59:24 AM	PHl3 MFC set to  0.000000
11/19/2011	10:59:24 AM	SiCl4 MFC set to  0.000000
11/19/2011	10:59:24 AM	Bypass solenoid MFC set to  0.000000
11/19/2011	10:59:24 AM	Tube furnace set to 150
11/19/2011	10:59:54 AM	H2 valve closed
11/19/2011	10:59:54 AM	BCl3 valve closed
11/19/2011	10:59:54 AM	PH3 valve closed
11/19/2011	10:59:54 AM	SiCl4 pre valve closed
11/19/2011	10:59:54 AM	SiCl4 post valve closed
11/19/2011	10:59:54 AM	Bypass valve closed
11/19/2011	10:59:54 AM	Bubbler valve closed
11/19/2011	10:59:54 AM	Helium valve opened
11/19/2011	10:59:54 AM	Main Vac valve opened
11/19/2011	10:59:54 AM	Helium MFC set to  20.000000
11/19/2011	10:59:54 AM	H2 MFC set to  0.000000
11/19/2011	10:59:54 AM	BCl3 MFC set to  0.000000
11/19/2011	10:59:54 AM	PHl3 MFC set to  0.000000
11/19/2011	10:59:54 AM	SiCl4 MFC set to  0.000000
11/19/2011	10:59:54 AM	Bypass solenoid MFC set to  0.000000
11/19/2011	10:59:55 AM	Tube furnace set to 150
11/19/2011	11:00:25 AM	Helium valve closed
11/19/2011	11:00:25 AM	H2 valve closed
11/19/2011	11:00:25 AM	BCl3 valve closed
11/19/2011	11:00:25 AM	PH3 valve closed
11/19/2011	11:00:25 AM	SiCl4 pre valve closed
11/19/2011	11:00:25 AM	SiCl4 post valve closed
11/19/2011	11:00:25 AM	Bypass valve closed
11/19/2011	11:00:25 AM	Bubbler valve closed
11/19/2011	11:00:25 AM	Main Vac valve opened
11/19/2011	11:00:25 AM	Helium MFC set to  0.000000
11/19/2011	11:00:25 AM	H2 MFC set to  0.000000
11/19/2011	11:00:25 AM	BCl3 MFC set to  0.000000
11/19/2011	11:00:25 AM	PHl3 MFC set to  0.000000
11/19/2011	11:00:25 AM	SiCl4 MFC set to  0.000000
11/19/2011	11:00:25 AM	Bypass solenoid MFC set to  0.000000
11/19/2011	11:00:25 AM	Tube furnace set to 150
11/19/2011	11:00:55 AM	H2 valve closed
11/19/2011	11:00:55 AM	BCl3 valve closed
11/19/2011	11:00:55 AM	PH3 valve closed
11/19/2011	11:00:55 AM	SiCl4 pre valve closed
11/19/2011	11:00:55 AM	SiCl4 post valve closed
11/19/2011	11:00:55 AM	Bypass valve closed
11/19/2011	11:00:55 AM	Bubbler valve closed
11/19/2011	11:00:55 AM	Helium valve opened
11/19/2011	11:00:55 AM	Main Vac valve opened
11/19/2011	11:00:55 AM	Helium MFC set to  20.000000
11/19/2011	11:00:55 AM	H2 MFC set to  0.000000
11/19/2011	11:00:55 AM	BCl3 MFC set to  0.000000
11/19/2011	11:00:55 AM	PHl3 MFC set to  0.000000
11/19/2011	11:00:55 AM	SiCl4 MFC set to  0.000000
11/19/2011	11:00:55 AM	Bypass solenoid MFC set to  0.000000
11/19/2011	11:00:55 AM	Tube furnace set to 150
11/19/2011	11:01:25 AM	Helium valve closed
11/19/2011	11:01:25 AM	H2 valve closed
11/19/2011	11:01:25 AM	BCl3 valve closed
11/19/2011	11:01:25 AM	PH3 valve closed
11/19/2011	11:01:25 AM	SiCl4 pre valve closed
11/19/2011	11:01:25 AM	SiCl4 post valve closed
11/19/2011	11:01:25 AM	Bypass valve closed
11/19/2011	11:01:25 AM	Bubbler valve closed
11/19/2011	11:01:25 AM	Main Vac valve opened
11/19/2011	11:01:25 AM	Helium MFC set to  0.000000
11/19/2011	11:01:25 AM	H2 MFC set to  0.000000
11/19/2011	11:01:25 AM	BCl3 MFC set to  0.000000
11/19/2011	11:01:25 AM	PHl3 MFC set to  0.000000
11/19/2011	11:01:25 AM	SiCl4 MFC set to  0.000000
11/19/2011	11:01:25 AM	Bypass solenoid MFC set to  0.000000
11/19/2011	11:01:25 AM	Tube furnace set to 150
11/19/2011	11:01:55 AM	H2 valve closed
11/19/2011	11:01:55 AM	BCl3 valve closed
11/19/2011	11:01:55 AM	PH3 valve closed
11/19/2011	11:01:55 AM	SiCl4 pre valve closed
11/19/2011	11:01:55 AM	SiCl4 post valve closed
11/19/2011	11:01:55 AM	Bypass valve closed
11/19/2011	11:01:55 AM	Bubbler valve closed
11/19/2011	11:01:55 AM	Helium valve opened
11/19/2011	11:01:55 AM	Main Vac valve opened
11/19/2011	11:01:55 AM	Helium MFC set to  20.000000
11/19/2011	11:01:55 AM	H2 MFC set to  0.000000
11/19/2011	11:01:55 AM	BCl3 MFC set to  0.000000
11/19/2011	11:01:55 AM	PHl3 MFC set to  0.000000
11/19/2011	11:01:55 AM	SiCl4 MFC set to  0.000000
11/19/2011	11:01:55 AM	Bypass solenoid MFC set to  0.000000
11/19/2011	11:01:55 AM	Tube furnace set to 150
11/19/2011	11:02:25 AM	Helium valve closed
11/19/2011	11:02:25 AM	H2 valve closed
11/19/2011	11:02:25 AM	BCl3 valve closed
11/19/2011	11:02:25 AM	PH3 valve closed
11/19/2011	11:02:25 AM	SiCl4 pre valve closed
11/19/2011	11:02:25 AM	SiCl4 post valve closed
11/19/2011	11:02:25 AM	Bypass valve closed
11/19/2011	11:02:25 AM	Bubbler valve closed
11/19/2011	11:02:25 AM	Main Vac valve opened
11/19/2011	11:02:25 AM	Helium MFC set to  0.000000
11/19/2011	11:02:26 AM	H2 MFC set to  0.000000
11/19/2011	11:02:26 AM	BCl3 MFC set to  0.000000
11/19/2011	11:02:26 AM	PHl3 MFC set to  0.000000
11/19/2011	11:02:26 AM	SiCl4 MFC set to  0.000000
11/19/2011	11:02:26 AM	Bypass solenoid MFC set to  0.000000
11/19/2011	11:02:26 AM	Tube furnace set to 150
11/19/2011	11:02:56 AM	H2 valve closed
11/19/2011	11:02:56 AM	BCl3 valve closed
11/19/2011	11:02:56 AM	PH3 valve closed
11/19/2011	11:02:56 AM	SiCl4 pre valve closed
11/19/2011	11:02:56 AM	SiCl4 post valve closed
11/19/2011	11:02:56 AM	Bypass valve closed
11/19/2011	11:02:56 AM	Bubbler valve closed
11/19/2011	11:02:56 AM	Helium valve opened
11/19/2011	11:02:56 AM	Main Vac valve opened
11/19/2011	11:02:56 AM	Helium MFC set to  20.000000
11/19/2011	11:02:56 AM	H2 MFC set to  0.000000
11/19/2011	11:02:56 AM	BCl3 MFC set to  0.000000
11/19/2011	11:02:56 AM	PHl3 MFC set to  0.000000
11/19/2011	11:02:56 AM	SiCl4 MFC set to  0.000000
11/19/2011	11:02:56 AM	Bypass solenoid MFC set to  0.000000
11/19/2011	11:02:56 AM	Tube furnace set to 150
11/19/2011	11:03:26 AM	Helium valve closed
11/19/2011	11:03:26 AM	H2 valve closed
11/19/2011	11:03:26 AM	BCl3 valve closed
11/19/2011	11:03:26 AM	PH3 valve closed
11/19/2011	11:03:26 AM	SiCl4 pre valve closed
11/19/2011	11:03:26 AM	SiCl4 post valve closed
11/19/2011	11:03:26 AM	Bypass valve closed
11/19/2011	11:03:26 AM	Bubbler valve closed
11/19/2011	11:03:26 AM	Main Vac valve opened
11/19/2011	11:03:26 AM	Helium MFC set to  0.000000
11/19/2011	11:03:26 AM	H2 MFC set to  0.000000
11/19/2011	11:03:26 AM	BCl3 MFC set to  0.000000
11/19/2011	11:03:26 AM	PHl3 MFC set to  0.000000
11/19/2011	11:03:26 AM	SiCl4 MFC set to  0.000000
11/19/2011	11:03:26 AM	Bypass solenoid MFC set to  0.000000
11/19/2011	11:03:26 AM	Tube furnace set to 150
11/19/2011	11:03:56 AM	H2 valve closed
11/19/2011	11:03:56 AM	BCl3 valve closed
11/19/2011	11:03:56 AM	PH3 valve closed
11/19/2011	11:03:56 AM	SiCl4 pre valve closed
11/19/2011	11:03:56 AM	SiCl4 post valve closed
11/19/2011	11:03:56 AM	Bypass valve closed
11/19/2011	11:03:56 AM	Bubbler valve closed
11/19/2011	11:03:56 AM	Helium valve opened
11/19/2011	11:03:56 AM	Main Vac valve opened
11/19/2011	11:03:56 AM	Helium MFC set to  20.000000
11/19/2011	11:03:56 AM	H2 MFC set to  0.000000
11/19/2011	11:03:56 AM	BCl3 MFC set to  0.000000
11/19/2011	11:03:56 AM	PHl3 MFC set to  0.000000
11/19/2011	11:03:56 AM	SiCl4 MFC set to  0.000000
11/19/2011	11:03:56 AM	Bypass solenoid MFC set to  0.000000
11/19/2011	11:03:56 AM	Tube furnace set to 150
11/19/2011	11:04:26 AM	Helium valve closed
11/19/2011	11:04:26 AM	H2 valve closed
11/19/2011	11:04:26 AM	BCl3 valve closed
11/19/2011	11:04:26 AM	PH3 valve closed
11/19/2011	11:04:26 AM	SiCl4 pre valve closed
11/19/2011	11:04:26 AM	SiCl4 post valve closed
11/19/2011	11:04:26 AM	Bypass valve closed
11/19/2011	11:04:26 AM	Bubbler valve closed
11/19/2011	11:04:26 AM	Main Vac valve opened
11/19/2011	11:04:26 AM	Helium MFC set to  0.000000
11/19/2011	11:04:26 AM	H2 MFC set to  0.000000
11/19/2011	11:04:26 AM	BCl3 MFC set to  0.000000
11/19/2011	11:04:26 AM	PHl3 MFC set to  0.000000
11/19/2011	11:04:26 AM	SiCl4 MFC set to  0.000000
11/19/2011	11:04:26 AM	Bypass solenoid MFC set to  0.000000
11/19/2011	11:04:27 AM	Tube furnace set to 150
11/19/2011	11:04:57 AM	H2 valve closed
11/19/2011	11:04:57 AM	BCl3 valve closed
11/19/2011	11:04:57 AM	PH3 valve closed
11/19/2011	11:04:57 AM	SiCl4 pre valve closed
11/19/2011	11:04:57 AM	SiCl4 post valve closed
11/19/2011	11:04:57 AM	Bypass valve closed
11/19/2011	11:04:57 AM	Bubbler valve closed
11/19/2011	11:04:57 AM	Helium valve opened
11/19/2011	11:04:57 AM	Main Vac valve opened
11/19/2011	11:04:57 AM	Helium MFC set to  20.000000
11/19/2011	11:04:57 AM	H2 MFC set to  0.000000
11/19/2011	11:04:57 AM	BCl3 MFC set to  0.000000
11/19/2011	11:04:57 AM	PHl3 MFC set to  0.000000
11/19/2011	11:04:57 AM	SiCl4 MFC set to  0.000000
11/19/2011	11:04:57 AM	Bypass solenoid MFC set to  0.000000
11/19/2011	11:04:57 AM	Tube furnace set to 150
11/19/2011	11:05:27 AM	Helium valve closed
11/19/2011	11:05:27 AM	H2 valve closed
11/19/2011	11:05:27 AM	BCl3 valve closed
11/19/2011	11:05:27 AM	PH3 valve closed
11/19/2011	11:05:27 AM	SiCl4 pre valve closed
11/19/2011	11:05:27 AM	SiCl4 post valve closed
11/19/2011	11:05:27 AM	Bypass valve closed
11/19/2011	11:05:27 AM	Bubbler valve closed
11/19/2011	11:05:27 AM	Main Vac valve opened
11/19/2011	11:05:27 AM	Helium MFC set to  0.000000
11/19/2011	11:05:27 AM	H2 MFC set to  0.000000
11/19/2011	11:05:27 AM	BCl3 MFC set to  0.000000
11/19/2011	11:05:27 AM	PHl3 MFC set to  0.000000
11/19/2011	11:05:27 AM	SiCl4 MFC set to  0.000000
11/19/2011	11:05:27 AM	Bypass solenoid MFC set to  0.000000
11/19/2011	11:05:27 AM	Tube furnace set to 150
11/19/2011	11:05:57 AM	H2 valve closed
11/19/2011	11:05:57 AM	BCl3 valve closed
11/19/2011	11:05:57 AM	PH3 valve closed
11/19/2011	11:05:57 AM	SiCl4 pre valve closed
11/19/2011	11:05:57 AM	SiCl4 post valve closed
11/19/2011	11:05:57 AM	Bypass valve closed
11/19/2011	11:05:57 AM	Bubbler valve closed
11/19/2011	11:05:57 AM	Helium valve opened
11/19/2011	11:05:57 AM	Main Vac valve opened
11/19/2011	11:05:57 AM	Helium MFC set to  20.000000
11/19/2011	11:05:57 AM	H2 MFC set to  0.000000
11/19/2011	11:05:57 AM	BCl3 MFC set to  0.000000
11/19/2011	11:05:57 AM	PHl3 MFC set to  0.000000
11/19/2011	11:05:57 AM	SiCl4 MFC set to  0.000000
11/19/2011	11:05:57 AM	Bypass solenoid MFC set to  0.000000
11/19/2011	11:05:57 AM	Tube furnace set to 150
11/19/2011	11:06:27 AM	Helium valve closed
11/19/2011	11:06:27 AM	H2 valve closed
11/19/2011	11:06:27 AM	BCl3 valve closed
11/19/2011	11:06:27 AM	PH3 valve closed
11/19/2011	11:06:27 AM	SiCl4 pre valve closed
11/19/2011	11:06:27 AM	SiCl4 post valve closed
11/19/2011	11:06:27 AM	Bypass valve closed
11/19/2011	11:06:27 AM	Bubbler valve closed
11/19/2011	11:06:27 AM	Main Vac valve opened
11/19/2011	11:06:27 AM	Helium MFC set to  0.000000
11/19/2011	11:06:27 AM	H2 MFC set to  0.000000
11/19/2011	11:06:27 AM	BCl3 MFC set to  0.000000
11/19/2011	11:06:27 AM	PHl3 MFC set to  0.000000
11/19/2011	11:06:27 AM	SiCl4 MFC set to  0.000000
11/19/2011	11:06:27 AM	Bypass solenoid MFC set to  0.000000
11/19/2011	11:06:27 AM	Tube furnace set to 150
11/19/2011	11:06:57 AM	H2 valve closed
11/19/2011	11:06:57 AM	BCl3 valve closed
11/19/2011	11:06:57 AM	PH3 valve closed
11/19/2011	11:06:57 AM	SiCl4 pre valve closed
11/19/2011	11:06:57 AM	SiCl4 post valve closed
11/19/2011	11:06:57 AM	Bypass valve closed
11/19/2011	11:06:57 AM	Bubbler valve closed
11/19/2011	11:06:57 AM	Helium valve opened
11/19/2011	11:06:57 AM	Main Vac valve opened
11/19/2011	11:06:57 AM	Helium MFC set to  20.000000
11/19/2011	11:06:57 AM	H2 MFC set to  0.000000
11/19/2011	11:06:57 AM	BCl3 MFC set to  0.000000
11/19/2011	11:06:57 AM	PHl3 MFC set to  0.000000
11/19/2011	11:06:57 AM	SiCl4 MFC set to  0.000000
11/19/2011	11:06:57 AM	Bypass solenoid MFC set to  0.000000
11/19/2011	11:06:58 AM	Tube furnace set to 150
11/19/2011	11:07:28 AM	Helium valve closed
11/19/2011	11:07:28 AM	H2 valve closed
11/19/2011	11:07:28 AM	BCl3 valve closed
11/19/2011	11:07:28 AM	PH3 valve closed
11/19/2011	11:07:28 AM	SiCl4 pre valve closed
11/19/2011	11:07:28 AM	SiCl4 post valve closed
11/19/2011	11:07:28 AM	Bypass valve closed
11/19/2011	11:07:28 AM	Bubbler valve closed
11/19/2011	11:07:28 AM	Main Vac valve opened
11/19/2011	11:07:28 AM	Helium MFC set to  0.000000
11/19/2011	11:07:28 AM	H2 MFC set to  0.000000
11/19/2011	11:07:28 AM	BCl3 MFC set to  0.000000
11/19/2011	11:07:28 AM	PHl3 MFC set to  0.000000
11/19/2011	11:07:28 AM	SiCl4 MFC set to  0.000000
11/19/2011	11:07:28 AM	Bypass solenoid MFC set to  0.000000
11/19/2011	11:07:28 AM	Tube furnace set to 150
11/19/2011	11:07:58 AM	H2 valve closed
11/19/2011	11:07:58 AM	BCl3 valve closed
11/19/2011	11:07:58 AM	PH3 valve closed
11/19/2011	11:07:58 AM	SiCl4 pre valve closed
11/19/2011	11:07:58 AM	SiCl4 post valve closed
11/19/2011	11:07:58 AM	Bypass valve closed
11/19/2011	11:07:58 AM	Bubbler valve closed
11/19/2011	11:07:58 AM	Helium valve opened
11/19/2011	11:07:58 AM	Main Vac valve opened
11/19/2011	11:07:58 AM	Helium MFC set to  20.000000
11/19/2011	11:07:58 AM	H2 MFC set to  0.000000
11/19/2011	11:07:58 AM	BCl3 MFC set to  0.000000
11/19/2011	11:07:58 AM	PHl3 MFC set to  0.000000
11/19/2011	11:07:58 AM	SiCl4 MFC set to  0.000000
11/19/2011	11:07:58 AM	Bypass solenoid MFC set to  0.000000
11/19/2011	11:07:58 AM	Tube furnace set to 150
11/19/2011	11:08:28 AM	Helium valve closed
11/19/2011	11:08:28 AM	H2 valve closed
11/19/2011	11:08:28 AM	BCl3 valve closed
11/19/2011	11:08:28 AM	PH3 valve closed
11/19/2011	11:08:28 AM	SiCl4 pre valve closed
11/19/2011	11:08:28 AM	SiCl4 post valve closed
11/19/2011	11:08:28 AM	Bypass valve closed
11/19/2011	11:08:28 AM	Bubbler valve closed
11/19/2011	11:08:28 AM	Main Vac valve opened
11/19/2011	11:08:28 AM	Helium MFC set to  0.000000
11/19/2011	11:08:28 AM	H2 MFC set to  0.000000
11/19/2011	11:08:28 AM	BCl3 MFC set to  0.000000
11/19/2011	11:08:28 AM	PHl3 MFC set to  0.000000
11/19/2011	11:08:28 AM	SiCl4 MFC set to  0.000000
11/19/2011	11:08:28 AM	Bypass solenoid MFC set to  0.000000
11/19/2011	11:08:28 AM	Tube furnace set to 150
11/19/2011	11:08:58 AM	H2 valve closed
11/19/2011	11:08:58 AM	BCl3 valve closed
11/19/2011	11:08:58 AM	PH3 valve closed
11/19/2011	11:08:58 AM	SiCl4 pre valve closed
11/19/2011	11:08:58 AM	SiCl4 post valve closed
11/19/2011	11:08:58 AM	Bypass valve closed
11/19/2011	11:08:58 AM	Bubbler valve closed
11/19/2011	11:08:58 AM	Helium valve opened
11/19/2011	11:08:58 AM	Main Vac valve opened
11/19/2011	11:08:58 AM	Helium MFC set to  20.000000
11/19/2011	11:08:58 AM	H2 MFC set to  0.000000
11/19/2011	11:08:58 AM	BCl3 MFC set to  0.000000
11/19/2011	11:08:58 AM	PHl3 MFC set to  0.000000
11/19/2011	11:08:58 AM	SiCl4 MFC set to  0.000000
11/19/2011	11:08:58 AM	Bypass solenoid MFC set to  0.000000
11/19/2011	11:08:58 AM	Tube furnace set to 150
11/19/2011	11:09:28 AM	Helium valve closed
11/19/2011	11:09:29 AM	H2 valve closed
11/19/2011	11:09:29 AM	BCl3 valve closed
11/19/2011	11:09:29 AM	PH3 valve closed
11/19/2011	11:09:29 AM	SiCl4 pre valve closed
11/19/2011	11:09:29 AM	SiCl4 post valve closed
11/19/2011	11:09:29 AM	Bypass valve closed
11/19/2011	11:09:29 AM	Bubbler valve closed
11/19/2011	11:09:29 AM	Main Vac valve opened
11/19/2011	11:09:29 AM	Helium MFC set to  0.000000
11/19/2011	11:09:29 AM	H2 MFC set to  0.000000
11/19/2011	11:09:29 AM	BCl3 MFC set to  0.000000
11/19/2011	11:09:29 AM	PHl3 MFC set to  0.000000
11/19/2011	11:09:29 AM	SiCl4 MFC set to  0.000000
11/19/2011	11:09:29 AM	Bypass solenoid MFC set to  0.000000
11/19/2011	11:09:29 AM	Tube furnace set to 150
11/19/2011	11:09:59 AM	H2 valve closed
11/19/2011	11:09:59 AM	BCl3 valve closed
11/19/2011	11:09:59 AM	PH3 valve closed
11/19/2011	11:09:59 AM	SiCl4 pre valve closed
11/19/2011	11:09:59 AM	SiCl4 post valve closed
11/19/2011	11:09:59 AM	Bypass valve closed
11/19/2011	11:09:59 AM	Bubbler valve closed
11/19/2011	11:09:59 AM	Helium valve opened
11/19/2011	11:09:59 AM	Main Vac valve opened
11/19/2011	11:09:59 AM	Helium MFC set to  20.000000
11/19/2011	11:09:59 AM	H2 MFC set to  0.000000
11/19/2011	11:09:59 AM	BCl3 MFC set to  0.000000
11/19/2011	11:09:59 AM	PHl3 MFC set to  0.000000
11/19/2011	11:09:59 AM	SiCl4 MFC set to  0.000000
11/19/2011	11:09:59 AM	Bypass solenoid MFC set to  0.000000
11/19/2011	11:09:59 AM	Tube furnace set to 150
11/19/2011	11:10:29 AM	Helium valve closed
11/19/2011	11:10:29 AM	H2 valve closed
11/19/2011	11:10:29 AM	BCl3 valve closed
11/19/2011	11:10:29 AM	PH3 valve closed
11/19/2011	11:10:29 AM	SiCl4 pre valve closed
11/19/2011	11:10:29 AM	SiCl4 post valve closed
11/19/2011	11:10:29 AM	Bypass valve closed
11/19/2011	11:10:29 AM	Bubbler valve closed
11/19/2011	11:10:29 AM	Main Vac valve opened
11/19/2011	11:10:29 AM	Helium MFC set to  0.000000
11/19/2011	11:10:29 AM	H2 MFC set to  0.000000
11/19/2011	11:10:29 AM	BCl3 MFC set to  0.000000
11/19/2011	11:10:29 AM	PHl3 MFC set to  0.000000
11/19/2011	11:10:29 AM	SiCl4 MFC set to  0.000000
11/19/2011	11:10:29 AM	Bypass solenoid MFC set to  0.000000
11/19/2011	11:10:29 AM	Tube furnace set to 150
11/19/2011	11:10:59 AM	H2 valve closed
11/19/2011	11:10:59 AM	BCl3 valve closed
11/19/2011	11:10:59 AM	PH3 valve closed
11/19/2011	11:10:59 AM	SiCl4 pre valve closed
11/19/2011	11:10:59 AM	SiCl4 post valve closed
11/19/2011	11:10:59 AM	Bypass valve closed
11/19/2011	11:10:59 AM	Bubbler valve closed
11/19/2011	11:10:59 AM	Helium valve opened
11/19/2011	11:10:59 AM	Main Vac valve opened
11/19/2011	11:10:59 AM	Helium MFC set to  20.000000
11/19/2011	11:10:59 AM	H2 MFC set to  0.000000
11/19/2011	11:10:59 AM	BCl3 MFC set to  0.000000
11/19/2011	11:10:59 AM	PHl3 MFC set to  0.000000
11/19/2011	11:10:59 AM	SiCl4 MFC set to  0.000000
11/19/2011	11:10:59 AM	Bypass solenoid MFC set to  0.000000
11/19/2011	11:10:59 AM	Tube furnace set to 150
11/19/2011	11:11:29 AM	Helium valve closed
11/19/2011	11:11:29 AM	H2 valve closed
11/19/2011	11:11:29 AM	BCl3 valve closed
11/19/2011	11:11:29 AM	PH3 valve closed
11/19/2011	11:11:29 AM	SiCl4 pre valve closed
11/19/2011	11:11:29 AM	SiCl4 post valve closed
11/19/2011	11:11:29 AM	Bypass valve closed
11/19/2011	11:11:29 AM	Bubbler valve closed
11/19/2011	11:11:29 AM	Main Vac valve opened
11/19/2011	11:11:29 AM	Helium MFC set to  0.000000
11/19/2011	11:11:29 AM	H2 MFC set to  0.000000
11/19/2011	11:11:29 AM	BCl3 MFC set to  0.000000
11/19/2011	11:11:29 AM	PHl3 MFC set to  0.000000
11/19/2011	11:11:29 AM	SiCl4 MFC set to  0.000000
11/19/2011	11:11:29 AM	Bypass solenoid MFC set to  0.000000
11/19/2011	11:11:30 AM	Tube furnace set to 150
11/19/2011	11:12:00 AM	H2 valve closed
11/19/2011	11:12:00 AM	BCl3 valve closed
11/19/2011	11:12:00 AM	PH3 valve closed
11/19/2011	11:12:00 AM	SiCl4 pre valve closed
11/19/2011	11:12:00 AM	SiCl4 post valve closed
11/19/2011	11:12:00 AM	Bypass valve closed
11/19/2011	11:12:00 AM	Bubbler valve closed
11/19/2011	11:12:00 AM	Helium valve opened
11/19/2011	11:12:00 AM	Main Vac valve opened
11/19/2011	11:12:00 AM	Helium MFC set to  20.000000
11/19/2011	11:12:00 AM	H2 MFC set to  0.000000
11/19/2011	11:12:00 AM	BCl3 MFC set to  0.000000
11/19/2011	11:12:00 AM	PHl3 MFC set to  0.000000
11/19/2011	11:12:00 AM	SiCl4 MFC set to  0.000000
11/19/2011	11:12:00 AM	Bypass solenoid MFC set to  0.000000
11/19/2011	11:12:00 AM	Tube furnace set to 150
11/19/2011	11:12:30 AM	Helium valve closed
11/19/2011	11:12:30 AM	H2 valve closed
11/19/2011	11:12:30 AM	BCl3 valve closed
11/19/2011	11:12:30 AM	PH3 valve closed
11/19/2011	11:12:30 AM	SiCl4 pre valve closed
11/19/2011	11:12:30 AM	SiCl4 post valve closed
11/19/2011	11:12:30 AM	Bypass valve closed
11/19/2011	11:12:30 AM	Bubbler valve closed
11/19/2011	11:12:30 AM	Main Vac valve opened
11/19/2011	11:12:30 AM	Helium MFC set to  0.000000
11/19/2011	11:12:30 AM	H2 MFC set to  0.000000
11/19/2011	11:12:30 AM	BCl3 MFC set to  0.000000
11/19/2011	11:12:30 AM	PHl3 MFC set to  0.000000
11/19/2011	11:12:30 AM	SiCl4 MFC set to  0.000000
11/19/2011	11:12:30 AM	Bypass solenoid MFC set to  0.000000
11/19/2011	11:12:30 AM	Tube furnace set to 150
11/19/2011	11:13:00 AM	H2 valve closed
11/19/2011	11:13:00 AM	BCl3 valve closed
11/19/2011	11:13:00 AM	PH3 valve closed
11/19/2011	11:13:00 AM	SiCl4 pre valve closed
11/19/2011	11:13:00 AM	SiCl4 post valve closed
11/19/2011	11:13:00 AM	Bypass valve closed
11/19/2011	11:13:00 AM	Bubbler valve closed
11/19/2011	11:13:00 AM	Helium valve opened
11/19/2011	11:13:00 AM	Main Vac valve opened
11/19/2011	11:13:00 AM	Helium MFC set to  20.000000
11/19/2011	11:13:00 AM	H2 MFC set to  0.000000
11/19/2011	11:13:00 AM	BCl3 MFC set to  0.000000
11/19/2011	11:13:00 AM	PHl3 MFC set to  0.000000
11/19/2011	11:13:00 AM	SiCl4 MFC set to  0.000000
11/19/2011	11:13:00 AM	Bypass solenoid MFC set to  0.000000
11/19/2011	11:13:00 AM	Tube furnace set to 150
11/19/2011	11:13:30 AM	Helium valve closed
11/19/2011	11:13:30 AM	H2 valve closed
11/19/2011	11:13:30 AM	BCl3 valve closed
11/19/2011	11:13:30 AM	PH3 valve closed
11/19/2011	11:13:30 AM	SiCl4 pre valve closed
11/19/2011	11:13:30 AM	SiCl4 post valve closed
11/19/2011	11:13:30 AM	Bypass valve closed
11/19/2011	11:13:30 AM	Bubbler valve closed
11/19/2011	11:13:30 AM	Main Vac valve opened
11/19/2011	11:13:30 AM	Helium MFC set to  0.000000
11/19/2011	11:13:30 AM	H2 MFC set to  0.000000
11/19/2011	11:13:30 AM	BCl3 MFC set to  0.000000
11/19/2011	11:13:30 AM	PHl3 MFC set to  0.000000
11/19/2011	11:13:30 AM	SiCl4 MFC set to  0.000000
11/19/2011	11:13:30 AM	Bypass solenoid MFC set to  0.000000
11/19/2011	11:13:30 AM	Tube furnace set to 180
11/19/2011	11:13:35 AM	Run finished at 11:13 AM
11/19/2011	1:41:45 PM	Main Vac valve closed
11/19/2011	1:42:07 PM	Main Vac valve opened
11/19/2011	1:43:33 PM	Recipe started at 1:43 PM
11/19/2011	1:43:33 PM	Helium valve closed
11/19/2011	1:43:33 PM	H2 valve closed
11/19/2011	1:43:33 PM	BCl3 valve closed
11/19/2011	1:43:33 PM	PH3 valve closed
11/19/2011	1:43:33 PM	SiCl4 pre valve closed
11/19/2011	1:43:33 PM	SiCl4 post valve closed
11/19/2011	1:43:33 PM	Main Vac valve closed
11/19/2011	1:43:33 PM	Bypass valve closed
11/19/2011	1:43:33 PM	Bubbler valve closed
11/19/2011	1:43:33 PM	Helium MFC set to  0.000000
11/19/2011	1:43:33 PM	H2 MFC set to  0.000000
11/19/2011	1:43:33 PM	BCl3 MFC set to  0.000000
11/19/2011	1:43:33 PM	PHl3 MFC set to  0.000000
11/19/2011	1:43:33 PM	SiCl4 MFC set to  0.000000
11/19/2011	1:43:33 PM	Bypass solenoid MFC set to  0.000000
11/19/2011	1:43:33 PM	Tube furnace set to 0
11/19/2011	1:43:36 PM	Helium valve closed
11/19/2011	1:43:36 PM	BCl3 valve closed
11/19/2011	1:43:36 PM	PH3 valve closed
11/19/2011	1:43:36 PM	SiCl4 pre valve closed
11/19/2011	1:43:36 PM	SiCl4 post valve closed
11/19/2011	1:43:36 PM	Main Vac valve closed
11/19/2011	1:43:36 PM	Bypass valve closed
11/19/2011	1:43:36 PM	Bubbler valve closed
11/19/2011	1:43:36 PM	H2 valve opened
11/19/2011	1:43:36 PM	Helium MFC set to  0.000000
11/19/2011	1:43:36 PM	H2 MFC set to  500.000000
11/19/2011	1:43:36 PM	BCl3 MFC set to  0.000000
11/19/2011	1:43:36 PM	PHl3 MFC set to  0.000000
11/19/2011	1:43:36 PM	SiCl4 MFC set to  0.000000
11/19/2011	1:43:36 PM	Bypass solenoid MFC set to  0.000000
11/19/2011	1:43:36 PM	Tube furnace set to 50
11/19/2011	1:44:40 PM	Helium valve closed
11/19/2011	1:44:40 PM	BCl3 valve closed
11/19/2011	1:44:40 PM	PH3 valve closed
11/19/2011	1:44:40 PM	SiCl4 pre valve closed
11/19/2011	1:44:40 PM	SiCl4 post valve closed
11/19/2011	1:44:40 PM	Main Vac valve closed
11/19/2011	1:44:40 PM	Bypass valve closed
11/19/2011	1:44:40 PM	H2 valve opened
11/19/2011	1:44:40 PM	Bubbler valve opened
11/19/2011	1:44:40 PM	Helium MFC set to  0.000000
11/19/2011	1:44:40 PM	H2 MFC set to  500.000000
11/19/2011	1:44:40 PM	BCl3 MFC set to  0.000000
11/19/2011	1:44:40 PM	PHl3 MFC set to  0.000000
11/19/2011	1:44:40 PM	SiCl4 MFC set to  0.000000
11/19/2011	1:44:40 PM	Bypass solenoid MFC set to  0.000000
11/19/2011	1:44:40 PM	Tube furnace set to 50
11/19/2011	1:44:41 PM	Helium valve closed
11/19/2011	1:44:41 PM	BCl3 valve closed
11/19/2011	1:44:41 PM	PH3 valve closed
11/19/2011	1:44:41 PM	SiCl4 pre valve closed
11/19/2011	1:44:41 PM	SiCl4 post valve closed
11/19/2011	1:44:41 PM	Main Vac valve closed
11/19/2011	1:44:41 PM	Bypass valve closed
11/19/2011	1:44:41 PM	H2 valve opened
11/19/2011	1:44:41 PM	Bubbler valve opened
11/19/2011	1:44:41 PM	Helium MFC set to  0.000000
11/19/2011	1:44:41 PM	H2 MFC set to  495.000000
11/19/2011	1:44:41 PM	BCl3 MFC set to  0.000000
11/19/2011	1:44:41 PM	PHl3 MFC set to  0.000000
11/19/2011	1:44:41 PM	SiCl4 MFC set to  0.000000
11/19/2011	1:44:41 PM	Bypass solenoid MFC set to  0.000000
11/19/2011	1:44:41 PM	Tube furnace set to 1000
11/19/2011	2:07:41 PM	Helium valve closed
11/19/2011	2:07:41 PM	BCl3 valve closed
11/19/2011	2:07:41 PM	Main Vac valve closed
11/19/2011	2:07:41 PM	Bypass valve closed
11/19/2011	2:07:41 PM	H2 valve opened
11/19/2011	2:07:41 PM	PH3 valve opened
11/19/2011	2:07:41 PM	SiCl4 pre valve opened
11/19/2011	2:07:41 PM	SiCl4 post valve opened
11/19/2011	2:07:41 PM	Bubbler valve opened
11/19/2011	2:07:41 PM	Helium MFC set to  0.000000
11/19/2011	2:07:41 PM	H2 MFC set to  495.000000
11/19/2011	2:07:41 PM	BCl3 MFC set to  0.000000
11/19/2011	2:07:41 PM	PHl3 MFC set to  0.700000
11/19/2011	2:07:41 PM	SiCl4 MFC set to  24.000000
11/19/2011	2:07:41 PM	Bypass solenoid MFC set to  0.000000
11/19/2011	2:07:41 PM	Tube furnace set to 1000
11/19/2011	2:27:41 PM	Helium valve closed
11/19/2011	2:27:41 PM	BCl3 valve closed
11/19/2011	2:27:41 PM	PH3 valve closed
11/19/2011	2:27:41 PM	SiCl4 pre valve closed
11/19/2011	2:27:41 PM	SiCl4 post valve closed
11/19/2011	2:27:41 PM	Main Vac valve closed
11/19/2011	2:27:41 PM	Bypass valve closed
11/19/2011	2:27:41 PM	H2 valve opened
11/19/2011	2:27:41 PM	Bubbler valve opened
11/19/2011	2:27:41 PM	Helium MFC set to  0.000000
11/19/2011	2:27:41 PM	H2 MFC set to  480.000000
11/19/2011	2:27:41 PM	BCl3 MFC set to  0.000000
11/19/2011	2:27:41 PM	PHl3 MFC set to  0.000000
11/19/2011	2:27:41 PM	SiCl4 MFC set to  0.000000
11/19/2011	2:27:41 PM	Bypass solenoid MFC set to  0.000000
11/19/2011	2:27:41 PM	Tube furnace set to 750
11/19/2011	2:37:41 PM	H2 valve closed
11/19/2011	2:37:41 PM	BCl3 valve closed
11/19/2011	2:37:41 PM	PH3 valve closed
11/19/2011	2:37:41 PM	SiCl4 pre valve closed
11/19/2011	2:37:41 PM	SiCl4 post valve closed
11/19/2011	2:37:41 PM	Main Vac valve closed
11/19/2011	2:37:41 PM	Bypass valve closed
11/19/2011	2:37:41 PM	Helium valve opened
11/19/2011	2:37:41 PM	Bubbler valve opened
11/19/2011	2:37:41 PM	Helium MFC set to  400.000000
11/19/2011	2:37:41 PM	H2 MFC set to  0.000000
11/19/2011	2:37:41 PM	BCl3 MFC set to  0.000000
11/19/2011	2:37:41 PM	PHl3 MFC set to  0.000000
11/19/2011	2:37:41 PM	SiCl4 MFC set to  0.000000
11/19/2011	2:37:41 PM	Bypass solenoid MFC set to  0.000000
11/19/2011	2:37:41 PM	Tube furnace set to 0
11/19/2011	2:39:50 PM	Run aborted at 2:39 PM
11/19/2011	2:39:50 PM	Helium valve closed
11/19/2011	2:39:50 PM	H2 valve closed
11/19/2011	2:39:50 PM	BCl3 valve closed
11/19/2011	2:39:50 PM	PH3 valve closed
11/19/2011	2:39:50 PM	SiCl4 pre valve closed
11/19/2011	2:39:50 PM	SiCl4 post valve closed
11/19/2011	2:39:50 PM	Bypass valve closed
11/19/2011	2:39:50 PM	Main Vac valve closed
11/19/2011	2:39:50 PM	Bubbler valve closed
11/19/2011	2:39:50 PM	Helium MFC set to  0.000000
11/19/2011	2:39:50 PM	H2 MFC set to  0.000000
11/19/2011	2:39:50 PM	BCl3 MFC set to  0.000000
11/19/2011	2:39:50 PM	PHl3 MFC set to  0.000000
11/19/2011	2:39:50 PM	SiCl4 MFC set to  0.000000
11/19/2011	2:39:50 PM	Tube furnace set to 0
11/19/2011	2:39:51 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/19/2011	2:39:52 PM	Recipe started at 2:39 PM
11/19/2011	2:39:52 PM	Helium valve closed
11/19/2011	2:39:52 PM	H2 valve closed
11/19/2011	2:39:52 PM	BCl3 valve closed
11/19/2011	2:39:52 PM	PH3 valve closed
11/19/2011	2:39:52 PM	SiCl4 pre valve closed
11/19/2011	2:39:52 PM	SiCl4 post valve closed
11/19/2011	2:39:52 PM	Main Vac valve closed
11/19/2011	2:39:52 PM	Bypass valve closed
11/19/2011	2:39:52 PM	Bubbler valve closed
11/19/2011	2:39:52 PM	Helium MFC set to  0.000000
11/19/2011	2:39:52 PM	H2 MFC set to  0.000000
11/19/2011	2:39:52 PM	BCl3 MFC set to  0.000000
11/19/2011	2:39:52 PM	PHl3 MFC set to  0.000000
11/19/2011	2:39:52 PM	SiCl4 MFC set to  0.000000
11/19/2011	2:39:52 PM	Bypass solenoid MFC set to  0.000000
11/19/2011	2:39:53 PM	Tube furnace set to 0
11/19/2011	2:39:56 PM	H2 valve closed
11/19/2011	2:39:56 PM	BCl3 valve closed
11/19/2011	2:39:56 PM	PH3 valve closed
11/19/2011	2:39:56 PM	SiCl4 pre valve closed
11/19/2011	2:39:56 PM	SiCl4 post valve closed
11/19/2011	2:39:56 PM	Main Vac valve closed
11/19/2011	2:39:56 PM	Bypass valve closed
11/19/2011	2:39:56 PM	Bubbler valve closed
11/19/2011	2:39:56 PM	Helium valve opened
11/19/2011	2:39:56 PM	Helium MFC set to  500.000000
11/19/2011	2:39:56 PM	H2 MFC set to  0.000000
11/19/2011	2:39:56 PM	BCl3 MFC set to  0.000000
11/19/2011	2:39:56 PM	PHl3 MFC set to  0.000000
11/19/2011	2:39:56 PM	SiCl4 MFC set to  0.000000
11/19/2011	2:39:56 PM	Bypass solenoid MFC set to  0.000000
11/19/2011	2:39:56 PM	Tube furnace set to 0
11/19/2011	2:39:56 PM	Helium valve closed
11/19/2011	2:39:56 PM	H2 valve closed
11/19/2011	2:39:56 PM	BCl3 valve closed
11/19/2011	2:39:56 PM	PH3 valve closed
11/19/2011	2:39:56 PM	SiCl4 pre valve closed
11/19/2011	2:39:56 PM	SiCl4 post valve closed
11/19/2011	2:39:56 PM	Main Vac valve closed
11/19/2011	2:39:56 PM	Bypass valve closed
11/19/2011	2:39:56 PM	Bubbler valve closed
11/19/2011	2:39:56 PM	Helium MFC set to  0.000000
11/19/2011	2:39:56 PM	H2 MFC set to  0.000000
11/19/2011	2:39:56 PM	BCl3 MFC set to  0.000000
11/19/2011	2:39:56 PM	PHl3 MFC set to  0.000000
11/19/2011	2:39:56 PM	SiCl4 MFC set to  0.000000
11/19/2011	2:39:56 PM	Bypass solenoid MFC set to  0.000000
11/19/2011	2:39:56 PM	Tube furnace set to 0
11/19/2011	2:39:57 PM	Run finished at 2:39 PM
11/19/2011	2:39:57 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/19/2011	2:43:55 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/19/2011	2:43:56 PM	Recipe started at 2:43 PM
11/19/2011	2:43:56 PM	Helium valve closed
11/19/2011	2:43:56 PM	H2 valve closed
11/19/2011	2:43:56 PM	BCl3 valve closed
11/19/2011	2:43:56 PM	PH3 valve closed
11/19/2011	2:43:56 PM	SiCl4 pre valve closed
11/19/2011	2:43:56 PM	SiCl4 post valve closed
11/19/2011	2:43:56 PM	Main Vac valve closed
11/19/2011	2:43:56 PM	Bubbler valve closed
11/19/2011	2:43:56 PM	Bypass valve opened
11/19/2011	2:43:56 PM	Helium MFC set to  0.000000
11/19/2011	2:43:56 PM	H2 MFC set to  0.000000
11/19/2011	2:43:56 PM	BCl3 MFC set to  0.000000
11/19/2011	2:43:56 PM	PHl3 MFC set to  0.000000
11/19/2011	2:43:56 PM	SiCl4 MFC set to  0.000000
11/19/2011	2:43:56 PM	Bypass solenoid MFC set to  0.000000
11/19/2011	2:43:56 PM	Tube furnace set to 0
11/19/2011	2:45:30 PM	Helium valve closed
11/19/2011	2:45:30 PM	H2 valve closed
11/19/2011	2:45:30 PM	BCl3 valve closed
11/19/2011	2:45:30 PM	PH3 valve closed
11/19/2011	2:45:30 PM	SiCl4 pre valve closed
11/19/2011	2:45:30 PM	SiCl4 post valve closed
11/19/2011	2:45:30 PM	Main Vac valve closed
11/19/2011	2:45:30 PM	Bubbler valve closed
11/19/2011	2:45:30 PM	Bypass valve opened
11/19/2011	2:45:30 PM	Helium MFC set to  0.000000
11/19/2011	2:45:30 PM	H2 MFC set to  0.000000
11/19/2011	2:45:30 PM	BCl3 MFC set to  0.000000
11/19/2011	2:45:30 PM	PHl3 MFC set to  0.000000
11/19/2011	2:45:30 PM	SiCl4 MFC set to  0.000000
11/19/2011	2:45:30 PM	Bypass solenoid MFC set to  0.000000
11/19/2011	2:45:30 PM	Tube furnace set to 0
11/19/2011	2:46:31 PM	Helium valve closed
11/19/2011	2:46:31 PM	H2 valve closed
11/19/2011	2:46:31 PM	BCl3 valve closed
11/19/2011	2:46:31 PM	PH3 valve closed
11/19/2011	2:46:31 PM	SiCl4 pre valve closed
11/19/2011	2:46:31 PM	SiCl4 post valve closed
11/19/2011	2:46:31 PM	Bypass valve closed
11/19/2011	2:46:31 PM	Bubbler valve closed
11/19/2011	2:46:31 PM	Main Vac valve opened
11/19/2011	2:46:31 PM	Helium MFC set to  0.000000
11/19/2011	2:46:31 PM	H2 MFC set to  0.000000
11/19/2011	2:46:31 PM	BCl3 MFC set to  0.000000
11/19/2011	2:46:31 PM	PHl3 MFC set to  0.000000
11/19/2011	2:46:31 PM	SiCl4 MFC set to  0.000000
11/19/2011	2:46:31 PM	Bypass solenoid MFC set to  0.000000
11/19/2011	2:46:31 PM	Tube furnace set to 0
11/19/2011	2:46:32 PM	Run finished at 2:46 PM
11/19/2011	2:46:32 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/19/2011	2:48:06 PM	Recipe started at 2:47 PM
11/19/2011	2:48:06 PM	Helium valve closed
11/19/2011	2:48:06 PM	H2 valve closed
11/19/2011	2:48:06 PM	BCl3 valve closed
11/19/2011	2:48:06 PM	PH3 valve closed
11/19/2011	2:48:06 PM	SiCl4 pre valve closed
11/19/2011	2:48:06 PM	SiCl4 post valve closed
11/19/2011	2:48:06 PM	Main Vac valve closed
11/19/2011	2:48:06 PM	Bubbler valve closed
11/19/2011	2:48:06 PM	Bypass valve opened
11/19/2011	2:48:06 PM	Helium MFC set to  0.000000
11/19/2011	2:48:06 PM	H2 MFC set to  0.000000
11/19/2011	2:48:06 PM	BCl3 MFC set to  0.000000
11/19/2011	2:48:06 PM	PHl3 MFC set to  0.000000
11/19/2011	2:48:06 PM	SiCl4 MFC set to  0.000000
11/19/2011	2:48:06 PM	Bypass solenoid MFC set to  0.000000
11/19/2011	2:48:07 PM	Tube furnace set to 180
11/19/2011	2:48:07 PM	Helium valve closed
11/19/2011	2:48:07 PM	H2 valve closed
11/19/2011	2:48:07 PM	BCl3 valve closed
11/19/2011	2:48:07 PM	PH3 valve closed
11/19/2011	2:48:07 PM	SiCl4 pre valve closed
11/19/2011	2:48:07 PM	SiCl4 post valve closed
11/19/2011	2:48:07 PM	Main Vac valve closed
11/19/2011	2:48:07 PM	Bubbler valve closed
11/19/2011	2:48:07 PM	Bypass valve opened
11/19/2011	2:48:07 PM	Helium MFC set to  0.000000
11/19/2011	2:48:07 PM	H2 MFC set to  0.000000
11/19/2011	2:48:07 PM	BCl3 MFC set to  0.000000
11/19/2011	2:48:07 PM	PHl3 MFC set to  0.000000
11/19/2011	2:48:07 PM	SiCl4 MFC set to  0.000000
11/19/2011	2:48:07 PM	Bypass solenoid MFC set to  0.000000
11/19/2011	2:48:07 PM	Tube furnace set to 150
11/19/2011	2:48:09 PM	Helium valve closed
11/19/2011	2:48:09 PM	H2 valve closed
11/19/2011	2:48:09 PM	BCl3 valve closed
11/19/2011	2:48:09 PM	PH3 valve closed
11/19/2011	2:48:09 PM	SiCl4 pre valve closed
11/19/2011	2:48:09 PM	SiCl4 post valve closed
11/19/2011	2:48:09 PM	Bypass valve closed
11/19/2011	2:48:09 PM	Bubbler valve closed
11/19/2011	2:48:09 PM	Main Vac valve opened
11/19/2011	2:48:09 PM	Helium MFC set to  0.000000
11/19/2011	2:48:09 PM	H2 MFC set to  0.000000
11/19/2011	2:48:09 PM	BCl3 MFC set to  0.000000
11/19/2011	2:48:09 PM	PHl3 MFC set to  0.000000
11/19/2011	2:48:09 PM	SiCl4 MFC set to  0.000000
11/19/2011	2:48:09 PM	Bypass solenoid MFC set to  0.000000
11/19/2011	2:48:09 PM	Tube furnace set to 180
11/19/2011	2:48:39 PM	H2 valve closed
11/19/2011	2:48:39 PM	BCl3 valve closed
11/19/2011	2:48:39 PM	PH3 valve closed
11/19/2011	2:48:39 PM	SiCl4 pre valve closed
11/19/2011	2:48:39 PM	SiCl4 post valve closed
11/19/2011	2:48:39 PM	Bypass valve closed
11/19/2011	2:48:39 PM	Bubbler valve closed
11/19/2011	2:48:39 PM	Helium valve opened
11/19/2011	2:48:39 PM	Main Vac valve opened
11/19/2011	2:48:39 PM	Helium MFC set to  20.000000
11/19/2011	2:48:39 PM	H2 MFC set to  0.000000
11/19/2011	2:48:39 PM	BCl3 MFC set to  0.000000
11/19/2011	2:48:39 PM	PHl3 MFC set to  0.000000
11/19/2011	2:48:39 PM	SiCl4 MFC set to  0.000000
11/19/2011	2:48:39 PM	Bypass solenoid MFC set to  0.000000
11/19/2011	2:48:39 PM	Tube furnace set to 180
11/19/2011	2:49:09 PM	Helium valve closed
11/19/2011	2:49:09 PM	H2 valve closed
11/19/2011	2:49:09 PM	BCl3 valve closed
11/19/2011	2:49:09 PM	PH3 valve closed
11/19/2011	2:49:09 PM	SiCl4 pre valve closed
11/19/2011	2:49:09 PM	SiCl4 post valve closed
11/19/2011	2:49:09 PM	Bypass valve closed
11/19/2011	2:49:09 PM	Bubbler valve closed
11/19/2011	2:49:09 PM	Main Vac valve opened
11/19/2011	2:49:09 PM	Helium MFC set to  0.000000
11/19/2011	2:49:09 PM	H2 MFC set to  0.000000
11/19/2011	2:49:09 PM	BCl3 MFC set to  0.000000
11/19/2011	2:49:09 PM	PHl3 MFC set to  0.000000
11/19/2011	2:49:09 PM	SiCl4 MFC set to  0.000000
11/19/2011	2:49:09 PM	Bypass solenoid MFC set to  0.000000
11/19/2011	2:49:09 PM	Tube furnace set to 150
11/19/2011	2:49:39 PM	H2 valve closed
11/19/2011	2:49:39 PM	BCl3 valve closed
11/19/2011	2:49:39 PM	PH3 valve closed
11/19/2011	2:49:39 PM	SiCl4 pre valve closed
11/19/2011	2:49:39 PM	SiCl4 post valve closed
11/19/2011	2:49:39 PM	Bypass valve closed
11/19/2011	2:49:39 PM	Bubbler valve closed
11/19/2011	2:49:39 PM	Helium valve opened
11/19/2011	2:49:39 PM	Main Vac valve opened
11/19/2011	2:49:39 PM	Helium MFC set to  20.000000
11/19/2011	2:49:39 PM	H2 MFC set to  0.000000
11/19/2011	2:49:39 PM	BCl3 MFC set to  0.000000
11/19/2011	2:49:39 PM	PHl3 MFC set to  0.000000
11/19/2011	2:49:39 PM	SiCl4 MFC set to  0.000000
11/19/2011	2:49:39 PM	Bypass solenoid MFC set to  0.000000
11/19/2011	2:49:40 PM	Tube furnace set to 180
11/19/2011	2:50:10 PM	Helium valve closed
11/19/2011	2:50:10 PM	H2 valve closed
11/19/2011	2:50:10 PM	BCl3 valve closed
11/19/2011	2:50:10 PM	PH3 valve closed
11/19/2011	2:50:10 PM	SiCl4 pre valve closed
11/19/2011	2:50:10 PM	SiCl4 post valve closed
11/19/2011	2:50:10 PM	Bypass valve closed
11/19/2011	2:50:10 PM	Bubbler valve closed
11/19/2011	2:50:10 PM	Main Vac valve opened
11/19/2011	2:50:10 PM	Helium MFC set to  0.000000
11/19/2011	2:50:10 PM	H2 MFC set to  0.000000
11/19/2011	2:50:10 PM	BCl3 MFC set to  0.000000
11/19/2011	2:50:10 PM	PHl3 MFC set to  0.000000
11/19/2011	2:50:10 PM	SiCl4 MFC set to  0.000000
11/19/2011	2:50:10 PM	Bypass solenoid MFC set to  0.000000
11/19/2011	2:50:10 PM	Tube furnace set to 150
11/19/2011	2:50:40 PM	H2 valve closed
11/19/2011	2:50:40 PM	BCl3 valve closed
11/19/2011	2:50:40 PM	PH3 valve closed
11/19/2011	2:50:40 PM	SiCl4 pre valve closed
11/19/2011	2:50:40 PM	SiCl4 post valve closed
11/19/2011	2:50:40 PM	Bypass valve closed
11/19/2011	2:50:40 PM	Bubbler valve closed
11/19/2011	2:50:40 PM	Helium valve opened
11/19/2011	2:50:40 PM	Main Vac valve opened
11/19/2011	2:50:40 PM	Helium MFC set to  20.000000
11/19/2011	2:50:40 PM	H2 MFC set to  0.000000
11/19/2011	2:50:40 PM	BCl3 MFC set to  0.000000
11/19/2011	2:50:40 PM	PHl3 MFC set to  0.000000
11/19/2011	2:50:40 PM	SiCl4 MFC set to  0.000000
11/19/2011	2:50:40 PM	Bypass solenoid MFC set to  0.000000
11/19/2011	2:50:40 PM	Tube furnace set to 150
11/19/2011	2:51:10 PM	Helium valve closed
11/19/2011	2:51:10 PM	H2 valve closed
11/19/2011	2:51:10 PM	BCl3 valve closed
11/19/2011	2:51:10 PM	PH3 valve closed
11/19/2011	2:51:10 PM	SiCl4 pre valve closed
11/19/2011	2:51:10 PM	SiCl4 post valve closed
11/19/2011	2:51:10 PM	Bypass valve closed
11/19/2011	2:51:10 PM	Bubbler valve closed
11/19/2011	2:51:10 PM	Main Vac valve opened
11/19/2011	2:51:10 PM	Helium MFC set to  0.000000
11/19/2011	2:51:10 PM	H2 MFC set to  0.000000
11/19/2011	2:51:10 PM	BCl3 MFC set to  0.000000
11/19/2011	2:51:10 PM	PHl3 MFC set to  0.000000
11/19/2011	2:51:10 PM	SiCl4 MFC set to  0.000000
11/19/2011	2:51:10 PM	Bypass solenoid MFC set to  0.000000
11/19/2011	2:51:10 PM	Tube furnace set to 150
11/19/2011	2:51:40 PM	H2 valve closed
11/19/2011	2:51:40 PM	BCl3 valve closed
11/19/2011	2:51:40 PM	PH3 valve closed
11/19/2011	2:51:40 PM	SiCl4 pre valve closed
11/19/2011	2:51:40 PM	SiCl4 post valve closed
11/19/2011	2:51:40 PM	Bypass valve closed
11/19/2011	2:51:40 PM	Bubbler valve closed
11/19/2011	2:51:40 PM	Helium valve opened
11/19/2011	2:51:40 PM	Main Vac valve opened
11/19/2011	2:51:40 PM	Helium MFC set to  20.000000
11/19/2011	2:51:40 PM	H2 MFC set to  0.000000
11/19/2011	2:51:40 PM	BCl3 MFC set to  0.000000
11/19/2011	2:51:40 PM	PHl3 MFC set to  0.000000
11/19/2011	2:51:40 PM	SiCl4 MFC set to  0.000000
11/19/2011	2:51:40 PM	Bypass solenoid MFC set to  0.000000
11/19/2011	2:51:40 PM	Tube furnace set to 180
11/19/2011	2:52:10 PM	Helium valve closed
11/19/2011	2:52:10 PM	H2 valve closed
11/19/2011	2:52:10 PM	BCl3 valve closed
11/19/2011	2:52:10 PM	PH3 valve closed
11/19/2011	2:52:10 PM	SiCl4 pre valve closed
11/19/2011	2:52:10 PM	SiCl4 post valve closed
11/19/2011	2:52:10 PM	Bypass valve closed
11/19/2011	2:52:10 PM	Bubbler valve closed
11/19/2011	2:52:10 PM	Main Vac valve opened
11/19/2011	2:52:10 PM	Helium MFC set to  0.000000
11/19/2011	2:52:10 PM	H2 MFC set to  0.000000
11/19/2011	2:52:10 PM	BCl3 MFC set to  0.000000
11/19/2011	2:52:10 PM	PHl3 MFC set to  0.000000
11/19/2011	2:52:10 PM	SiCl4 MFC set to  0.000000
11/19/2011	2:52:10 PM	Bypass solenoid MFC set to  0.000000
11/19/2011	2:52:11 PM	Tube furnace set to 150
11/19/2011	2:52:41 PM	H2 valve closed
11/19/2011	2:52:41 PM	BCl3 valve closed
11/19/2011	2:52:41 PM	PH3 valve closed
11/19/2011	2:52:41 PM	SiCl4 pre valve closed
11/19/2011	2:52:41 PM	SiCl4 post valve closed
11/19/2011	2:52:41 PM	Bypass valve closed
11/19/2011	2:52:41 PM	Bubbler valve closed
11/19/2011	2:52:41 PM	Helium valve opened
11/19/2011	2:52:41 PM	Main Vac valve opened
11/19/2011	2:52:41 PM	Helium MFC set to  20.000000
11/19/2011	2:52:41 PM	H2 MFC set to  0.000000
11/19/2011	2:52:41 PM	BCl3 MFC set to  0.000000
11/19/2011	2:52:41 PM	PHl3 MFC set to  0.000000
11/19/2011	2:52:41 PM	SiCl4 MFC set to  0.000000
11/19/2011	2:52:41 PM	Bypass solenoid MFC set to  0.000000
11/19/2011	2:52:41 PM	Tube furnace set to 150
11/19/2011	2:53:11 PM	Helium valve closed
11/19/2011	2:53:11 PM	H2 valve closed
11/19/2011	2:53:11 PM	BCl3 valve closed
11/19/2011	2:53:11 PM	PH3 valve closed
11/19/2011	2:53:11 PM	SiCl4 pre valve closed
11/19/2011	2:53:11 PM	SiCl4 post valve closed
11/19/2011	2:53:11 PM	Bypass valve closed
11/19/2011	2:53:11 PM	Bubbler valve closed
11/19/2011	2:53:11 PM	Main Vac valve opened
11/19/2011	2:53:11 PM	Helium MFC set to  0.000000
11/19/2011	2:53:11 PM	H2 MFC set to  0.000000
11/19/2011	2:53:11 PM	BCl3 MFC set to  0.000000
11/19/2011	2:53:11 PM	PHl3 MFC set to  0.000000
11/19/2011	2:53:11 PM	SiCl4 MFC set to  0.000000
11/19/2011	2:53:11 PM	Bypass solenoid MFC set to  0.000000
11/19/2011	2:53:11 PM	Tube furnace set to 150
11/19/2011	2:53:41 PM	H2 valve closed
11/19/2011	2:53:41 PM	BCl3 valve closed
11/19/2011	2:53:41 PM	PH3 valve closed
11/19/2011	2:53:41 PM	SiCl4 pre valve closed
11/19/2011	2:53:41 PM	SiCl4 post valve closed
11/19/2011	2:53:41 PM	Bypass valve closed
11/19/2011	2:53:41 PM	Bubbler valve closed
11/19/2011	2:53:41 PM	Helium valve opened
11/19/2011	2:53:41 PM	Main Vac valve opened
11/19/2011	2:53:41 PM	Helium MFC set to  20.000000
11/19/2011	2:53:41 PM	H2 MFC set to  0.000000
11/19/2011	2:53:41 PM	BCl3 MFC set to  0.000000
11/19/2011	2:53:41 PM	PHl3 MFC set to  0.000000
11/19/2011	2:53:41 PM	SiCl4 MFC set to  0.000000
11/19/2011	2:53:41 PM	Bypass solenoid MFC set to  0.000000
11/19/2011	2:53:41 PM	Tube furnace set to 150
11/19/2011	2:54:11 PM	Helium valve closed
11/19/2011	2:54:11 PM	H2 valve closed
11/19/2011	2:54:11 PM	BCl3 valve closed
11/19/2011	2:54:11 PM	PH3 valve closed
11/19/2011	2:54:11 PM	SiCl4 pre valve closed
11/19/2011	2:54:11 PM	SiCl4 post valve closed
11/19/2011	2:54:11 PM	Bypass valve closed
11/19/2011	2:54:11 PM	Bubbler valve closed
11/19/2011	2:54:11 PM	Main Vac valve opened
11/19/2011	2:54:11 PM	Helium MFC set to  0.000000
11/19/2011	2:54:11 PM	H2 MFC set to  0.000000
11/19/2011	2:54:11 PM	BCl3 MFC set to  0.000000
11/19/2011	2:54:11 PM	PHl3 MFC set to  0.000000
11/19/2011	2:54:11 PM	SiCl4 MFC set to  0.000000
11/19/2011	2:54:11 PM	Bypass solenoid MFC set to  0.000000
11/19/2011	2:54:11 PM	Tube furnace set to 150
11/19/2011	2:54:41 PM	H2 valve closed
11/19/2011	2:54:41 PM	BCl3 valve closed
11/19/2011	2:54:41 PM	PH3 valve closed
11/19/2011	2:54:41 PM	SiCl4 pre valve closed
11/19/2011	2:54:41 PM	SiCl4 post valve closed
11/19/2011	2:54:41 PM	Bypass valve closed
11/19/2011	2:54:41 PM	Bubbler valve closed
11/19/2011	2:54:41 PM	Helium valve opened
11/19/2011	2:54:41 PM	Main Vac valve opened
11/19/2011	2:54:41 PM	Helium MFC set to  20.000000
11/19/2011	2:54:41 PM	H2 MFC set to  0.000000
11/19/2011	2:54:41 PM	BCl3 MFC set to  0.000000
11/19/2011	2:54:41 PM	PHl3 MFC set to  0.000000
11/19/2011	2:54:41 PM	SiCl4 MFC set to  0.000000
11/19/2011	2:54:41 PM	Bypass solenoid MFC set to  0.000000
11/19/2011	2:54:42 PM	Tube furnace set to 150
11/19/2011	2:55:12 PM	Helium valve closed
11/19/2011	2:55:12 PM	H2 valve closed
11/19/2011	2:55:12 PM	BCl3 valve closed
11/19/2011	2:55:12 PM	PH3 valve closed
11/19/2011	2:55:12 PM	SiCl4 pre valve closed
11/19/2011	2:55:12 PM	SiCl4 post valve closed
11/19/2011	2:55:12 PM	Bypass valve closed
11/19/2011	2:55:12 PM	Bubbler valve closed
11/19/2011	2:55:12 PM	Main Vac valve opened
11/19/2011	2:55:12 PM	Helium MFC set to  0.000000
11/19/2011	2:55:12 PM	H2 MFC set to  0.000000
11/19/2011	2:55:12 PM	BCl3 MFC set to  0.000000
11/19/2011	2:55:12 PM	PHl3 MFC set to  0.000000
11/19/2011	2:55:12 PM	SiCl4 MFC set to  0.000000
11/19/2011	2:55:12 PM	Bypass solenoid MFC set to  0.000000
11/19/2011	2:55:12 PM	Tube furnace set to 150
11/19/2011	2:55:42 PM	H2 valve closed
11/19/2011	2:55:42 PM	BCl3 valve closed
11/19/2011	2:55:42 PM	PH3 valve closed
11/19/2011	2:55:42 PM	SiCl4 pre valve closed
11/19/2011	2:55:42 PM	SiCl4 post valve closed
11/19/2011	2:55:42 PM	Bypass valve closed
11/19/2011	2:55:42 PM	Bubbler valve closed
11/19/2011	2:55:42 PM	Helium valve opened
11/19/2011	2:55:42 PM	Main Vac valve opened
11/19/2011	2:55:42 PM	Helium MFC set to  20.000000
11/19/2011	2:55:42 PM	H2 MFC set to  0.000000
11/19/2011	2:55:42 PM	BCl3 MFC set to  0.000000
11/19/2011	2:55:42 PM	PHl3 MFC set to  0.000000
11/19/2011	2:55:42 PM	SiCl4 MFC set to  0.000000
11/19/2011	2:55:42 PM	Bypass solenoid MFC set to  0.000000
11/19/2011	2:55:42 PM	Tube furnace set to 150
11/19/2011	2:56:12 PM	Helium valve closed
11/19/2011	2:56:12 PM	H2 valve closed
11/19/2011	2:56:12 PM	BCl3 valve closed
11/19/2011	2:56:12 PM	PH3 valve closed
11/19/2011	2:56:12 PM	SiCl4 pre valve closed
11/19/2011	2:56:12 PM	SiCl4 post valve closed
11/19/2011	2:56:12 PM	Bypass valve closed
11/19/2011	2:56:12 PM	Bubbler valve closed
11/19/2011	2:56:12 PM	Main Vac valve opened
11/19/2011	2:56:12 PM	Helium MFC set to  0.000000
11/19/2011	2:56:12 PM	H2 MFC set to  0.000000
11/19/2011	2:56:12 PM	BCl3 MFC set to  0.000000
11/19/2011	2:56:12 PM	PHl3 MFC set to  0.000000
11/19/2011	2:56:12 PM	SiCl4 MFC set to  0.000000
11/19/2011	2:56:12 PM	Bypass solenoid MFC set to  0.000000
11/19/2011	2:56:12 PM	Tube furnace set to 150
11/19/2011	2:56:42 PM	H2 valve closed
11/19/2011	2:56:42 PM	BCl3 valve closed
11/19/2011	2:56:42 PM	PH3 valve closed
11/19/2011	2:56:42 PM	SiCl4 pre valve closed
11/19/2011	2:56:42 PM	SiCl4 post valve closed
11/19/2011	2:56:42 PM	Bypass valve closed
11/19/2011	2:56:42 PM	Bubbler valve closed
11/19/2011	2:56:42 PM	Helium valve opened
11/19/2011	2:56:42 PM	Main Vac valve opened
11/19/2011	2:56:42 PM	Helium MFC set to  20.000000
11/19/2011	2:56:42 PM	H2 MFC set to  0.000000
11/19/2011	2:56:42 PM	BCl3 MFC set to  0.000000
11/19/2011	2:56:42 PM	PHl3 MFC set to  0.000000
11/19/2011	2:56:42 PM	SiCl4 MFC set to  0.000000
11/19/2011	2:56:42 PM	Bypass solenoid MFC set to  0.000000
11/19/2011	2:56:42 PM	Tube furnace set to 150
11/19/2011	2:57:12 PM	Helium valve closed
11/19/2011	2:57:12 PM	H2 valve closed
11/19/2011	2:57:12 PM	BCl3 valve closed
11/19/2011	2:57:12 PM	PH3 valve closed
11/19/2011	2:57:12 PM	SiCl4 pre valve closed
11/19/2011	2:57:12 PM	SiCl4 post valve closed
11/19/2011	2:57:12 PM	Bypass valve closed
11/19/2011	2:57:12 PM	Bubbler valve closed
11/19/2011	2:57:12 PM	Main Vac valve opened
11/19/2011	2:57:12 PM	Helium MFC set to  0.000000
11/19/2011	2:57:12 PM	H2 MFC set to  0.000000
11/19/2011	2:57:12 PM	BCl3 MFC set to  0.000000
11/19/2011	2:57:12 PM	PHl3 MFC set to  0.000000
11/19/2011	2:57:12 PM	SiCl4 MFC set to  0.000000
11/19/2011	2:57:12 PM	Bypass solenoid MFC set to  0.000000
11/19/2011	2:57:13 PM	Tube furnace set to 150
11/19/2011	2:57:43 PM	H2 valve closed
11/19/2011	2:57:43 PM	BCl3 valve closed
11/19/2011	2:57:43 PM	PH3 valve closed
11/19/2011	2:57:43 PM	SiCl4 pre valve closed
11/19/2011	2:57:43 PM	SiCl4 post valve closed
11/19/2011	2:57:43 PM	Bypass valve closed
11/19/2011	2:57:43 PM	Bubbler valve closed
11/19/2011	2:57:43 PM	Helium valve opened
11/19/2011	2:57:43 PM	Main Vac valve opened
11/19/2011	2:57:43 PM	Helium MFC set to  20.000000
11/19/2011	2:57:43 PM	H2 MFC set to  0.000000
11/19/2011	2:57:43 PM	BCl3 MFC set to  0.000000
11/19/2011	2:57:43 PM	PHl3 MFC set to  0.000000
11/19/2011	2:57:43 PM	SiCl4 MFC set to  0.000000
11/19/2011	2:57:43 PM	Bypass solenoid MFC set to  0.000000
11/19/2011	2:57:43 PM	Tube furnace set to 150
11/19/2011	2:58:13 PM	Helium valve closed
11/19/2011	2:58:13 PM	H2 valve closed
11/19/2011	2:58:13 PM	BCl3 valve closed
11/19/2011	2:58:13 PM	PH3 valve closed
11/19/2011	2:58:13 PM	SiCl4 pre valve closed
11/19/2011	2:58:13 PM	SiCl4 post valve closed
11/19/2011	2:58:13 PM	Bypass valve closed
11/19/2011	2:58:13 PM	Bubbler valve closed
11/19/2011	2:58:13 PM	Main Vac valve opened
11/19/2011	2:58:13 PM	Helium MFC set to  0.000000
11/19/2011	2:58:13 PM	H2 MFC set to  0.000000
11/19/2011	2:58:13 PM	BCl3 MFC set to  0.000000
11/19/2011	2:58:13 PM	PHl3 MFC set to  0.000000
11/19/2011	2:58:13 PM	SiCl4 MFC set to  0.000000
11/19/2011	2:58:13 PM	Bypass solenoid MFC set to  0.000000
11/19/2011	2:58:13 PM	Tube furnace set to 150
11/19/2011	2:58:43 PM	H2 valve closed
11/19/2011	2:58:43 PM	BCl3 valve closed
11/19/2011	2:58:43 PM	PH3 valve closed
11/19/2011	2:58:43 PM	SiCl4 pre valve closed
11/19/2011	2:58:43 PM	SiCl4 post valve closed
11/19/2011	2:58:43 PM	Bypass valve closed
11/19/2011	2:58:43 PM	Bubbler valve closed
11/19/2011	2:58:43 PM	Helium valve opened
11/19/2011	2:58:43 PM	Main Vac valve opened
11/19/2011	2:58:43 PM	Helium MFC set to  20.000000
11/19/2011	2:58:43 PM	H2 MFC set to  0.000000
11/19/2011	2:58:43 PM	BCl3 MFC set to  0.000000
11/19/2011	2:58:43 PM	PHl3 MFC set to  0.000000
11/19/2011	2:58:43 PM	SiCl4 MFC set to  0.000000
11/19/2011	2:58:43 PM	Bypass solenoid MFC set to  0.000000
11/19/2011	2:58:43 PM	Tube furnace set to 150
11/19/2011	2:59:13 PM	Helium valve closed
11/19/2011	2:59:13 PM	H2 valve closed
11/19/2011	2:59:13 PM	BCl3 valve closed
11/19/2011	2:59:13 PM	PH3 valve closed
11/19/2011	2:59:13 PM	SiCl4 pre valve closed
11/19/2011	2:59:13 PM	SiCl4 post valve closed
11/19/2011	2:59:13 PM	Bypass valve closed
11/19/2011	2:59:13 PM	Bubbler valve closed
11/19/2011	2:59:13 PM	Main Vac valve opened
11/19/2011	2:59:13 PM	Helium MFC set to  0.000000
11/19/2011	2:59:13 PM	H2 MFC set to  0.000000
11/19/2011	2:59:13 PM	BCl3 MFC set to  0.000000
11/19/2011	2:59:13 PM	PHl3 MFC set to  0.000000
11/19/2011	2:59:13 PM	SiCl4 MFC set to  0.000000
11/19/2011	2:59:13 PM	Bypass solenoid MFC set to  0.000000
11/19/2011	2:59:13 PM	Tube furnace set to 150
11/19/2011	2:59:43 PM	H2 valve closed
11/19/2011	2:59:43 PM	BCl3 valve closed
11/19/2011	2:59:43 PM	PH3 valve closed
11/19/2011	2:59:43 PM	SiCl4 pre valve closed
11/19/2011	2:59:44 PM	SiCl4 post valve closed
11/19/2011	2:59:44 PM	Bypass valve closed
11/19/2011	2:59:44 PM	Bubbler valve closed
11/19/2011	2:59:44 PM	Helium valve opened
11/19/2011	2:59:44 PM	Main Vac valve opened
11/19/2011	2:59:44 PM	Helium MFC set to  20.000000
11/19/2011	2:59:44 PM	H2 MFC set to  0.000000
11/19/2011	2:59:44 PM	BCl3 MFC set to  0.000000
11/19/2011	2:59:44 PM	PHl3 MFC set to  0.000000
11/19/2011	2:59:44 PM	SiCl4 MFC set to  0.000000
11/19/2011	2:59:44 PM	Bypass solenoid MFC set to  0.000000
11/19/2011	2:59:44 PM	Tube furnace set to 150
11/19/2011	3:00:14 PM	Helium valve closed
11/19/2011	3:00:14 PM	H2 valve closed
11/19/2011	3:00:14 PM	BCl3 valve closed
11/19/2011	3:00:14 PM	PH3 valve closed
11/19/2011	3:00:14 PM	SiCl4 pre valve closed
11/19/2011	3:00:14 PM	SiCl4 post valve closed
11/19/2011	3:00:14 PM	Bypass valve closed
11/19/2011	3:00:14 PM	Bubbler valve closed
11/19/2011	3:00:14 PM	Main Vac valve opened
11/19/2011	3:00:14 PM	Helium MFC set to  0.000000
11/19/2011	3:00:14 PM	H2 MFC set to  0.000000
11/19/2011	3:00:14 PM	BCl3 MFC set to  0.000000
11/19/2011	3:00:14 PM	PHl3 MFC set to  0.000000
11/19/2011	3:00:14 PM	SiCl4 MFC set to  0.000000
11/19/2011	3:00:14 PM	Bypass solenoid MFC set to  0.000000
11/19/2011	3:00:14 PM	Tube furnace set to 150
11/19/2011	3:00:44 PM	H2 valve closed
11/19/2011	3:00:44 PM	BCl3 valve closed
11/19/2011	3:00:44 PM	PH3 valve closed
11/19/2011	3:00:44 PM	SiCl4 pre valve closed
11/19/2011	3:00:44 PM	SiCl4 post valve closed
11/19/2011	3:00:44 PM	Bypass valve closed
11/19/2011	3:00:44 PM	Bubbler valve closed
11/19/2011	3:00:44 PM	Helium valve opened
11/19/2011	3:00:44 PM	Main Vac valve opened
11/19/2011	3:00:44 PM	Helium MFC set to  20.000000
11/19/2011	3:00:44 PM	H2 MFC set to  0.000000
11/19/2011	3:00:44 PM	BCl3 MFC set to  0.000000
11/19/2011	3:00:44 PM	PHl3 MFC set to  0.000000
11/19/2011	3:00:44 PM	SiCl4 MFC set to  0.000000
11/19/2011	3:00:44 PM	Bypass solenoid MFC set to  0.000000
11/19/2011	3:00:44 PM	Tube furnace set to 150
11/19/2011	3:01:14 PM	Helium valve closed
11/19/2011	3:01:14 PM	H2 valve closed
11/19/2011	3:01:14 PM	BCl3 valve closed
11/19/2011	3:01:14 PM	PH3 valve closed
11/19/2011	3:01:14 PM	SiCl4 pre valve closed
11/19/2011	3:01:14 PM	SiCl4 post valve closed
11/19/2011	3:01:14 PM	Bypass valve closed
11/19/2011	3:01:14 PM	Bubbler valve closed
11/19/2011	3:01:14 PM	Main Vac valve opened
11/19/2011	3:01:14 PM	Helium MFC set to  0.000000
11/19/2011	3:01:14 PM	H2 MFC set to  0.000000
11/19/2011	3:01:14 PM	BCl3 MFC set to  0.000000
11/19/2011	3:01:14 PM	PHl3 MFC set to  0.000000
11/19/2011	3:01:14 PM	SiCl4 MFC set to  0.000000
11/19/2011	3:01:14 PM	Bypass solenoid MFC set to  0.000000
11/19/2011	3:01:14 PM	Tube furnace set to 150
11/19/2011	3:01:44 PM	H2 valve closed
11/19/2011	3:01:44 PM	BCl3 valve closed
11/19/2011	3:01:44 PM	PH3 valve closed
11/19/2011	3:01:44 PM	SiCl4 pre valve closed
11/19/2011	3:01:44 PM	SiCl4 post valve closed
11/19/2011	3:01:44 PM	Bypass valve closed
11/19/2011	3:01:44 PM	Bubbler valve closed
11/19/2011	3:01:44 PM	Helium valve opened
11/19/2011	3:01:44 PM	Main Vac valve opened
11/19/2011	3:01:44 PM	Helium MFC set to  20.000000
11/19/2011	3:01:44 PM	H2 MFC set to  0.000000
11/19/2011	3:01:44 PM	BCl3 MFC set to  0.000000
11/19/2011	3:01:44 PM	PHl3 MFC set to  0.000000
11/19/2011	3:01:44 PM	SiCl4 MFC set to  0.000000
11/19/2011	3:01:44 PM	Bypass solenoid MFC set to  0.000000
11/19/2011	3:01:44 PM	Tube furnace set to 150
11/19/2011	3:02:15 PM	Helium valve closed
11/19/2011	3:02:15 PM	H2 valve closed
11/19/2011	3:02:15 PM	BCl3 valve closed
11/19/2011	3:02:15 PM	PH3 valve closed
11/19/2011	3:02:15 PM	SiCl4 pre valve closed
11/19/2011	3:02:15 PM	SiCl4 post valve closed
11/19/2011	3:02:15 PM	Bypass valve closed
11/19/2011	3:02:15 PM	Bubbler valve closed
11/19/2011	3:02:15 PM	Main Vac valve opened
11/19/2011	3:02:15 PM	Helium MFC set to  0.000000
11/19/2011	3:02:15 PM	H2 MFC set to  0.000000
11/19/2011	3:02:15 PM	BCl3 MFC set to  0.000000
11/19/2011	3:02:15 PM	PHl3 MFC set to  0.000000
11/19/2011	3:02:15 PM	SiCl4 MFC set to  0.000000
11/19/2011	3:02:15 PM	Bypass solenoid MFC set to  0.000000
11/19/2011	3:02:15 PM	Tube furnace set to 150
11/19/2011	3:02:45 PM	H2 valve closed
11/19/2011	3:02:45 PM	BCl3 valve closed
11/19/2011	3:02:45 PM	PH3 valve closed
11/19/2011	3:02:45 PM	SiCl4 pre valve closed
11/19/2011	3:02:45 PM	SiCl4 post valve closed
11/19/2011	3:02:45 PM	Bypass valve closed
11/19/2011	3:02:45 PM	Bubbler valve closed
11/19/2011	3:02:45 PM	Helium valve opened
11/19/2011	3:02:45 PM	Main Vac valve opened
11/19/2011	3:02:45 PM	Helium MFC set to  20.000000
11/19/2011	3:02:45 PM	H2 MFC set to  0.000000
11/19/2011	3:02:45 PM	BCl3 MFC set to  0.000000
11/19/2011	3:02:45 PM	PHl3 MFC set to  0.000000
11/19/2011	3:02:45 PM	SiCl4 MFC set to  0.000000
11/19/2011	3:02:45 PM	Bypass solenoid MFC set to  0.000000
11/19/2011	3:02:45 PM	Tube furnace set to 150
11/19/2011	3:03:15 PM	Helium valve closed
11/19/2011	3:03:15 PM	H2 valve closed
11/19/2011	3:03:15 PM	BCl3 valve closed
11/19/2011	3:03:15 PM	PH3 valve closed
11/19/2011	3:03:15 PM	SiCl4 pre valve closed
11/19/2011	3:03:15 PM	SiCl4 post valve closed
11/19/2011	3:03:15 PM	Bypass valve closed
11/19/2011	3:03:15 PM	Bubbler valve closed
11/19/2011	3:03:15 PM	Main Vac valve opened
11/19/2011	3:03:15 PM	Helium MFC set to  0.000000
11/19/2011	3:03:15 PM	H2 MFC set to  0.000000
11/19/2011	3:03:15 PM	BCl3 MFC set to  0.000000
11/19/2011	3:03:15 PM	PHl3 MFC set to  0.000000
11/19/2011	3:03:15 PM	SiCl4 MFC set to  0.000000
11/19/2011	3:03:15 PM	Bypass solenoid MFC set to  0.000000
11/19/2011	3:03:15 PM	Tube furnace set to 150
11/19/2011	3:03:45 PM	H2 valve closed
11/19/2011	3:03:45 PM	BCl3 valve closed
11/19/2011	3:03:45 PM	PH3 valve closed
11/19/2011	3:03:45 PM	SiCl4 pre valve closed
11/19/2011	3:03:45 PM	SiCl4 post valve closed
11/19/2011	3:03:45 PM	Bypass valve closed
11/19/2011	3:03:45 PM	Bubbler valve closed
11/19/2011	3:03:45 PM	Helium valve opened
11/19/2011	3:03:45 PM	Main Vac valve opened
11/19/2011	3:03:45 PM	Helium MFC set to  20.000000
11/19/2011	3:03:45 PM	H2 MFC set to  0.000000
11/19/2011	3:03:45 PM	BCl3 MFC set to  0.000000
11/19/2011	3:03:45 PM	PHl3 MFC set to  0.000000
11/19/2011	3:03:45 PM	SiCl4 MFC set to  0.000000
11/19/2011	3:03:45 PM	Bypass solenoid MFC set to  0.000000
11/19/2011	3:03:45 PM	Tube furnace set to 150
11/19/2011	3:04:15 PM	Helium valve closed
11/19/2011	3:04:15 PM	H2 valve closed
11/19/2011	3:04:15 PM	BCl3 valve closed
11/19/2011	3:04:15 PM	PH3 valve closed
11/19/2011	3:04:15 PM	SiCl4 pre valve closed
11/19/2011	3:04:15 PM	SiCl4 post valve closed
11/19/2011	3:04:15 PM	Bypass valve closed
11/19/2011	3:04:15 PM	Bubbler valve closed
11/19/2011	3:04:15 PM	Main Vac valve opened
11/19/2011	3:04:15 PM	Helium MFC set to  0.000000
11/19/2011	3:04:15 PM	H2 MFC set to  0.000000
11/19/2011	3:04:15 PM	BCl3 MFC set to  0.000000
11/19/2011	3:04:15 PM	PHl3 MFC set to  0.000000
11/19/2011	3:04:15 PM	SiCl4 MFC set to  0.000000
11/19/2011	3:04:15 PM	Bypass solenoid MFC set to  0.000000
11/19/2011	3:04:16 PM	Tube furnace set to 150
11/19/2011	3:04:46 PM	H2 valve closed
11/19/2011	3:04:46 PM	BCl3 valve closed
11/19/2011	3:04:46 PM	PH3 valve closed
11/19/2011	3:04:46 PM	SiCl4 pre valve closed
11/19/2011	3:04:46 PM	SiCl4 post valve closed
11/19/2011	3:04:46 PM	Bypass valve closed
11/19/2011	3:04:46 PM	Bubbler valve closed
11/19/2011	3:04:46 PM	Helium valve opened
11/19/2011	3:04:46 PM	Main Vac valve opened
11/19/2011	3:04:46 PM	Helium MFC set to  20.000000
11/19/2011	3:04:46 PM	H2 MFC set to  0.000000
11/19/2011	3:04:46 PM	BCl3 MFC set to  0.000000
11/19/2011	3:04:46 PM	PHl3 MFC set to  0.000000
11/19/2011	3:04:46 PM	SiCl4 MFC set to  0.000000
11/19/2011	3:04:46 PM	Bypass solenoid MFC set to  0.000000
11/19/2011	3:04:46 PM	Tube furnace set to 150
11/19/2011	3:05:16 PM	Helium valve closed
11/19/2011	3:05:16 PM	H2 valve closed
11/19/2011	3:05:16 PM	BCl3 valve closed
11/19/2011	3:05:16 PM	PH3 valve closed
11/19/2011	3:05:16 PM	SiCl4 pre valve closed
11/19/2011	3:05:16 PM	SiCl4 post valve closed
11/19/2011	3:05:16 PM	Bypass valve closed
11/19/2011	3:05:16 PM	Bubbler valve closed
11/19/2011	3:05:16 PM	Main Vac valve opened
11/19/2011	3:05:16 PM	Helium MFC set to  0.000000
11/19/2011	3:05:16 PM	H2 MFC set to  0.000000
11/19/2011	3:05:16 PM	BCl3 MFC set to  0.000000
11/19/2011	3:05:16 PM	PHl3 MFC set to  0.000000
11/19/2011	3:05:16 PM	SiCl4 MFC set to  0.000000
11/19/2011	3:05:16 PM	Bypass solenoid MFC set to  0.000000
11/19/2011	3:05:16 PM	Tube furnace set to 150
11/19/2011	3:05:46 PM	H2 valve closed
11/19/2011	3:05:46 PM	BCl3 valve closed
11/19/2011	3:05:46 PM	PH3 valve closed
11/19/2011	3:05:46 PM	SiCl4 pre valve closed
11/19/2011	3:05:46 PM	SiCl4 post valve closed
11/19/2011	3:05:46 PM	Bypass valve closed
11/19/2011	3:05:46 PM	Bubbler valve closed
11/19/2011	3:05:46 PM	Helium valve opened
11/19/2011	3:05:46 PM	Main Vac valve opened
11/19/2011	3:05:46 PM	Helium MFC set to  20.000000
11/19/2011	3:05:46 PM	H2 MFC set to  0.000000
11/19/2011	3:05:46 PM	BCl3 MFC set to  0.000000
11/19/2011	3:05:46 PM	PHl3 MFC set to  0.000000
11/19/2011	3:05:46 PM	SiCl4 MFC set to  0.000000
11/19/2011	3:05:46 PM	Bypass solenoid MFC set to  0.000000
11/19/2011	3:05:46 PM	Tube furnace set to 150
11/19/2011	3:06:16 PM	Helium valve closed
11/19/2011	3:06:16 PM	H2 valve closed
11/19/2011	3:06:16 PM	BCl3 valve closed
11/19/2011	3:06:16 PM	PH3 valve closed
11/19/2011	3:06:16 PM	SiCl4 pre valve closed
11/19/2011	3:06:16 PM	SiCl4 post valve closed
11/19/2011	3:06:16 PM	Bypass valve closed
11/19/2011	3:06:16 PM	Bubbler valve closed
11/19/2011	3:06:16 PM	Main Vac valve opened
11/19/2011	3:06:16 PM	Helium MFC set to  0.000000
11/19/2011	3:06:16 PM	H2 MFC set to  0.000000
11/19/2011	3:06:16 PM	BCl3 MFC set to  0.000000
11/19/2011	3:06:16 PM	PHl3 MFC set to  0.000000
11/19/2011	3:06:16 PM	SiCl4 MFC set to  0.000000
11/19/2011	3:06:16 PM	Bypass solenoid MFC set to  0.000000
11/19/2011	3:06:16 PM	Tube furnace set to 150
11/19/2011	3:06:46 PM	H2 valve closed
11/19/2011	3:06:46 PM	BCl3 valve closed
11/19/2011	3:06:46 PM	PH3 valve closed
11/19/2011	3:06:46 PM	SiCl4 pre valve closed
11/19/2011	3:06:46 PM	SiCl4 post valve closed
11/19/2011	3:06:46 PM	Bypass valve closed
11/19/2011	3:06:46 PM	Bubbler valve closed
11/19/2011	3:06:46 PM	Helium valve opened
11/19/2011	3:06:46 PM	Main Vac valve opened
11/19/2011	3:06:46 PM	Helium MFC set to  20.000000
11/19/2011	3:06:46 PM	H2 MFC set to  0.000000
11/19/2011	3:06:46 PM	BCl3 MFC set to  0.000000
11/19/2011	3:06:46 PM	PHl3 MFC set to  0.000000
11/19/2011	3:06:46 PM	SiCl4 MFC set to  0.000000
11/19/2011	3:06:46 PM	Bypass solenoid MFC set to  0.000000
11/19/2011	3:06:47 PM	Tube furnace set to 150
11/19/2011	3:07:17 PM	Helium valve closed
11/19/2011	3:07:17 PM	H2 valve closed
11/19/2011	3:07:17 PM	BCl3 valve closed
11/19/2011	3:07:17 PM	PH3 valve closed
11/19/2011	3:07:17 PM	SiCl4 pre valve closed
11/19/2011	3:07:17 PM	SiCl4 post valve closed
11/19/2011	3:07:17 PM	Bypass valve closed
11/19/2011	3:07:17 PM	Bubbler valve closed
11/19/2011	3:07:17 PM	Main Vac valve opened
11/19/2011	3:07:17 PM	Helium MFC set to  0.000000
11/19/2011	3:07:17 PM	H2 MFC set to  0.000000
11/19/2011	3:07:17 PM	BCl3 MFC set to  0.000000
11/19/2011	3:07:17 PM	PHl3 MFC set to  0.000000
11/19/2011	3:07:17 PM	SiCl4 MFC set to  0.000000
11/19/2011	3:07:17 PM	Bypass solenoid MFC set to  0.000000
11/19/2011	3:07:17 PM	Tube furnace set to 150
11/19/2011	3:07:47 PM	H2 valve closed
11/19/2011	3:07:47 PM	BCl3 valve closed
11/19/2011	3:07:47 PM	PH3 valve closed
11/19/2011	3:07:47 PM	SiCl4 pre valve closed
11/19/2011	3:07:47 PM	SiCl4 post valve closed
11/19/2011	3:07:47 PM	Bypass valve closed
11/19/2011	3:07:47 PM	Bubbler valve closed
11/19/2011	3:07:47 PM	Helium valve opened
11/19/2011	3:07:47 PM	Main Vac valve opened
11/19/2011	3:07:47 PM	Helium MFC set to  20.000000
11/19/2011	3:07:47 PM	H2 MFC set to  0.000000
11/19/2011	3:07:47 PM	BCl3 MFC set to  0.000000
11/19/2011	3:07:47 PM	PHl3 MFC set to  0.000000
11/19/2011	3:07:47 PM	SiCl4 MFC set to  0.000000
11/19/2011	3:07:47 PM	Bypass solenoid MFC set to  0.000000
11/19/2011	3:07:47 PM	Tube furnace set to 150
11/19/2011	3:08:17 PM	Helium valve closed
11/19/2011	3:08:17 PM	H2 valve closed
11/19/2011	3:08:17 PM	BCl3 valve closed
11/19/2011	3:08:17 PM	PH3 valve closed
11/19/2011	3:08:17 PM	SiCl4 pre valve closed
11/19/2011	3:08:17 PM	SiCl4 post valve closed
11/19/2011	3:08:17 PM	Bypass valve closed
11/19/2011	3:08:17 PM	Bubbler valve closed
11/19/2011	3:08:17 PM	Main Vac valve opened
11/19/2011	3:08:17 PM	Helium MFC set to  0.000000
11/19/2011	3:08:17 PM	H2 MFC set to  0.000000
11/19/2011	3:08:17 PM	BCl3 MFC set to  0.000000
11/19/2011	3:08:17 PM	PHl3 MFC set to  0.000000
11/19/2011	3:08:17 PM	SiCl4 MFC set to  0.000000
11/19/2011	3:08:17 PM	Bypass solenoid MFC set to  0.000000
11/19/2011	3:08:17 PM	Tube furnace set to 180
11/19/2011	3:08:22 PM	Run finished at 3:08 PM
11/19/2011	4:14:05 PM	Main Vac valve closed
11/19/2011	4:14:17 PM	Main Vac valve opened
11/19/2011	4:14:36 PM	Recipe started at 4:14 PM
11/19/2011	4:14:36 PM	Helium valve closed
11/19/2011	4:14:36 PM	H2 valve closed
11/19/2011	4:14:36 PM	BCl3 valve closed
11/19/2011	4:14:36 PM	PH3 valve closed
11/19/2011	4:14:36 PM	SiCl4 pre valve closed
11/19/2011	4:14:36 PM	SiCl4 post valve closed
11/19/2011	4:14:36 PM	Main Vac valve closed
11/19/2011	4:14:36 PM	Bypass valve closed
11/19/2011	4:14:36 PM	Bubbler valve closed
11/19/2011	4:14:36 PM	Helium MFC set to  0.000000
11/19/2011	4:14:36 PM	H2 MFC set to  0.000000
11/19/2011	4:14:36 PM	BCl3 MFC set to  0.000000
11/19/2011	4:14:36 PM	PHl3 MFC set to  0.000000
11/19/2011	4:14:36 PM	SiCl4 MFC set to  0.000000
11/19/2011	4:14:36 PM	Bypass solenoid MFC set to  0.000000
11/19/2011	4:14:36 PM	Tube furnace set to 0
11/19/2011	4:14:39 PM	Helium valve closed
11/19/2011	4:14:39 PM	BCl3 valve closed
11/19/2011	4:14:39 PM	PH3 valve closed
11/19/2011	4:14:39 PM	SiCl4 pre valve closed
11/19/2011	4:14:39 PM	SiCl4 post valve closed
11/19/2011	4:14:39 PM	Main Vac valve closed
11/19/2011	4:14:39 PM	Bypass valve closed
11/19/2011	4:14:39 PM	Bubbler valve closed
11/19/2011	4:14:39 PM	H2 valve opened
11/19/2011	4:14:39 PM	Helium MFC set to  0.000000
11/19/2011	4:14:39 PM	H2 MFC set to  500.000000
11/19/2011	4:14:39 PM	BCl3 MFC set to  0.000000
11/19/2011	4:14:39 PM	PHl3 MFC set to  0.000000
11/19/2011	4:14:39 PM	SiCl4 MFC set to  0.000000
11/19/2011	4:14:39 PM	Bypass solenoid MFC set to  0.000000
11/19/2011	4:14:39 PM	Tube furnace set to 50
11/19/2011	4:15:43 PM	Helium valve closed
11/19/2011	4:15:43 PM	BCl3 valve closed
11/19/2011	4:15:43 PM	PH3 valve closed
11/19/2011	4:15:43 PM	SiCl4 pre valve closed
11/19/2011	4:15:43 PM	SiCl4 post valve closed
11/19/2011	4:15:43 PM	Main Vac valve closed
11/19/2011	4:15:43 PM	Bypass valve closed
11/19/2011	4:15:43 PM	H2 valve opened
11/19/2011	4:15:43 PM	Bubbler valve opened
11/19/2011	4:15:43 PM	Helium MFC set to  0.000000
11/19/2011	4:15:43 PM	H2 MFC set to  500.000000
11/19/2011	4:15:43 PM	BCl3 MFC set to  0.000000
11/19/2011	4:15:43 PM	PHl3 MFC set to  0.000000
11/19/2011	4:15:43 PM	SiCl4 MFC set to  0.000000
11/19/2011	4:15:43 PM	Bypass solenoid MFC set to  0.000000
11/19/2011	4:15:43 PM	Tube furnace set to 50
11/19/2011	4:15:44 PM	Helium valve closed
11/19/2011	4:15:44 PM	BCl3 valve closed
11/19/2011	4:15:44 PM	PH3 valve closed
11/19/2011	4:15:44 PM	SiCl4 pre valve closed
11/19/2011	4:15:44 PM	SiCl4 post valve closed
11/19/2011	4:15:44 PM	Main Vac valve closed
11/19/2011	4:15:44 PM	Bypass valve closed
11/19/2011	4:15:44 PM	H2 valve opened
11/19/2011	4:15:44 PM	Bubbler valve opened
11/19/2011	4:15:44 PM	Helium MFC set to  0.000000
11/19/2011	4:15:44 PM	H2 MFC set to  495.000000
11/19/2011	4:15:44 PM	BCl3 MFC set to  0.000000
11/19/2011	4:15:44 PM	PHl3 MFC set to  0.000000
11/19/2011	4:15:44 PM	SiCl4 MFC set to  0.000000
11/19/2011	4:15:44 PM	Bypass solenoid MFC set to  0.000000
11/19/2011	4:15:44 PM	Tube furnace set to 1000
11/19/2011	4:38:44 PM	Helium valve closed
11/19/2011	4:38:44 PM	BCl3 valve closed
11/19/2011	4:38:44 PM	PH3 valve closed
11/19/2011	4:38:44 PM	Main Vac valve closed
11/19/2011	4:38:44 PM	Bypass valve closed
11/19/2011	4:38:44 PM	H2 valve opened
11/19/2011	4:38:44 PM	SiCl4 pre valve opened
11/19/2011	4:38:44 PM	SiCl4 post valve opened
11/19/2011	4:38:44 PM	Bubbler valve opened
11/19/2011	4:38:44 PM	Helium MFC set to  0.000000
11/19/2011	4:38:44 PM	H2 MFC set to  495.000000
11/19/2011	4:38:44 PM	BCl3 MFC set to  0.000000
11/19/2011	4:38:44 PM	PHl3 MFC set to  0.000000
11/19/2011	4:38:44 PM	SiCl4 MFC set to  24.000000
11/19/2011	4:38:44 PM	Bypass solenoid MFC set to  0.000000
11/19/2011	4:38:44 PM	Tube furnace set to 1000
11/19/2011	5:00:14 PM	Helium valve closed
11/19/2011	5:00:14 PM	BCl3 valve closed
11/19/2011	5:00:14 PM	PH3 valve closed
11/19/2011	5:00:14 PM	SiCl4 pre valve closed
11/19/2011	5:00:14 PM	SiCl4 post valve closed
11/19/2011	5:00:14 PM	Main Vac valve closed
11/19/2011	5:00:14 PM	Bypass valve closed
11/19/2011	5:00:14 PM	H2 valve opened
11/19/2011	5:00:14 PM	Bubbler valve opened
11/19/2011	5:00:14 PM	Helium MFC set to  0.000000
11/19/2011	5:00:14 PM	H2 MFC set to  480.000000
11/19/2011	5:00:14 PM	BCl3 MFC set to  0.000000
11/19/2011	5:00:14 PM	PHl3 MFC set to  0.000000
11/19/2011	5:00:14 PM	SiCl4 MFC set to  0.000000
11/19/2011	5:00:14 PM	Bypass solenoid MFC set to  0.000000
11/19/2011	5:00:14 PM	Tube furnace set to 750
11/19/2011	5:07:36 PM	H2 valve closed
11/19/2011	5:07:36 PM	BCl3 valve closed
11/19/2011	5:07:36 PM	PH3 valve closed
11/19/2011	5:07:36 PM	SiCl4 pre valve closed
11/19/2011	5:07:36 PM	SiCl4 post valve closed
11/19/2011	5:07:36 PM	Main Vac valve closed
11/19/2011	5:07:36 PM	Bypass valve closed
11/19/2011	5:07:36 PM	Helium valve opened
11/19/2011	5:07:36 PM	Bubbler valve opened
11/19/2011	5:07:36 PM	Helium MFC set to  400.000000
11/19/2011	5:07:36 PM	H2 MFC set to  0.000000
11/19/2011	5:07:36 PM	BCl3 MFC set to  0.000000
11/19/2011	5:07:36 PM	PHl3 MFC set to  0.000000
11/19/2011	5:07:36 PM	SiCl4 MFC set to  0.000000
11/19/2011	5:07:36 PM	Bypass solenoid MFC set to  0.000000
11/19/2011	5:07:36 PM	Tube furnace set to 0
11/19/2011	5:10:22 PM	Run aborted at 5:10 PM
11/19/2011	5:10:22 PM	Helium valve closed
11/19/2011	5:10:22 PM	H2 valve closed
11/19/2011	5:10:22 PM	BCl3 valve closed
11/19/2011	5:10:22 PM	PH3 valve closed
11/19/2011	5:10:22 PM	SiCl4 pre valve closed
11/19/2011	5:10:22 PM	SiCl4 post valve closed
11/19/2011	5:10:22 PM	Bypass valve closed
11/19/2011	5:10:22 PM	Main Vac valve closed
11/19/2011	5:10:22 PM	Bubbler valve closed
11/19/2011	5:10:22 PM	Helium MFC set to  0.000000
11/19/2011	5:10:22 PM	H2 MFC set to  0.000000
11/19/2011	5:10:22 PM	BCl3 MFC set to  0.000000
11/19/2011	5:10:22 PM	PHl3 MFC set to  0.000000
11/19/2011	5:10:22 PM	SiCl4 MFC set to  0.000000
11/19/2011	5:10:22 PM	Tube furnace set to 0
11/19/2011	5:10:25 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/19/2011	5:10:26 PM	Recipe started at 5:10 PM
11/19/2011	5:10:26 PM	Helium valve closed
11/19/2011	5:10:26 PM	H2 valve closed
11/19/2011	5:10:26 PM	BCl3 valve closed
11/19/2011	5:10:26 PM	PH3 valve closed
11/19/2011	5:10:26 PM	SiCl4 pre valve closed
11/19/2011	5:10:26 PM	SiCl4 post valve closed
11/19/2011	5:10:26 PM	Main Vac valve closed
11/19/2011	5:10:26 PM	Bypass valve closed
11/19/2011	5:10:26 PM	Bubbler valve closed
11/19/2011	5:10:26 PM	Helium MFC set to  0.000000
11/19/2011	5:10:26 PM	H2 MFC set to  0.000000
11/19/2011	5:10:26 PM	BCl3 MFC set to  0.000000
11/19/2011	5:10:26 PM	PHl3 MFC set to  0.000000
11/19/2011	5:10:26 PM	SiCl4 MFC set to  0.000000
11/19/2011	5:10:26 PM	Bypass solenoid MFC set to  0.000000
11/19/2011	5:10:26 PM	Tube furnace set to 0
11/19/2011	5:10:29 PM	H2 valve closed
11/19/2011	5:10:29 PM	BCl3 valve closed
11/19/2011	5:10:29 PM	PH3 valve closed
11/19/2011	5:10:29 PM	SiCl4 pre valve closed
11/19/2011	5:10:29 PM	SiCl4 post valve closed
11/19/2011	5:10:29 PM	Main Vac valve closed
11/19/2011	5:10:29 PM	Bypass valve closed
11/19/2011	5:10:29 PM	Bubbler valve closed
11/19/2011	5:10:29 PM	Helium valve opened
11/19/2011	5:10:29 PM	Helium MFC set to  500.000000
11/19/2011	5:10:29 PM	H2 MFC set to  0.000000
11/19/2011	5:10:29 PM	BCl3 MFC set to  0.000000
11/19/2011	5:10:29 PM	PHl3 MFC set to  0.000000
11/19/2011	5:10:29 PM	SiCl4 MFC set to  0.000000
11/19/2011	5:10:29 PM	Bypass solenoid MFC set to  0.000000
11/19/2011	5:10:29 PM	Tube furnace set to 0
11/19/2011	5:10:29 PM	Helium valve closed
11/19/2011	5:10:29 PM	H2 valve closed
11/19/2011	5:10:29 PM	BCl3 valve closed
11/19/2011	5:10:29 PM	PH3 valve closed
11/19/2011	5:10:29 PM	SiCl4 pre valve closed
11/19/2011	5:10:29 PM	SiCl4 post valve closed
11/19/2011	5:10:29 PM	Main Vac valve closed
11/19/2011	5:10:29 PM	Bypass valve closed
11/19/2011	5:10:29 PM	Bubbler valve closed
11/19/2011	5:10:29 PM	Helium MFC set to  0.000000
11/19/2011	5:10:29 PM	H2 MFC set to  0.000000
11/19/2011	5:10:29 PM	BCl3 MFC set to  0.000000
11/19/2011	5:10:29 PM	PHl3 MFC set to  0.000000
11/19/2011	5:10:29 PM	SiCl4 MFC set to  0.000000
11/19/2011	5:10:29 PM	Bypass solenoid MFC set to  0.000000
11/19/2011	5:10:30 PM	Tube furnace set to 0
11/19/2011	5:10:31 PM	Run finished at 5:10 PM
11/19/2011	5:10:31 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/19/2011	5:14:55 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/19/2011	5:14:56 PM	Recipe started at 5:14 PM
11/19/2011	5:14:56 PM	Helium valve closed
11/19/2011	5:14:56 PM	H2 valve closed
11/19/2011	5:14:56 PM	BCl3 valve closed
11/19/2011	5:14:56 PM	PH3 valve closed
11/19/2011	5:14:56 PM	SiCl4 pre valve closed
11/19/2011	5:14:56 PM	SiCl4 post valve closed
11/19/2011	5:14:56 PM	Main Vac valve closed
11/19/2011	5:14:56 PM	Bubbler valve closed
11/19/2011	5:14:56 PM	Bypass valve opened
11/19/2011	5:14:56 PM	Helium MFC set to  0.000000
11/19/2011	5:14:56 PM	H2 MFC set to  0.000000
11/19/2011	5:14:56 PM	BCl3 MFC set to  0.000000
11/19/2011	5:14:56 PM	PHl3 MFC set to  0.000000
11/19/2011	5:14:56 PM	SiCl4 MFC set to  0.000000
11/19/2011	5:14:56 PM	Bypass solenoid MFC set to  0.000000
11/19/2011	5:14:56 PM	Tube furnace set to 0
11/19/2011	5:16:40 PM	Helium valve closed
11/19/2011	5:16:40 PM	H2 valve closed
11/19/2011	5:16:40 PM	BCl3 valve closed
11/19/2011	5:16:40 PM	PH3 valve closed
11/19/2011	5:16:40 PM	SiCl4 pre valve closed
11/19/2011	5:16:40 PM	SiCl4 post valve closed
11/19/2011	5:16:41 PM	Main Vac valve closed
11/19/2011	5:16:41 PM	Bubbler valve closed
11/19/2011	5:16:41 PM	Bypass valve opened
11/19/2011	5:16:41 PM	Helium MFC set to  0.000000
11/19/2011	5:16:41 PM	H2 MFC set to  0.000000
11/19/2011	5:16:41 PM	BCl3 MFC set to  0.000000
11/19/2011	5:16:41 PM	PHl3 MFC set to  0.000000
11/19/2011	5:16:41 PM	SiCl4 MFC set to  0.000000
11/19/2011	5:16:41 PM	Bypass solenoid MFC set to  0.000000
11/19/2011	5:16:41 PM	Tube furnace set to 0
11/19/2011	5:17:41 PM	Helium valve closed
11/19/2011	5:17:41 PM	H2 valve closed
11/19/2011	5:17:41 PM	BCl3 valve closed
11/19/2011	5:17:41 PM	PH3 valve closed
11/19/2011	5:17:41 PM	SiCl4 pre valve closed
11/19/2011	5:17:41 PM	SiCl4 post valve closed
11/19/2011	5:17:41 PM	Bypass valve closed
11/19/2011	5:17:41 PM	Bubbler valve closed
11/19/2011	5:17:41 PM	Main Vac valve opened
11/19/2011	5:17:41 PM	Helium MFC set to  0.000000
11/19/2011	5:17:41 PM	H2 MFC set to  0.000000
11/19/2011	5:17:41 PM	BCl3 MFC set to  0.000000
11/19/2011	5:17:41 PM	PHl3 MFC set to  0.000000
11/19/2011	5:17:41 PM	SiCl4 MFC set to  0.000000
11/19/2011	5:17:41 PM	Bypass solenoid MFC set to  0.000000
11/19/2011	5:17:41 PM	Tube furnace set to 0
11/19/2011	5:17:42 PM	Run finished at 5:17 PM
11/19/2011	5:17:42 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/19/2011	5:27:35 PM	Recipe started at 5:27 PM
11/19/2011	5:27:35 PM	Helium valve closed
11/19/2011	5:27:35 PM	H2 valve closed
11/19/2011	5:27:35 PM	BCl3 valve closed
11/19/2011	5:27:35 PM	PH3 valve closed
11/19/2011	5:27:35 PM	SiCl4 pre valve closed
11/19/2011	5:27:35 PM	SiCl4 post valve closed
11/19/2011	5:27:35 PM	Main Vac valve closed
11/19/2011	5:27:35 PM	Bubbler valve closed
11/19/2011	5:27:35 PM	Bypass valve opened
11/19/2011	5:27:35 PM	Helium MFC set to  0.000000
11/19/2011	5:27:35 PM	H2 MFC set to  0.000000
11/19/2011	5:27:35 PM	BCl3 MFC set to  0.000000
11/19/2011	5:27:35 PM	PHl3 MFC set to  0.000000
11/19/2011	5:27:35 PM	SiCl4 MFC set to  0.000000
11/19/2011	5:27:35 PM	Bypass solenoid MFC set to  0.000000
11/19/2011	5:27:36 PM	Tube furnace set to 180
11/19/2011	5:27:36 PM	Helium valve closed
11/19/2011	5:27:36 PM	H2 valve closed
11/19/2011	5:27:36 PM	BCl3 valve closed
11/19/2011	5:27:36 PM	PH3 valve closed
11/19/2011	5:27:36 PM	SiCl4 pre valve closed
11/19/2011	5:27:36 PM	SiCl4 post valve closed
11/19/2011	5:27:36 PM	Main Vac valve closed
11/19/2011	5:27:36 PM	Bubbler valve closed
11/19/2011	5:27:36 PM	Bypass valve opened
11/19/2011	5:27:36 PM	Helium MFC set to  0.000000
11/19/2011	5:27:36 PM	H2 MFC set to  0.000000
11/19/2011	5:27:36 PM	BCl3 MFC set to  0.000000
11/19/2011	5:27:36 PM	PHl3 MFC set to  0.000000
11/19/2011	5:27:36 PM	SiCl4 MFC set to  0.000000
11/19/2011	5:27:36 PM	Bypass solenoid MFC set to  0.000000
11/19/2011	5:27:36 PM	Tube furnace set to 150
11/19/2011	5:27:46 PM	Helium valve closed
11/19/2011	5:27:46 PM	H2 valve closed
11/19/2011	5:27:46 PM	BCl3 valve closed
11/19/2011	5:27:46 PM	PH3 valve closed
11/19/2011	5:27:46 PM	SiCl4 pre valve closed
11/19/2011	5:27:46 PM	SiCl4 post valve closed
11/19/2011	5:27:46 PM	Bypass valve closed
11/19/2011	5:27:46 PM	Bubbler valve closed
11/19/2011	5:27:46 PM	Main Vac valve opened
11/19/2011	5:27:46 PM	Helium MFC set to  0.000000
11/19/2011	5:27:46 PM	H2 MFC set to  0.000000
11/19/2011	5:27:46 PM	BCl3 MFC set to  0.000000
11/19/2011	5:27:46 PM	PHl3 MFC set to  0.000000
11/19/2011	5:27:46 PM	SiCl4 MFC set to  0.000000
11/19/2011	5:27:46 PM	Bypass solenoid MFC set to  0.000000
11/19/2011	5:27:46 PM	Tube furnace set to 180
11/19/2011	5:28:16 PM	H2 valve closed
11/19/2011	5:28:16 PM	BCl3 valve closed
11/19/2011	5:28:16 PM	PH3 valve closed
11/19/2011	5:28:16 PM	SiCl4 pre valve closed
11/19/2011	5:28:16 PM	SiCl4 post valve closed
11/19/2011	5:28:16 PM	Bypass valve closed
11/19/2011	5:28:16 PM	Bubbler valve closed
11/19/2011	5:28:16 PM	Helium valve opened
11/19/2011	5:28:16 PM	Main Vac valve opened
11/19/2011	5:28:16 PM	Helium MFC set to  20.000000
11/19/2011	5:28:16 PM	H2 MFC set to  0.000000
11/19/2011	5:28:16 PM	BCl3 MFC set to  0.000000
11/19/2011	5:28:16 PM	PHl3 MFC set to  0.000000
11/19/2011	5:28:16 PM	SiCl4 MFC set to  0.000000
11/19/2011	5:28:16 PM	Bypass solenoid MFC set to  0.000000
11/19/2011	5:28:16 PM	Tube furnace set to 180
11/19/2011	5:28:46 PM	Helium valve closed
11/19/2011	5:28:46 PM	H2 valve closed
11/19/2011	5:28:46 PM	BCl3 valve closed
11/19/2011	5:28:46 PM	PH3 valve closed
11/19/2011	5:28:46 PM	SiCl4 pre valve closed
11/19/2011	5:28:46 PM	SiCl4 post valve closed
11/19/2011	5:28:46 PM	Bypass valve closed
11/19/2011	5:28:46 PM	Bubbler valve closed
11/19/2011	5:28:46 PM	Main Vac valve opened
11/19/2011	5:28:46 PM	Helium MFC set to  0.000000
11/19/2011	5:28:46 PM	H2 MFC set to  0.000000
11/19/2011	5:28:46 PM	BCl3 MFC set to  0.000000
11/19/2011	5:28:46 PM	PHl3 MFC set to  0.000000
11/19/2011	5:28:46 PM	SiCl4 MFC set to  0.000000
11/19/2011	5:28:46 PM	Bypass solenoid MFC set to  0.000000
11/19/2011	5:28:46 PM	Tube furnace set to 150
11/19/2011	5:29:16 PM	H2 valve closed
11/19/2011	5:29:16 PM	BCl3 valve closed
11/19/2011	5:29:16 PM	PH3 valve closed
11/19/2011	5:29:16 PM	SiCl4 pre valve closed
11/19/2011	5:29:16 PM	SiCl4 post valve closed
11/19/2011	5:29:16 PM	Bypass valve closed
11/19/2011	5:29:16 PM	Bubbler valve closed
11/19/2011	5:29:16 PM	Helium valve opened
11/19/2011	5:29:16 PM	Main Vac valve opened
11/19/2011	5:29:16 PM	Helium MFC set to  20.000000
11/19/2011	5:29:16 PM	H2 MFC set to  0.000000
11/19/2011	5:29:17 PM	BCl3 MFC set to  0.000000
11/19/2011	5:29:17 PM	PHl3 MFC set to  0.000000
11/19/2011	5:29:17 PM	SiCl4 MFC set to  0.000000
11/19/2011	5:29:17 PM	Bypass solenoid MFC set to  0.000000
11/19/2011	5:29:17 PM	Tube furnace set to 180
11/19/2011	5:29:47 PM	Helium valve closed
11/19/2011	5:29:47 PM	H2 valve closed
11/19/2011	5:29:47 PM	BCl3 valve closed
11/19/2011	5:29:47 PM	PH3 valve closed
11/19/2011	5:29:47 PM	SiCl4 pre valve closed
11/19/2011	5:29:47 PM	SiCl4 post valve closed
11/19/2011	5:29:47 PM	Bypass valve closed
11/19/2011	5:29:47 PM	Bubbler valve closed
11/19/2011	5:29:47 PM	Main Vac valve opened
11/19/2011	5:29:47 PM	Helium MFC set to  0.000000
11/19/2011	5:29:47 PM	H2 MFC set to  0.000000
11/19/2011	5:29:47 PM	BCl3 MFC set to  0.000000
11/19/2011	5:29:47 PM	PHl3 MFC set to  0.000000
11/19/2011	5:29:47 PM	SiCl4 MFC set to  0.000000
11/19/2011	5:29:47 PM	Bypass solenoid MFC set to  0.000000
11/19/2011	5:29:47 PM	Tube furnace set to 150
11/19/2011	5:30:17 PM	H2 valve closed
11/19/2011	5:30:17 PM	BCl3 valve closed
11/19/2011	5:30:17 PM	PH3 valve closed
11/19/2011	5:30:17 PM	SiCl4 pre valve closed
11/19/2011	5:30:17 PM	SiCl4 post valve closed
11/19/2011	5:30:17 PM	Bypass valve closed
11/19/2011	5:30:17 PM	Bubbler valve closed
11/19/2011	5:30:17 PM	Helium valve opened
11/19/2011	5:30:17 PM	Main Vac valve opened
11/19/2011	5:30:17 PM	Helium MFC set to  20.000000
11/19/2011	5:30:17 PM	H2 MFC set to  0.000000
11/19/2011	5:30:17 PM	BCl3 MFC set to  0.000000
11/19/2011	5:30:17 PM	PHl3 MFC set to  0.000000
11/19/2011	5:30:17 PM	SiCl4 MFC set to  0.000000
11/19/2011	5:30:17 PM	Bypass solenoid MFC set to  0.000000
11/19/2011	5:30:17 PM	Tube furnace set to 150
11/19/2011	5:30:47 PM	Helium valve closed
11/19/2011	5:30:47 PM	H2 valve closed
11/19/2011	5:30:47 PM	BCl3 valve closed
11/19/2011	5:30:47 PM	PH3 valve closed
11/19/2011	5:30:47 PM	SiCl4 pre valve closed
11/19/2011	5:30:47 PM	SiCl4 post valve closed
11/19/2011	5:30:47 PM	Bypass valve closed
11/19/2011	5:30:47 PM	Bubbler valve closed
11/19/2011	5:30:47 PM	Main Vac valve opened
11/19/2011	5:30:47 PM	Helium MFC set to  0.000000
11/19/2011	5:30:47 PM	H2 MFC set to  0.000000
11/19/2011	5:30:47 PM	BCl3 MFC set to  0.000000
11/19/2011	5:30:47 PM	PHl3 MFC set to  0.000000
11/19/2011	5:30:47 PM	SiCl4 MFC set to  0.000000
11/19/2011	5:30:47 PM	Bypass solenoid MFC set to  0.000000
11/19/2011	5:30:47 PM	Tube furnace set to 150
11/19/2011	5:31:17 PM	H2 valve closed
11/19/2011	5:31:17 PM	BCl3 valve closed
11/19/2011	5:31:17 PM	PH3 valve closed
11/19/2011	5:31:17 PM	SiCl4 pre valve closed
11/19/2011	5:31:17 PM	SiCl4 post valve closed
11/19/2011	5:31:17 PM	Bypass valve closed
11/19/2011	5:31:17 PM	Bubbler valve closed
11/19/2011	5:31:17 PM	Helium valve opened
11/19/2011	5:31:17 PM	Main Vac valve opened
11/19/2011	5:31:17 PM	Helium MFC set to  20.000000
11/19/2011	5:31:17 PM	H2 MFC set to  0.000000
11/19/2011	5:31:17 PM	BCl3 MFC set to  0.000000
11/19/2011	5:31:17 PM	PHl3 MFC set to  0.000000
11/19/2011	5:31:17 PM	SiCl4 MFC set to  0.000000
11/19/2011	5:31:17 PM	Bypass solenoid MFC set to  0.000000
11/19/2011	5:31:17 PM	Tube furnace set to 180
11/19/2011	5:31:47 PM	Helium valve closed
11/19/2011	5:31:48 PM	H2 valve closed
11/19/2011	5:31:48 PM	BCl3 valve closed
11/19/2011	5:31:48 PM	PH3 valve closed
11/19/2011	5:31:48 PM	SiCl4 pre valve closed
11/19/2011	5:31:48 PM	SiCl4 post valve closed
11/19/2011	5:31:48 PM	Bypass valve closed
11/19/2011	5:31:48 PM	Bubbler valve closed
11/19/2011	5:31:48 PM	Main Vac valve opened
11/19/2011	5:31:48 PM	Helium MFC set to  0.000000
11/19/2011	5:31:48 PM	H2 MFC set to  0.000000
11/19/2011	5:31:48 PM	BCl3 MFC set to  0.000000
11/19/2011	5:31:48 PM	PHl3 MFC set to  0.000000
11/19/2011	5:31:48 PM	SiCl4 MFC set to  0.000000
11/19/2011	5:31:48 PM	Bypass solenoid MFC set to  0.000000
11/19/2011	5:31:48 PM	Tube furnace set to 150
11/19/2011	5:32:18 PM	H2 valve closed
11/19/2011	5:32:18 PM	BCl3 valve closed
11/19/2011	5:32:18 PM	PH3 valve closed
11/19/2011	5:32:18 PM	SiCl4 pre valve closed
11/19/2011	5:32:18 PM	SiCl4 post valve closed
11/19/2011	5:32:18 PM	Bypass valve closed
11/19/2011	5:32:18 PM	Bubbler valve closed
11/19/2011	5:32:18 PM	Helium valve opened
11/19/2011	5:32:18 PM	Main Vac valve opened
11/19/2011	5:32:18 PM	Helium MFC set to  20.000000
11/19/2011	5:32:18 PM	H2 MFC set to  0.000000
11/19/2011	5:32:18 PM	BCl3 MFC set to  0.000000
11/19/2011	5:32:18 PM	PHl3 MFC set to  0.000000
11/19/2011	5:32:18 PM	SiCl4 MFC set to  0.000000
11/19/2011	5:32:18 PM	Bypass solenoid MFC set to  0.000000
11/19/2011	5:32:18 PM	Tube furnace set to 150
11/19/2011	5:32:48 PM	Helium valve closed
11/19/2011	5:32:48 PM	H2 valve closed
11/19/2011	5:32:48 PM	BCl3 valve closed
11/19/2011	5:32:48 PM	PH3 valve closed
11/19/2011	5:32:48 PM	SiCl4 pre valve closed
11/19/2011	5:32:48 PM	SiCl4 post valve closed
11/19/2011	5:32:48 PM	Bypass valve closed
11/19/2011	5:32:48 PM	Bubbler valve closed
11/19/2011	5:32:48 PM	Main Vac valve opened
11/19/2011	5:32:48 PM	Helium MFC set to  0.000000
11/19/2011	5:32:48 PM	H2 MFC set to  0.000000
11/19/2011	5:32:48 PM	BCl3 MFC set to  0.000000
11/19/2011	5:32:48 PM	PHl3 MFC set to  0.000000
11/19/2011	5:32:48 PM	SiCl4 MFC set to  0.000000
11/19/2011	5:32:48 PM	Bypass solenoid MFC set to  0.000000
11/19/2011	5:32:48 PM	Tube furnace set to 150
11/19/2011	5:33:18 PM	H2 valve closed
11/19/2011	5:33:18 PM	BCl3 valve closed
11/19/2011	5:33:18 PM	PH3 valve closed
11/19/2011	5:33:18 PM	SiCl4 pre valve closed
11/19/2011	5:33:18 PM	SiCl4 post valve closed
11/19/2011	5:33:18 PM	Bypass valve closed
11/19/2011	5:33:18 PM	Bubbler valve closed
11/19/2011	5:33:18 PM	Helium valve opened
11/19/2011	5:33:18 PM	Main Vac valve opened
11/19/2011	5:33:18 PM	Helium MFC set to  20.000000
11/19/2011	5:33:18 PM	H2 MFC set to  0.000000
11/19/2011	5:33:18 PM	BCl3 MFC set to  0.000000
11/19/2011	5:33:18 PM	PHl3 MFC set to  0.000000
11/19/2011	5:33:18 PM	SiCl4 MFC set to  0.000000
11/19/2011	5:33:18 PM	Bypass solenoid MFC set to  0.000000
11/19/2011	5:33:18 PM	Tube furnace set to 150
11/19/2011	5:33:48 PM	Helium valve closed
11/19/2011	5:33:48 PM	H2 valve closed
11/19/2011	5:33:48 PM	BCl3 valve closed
11/19/2011	5:33:48 PM	PH3 valve closed
11/19/2011	5:33:48 PM	SiCl4 pre valve closed
11/19/2011	5:33:48 PM	SiCl4 post valve closed
11/19/2011	5:33:48 PM	Bypass valve closed
11/19/2011	5:33:48 PM	Bubbler valve closed
11/19/2011	5:33:48 PM	Main Vac valve opened
11/19/2011	5:33:48 PM	Helium MFC set to  0.000000
11/19/2011	5:33:48 PM	H2 MFC set to  0.000000
11/19/2011	5:33:48 PM	BCl3 MFC set to  0.000000
11/19/2011	5:33:48 PM	PHl3 MFC set to  0.000000
11/19/2011	5:33:48 PM	SiCl4 MFC set to  0.000000
11/19/2011	5:33:48 PM	Bypass solenoid MFC set to  0.000000
11/19/2011	5:33:49 PM	Tube furnace set to 150
11/19/2011	5:34:19 PM	H2 valve closed
11/19/2011	5:34:19 PM	BCl3 valve closed
11/19/2011	5:34:19 PM	PH3 valve closed
11/19/2011	5:34:19 PM	SiCl4 pre valve closed
11/19/2011	5:34:19 PM	SiCl4 post valve closed
11/19/2011	5:34:19 PM	Bypass valve closed
11/19/2011	5:34:19 PM	Bubbler valve closed
11/19/2011	5:34:19 PM	Helium valve opened
11/19/2011	5:34:19 PM	Main Vac valve opened
11/19/2011	5:34:19 PM	Helium MFC set to  20.000000
11/19/2011	5:34:19 PM	H2 MFC set to  0.000000
11/19/2011	5:34:19 PM	BCl3 MFC set to  0.000000
11/19/2011	5:34:19 PM	PHl3 MFC set to  0.000000
11/19/2011	5:34:19 PM	SiCl4 MFC set to  0.000000
11/19/2011	5:34:19 PM	Bypass solenoid MFC set to  0.000000
11/19/2011	5:34:19 PM	Tube furnace set to 150
11/19/2011	5:34:24 PM	Run aborted at 5:34 PM
11/19/2011	5:34:24 PM	Helium valve closed
11/19/2011	5:34:24 PM	H2 valve closed
11/19/2011	5:34:24 PM	BCl3 valve closed
11/19/2011	5:34:24 PM	PH3 valve closed
11/19/2011	5:34:24 PM	SiCl4 pre valve closed
11/19/2011	5:34:24 PM	SiCl4 post valve closed
11/19/2011	5:34:24 PM	Bypass valve closed
11/19/2011	5:34:24 PM	Main Vac valve closed
11/19/2011	5:34:24 PM	Bubbler valve closed
11/19/2011	5:34:24 PM	Helium MFC set to  0.000000
11/19/2011	5:34:24 PM	H2 MFC set to  0.000000
11/19/2011	5:34:24 PM	BCl3 MFC set to  0.000000
11/19/2011	5:34:24 PM	PHl3 MFC set to  0.000000
11/19/2011	5:34:24 PM	SiCl4 MFC set to  0.000000
11/19/2011	5:34:24 PM	Tube furnace set to 0
11/19/2011	5:34:26 PM	Main Vac valve opened
11/19/2011	5:34:43 PM	Recipe started at 5:34 PM
11/19/2011	5:34:43 PM	Helium valve closed
11/19/2011	5:34:43 PM	H2 valve closed
11/19/2011	5:34:43 PM	BCl3 valve closed
11/19/2011	5:34:43 PM	PH3 valve closed
11/19/2011	5:34:43 PM	SiCl4 pre valve closed
11/19/2011	5:34:43 PM	SiCl4 post valve closed
11/19/2011	5:34:43 PM	Main Vac valve closed
11/19/2011	5:34:43 PM	Bubbler valve closed
11/19/2011	5:34:43 PM	Bypass valve opened
11/19/2011	5:34:43 PM	Helium MFC set to  0.000000
11/19/2011	5:34:43 PM	H2 MFC set to  0.000000
11/19/2011	5:34:43 PM	BCl3 MFC set to  0.000000
11/19/2011	5:34:43 PM	PHl3 MFC set to  0.000000
11/19/2011	5:34:43 PM	SiCl4 MFC set to  0.000000
11/19/2011	5:34:43 PM	Bypass solenoid MFC set to  0.000000
11/19/2011	5:34:44 PM	Tube furnace set to 180
11/19/2011	5:34:45 PM	Helium valve closed
11/19/2011	5:34:45 PM	H2 valve closed
11/19/2011	5:34:45 PM	BCl3 valve closed
11/19/2011	5:34:45 PM	PH3 valve closed
11/19/2011	5:34:45 PM	SiCl4 pre valve closed
11/19/2011	5:34:45 PM	SiCl4 post valve closed
11/19/2011	5:34:45 PM	Main Vac valve closed
11/19/2011	5:34:45 PM	Bubbler valve closed
11/19/2011	5:34:45 PM	Bypass valve opened
11/19/2011	5:34:45 PM	Helium MFC set to  0.000000
11/19/2011	5:34:45 PM	H2 MFC set to  0.000000
11/19/2011	5:34:45 PM	BCl3 MFC set to  0.000000
11/19/2011	5:34:45 PM	PHl3 MFC set to  0.000000
11/19/2011	5:34:45 PM	SiCl4 MFC set to  0.000000
11/19/2011	5:34:45 PM	Bypass solenoid MFC set to  0.000000
11/19/2011	5:34:45 PM	Tube furnace set to 150
11/19/2011	5:34:46 PM	Helium valve closed
11/19/2011	5:34:46 PM	H2 valve closed
11/19/2011	5:34:46 PM	BCl3 valve closed
11/19/2011	5:34:46 PM	PH3 valve closed
11/19/2011	5:34:46 PM	SiCl4 pre valve closed
11/19/2011	5:34:46 PM	SiCl4 post valve closed
11/19/2011	5:34:46 PM	Bypass valve closed
11/19/2011	5:34:46 PM	Bubbler valve closed
11/19/2011	5:34:46 PM	Main Vac valve opened
11/19/2011	5:34:46 PM	Helium MFC set to  0.000000
11/19/2011	5:34:46 PM	H2 MFC set to  0.000000
11/19/2011	5:34:46 PM	BCl3 MFC set to  0.000000
11/19/2011	5:34:46 PM	PHl3 MFC set to  0.000000
11/19/2011	5:34:46 PM	SiCl4 MFC set to  0.000000
11/19/2011	5:34:46 PM	Bypass solenoid MFC set to  0.000000
11/19/2011	5:34:46 PM	Tube furnace set to 180
11/19/2011	5:35:17 PM	H2 valve closed
11/19/2011	5:35:17 PM	BCl3 valve closed
11/19/2011	5:35:17 PM	PH3 valve closed
11/19/2011	5:35:17 PM	SiCl4 pre valve closed
11/19/2011	5:35:17 PM	SiCl4 post valve closed
11/19/2011	5:35:17 PM	Bypass valve closed
11/19/2011	5:35:17 PM	Bubbler valve closed
11/19/2011	5:35:17 PM	Helium valve opened
11/19/2011	5:35:17 PM	Main Vac valve opened
11/19/2011	5:35:17 PM	Helium MFC set to  20.000000
11/19/2011	5:35:17 PM	H2 MFC set to  0.000000
11/19/2011	5:35:17 PM	BCl3 MFC set to  0.000000
11/19/2011	5:35:17 PM	PHl3 MFC set to  0.000000
11/19/2011	5:35:17 PM	SiCl4 MFC set to  0.000000
11/19/2011	5:35:17 PM	Bypass solenoid MFC set to  0.000000
11/19/2011	5:35:17 PM	Tube furnace set to 180
11/19/2011	5:35:47 PM	Helium valve closed
11/19/2011	5:35:47 PM	H2 valve closed
11/19/2011	5:35:47 PM	BCl3 valve closed
11/19/2011	5:35:47 PM	PH3 valve closed
11/19/2011	5:35:47 PM	SiCl4 pre valve closed
11/19/2011	5:35:47 PM	SiCl4 post valve closed
11/19/2011	5:35:47 PM	Bypass valve closed
11/19/2011	5:35:47 PM	Bubbler valve closed
11/19/2011	5:35:47 PM	Main Vac valve opened
11/19/2011	5:35:47 PM	Helium MFC set to  0.000000
11/19/2011	5:35:47 PM	H2 MFC set to  0.000000
11/19/2011	5:35:47 PM	BCl3 MFC set to  0.000000
11/19/2011	5:35:47 PM	PHl3 MFC set to  0.000000
11/19/2011	5:35:47 PM	SiCl4 MFC set to  0.000000
11/19/2011	5:35:47 PM	Bypass solenoid MFC set to  0.000000
11/19/2011	5:35:47 PM	Tube furnace set to 150
11/19/2011	5:36:17 PM	H2 valve closed
11/19/2011	5:36:17 PM	BCl3 valve closed
11/19/2011	5:36:17 PM	PH3 valve closed
11/19/2011	5:36:17 PM	SiCl4 pre valve closed
11/19/2011	5:36:17 PM	SiCl4 post valve closed
11/19/2011	5:36:17 PM	Bypass valve closed
11/19/2011	5:36:17 PM	Bubbler valve closed
11/19/2011	5:36:17 PM	Helium valve opened
11/19/2011	5:36:17 PM	Main Vac valve opened
11/19/2011	5:36:17 PM	Helium MFC set to  20.000000
11/19/2011	5:36:17 PM	H2 MFC set to  0.000000
11/19/2011	5:36:17 PM	BCl3 MFC set to  0.000000
11/19/2011	5:36:17 PM	PHl3 MFC set to  0.000000
11/19/2011	5:36:17 PM	SiCl4 MFC set to  0.000000
11/19/2011	5:36:17 PM	Bypass solenoid MFC set to  0.000000
11/19/2011	5:36:17 PM	Tube furnace set to 180
11/19/2011	5:36:47 PM	Helium valve closed
11/19/2011	5:36:47 PM	H2 valve closed
11/19/2011	5:36:47 PM	BCl3 valve closed
11/19/2011	5:36:47 PM	PH3 valve closed
11/19/2011	5:36:47 PM	SiCl4 pre valve closed
11/19/2011	5:36:47 PM	SiCl4 post valve closed
11/19/2011	5:36:47 PM	Bypass valve closed
11/19/2011	5:36:47 PM	Bubbler valve closed
11/19/2011	5:36:47 PM	Main Vac valve opened
11/19/2011	5:36:47 PM	Helium MFC set to  0.000000
11/19/2011	5:36:47 PM	H2 MFC set to  0.000000
11/19/2011	5:36:47 PM	BCl3 MFC set to  0.000000
11/19/2011	5:36:47 PM	PHl3 MFC set to  0.000000
11/19/2011	5:36:47 PM	SiCl4 MFC set to  0.000000
11/19/2011	5:36:47 PM	Bypass solenoid MFC set to  0.000000
11/19/2011	5:36:47 PM	Tube furnace set to 150
11/19/2011	5:37:17 PM	H2 valve closed
11/19/2011	5:37:17 PM	BCl3 valve closed
11/19/2011	5:37:17 PM	PH3 valve closed
11/19/2011	5:37:17 PM	SiCl4 pre valve closed
11/19/2011	5:37:17 PM	SiCl4 post valve closed
11/19/2011	5:37:17 PM	Bypass valve closed
11/19/2011	5:37:17 PM	Bubbler valve closed
11/19/2011	5:37:17 PM	Helium valve opened
11/19/2011	5:37:17 PM	Main Vac valve opened
11/19/2011	5:37:17 PM	Helium MFC set to  20.000000
11/19/2011	5:37:17 PM	H2 MFC set to  0.000000
11/19/2011	5:37:17 PM	BCl3 MFC set to  0.000000
11/19/2011	5:37:17 PM	PHl3 MFC set to  0.000000
11/19/2011	5:37:17 PM	SiCl4 MFC set to  0.000000
11/19/2011	5:37:17 PM	Bypass solenoid MFC set to  0.000000
11/19/2011	5:37:18 PM	Tube furnace set to 150
11/19/2011	5:37:48 PM	Helium valve closed
11/19/2011	5:37:48 PM	H2 valve closed
11/19/2011	5:37:48 PM	BCl3 valve closed
11/19/2011	5:37:48 PM	PH3 valve closed
11/19/2011	5:37:48 PM	SiCl4 pre valve closed
11/19/2011	5:37:48 PM	SiCl4 post valve closed
11/19/2011	5:37:48 PM	Bypass valve closed
11/19/2011	5:37:48 PM	Bubbler valve closed
11/19/2011	5:37:48 PM	Main Vac valve opened
11/19/2011	5:37:48 PM	Helium MFC set to  0.000000
11/19/2011	5:37:48 PM	H2 MFC set to  0.000000
11/19/2011	5:37:48 PM	BCl3 MFC set to  0.000000
11/19/2011	5:37:48 PM	PHl3 MFC set to  0.000000
11/19/2011	5:37:48 PM	SiCl4 MFC set to  0.000000
11/19/2011	5:37:48 PM	Bypass solenoid MFC set to  0.000000
11/19/2011	5:37:48 PM	Tube furnace set to 150
11/19/2011	5:38:18 PM	H2 valve closed
11/19/2011	5:38:18 PM	BCl3 valve closed
11/19/2011	5:38:18 PM	PH3 valve closed
11/19/2011	5:38:18 PM	SiCl4 pre valve closed
11/19/2011	5:38:18 PM	SiCl4 post valve closed
11/19/2011	5:38:18 PM	Bypass valve closed
11/19/2011	5:38:18 PM	Bubbler valve closed
11/19/2011	5:38:18 PM	Helium valve opened
11/19/2011	5:38:18 PM	Main Vac valve opened
11/19/2011	5:38:18 PM	Helium MFC set to  20.000000
11/19/2011	5:38:18 PM	H2 MFC set to  0.000000
11/19/2011	5:38:18 PM	BCl3 MFC set to  0.000000
11/19/2011	5:38:18 PM	PHl3 MFC set to  0.000000
11/19/2011	5:38:18 PM	SiCl4 MFC set to  0.000000
11/19/2011	5:38:18 PM	Bypass solenoid MFC set to  0.000000
11/19/2011	5:38:18 PM	Tube furnace set to 180
11/19/2011	5:38:48 PM	Helium valve closed
11/19/2011	5:38:48 PM	H2 valve closed
11/19/2011	5:38:48 PM	BCl3 valve closed
11/19/2011	5:38:48 PM	PH3 valve closed
11/19/2011	5:38:48 PM	SiCl4 pre valve closed
11/19/2011	5:38:48 PM	SiCl4 post valve closed
11/19/2011	5:38:48 PM	Bypass valve closed
11/19/2011	5:38:48 PM	Bubbler valve closed
11/19/2011	5:38:48 PM	Main Vac valve opened
11/19/2011	5:38:48 PM	Helium MFC set to  0.000000
11/19/2011	5:38:48 PM	H2 MFC set to  0.000000
11/19/2011	5:38:48 PM	BCl3 MFC set to  0.000000
11/19/2011	5:38:48 PM	PHl3 MFC set to  0.000000
11/19/2011	5:38:48 PM	SiCl4 MFC set to  0.000000
11/19/2011	5:38:48 PM	Bypass solenoid MFC set to  0.000000
11/19/2011	5:38:48 PM	Tube furnace set to 150
11/19/2011	5:39:18 PM	H2 valve closed
11/19/2011	5:39:18 PM	BCl3 valve closed
11/19/2011	5:39:18 PM	PH3 valve closed
11/19/2011	5:39:18 PM	SiCl4 pre valve closed
11/19/2011	5:39:18 PM	SiCl4 post valve closed
11/19/2011	5:39:18 PM	Bypass valve closed
11/19/2011	5:39:18 PM	Bubbler valve closed
11/19/2011	5:39:18 PM	Helium valve opened
11/19/2011	5:39:18 PM	Main Vac valve opened
11/19/2011	5:39:18 PM	Helium MFC set to  20.000000
11/19/2011	5:39:18 PM	H2 MFC set to  0.000000
11/19/2011	5:39:18 PM	BCl3 MFC set to  0.000000
11/19/2011	5:39:18 PM	PHl3 MFC set to  0.000000
11/19/2011	5:39:18 PM	SiCl4 MFC set to  0.000000
11/19/2011	5:39:18 PM	Bypass solenoid MFC set to  0.000000
11/19/2011	5:39:18 PM	Tube furnace set to 150
11/19/2011	5:39:48 PM	Helium valve closed
11/19/2011	5:39:48 PM	H2 valve closed
11/19/2011	5:39:48 PM	BCl3 valve closed
11/19/2011	5:39:48 PM	PH3 valve closed
11/19/2011	5:39:48 PM	SiCl4 pre valve closed
11/19/2011	5:39:48 PM	SiCl4 post valve closed
11/19/2011	5:39:48 PM	Bypass valve closed
11/19/2011	5:39:48 PM	Bubbler valve closed
11/19/2011	5:39:48 PM	Main Vac valve opened
11/19/2011	5:39:48 PM	Helium MFC set to  0.000000
11/19/2011	5:39:48 PM	H2 MFC set to  0.000000
11/19/2011	5:39:48 PM	BCl3 MFC set to  0.000000
11/19/2011	5:39:48 PM	PHl3 MFC set to  0.000000
11/19/2011	5:39:48 PM	SiCl4 MFC set to  0.000000
11/19/2011	5:39:48 PM	Bypass solenoid MFC set to  0.000000
11/19/2011	5:39:49 PM	Tube furnace set to 150
11/19/2011	5:40:19 PM	H2 valve closed
11/19/2011	5:40:19 PM	BCl3 valve closed
11/19/2011	5:40:19 PM	PH3 valve closed
11/19/2011	5:40:19 PM	SiCl4 pre valve closed
11/19/2011	5:40:19 PM	SiCl4 post valve closed
11/19/2011	5:40:19 PM	Bypass valve closed
11/19/2011	5:40:19 PM	Bubbler valve closed
11/19/2011	5:40:19 PM	Helium valve opened
11/19/2011	5:40:19 PM	Main Vac valve opened
11/19/2011	5:40:19 PM	Helium MFC set to  20.000000
11/19/2011	5:40:19 PM	H2 MFC set to  0.000000
11/19/2011	5:40:19 PM	BCl3 MFC set to  0.000000
11/19/2011	5:40:19 PM	PHl3 MFC set to  0.000000
11/19/2011	5:40:19 PM	SiCl4 MFC set to  0.000000
11/19/2011	5:40:19 PM	Bypass solenoid MFC set to  0.000000
11/19/2011	5:40:19 PM	Tube furnace set to 150
11/19/2011	5:40:49 PM	Helium valve closed
11/19/2011	5:40:49 PM	H2 valve closed
11/19/2011	5:40:49 PM	BCl3 valve closed
11/19/2011	5:40:49 PM	PH3 valve closed
11/19/2011	5:40:49 PM	SiCl4 pre valve closed
11/19/2011	5:40:49 PM	SiCl4 post valve closed
11/19/2011	5:40:49 PM	Bypass valve closed
11/19/2011	5:40:49 PM	Bubbler valve closed
11/19/2011	5:40:49 PM	Main Vac valve opened
11/19/2011	5:40:49 PM	Helium MFC set to  0.000000
11/19/2011	5:40:49 PM	H2 MFC set to  0.000000
11/19/2011	5:40:49 PM	BCl3 MFC set to  0.000000
11/19/2011	5:40:49 PM	PHl3 MFC set to  0.000000
11/19/2011	5:40:49 PM	SiCl4 MFC set to  0.000000
11/19/2011	5:40:49 PM	Bypass solenoid MFC set to  0.000000
11/19/2011	5:40:49 PM	Tube furnace set to 150
11/19/2011	5:41:19 PM	H2 valve closed
11/19/2011	5:41:19 PM	BCl3 valve closed
11/19/2011	5:41:19 PM	PH3 valve closed
11/19/2011	5:41:19 PM	SiCl4 pre valve closed
11/19/2011	5:41:19 PM	SiCl4 post valve closed
11/19/2011	5:41:19 PM	Bypass valve closed
11/19/2011	5:41:19 PM	Bubbler valve closed
11/19/2011	5:41:19 PM	Helium valve opened
11/19/2011	5:41:19 PM	Main Vac valve opened
11/19/2011	5:41:19 PM	Helium MFC set to  20.000000
11/19/2011	5:41:19 PM	H2 MFC set to  0.000000
11/19/2011	5:41:19 PM	BCl3 MFC set to  0.000000
11/19/2011	5:41:19 PM	PHl3 MFC set to  0.000000
11/19/2011	5:41:19 PM	SiCl4 MFC set to  0.000000
11/19/2011	5:41:19 PM	Bypass solenoid MFC set to  0.000000
11/19/2011	5:41:19 PM	Tube furnace set to 150
11/19/2011	5:41:49 PM	Helium valve closed
11/19/2011	5:41:49 PM	H2 valve closed
11/19/2011	5:41:49 PM	BCl3 valve closed
11/19/2011	5:41:49 PM	PH3 valve closed
11/19/2011	5:41:49 PM	SiCl4 pre valve closed
11/19/2011	5:41:49 PM	SiCl4 post valve closed
11/19/2011	5:41:49 PM	Bypass valve closed
11/19/2011	5:41:49 PM	Bubbler valve closed
11/19/2011	5:41:49 PM	Main Vac valve opened
11/19/2011	5:41:49 PM	Helium MFC set to  0.000000
11/19/2011	5:41:49 PM	H2 MFC set to  0.000000
11/19/2011	5:41:49 PM	BCl3 MFC set to  0.000000
11/19/2011	5:41:49 PM	PHl3 MFC set to  0.000000
11/19/2011	5:41:49 PM	SiCl4 MFC set to  0.000000
11/19/2011	5:41:49 PM	Bypass solenoid MFC set to  0.000000
11/19/2011	5:41:49 PM	Tube furnace set to 150
11/19/2011	5:42:19 PM	H2 valve closed
11/19/2011	5:42:19 PM	BCl3 valve closed
11/19/2011	5:42:19 PM	PH3 valve closed
11/19/2011	5:42:19 PM	SiCl4 pre valve closed
11/19/2011	5:42:19 PM	SiCl4 post valve closed
11/19/2011	5:42:19 PM	Bypass valve closed
11/19/2011	5:42:19 PM	Bubbler valve closed
11/19/2011	5:42:19 PM	Helium valve opened
11/19/2011	5:42:19 PM	Main Vac valve opened
11/19/2011	5:42:19 PM	Helium MFC set to  20.000000
11/19/2011	5:42:19 PM	H2 MFC set to  0.000000
11/19/2011	5:42:19 PM	BCl3 MFC set to  0.000000
11/19/2011	5:42:19 PM	PHl3 MFC set to  0.000000
11/19/2011	5:42:19 PM	SiCl4 MFC set to  0.000000
11/19/2011	5:42:20 PM	Bypass solenoid MFC set to  0.000000
11/19/2011	5:42:20 PM	Tube furnace set to 150
11/19/2011	5:42:50 PM	Helium valve closed
11/19/2011	5:42:50 PM	H2 valve closed
11/19/2011	5:42:50 PM	BCl3 valve closed
11/19/2011	5:42:50 PM	PH3 valve closed
11/19/2011	5:42:50 PM	SiCl4 pre valve closed
11/19/2011	5:42:50 PM	SiCl4 post valve closed
11/19/2011	5:42:50 PM	Bypass valve closed
11/19/2011	5:42:50 PM	Bubbler valve closed
11/19/2011	5:42:50 PM	Main Vac valve opened
11/19/2011	5:42:50 PM	Helium MFC set to  0.000000
11/19/2011	5:42:50 PM	H2 MFC set to  0.000000
11/19/2011	5:42:50 PM	BCl3 MFC set to  0.000000
11/19/2011	5:42:50 PM	PHl3 MFC set to  0.000000
11/19/2011	5:42:50 PM	SiCl4 MFC set to  0.000000
11/19/2011	5:42:50 PM	Bypass solenoid MFC set to  0.000000
11/19/2011	5:42:50 PM	Tube furnace set to 150
11/19/2011	5:43:20 PM	H2 valve closed
11/19/2011	5:43:20 PM	BCl3 valve closed
11/19/2011	5:43:20 PM	PH3 valve closed
11/19/2011	5:43:20 PM	SiCl4 pre valve closed
11/19/2011	5:43:20 PM	SiCl4 post valve closed
11/19/2011	5:43:20 PM	Bypass valve closed
11/19/2011	5:43:20 PM	Bubbler valve closed
11/19/2011	5:43:20 PM	Helium valve opened
11/19/2011	5:43:20 PM	Main Vac valve opened
11/19/2011	5:43:20 PM	Helium MFC set to  20.000000
11/19/2011	5:43:20 PM	H2 MFC set to  0.000000
11/19/2011	5:43:20 PM	BCl3 MFC set to  0.000000
11/19/2011	5:43:20 PM	PHl3 MFC set to  0.000000
11/19/2011	5:43:20 PM	SiCl4 MFC set to  0.000000
11/19/2011	5:43:20 PM	Bypass solenoid MFC set to  0.000000
11/19/2011	5:43:20 PM	Tube furnace set to 150
11/19/2011	5:43:50 PM	Helium valve closed
11/19/2011	5:43:50 PM	H2 valve closed
11/19/2011	5:43:50 PM	BCl3 valve closed
11/19/2011	5:43:50 PM	PH3 valve closed
11/19/2011	5:43:50 PM	SiCl4 pre valve closed
11/19/2011	5:43:50 PM	SiCl4 post valve closed
11/19/2011	5:43:50 PM	Bypass valve closed
11/19/2011	5:43:50 PM	Bubbler valve closed
11/19/2011	5:43:50 PM	Main Vac valve opened
11/19/2011	5:43:50 PM	Helium MFC set to  0.000000
11/19/2011	5:43:50 PM	H2 MFC set to  0.000000
11/19/2011	5:43:50 PM	BCl3 MFC set to  0.000000
11/19/2011	5:43:50 PM	PHl3 MFC set to  0.000000
11/19/2011	5:43:50 PM	SiCl4 MFC set to  0.000000
11/19/2011	5:43:50 PM	Bypass solenoid MFC set to  0.000000
11/19/2011	5:43:50 PM	Tube furnace set to 150
11/19/2011	5:44:20 PM	H2 valve closed
11/19/2011	5:44:20 PM	BCl3 valve closed
11/19/2011	5:44:20 PM	PH3 valve closed
11/19/2011	5:44:20 PM	SiCl4 pre valve closed
11/19/2011	5:44:20 PM	SiCl4 post valve closed
11/19/2011	5:44:20 PM	Bypass valve closed
11/19/2011	5:44:20 PM	Bubbler valve closed
11/19/2011	5:44:20 PM	Helium valve opened
11/19/2011	5:44:20 PM	Main Vac valve opened
11/19/2011	5:44:20 PM	Helium MFC set to  20.000000
11/19/2011	5:44:20 PM	H2 MFC set to  0.000000
11/19/2011	5:44:20 PM	BCl3 MFC set to  0.000000
11/19/2011	5:44:20 PM	PHl3 MFC set to  0.000000
11/19/2011	5:44:20 PM	SiCl4 MFC set to  0.000000
11/19/2011	5:44:20 PM	Bypass solenoid MFC set to  0.000000
11/19/2011	5:44:21 PM	Tube furnace set to 150
11/19/2011	5:44:51 PM	Helium valve closed
11/19/2011	5:44:51 PM	H2 valve closed
11/19/2011	5:44:51 PM	BCl3 valve closed
11/19/2011	5:44:51 PM	PH3 valve closed
11/19/2011	5:44:51 PM	SiCl4 pre valve closed
11/19/2011	5:44:51 PM	SiCl4 post valve closed
11/19/2011	5:44:51 PM	Bypass valve closed
11/19/2011	5:44:51 PM	Bubbler valve closed
11/19/2011	5:44:51 PM	Main Vac valve opened
11/19/2011	5:44:51 PM	Helium MFC set to  0.000000
11/19/2011	5:44:51 PM	H2 MFC set to  0.000000
11/19/2011	5:44:51 PM	BCl3 MFC set to  0.000000
11/19/2011	5:44:51 PM	PHl3 MFC set to  0.000000
11/19/2011	5:44:51 PM	SiCl4 MFC set to  0.000000
11/19/2011	5:44:51 PM	Bypass solenoid MFC set to  0.000000
11/19/2011	5:44:51 PM	Tube furnace set to 150
11/19/2011	5:45:21 PM	H2 valve closed
11/19/2011	5:45:21 PM	BCl3 valve closed
11/19/2011	5:45:21 PM	PH3 valve closed
11/19/2011	5:45:21 PM	SiCl4 pre valve closed
11/19/2011	5:45:21 PM	SiCl4 post valve closed
11/19/2011	5:45:21 PM	Bypass valve closed
11/19/2011	5:45:21 PM	Bubbler valve closed
11/19/2011	5:45:21 PM	Helium valve opened
11/19/2011	5:45:21 PM	Main Vac valve opened
11/19/2011	5:45:21 PM	Helium MFC set to  20.000000
11/19/2011	5:45:21 PM	H2 MFC set to  0.000000
11/19/2011	5:45:21 PM	BCl3 MFC set to  0.000000
11/19/2011	5:45:21 PM	PHl3 MFC set to  0.000000
11/19/2011	5:45:21 PM	SiCl4 MFC set to  0.000000
11/19/2011	5:45:21 PM	Bypass solenoid MFC set to  0.000000
11/19/2011	5:45:21 PM	Tube furnace set to 150
11/19/2011	5:45:51 PM	Helium valve closed
11/19/2011	5:45:51 PM	H2 valve closed
11/19/2011	5:45:51 PM	BCl3 valve closed
11/19/2011	5:45:51 PM	PH3 valve closed
11/19/2011	5:45:51 PM	SiCl4 pre valve closed
11/19/2011	5:45:51 PM	SiCl4 post valve closed
11/19/2011	5:45:51 PM	Bypass valve closed
11/19/2011	5:45:51 PM	Bubbler valve closed
11/19/2011	5:45:51 PM	Main Vac valve opened
11/19/2011	5:45:51 PM	Helium MFC set to  0.000000
11/19/2011	5:45:51 PM	H2 MFC set to  0.000000
11/19/2011	5:45:51 PM	BCl3 MFC set to  0.000000
11/19/2011	5:45:51 PM	PHl3 MFC set to  0.000000
11/19/2011	5:45:51 PM	SiCl4 MFC set to  0.000000
11/19/2011	5:45:51 PM	Bypass solenoid MFC set to  0.000000
11/19/2011	5:45:51 PM	Tube furnace set to 150
11/19/2011	5:46:21 PM	H2 valve closed
11/19/2011	5:46:21 PM	BCl3 valve closed
11/19/2011	5:46:21 PM	PH3 valve closed
11/19/2011	5:46:21 PM	SiCl4 pre valve closed
11/19/2011	5:46:21 PM	SiCl4 post valve closed
11/19/2011	5:46:21 PM	Bypass valve closed
11/19/2011	5:46:21 PM	Bubbler valve closed
11/19/2011	5:46:21 PM	Helium valve opened
11/19/2011	5:46:21 PM	Main Vac valve opened
11/19/2011	5:46:21 PM	Helium MFC set to  20.000000
11/19/2011	5:46:21 PM	H2 MFC set to  0.000000
11/19/2011	5:46:21 PM	BCl3 MFC set to  0.000000
11/19/2011	5:46:21 PM	PHl3 MFC set to  0.000000
11/19/2011	5:46:21 PM	SiCl4 MFC set to  0.000000
11/19/2011	5:46:21 PM	Bypass solenoid MFC set to  0.000000
11/19/2011	5:46:21 PM	Tube furnace set to 150
11/19/2011	5:46:51 PM	Helium valve closed
11/19/2011	5:46:51 PM	H2 valve closed
11/19/2011	5:46:51 PM	BCl3 valve closed
11/19/2011	5:46:51 PM	PH3 valve closed
11/19/2011	5:46:51 PM	SiCl4 pre valve closed
11/19/2011	5:46:51 PM	SiCl4 post valve closed
11/19/2011	5:46:51 PM	Bypass valve closed
11/19/2011	5:46:51 PM	Bubbler valve closed
11/19/2011	5:46:51 PM	Main Vac valve opened
11/19/2011	5:46:51 PM	Helium MFC set to  0.000000
11/19/2011	5:46:51 PM	H2 MFC set to  0.000000
11/19/2011	5:46:51 PM	BCl3 MFC set to  0.000000
11/19/2011	5:46:51 PM	PHl3 MFC set to  0.000000
11/19/2011	5:46:51 PM	SiCl4 MFC set to  0.000000
11/19/2011	5:46:51 PM	Bypass solenoid MFC set to  0.000000
11/19/2011	5:46:52 PM	Tube furnace set to 150
11/19/2011	5:47:22 PM	H2 valve closed
11/19/2011	5:47:22 PM	BCl3 valve closed
11/19/2011	5:47:22 PM	PH3 valve closed
11/19/2011	5:47:22 PM	SiCl4 pre valve closed
11/19/2011	5:47:22 PM	SiCl4 post valve closed
11/19/2011	5:47:22 PM	Bypass valve closed
11/19/2011	5:47:22 PM	Bubbler valve closed
11/19/2011	5:47:22 PM	Helium valve opened
11/19/2011	5:47:22 PM	Main Vac valve opened
11/19/2011	5:47:22 PM	Helium MFC set to  20.000000
11/19/2011	5:47:22 PM	H2 MFC set to  0.000000
11/19/2011	5:47:22 PM	BCl3 MFC set to  0.000000
11/19/2011	5:47:22 PM	PHl3 MFC set to  0.000000
11/19/2011	5:47:22 PM	SiCl4 MFC set to  0.000000
11/19/2011	5:47:22 PM	Bypass solenoid MFC set to  0.000000
11/19/2011	5:47:22 PM	Tube furnace set to 150
11/19/2011	5:47:52 PM	Helium valve closed
11/19/2011	5:47:52 PM	H2 valve closed
11/19/2011	5:47:52 PM	BCl3 valve closed
11/19/2011	5:47:52 PM	PH3 valve closed
11/19/2011	5:47:52 PM	SiCl4 pre valve closed
11/19/2011	5:47:52 PM	SiCl4 post valve closed
11/19/2011	5:47:52 PM	Bypass valve closed
11/19/2011	5:47:52 PM	Bubbler valve closed
11/19/2011	5:47:52 PM	Main Vac valve opened
11/19/2011	5:47:52 PM	Helium MFC set to  0.000000
11/19/2011	5:47:52 PM	H2 MFC set to  0.000000
11/19/2011	5:47:52 PM	BCl3 MFC set to  0.000000
11/19/2011	5:47:52 PM	PHl3 MFC set to  0.000000
11/19/2011	5:47:52 PM	SiCl4 MFC set to  0.000000
11/19/2011	5:47:52 PM	Bypass solenoid MFC set to  0.000000
11/19/2011	5:47:52 PM	Tube furnace set to 150
11/19/2011	5:48:22 PM	H2 valve closed
11/19/2011	5:48:22 PM	BCl3 valve closed
11/19/2011	5:48:22 PM	PH3 valve closed
11/19/2011	5:48:22 PM	SiCl4 pre valve closed
11/19/2011	5:48:22 PM	SiCl4 post valve closed
11/19/2011	5:48:22 PM	Bypass valve closed
11/19/2011	5:48:22 PM	Bubbler valve closed
11/19/2011	5:48:22 PM	Helium valve opened
11/19/2011	5:48:22 PM	Main Vac valve opened
11/19/2011	5:48:22 PM	Helium MFC set to  20.000000
11/19/2011	5:48:22 PM	H2 MFC set to  0.000000
11/19/2011	5:48:22 PM	BCl3 MFC set to  0.000000
11/19/2011	5:48:22 PM	PHl3 MFC set to  0.000000
11/19/2011	5:48:22 PM	SiCl4 MFC set to  0.000000
11/19/2011	5:48:22 PM	Bypass solenoid MFC set to  0.000000
11/19/2011	5:48:22 PM	Tube furnace set to 150
11/19/2011	5:48:52 PM	Helium valve closed
11/19/2011	5:48:52 PM	H2 valve closed
11/19/2011	5:48:52 PM	BCl3 valve closed
11/19/2011	5:48:52 PM	PH3 valve closed
11/19/2011	5:48:52 PM	SiCl4 pre valve closed
11/19/2011	5:48:52 PM	SiCl4 post valve closed
11/19/2011	5:48:52 PM	Bypass valve closed
11/19/2011	5:48:52 PM	Bubbler valve closed
11/19/2011	5:48:52 PM	Main Vac valve opened
11/19/2011	5:48:52 PM	Helium MFC set to  0.000000
11/19/2011	5:48:52 PM	H2 MFC set to  0.000000
11/19/2011	5:48:52 PM	BCl3 MFC set to  0.000000
11/19/2011	5:48:52 PM	PHl3 MFC set to  0.000000
11/19/2011	5:48:52 PM	SiCl4 MFC set to  0.000000
11/19/2011	5:48:52 PM	Bypass solenoid MFC set to  0.000000
11/19/2011	5:48:52 PM	Tube furnace set to 150
11/19/2011	5:49:22 PM	H2 valve closed
11/19/2011	5:49:22 PM	BCl3 valve closed
11/19/2011	5:49:22 PM	PH3 valve closed
11/19/2011	5:49:22 PM	SiCl4 pre valve closed
11/19/2011	5:49:22 PM	SiCl4 post valve closed
11/19/2011	5:49:22 PM	Bypass valve closed
11/19/2011	5:49:22 PM	Bubbler valve closed
11/19/2011	5:49:22 PM	Helium valve opened
11/19/2011	5:49:23 PM	Main Vac valve opened
11/19/2011	5:49:23 PM	Helium MFC set to  20.000000
11/19/2011	5:49:23 PM	H2 MFC set to  0.000000
11/19/2011	5:49:23 PM	BCl3 MFC set to  0.000000
11/19/2011	5:49:23 PM	PHl3 MFC set to  0.000000
11/19/2011	5:49:23 PM	SiCl4 MFC set to  0.000000
11/19/2011	5:49:23 PM	Bypass solenoid MFC set to  0.000000
11/19/2011	5:49:23 PM	Tube furnace set to 150
11/19/2011	5:49:53 PM	Helium valve closed
11/19/2011	5:49:53 PM	H2 valve closed
11/19/2011	5:49:53 PM	BCl3 valve closed
11/19/2011	5:49:53 PM	PH3 valve closed
11/19/2011	5:49:53 PM	SiCl4 pre valve closed
11/19/2011	5:49:53 PM	SiCl4 post valve closed
11/19/2011	5:49:53 PM	Bypass valve closed
11/19/2011	5:49:53 PM	Bubbler valve closed
11/19/2011	5:49:53 PM	Main Vac valve opened
11/19/2011	5:49:53 PM	Helium MFC set to  0.000000
11/19/2011	5:49:53 PM	H2 MFC set to  0.000000
11/19/2011	5:49:53 PM	BCl3 MFC set to  0.000000
11/19/2011	5:49:53 PM	PHl3 MFC set to  0.000000
11/19/2011	5:49:53 PM	SiCl4 MFC set to  0.000000
11/19/2011	5:49:53 PM	Bypass solenoid MFC set to  0.000000
11/19/2011	5:49:53 PM	Tube furnace set to 150
11/19/2011	5:50:23 PM	H2 valve closed
11/19/2011	5:50:23 PM	BCl3 valve closed
11/19/2011	5:50:23 PM	PH3 valve closed
11/19/2011	5:50:23 PM	SiCl4 pre valve closed
11/19/2011	5:50:23 PM	SiCl4 post valve closed
11/19/2011	5:50:23 PM	Bypass valve closed
11/19/2011	5:50:23 PM	Bubbler valve closed
11/19/2011	5:50:23 PM	Helium valve opened
11/19/2011	5:50:23 PM	Main Vac valve opened
11/19/2011	5:50:23 PM	Helium MFC set to  20.000000
11/19/2011	5:50:23 PM	H2 MFC set to  0.000000
11/19/2011	5:50:23 PM	BCl3 MFC set to  0.000000
11/19/2011	5:50:23 PM	PHl3 MFC set to  0.000000
11/19/2011	5:50:23 PM	SiCl4 MFC set to  0.000000
11/19/2011	5:50:23 PM	Bypass solenoid MFC set to  0.000000
11/19/2011	5:50:23 PM	Tube furnace set to 150
11/19/2011	5:50:53 PM	Helium valve closed
11/19/2011	5:50:53 PM	H2 valve closed
11/19/2011	5:50:53 PM	BCl3 valve closed
11/19/2011	5:50:53 PM	PH3 valve closed
11/19/2011	5:50:53 PM	SiCl4 pre valve closed
11/19/2011	5:50:53 PM	SiCl4 post valve closed
11/19/2011	5:50:53 PM	Bypass valve closed
11/19/2011	5:50:53 PM	Bubbler valve closed
11/19/2011	5:50:53 PM	Main Vac valve opened
11/19/2011	5:50:53 PM	Helium MFC set to  0.000000
11/19/2011	5:50:53 PM	H2 MFC set to  0.000000
11/19/2011	5:50:53 PM	BCl3 MFC set to  0.000000
11/19/2011	5:50:53 PM	PHl3 MFC set to  0.000000
11/19/2011	5:50:53 PM	SiCl4 MFC set to  0.000000
11/19/2011	5:50:53 PM	Bypass solenoid MFC set to  0.000000
11/19/2011	5:50:53 PM	Tube furnace set to 150
11/19/2011	5:51:23 PM	H2 valve closed
11/19/2011	5:51:23 PM	BCl3 valve closed
11/19/2011	5:51:23 PM	PH3 valve closed
11/19/2011	5:51:23 PM	SiCl4 pre valve closed
11/19/2011	5:51:23 PM	SiCl4 post valve closed
11/19/2011	5:51:23 PM	Bypass valve closed
11/19/2011	5:51:23 PM	Bubbler valve closed
11/19/2011	5:51:23 PM	Helium valve opened
11/19/2011	5:51:23 PM	Main Vac valve opened
11/19/2011	5:51:23 PM	Helium MFC set to  20.000000
11/19/2011	5:51:23 PM	H2 MFC set to  0.000000
11/19/2011	5:51:23 PM	BCl3 MFC set to  0.000000
11/19/2011	5:51:23 PM	PHl3 MFC set to  0.000000
11/19/2011	5:51:23 PM	SiCl4 MFC set to  0.000000
11/19/2011	5:51:23 PM	Bypass solenoid MFC set to  0.000000
11/19/2011	5:51:24 PM	Tube furnace set to 150
11/19/2011	5:51:54 PM	Helium valve closed
11/19/2011	5:51:54 PM	H2 valve closed
11/19/2011	5:51:54 PM	BCl3 valve closed
11/19/2011	5:51:54 PM	PH3 valve closed
11/19/2011	5:51:54 PM	SiCl4 pre valve closed
11/19/2011	5:51:54 PM	SiCl4 post valve closed
11/19/2011	5:51:54 PM	Bypass valve closed
11/19/2011	5:51:54 PM	Bubbler valve closed
11/19/2011	5:51:54 PM	Main Vac valve opened
11/19/2011	5:51:54 PM	Helium MFC set to  0.000000
11/19/2011	5:51:54 PM	H2 MFC set to  0.000000
11/19/2011	5:51:54 PM	BCl3 MFC set to  0.000000
11/19/2011	5:51:54 PM	PHl3 MFC set to  0.000000
11/19/2011	5:51:54 PM	SiCl4 MFC set to  0.000000
11/19/2011	5:51:54 PM	Bypass solenoid MFC set to  0.000000
11/19/2011	5:51:54 PM	Tube furnace set to 150
11/19/2011	5:52:24 PM	H2 valve closed
11/19/2011	5:52:24 PM	BCl3 valve closed
11/19/2011	5:52:24 PM	PH3 valve closed
11/19/2011	5:52:24 PM	SiCl4 pre valve closed
11/19/2011	5:52:24 PM	SiCl4 post valve closed
11/19/2011	5:52:24 PM	Bypass valve closed
11/19/2011	5:52:24 PM	Bubbler valve closed
11/19/2011	5:52:24 PM	Helium valve opened
11/19/2011	5:52:24 PM	Main Vac valve opened
11/19/2011	5:52:24 PM	Helium MFC set to  20.000000
11/19/2011	5:52:24 PM	H2 MFC set to  0.000000
11/19/2011	5:52:24 PM	BCl3 MFC set to  0.000000
11/19/2011	5:52:24 PM	PHl3 MFC set to  0.000000
11/19/2011	5:52:24 PM	SiCl4 MFC set to  0.000000
11/19/2011	5:52:24 PM	Bypass solenoid MFC set to  0.000000
11/19/2011	5:52:24 PM	Tube furnace set to 150
11/19/2011	5:52:54 PM	Helium valve closed
11/19/2011	5:52:54 PM	H2 valve closed
11/19/2011	5:52:54 PM	BCl3 valve closed
11/19/2011	5:52:54 PM	PH3 valve closed
11/19/2011	5:52:54 PM	SiCl4 pre valve closed
11/19/2011	5:52:54 PM	SiCl4 post valve closed
11/19/2011	5:52:54 PM	Bypass valve closed
11/19/2011	5:52:54 PM	Bubbler valve closed
11/19/2011	5:52:54 PM	Main Vac valve opened
11/19/2011	5:52:54 PM	Helium MFC set to  0.000000
11/19/2011	5:52:54 PM	H2 MFC set to  0.000000
11/19/2011	5:52:54 PM	BCl3 MFC set to  0.000000
11/19/2011	5:52:54 PM	PHl3 MFC set to  0.000000
11/19/2011	5:52:54 PM	SiCl4 MFC set to  0.000000
11/19/2011	5:52:54 PM	Bypass solenoid MFC set to  0.000000
11/19/2011	5:52:54 PM	Tube furnace set to 150
11/19/2011	5:53:24 PM	H2 valve closed
11/19/2011	5:53:24 PM	BCl3 valve closed
11/19/2011	5:53:24 PM	PH3 valve closed
11/19/2011	5:53:24 PM	SiCl4 pre valve closed
11/19/2011	5:53:24 PM	SiCl4 post valve closed
11/19/2011	5:53:24 PM	Bypass valve closed
11/19/2011	5:53:24 PM	Bubbler valve closed
11/19/2011	5:53:24 PM	Helium valve opened
11/19/2011	5:53:24 PM	Main Vac valve opened
11/19/2011	5:53:24 PM	Helium MFC set to  20.000000
11/19/2011	5:53:24 PM	H2 MFC set to  0.000000
11/19/2011	5:53:24 PM	BCl3 MFC set to  0.000000
11/19/2011	5:53:24 PM	PHl3 MFC set to  0.000000
11/19/2011	5:53:24 PM	SiCl4 MFC set to  0.000000
11/19/2011	5:53:24 PM	Bypass solenoid MFC set to  0.000000
11/19/2011	5:53:24 PM	Tube furnace set to 150
11/19/2011	5:53:54 PM	Helium valve closed
11/19/2011	5:53:54 PM	H2 valve closed
11/19/2011	5:53:54 PM	BCl3 valve closed
11/19/2011	5:53:54 PM	PH3 valve closed
11/19/2011	5:53:54 PM	SiCl4 pre valve closed
11/19/2011	5:53:54 PM	SiCl4 post valve closed
11/19/2011	5:53:54 PM	Bypass valve closed
11/19/2011	5:53:54 PM	Bubbler valve closed
11/19/2011	5:53:54 PM	Main Vac valve opened
11/19/2011	5:53:54 PM	Helium MFC set to  0.000000
11/19/2011	5:53:54 PM	H2 MFC set to  0.000000
11/19/2011	5:53:54 PM	BCl3 MFC set to  0.000000
11/19/2011	5:53:54 PM	PHl3 MFC set to  0.000000
11/19/2011	5:53:54 PM	SiCl4 MFC set to  0.000000
11/19/2011	5:53:54 PM	Bypass solenoid MFC set to  0.000000
11/19/2011	5:53:55 PM	Tube furnace set to 150
11/19/2011	5:54:25 PM	H2 valve closed
11/19/2011	5:54:25 PM	BCl3 valve closed
11/19/2011	5:54:25 PM	PH3 valve closed
11/19/2011	5:54:25 PM	SiCl4 pre valve closed
11/19/2011	5:54:25 PM	SiCl4 post valve closed
11/19/2011	5:54:25 PM	Bypass valve closed
11/19/2011	5:54:25 PM	Bubbler valve closed
11/19/2011	5:54:25 PM	Helium valve opened
11/19/2011	5:54:25 PM	Main Vac valve opened
11/19/2011	5:54:25 PM	Helium MFC set to  20.000000
11/19/2011	5:54:25 PM	H2 MFC set to  0.000000
11/19/2011	5:54:25 PM	BCl3 MFC set to  0.000000
11/19/2011	5:54:25 PM	PHl3 MFC set to  0.000000
11/19/2011	5:54:25 PM	SiCl4 MFC set to  0.000000
11/19/2011	5:54:25 PM	Bypass solenoid MFC set to  0.000000
11/19/2011	5:54:25 PM	Tube furnace set to 150
11/19/2011	5:54:55 PM	Helium valve closed
11/19/2011	5:54:55 PM	H2 valve closed
11/19/2011	5:54:55 PM	BCl3 valve closed
11/19/2011	5:54:55 PM	PH3 valve closed
11/19/2011	5:54:55 PM	SiCl4 pre valve closed
11/19/2011	5:54:55 PM	SiCl4 post valve closed
11/19/2011	5:54:55 PM	Bypass valve closed
11/19/2011	5:54:55 PM	Bubbler valve closed
11/19/2011	5:54:55 PM	Main Vac valve opened
11/19/2011	5:54:55 PM	Helium MFC set to  0.000000
11/19/2011	5:54:55 PM	H2 MFC set to  0.000000
11/19/2011	5:54:55 PM	BCl3 MFC set to  0.000000
11/19/2011	5:54:55 PM	PHl3 MFC set to  0.000000
11/19/2011	5:54:55 PM	SiCl4 MFC set to  0.000000
11/19/2011	5:54:55 PM	Bypass solenoid MFC set to  0.000000
11/19/2011	5:54:55 PM	Tube furnace set to 180
11/19/2011	5:55:00 PM	Run finished at 5:55 PM
11/19/2011	5:58:34 PM	Main Vac valve closed
11/19/2011	5:58:45 PM	Main Vac valve opened
11/19/2011	6:00:15 PM	Recipe started at 6:00 PM
11/19/2011	6:00:15 PM	Helium valve closed
11/19/2011	6:00:15 PM	H2 valve closed
11/19/2011	6:00:15 PM	BCl3 valve closed
11/19/2011	6:00:15 PM	PH3 valve closed
11/19/2011	6:00:15 PM	SiCl4 pre valve closed
11/19/2011	6:00:15 PM	SiCl4 post valve closed
11/19/2011	6:00:15 PM	Main Vac valve closed
11/19/2011	6:00:15 PM	Bypass valve closed
11/19/2011	6:00:15 PM	Bubbler valve closed
11/19/2011	6:00:15 PM	Helium MFC set to  0.000000
11/19/2011	6:00:15 PM	H2 MFC set to  0.000000
11/19/2011	6:00:15 PM	BCl3 MFC set to  0.000000
11/19/2011	6:00:15 PM	PHl3 MFC set to  0.000000
11/19/2011	6:00:15 PM	SiCl4 MFC set to  0.000000
11/19/2011	6:00:15 PM	Bypass solenoid MFC set to  0.000000
11/19/2011	6:00:15 PM	Tube furnace set to 0
11/19/2011	6:00:18 PM	Helium valve closed
11/19/2011	6:00:18 PM	BCl3 valve closed
11/19/2011	6:00:18 PM	PH3 valve closed
11/19/2011	6:00:18 PM	SiCl4 pre valve closed
11/19/2011	6:00:18 PM	SiCl4 post valve closed
11/19/2011	6:00:18 PM	Main Vac valve closed
11/19/2011	6:00:18 PM	Bypass valve closed
11/19/2011	6:00:18 PM	Bubbler valve closed
11/19/2011	6:00:18 PM	H2 valve opened
11/19/2011	6:00:18 PM	Helium MFC set to  0.000000
11/19/2011	6:00:18 PM	H2 MFC set to  500.000000
11/19/2011	6:00:18 PM	BCl3 MFC set to  0.000000
11/19/2011	6:00:18 PM	PHl3 MFC set to  0.000000
11/19/2011	6:00:18 PM	SiCl4 MFC set to  0.000000
11/19/2011	6:00:18 PM	Bypass solenoid MFC set to  0.000000
11/19/2011	6:00:18 PM	Tube furnace set to 50
11/19/2011	6:01:19 PM	Helium valve closed
11/19/2011	6:01:19 PM	BCl3 valve closed
11/19/2011	6:01:19 PM	PH3 valve closed
11/19/2011	6:01:19 PM	SiCl4 pre valve closed
11/19/2011	6:01:19 PM	SiCl4 post valve closed
11/19/2011	6:01:19 PM	Main Vac valve closed
11/19/2011	6:01:19 PM	Bypass valve closed
11/19/2011	6:01:19 PM	H2 valve opened
11/19/2011	6:01:19 PM	Bubbler valve opened
11/19/2011	6:01:19 PM	Helium MFC set to  0.000000
11/19/2011	6:01:19 PM	H2 MFC set to  500.000000
11/19/2011	6:01:19 PM	BCl3 MFC set to  0.000000
11/19/2011	6:01:19 PM	PHl3 MFC set to  0.000000
11/19/2011	6:01:19 PM	SiCl4 MFC set to  0.000000
11/19/2011	6:01:19 PM	Bypass solenoid MFC set to  0.000000
11/19/2011	6:01:19 PM	Tube furnace set to 50
11/19/2011	6:01:20 PM	Helium valve closed
11/19/2011	6:01:20 PM	BCl3 valve closed
11/19/2011	6:01:20 PM	PH3 valve closed
11/19/2011	6:01:20 PM	SiCl4 pre valve closed
11/19/2011	6:01:20 PM	SiCl4 post valve closed
11/19/2011	6:01:20 PM	Main Vac valve closed
11/19/2011	6:01:20 PM	Bypass valve closed
11/19/2011	6:01:20 PM	H2 valve opened
11/19/2011	6:01:20 PM	Bubbler valve opened
11/19/2011	6:01:20 PM	Helium MFC set to  0.000000
11/19/2011	6:01:20 PM	H2 MFC set to  495.000000
11/19/2011	6:01:20 PM	BCl3 MFC set to  0.000000
11/19/2011	6:01:20 PM	PHl3 MFC set to  0.000000
11/19/2011	6:01:20 PM	SiCl4 MFC set to  0.000000
11/19/2011	6:01:20 PM	Bypass solenoid MFC set to  0.000000
11/19/2011	6:01:21 PM	Tube furnace set to 1000
11/19/2011	6:21:21 PM	Helium valve closed
11/19/2011	6:21:21 PM	BCl3 valve closed
11/19/2011	6:21:21 PM	Main Vac valve closed
11/19/2011	6:21:21 PM	Bypass valve closed
11/19/2011	6:21:21 PM	H2 valve opened
11/19/2011	6:21:21 PM	PH3 valve opened
11/19/2011	6:21:21 PM	SiCl4 pre valve opened
11/19/2011	6:21:21 PM	SiCl4 post valve opened
11/19/2011	6:21:21 PM	Bubbler valve opened
11/19/2011	6:21:21 PM	Helium MFC set to  0.000000
11/19/2011	6:21:21 PM	H2 MFC set to  495.000000
11/19/2011	6:21:21 PM	BCl3 MFC set to  0.000000
11/19/2011	6:21:21 PM	PHl3 MFC set to  0.700000
11/19/2011	6:21:21 PM	SiCl4 MFC set to  24.000000
11/19/2011	6:21:21 PM	Bypass solenoid MFC set to  0.000000
11/19/2011	6:21:21 PM	Tube furnace set to 1000
11/19/2011	6:31:21 PM	Helium valve closed
11/19/2011	6:31:21 PM	BCl3 valve closed
11/19/2011	6:31:21 PM	PH3 valve closed
11/19/2011	6:31:21 PM	SiCl4 pre valve closed
11/19/2011	6:31:21 PM	SiCl4 post valve closed
11/19/2011	6:31:21 PM	Main Vac valve closed
11/19/2011	6:31:21 PM	Bypass valve closed
11/19/2011	6:31:21 PM	H2 valve opened
11/19/2011	6:31:21 PM	Bubbler valve opened
11/19/2011	6:31:21 PM	Helium MFC set to  0.000000
11/19/2011	6:31:21 PM	H2 MFC set to  480.000000
11/19/2011	6:31:21 PM	BCl3 MFC set to  0.000000
11/19/2011	6:31:21 PM	PHl3 MFC set to  0.000000
11/19/2011	6:31:21 PM	SiCl4 MFC set to  0.000000
11/19/2011	6:31:21 PM	Bypass solenoid MFC set to  0.000000
11/19/2011	6:31:21 PM	Tube furnace set to 750
11/19/2011	6:41:21 PM	H2 valve closed
11/19/2011	6:41:21 PM	BCl3 valve closed
11/19/2011	6:41:21 PM	PH3 valve closed
11/19/2011	6:41:21 PM	SiCl4 pre valve closed
11/19/2011	6:41:21 PM	SiCl4 post valve closed
11/19/2011	6:41:21 PM	Main Vac valve closed
11/19/2011	6:41:21 PM	Bypass valve closed
11/19/2011	6:41:21 PM	Helium valve opened
11/19/2011	6:41:21 PM	Bubbler valve opened
11/19/2011	6:41:21 PM	Helium MFC set to  400.000000
11/19/2011	6:41:21 PM	H2 MFC set to  0.000000
11/19/2011	6:41:21 PM	BCl3 MFC set to  0.000000
11/19/2011	6:41:21 PM	PHl3 MFC set to  0.000000
11/19/2011	6:41:21 PM	SiCl4 MFC set to  0.000000
11/19/2011	6:41:21 PM	Bypass solenoid MFC set to  0.000000
11/19/2011	6:41:21 PM	Tube furnace set to 0
11/19/2011	6:49:45 PM	Run aborted at 6:49 PM
11/19/2011	6:49:45 PM	Helium valve closed
11/19/2011	6:49:45 PM	H2 valve closed
11/19/2011	6:49:45 PM	BCl3 valve closed
11/19/2011	6:49:45 PM	PH3 valve closed
11/19/2011	6:49:45 PM	SiCl4 pre valve closed
11/19/2011	6:49:45 PM	SiCl4 post valve closed
11/19/2011	6:49:45 PM	Bypass valve closed
11/19/2011	6:49:45 PM	Main Vac valve closed
11/19/2011	6:49:45 PM	Bubbler valve closed
11/19/2011	6:49:45 PM	Helium MFC set to  0.000000
11/19/2011	6:49:45 PM	H2 MFC set to  0.000000
11/19/2011	6:49:45 PM	BCl3 MFC set to  0.000000
11/19/2011	6:49:45 PM	PHl3 MFC set to  0.000000
11/19/2011	6:49:45 PM	SiCl4 MFC set to  0.000000
11/19/2011	6:49:46 PM	Tube furnace set to 0
11/19/2011	6:49:47 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/19/2011	6:49:48 PM	Recipe started at 6:49 PM
11/19/2011	6:49:48 PM	Helium valve closed
11/19/2011	6:49:48 PM	H2 valve closed
11/19/2011	6:49:48 PM	BCl3 valve closed
11/19/2011	6:49:48 PM	PH3 valve closed
11/19/2011	6:49:48 PM	SiCl4 pre valve closed
11/19/2011	6:49:48 PM	SiCl4 post valve closed
11/19/2011	6:49:48 PM	Main Vac valve closed
11/19/2011	6:49:48 PM	Bypass valve closed
11/19/2011	6:49:48 PM	Bubbler valve closed
11/19/2011	6:49:48 PM	Helium MFC set to  0.000000
11/19/2011	6:49:48 PM	H2 MFC set to  0.000000
11/19/2011	6:49:48 PM	BCl3 MFC set to  0.000000
11/19/2011	6:49:48 PM	PHl3 MFC set to  0.000000
11/19/2011	6:49:48 PM	SiCl4 MFC set to  0.000000
11/19/2011	6:49:48 PM	Bypass solenoid MFC set to  0.000000
11/19/2011	6:49:48 PM	Tube furnace set to 0
11/19/2011	6:49:51 PM	H2 valve closed
11/19/2011	6:49:51 PM	BCl3 valve closed
11/19/2011	6:49:51 PM	PH3 valve closed
11/19/2011	6:49:51 PM	SiCl4 pre valve closed
11/19/2011	6:49:51 PM	SiCl4 post valve closed
11/19/2011	6:49:51 PM	Main Vac valve closed
11/19/2011	6:49:51 PM	Bypass valve closed
11/19/2011	6:49:51 PM	Bubbler valve closed
11/19/2011	6:49:51 PM	Helium valve opened
11/19/2011	6:49:51 PM	Helium MFC set to  500.000000
11/19/2011	6:49:51 PM	H2 MFC set to  0.000000
11/19/2011	6:49:51 PM	BCl3 MFC set to  0.000000
11/19/2011	6:49:51 PM	PHl3 MFC set to  0.000000
11/19/2011	6:49:51 PM	SiCl4 MFC set to  0.000000
11/19/2011	6:49:51 PM	Bypass solenoid MFC set to  0.000000
11/19/2011	6:49:51 PM	Tube furnace set to 0
11/19/2011	6:49:52 PM	Helium valve closed
11/19/2011	6:49:52 PM	H2 valve closed
11/19/2011	6:49:52 PM	BCl3 valve closed
11/19/2011	6:49:52 PM	PH3 valve closed
11/19/2011	6:49:52 PM	SiCl4 pre valve closed
11/19/2011	6:49:52 PM	SiCl4 post valve closed
11/19/2011	6:49:52 PM	Main Vac valve closed
11/19/2011	6:49:52 PM	Bypass valve closed
11/19/2011	6:49:52 PM	Bubbler valve closed
11/19/2011	6:49:52 PM	Helium MFC set to  0.000000
11/19/2011	6:49:52 PM	H2 MFC set to  0.000000
11/19/2011	6:49:52 PM	BCl3 MFC set to  0.000000
11/19/2011	6:49:52 PM	PHl3 MFC set to  0.000000
11/19/2011	6:49:52 PM	SiCl4 MFC set to  0.000000
11/19/2011	6:49:52 PM	Bypass solenoid MFC set to  0.000000
11/19/2011	6:49:52 PM	Tube furnace set to 0
11/19/2011	6:49:53 PM	Run finished at 6:49 PM
11/19/2011	6:49:53 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/19/2011	6:54:12 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/19/2011	6:54:12 PM	Recipe started at 6:54 PM
11/19/2011	6:54:13 PM	Helium valve closed
11/19/2011	6:54:13 PM	H2 valve closed
11/19/2011	6:54:13 PM	BCl3 valve closed
11/19/2011	6:54:13 PM	PH3 valve closed
11/19/2011	6:54:13 PM	SiCl4 pre valve closed
11/19/2011	6:54:13 PM	SiCl4 post valve closed
11/19/2011	6:54:13 PM	Main Vac valve closed
11/19/2011	6:54:13 PM	Bubbler valve closed
11/19/2011	6:54:13 PM	Bypass valve opened
11/19/2011	6:54:13 PM	Helium MFC set to  0.000000
11/19/2011	6:54:13 PM	H2 MFC set to  0.000000
11/19/2011	6:54:13 PM	BCl3 MFC set to  0.000000
11/19/2011	6:54:13 PM	PHl3 MFC set to  0.000000
11/19/2011	6:54:13 PM	SiCl4 MFC set to  0.000000
11/19/2011	6:54:13 PM	Bypass solenoid MFC set to  0.000000
11/19/2011	6:54:13 PM	Tube furnace set to 0
11/19/2011	6:55:54 PM	Helium valve closed
11/19/2011	6:55:54 PM	H2 valve closed
11/19/2011	6:55:54 PM	BCl3 valve closed
11/19/2011	6:55:54 PM	PH3 valve closed
11/19/2011	6:55:54 PM	SiCl4 pre valve closed
11/19/2011	6:55:54 PM	SiCl4 post valve closed
11/19/2011	6:55:54 PM	Main Vac valve closed
11/19/2011	6:55:54 PM	Bubbler valve closed
11/19/2011	6:55:54 PM	Bypass valve opened
11/19/2011	6:55:54 PM	Helium MFC set to  0.000000
11/19/2011	6:55:54 PM	H2 MFC set to  0.000000
11/19/2011	6:55:54 PM	BCl3 MFC set to  0.000000
11/19/2011	6:55:54 PM	PHl3 MFC set to  0.000000
11/19/2011	6:55:54 PM	SiCl4 MFC set to  0.000000
11/19/2011	6:55:54 PM	Bypass solenoid MFC set to  0.000000
11/19/2011	6:55:54 PM	Tube furnace set to 0
11/19/2011	6:56:54 PM	Helium valve closed
11/19/2011	6:56:54 PM	H2 valve closed
11/19/2011	6:56:54 PM	BCl3 valve closed
11/19/2011	6:56:54 PM	PH3 valve closed
11/19/2011	6:56:54 PM	SiCl4 pre valve closed
11/19/2011	6:56:54 PM	SiCl4 post valve closed
11/19/2011	6:56:54 PM	Bypass valve closed
11/19/2011	6:56:54 PM	Bubbler valve closed
11/19/2011	6:56:54 PM	Main Vac valve opened
11/19/2011	6:56:54 PM	Helium MFC set to  0.000000
11/19/2011	6:56:54 PM	H2 MFC set to  0.000000
11/19/2011	6:56:54 PM	BCl3 MFC set to  0.000000
11/19/2011	6:56:54 PM	PHl3 MFC set to  0.000000
11/19/2011	6:56:54 PM	SiCl4 MFC set to  0.000000
11/19/2011	6:56:54 PM	Bypass solenoid MFC set to  0.000000
11/19/2011	6:56:54 PM	Tube furnace set to 0
11/19/2011	6:56:55 PM	Run finished at 6:56 PM
11/19/2011	6:56:55 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/19/2011	7:01:20 PM	Recipe started at 7:01 PM
11/19/2011	7:01:20 PM	Helium valve closed
11/19/2011	7:01:20 PM	H2 valve closed
11/19/2011	7:01:20 PM	BCl3 valve closed
11/19/2011	7:01:20 PM	PH3 valve closed
11/19/2011	7:01:20 PM	SiCl4 pre valve closed
11/19/2011	7:01:20 PM	SiCl4 post valve closed
11/19/2011	7:01:20 PM	Main Vac valve closed
11/19/2011	7:01:20 PM	Bubbler valve closed
11/19/2011	7:01:20 PM	Bypass valve opened
11/19/2011	7:01:20 PM	Helium MFC set to  0.000000
11/19/2011	7:01:20 PM	H2 MFC set to  0.000000
11/19/2011	7:01:20 PM	BCl3 MFC set to  0.000000
11/19/2011	7:01:20 PM	PHl3 MFC set to  0.000000
11/19/2011	7:01:20 PM	SiCl4 MFC set to  0.000000
11/19/2011	7:01:20 PM	Bypass solenoid MFC set to  0.000000
11/19/2011	7:01:20 PM	Tube furnace set to 180
11/19/2011	7:01:20 PM	Helium valve closed
11/19/2011	7:01:20 PM	H2 valve closed
11/19/2011	7:01:20 PM	BCl3 valve closed
11/19/2011	7:01:20 PM	PH3 valve closed
11/19/2011	7:01:20 PM	SiCl4 pre valve closed
11/19/2011	7:01:20 PM	SiCl4 post valve closed
11/19/2011	7:01:20 PM	Main Vac valve closed
11/19/2011	7:01:20 PM	Bubbler valve closed
11/19/2011	7:01:20 PM	Bypass valve opened
11/19/2011	7:01:20 PM	Helium MFC set to  0.000000
11/19/2011	7:01:20 PM	H2 MFC set to  0.000000
11/19/2011	7:01:20 PM	BCl3 MFC set to  0.000000
11/19/2011	7:01:20 PM	PHl3 MFC set to  0.000000
11/19/2011	7:01:20 PM	SiCl4 MFC set to  0.000000
11/19/2011	7:01:20 PM	Bypass solenoid MFC set to  0.000000
11/19/2011	7:01:20 PM	Tube furnace set to 150
11/19/2011	7:01:33 PM	Helium valve closed
11/19/2011	7:01:33 PM	H2 valve closed
11/19/2011	7:01:33 PM	BCl3 valve closed
11/19/2011	7:01:33 PM	PH3 valve closed
11/19/2011	7:01:33 PM	SiCl4 pre valve closed
11/19/2011	7:01:33 PM	SiCl4 post valve closed
11/19/2011	7:01:33 PM	Bypass valve closed
11/19/2011	7:01:33 PM	Bubbler valve closed
11/19/2011	7:01:33 PM	Main Vac valve opened
11/19/2011	7:01:33 PM	Helium MFC set to  0.000000
11/19/2011	7:01:33 PM	H2 MFC set to  0.000000
11/19/2011	7:01:33 PM	BCl3 MFC set to  0.000000
11/19/2011	7:01:33 PM	PHl3 MFC set to  0.000000
11/19/2011	7:01:33 PM	SiCl4 MFC set to  0.000000
11/19/2011	7:01:33 PM	Bypass solenoid MFC set to  0.000000
11/19/2011	7:01:33 PM	Tube furnace set to 180
11/19/2011	7:02:03 PM	H2 valve closed
11/19/2011	7:02:03 PM	BCl3 valve closed
11/19/2011	7:02:03 PM	PH3 valve closed
11/19/2011	7:02:03 PM	SiCl4 pre valve closed
11/19/2011	7:02:03 PM	SiCl4 post valve closed
11/19/2011	7:02:03 PM	Bypass valve closed
11/19/2011	7:02:03 PM	Bubbler valve closed
11/19/2011	7:02:03 PM	Helium valve opened
11/19/2011	7:02:03 PM	Main Vac valve opened
11/19/2011	7:02:03 PM	Helium MFC set to  20.000000
11/19/2011	7:02:03 PM	H2 MFC set to  0.000000
11/19/2011	7:02:03 PM	BCl3 MFC set to  0.000000
11/19/2011	7:02:03 PM	PHl3 MFC set to  0.000000
11/19/2011	7:02:03 PM	SiCl4 MFC set to  0.000000
11/19/2011	7:02:03 PM	Bypass solenoid MFC set to  0.000000
11/19/2011	7:02:03 PM	Tube furnace set to 180
11/19/2011	7:02:33 PM	Helium valve closed
11/19/2011	7:02:33 PM	H2 valve closed
11/19/2011	7:02:33 PM	BCl3 valve closed
11/19/2011	7:02:33 PM	PH3 valve closed
11/19/2011	7:02:33 PM	SiCl4 pre valve closed
11/19/2011	7:02:33 PM	SiCl4 post valve closed
11/19/2011	7:02:33 PM	Bypass valve closed
11/19/2011	7:02:33 PM	Bubbler valve closed
11/19/2011	7:02:33 PM	Main Vac valve opened
11/19/2011	7:02:33 PM	Helium MFC set to  0.000000
11/19/2011	7:02:33 PM	H2 MFC set to  0.000000
11/19/2011	7:02:33 PM	BCl3 MFC set to  0.000000
11/19/2011	7:02:33 PM	PHl3 MFC set to  0.000000
11/19/2011	7:02:33 PM	SiCl4 MFC set to  0.000000
11/19/2011	7:02:33 PM	Bypass solenoid MFC set to  0.000000
11/19/2011	7:02:33 PM	Tube furnace set to 150
11/19/2011	7:03:03 PM	H2 valve closed
11/19/2011	7:03:03 PM	BCl3 valve closed
11/19/2011	7:03:03 PM	PH3 valve closed
11/19/2011	7:03:03 PM	SiCl4 pre valve closed
11/19/2011	7:03:03 PM	SiCl4 post valve closed
11/19/2011	7:03:03 PM	Bypass valve closed
11/19/2011	7:03:03 PM	Bubbler valve closed
11/19/2011	7:03:03 PM	Helium valve opened
11/19/2011	7:03:03 PM	Main Vac valve opened
11/19/2011	7:03:03 PM	Helium MFC set to  20.000000
11/19/2011	7:03:03 PM	H2 MFC set to  0.000000
11/19/2011	7:03:03 PM	BCl3 MFC set to  0.000000
11/19/2011	7:03:03 PM	PHl3 MFC set to  0.000000
11/19/2011	7:03:03 PM	SiCl4 MFC set to  0.000000
11/19/2011	7:03:03 PM	Bypass solenoid MFC set to  0.000000
11/19/2011	7:03:04 PM	Tube furnace set to 180
11/19/2011	7:03:34 PM	Helium valve closed
11/19/2011	7:03:34 PM	H2 valve closed
11/19/2011	7:03:34 PM	BCl3 valve closed
11/19/2011	7:03:34 PM	PH3 valve closed
11/19/2011	7:03:34 PM	SiCl4 pre valve closed
11/19/2011	7:03:34 PM	SiCl4 post valve closed
11/19/2011	7:03:34 PM	Bypass valve closed
11/19/2011	7:03:34 PM	Bubbler valve closed
11/19/2011	7:03:34 PM	Main Vac valve opened
11/19/2011	7:03:34 PM	Helium MFC set to  0.000000
11/19/2011	7:03:34 PM	H2 MFC set to  0.000000
11/19/2011	7:03:34 PM	BCl3 MFC set to  0.000000
11/19/2011	7:03:34 PM	PHl3 MFC set to  0.000000
11/19/2011	7:03:34 PM	SiCl4 MFC set to  0.000000
11/19/2011	7:03:34 PM	Bypass solenoid MFC set to  0.000000
11/19/2011	7:03:34 PM	Tube furnace set to 150
11/19/2011	7:04:04 PM	H2 valve closed
11/19/2011	7:04:04 PM	BCl3 valve closed
11/19/2011	7:04:04 PM	PH3 valve closed
11/19/2011	7:04:04 PM	SiCl4 pre valve closed
11/19/2011	7:04:04 PM	SiCl4 post valve closed
11/19/2011	7:04:04 PM	Bypass valve closed
11/19/2011	7:04:04 PM	Bubbler valve closed
11/19/2011	7:04:04 PM	Helium valve opened
11/19/2011	7:04:04 PM	Main Vac valve opened
11/19/2011	7:04:04 PM	Helium MFC set to  20.000000
11/19/2011	7:04:04 PM	H2 MFC set to  0.000000
11/19/2011	7:04:04 PM	BCl3 MFC set to  0.000000
11/19/2011	7:04:04 PM	PHl3 MFC set to  0.000000
11/19/2011	7:04:04 PM	SiCl4 MFC set to  0.000000
11/19/2011	7:04:04 PM	Bypass solenoid MFC set to  0.000000
11/19/2011	7:04:04 PM	Tube furnace set to 150
11/19/2011	7:04:34 PM	Helium valve closed
11/19/2011	7:04:34 PM	H2 valve closed
11/19/2011	7:04:34 PM	BCl3 valve closed
11/19/2011	7:04:34 PM	PH3 valve closed
11/19/2011	7:04:34 PM	SiCl4 pre valve closed
11/19/2011	7:04:34 PM	SiCl4 post valve closed
11/19/2011	7:04:34 PM	Bypass valve closed
11/19/2011	7:04:34 PM	Bubbler valve closed
11/19/2011	7:04:34 PM	Main Vac valve opened
11/19/2011	7:04:34 PM	Helium MFC set to  0.000000
11/19/2011	7:04:34 PM	H2 MFC set to  0.000000
11/19/2011	7:04:34 PM	BCl3 MFC set to  0.000000
11/19/2011	7:04:34 PM	PHl3 MFC set to  0.000000
11/19/2011	7:04:34 PM	SiCl4 MFC set to  0.000000
11/19/2011	7:04:34 PM	Bypass solenoid MFC set to  0.000000
11/19/2011	7:04:34 PM	Tube furnace set to 150
11/19/2011	7:05:04 PM	H2 valve closed
11/19/2011	7:05:04 PM	BCl3 valve closed
11/19/2011	7:05:04 PM	PH3 valve closed
11/19/2011	7:05:04 PM	SiCl4 pre valve closed
11/19/2011	7:05:04 PM	SiCl4 post valve closed
11/19/2011	7:05:04 PM	Bypass valve closed
11/19/2011	7:05:04 PM	Bubbler valve closed
11/19/2011	7:05:04 PM	Helium valve opened
11/19/2011	7:05:04 PM	Main Vac valve opened
11/19/2011	7:05:04 PM	Helium MFC set to  20.000000
11/19/2011	7:05:04 PM	H2 MFC set to  0.000000
11/19/2011	7:05:04 PM	BCl3 MFC set to  0.000000
11/19/2011	7:05:04 PM	PHl3 MFC set to  0.000000
11/19/2011	7:05:04 PM	SiCl4 MFC set to  0.000000
11/19/2011	7:05:04 PM	Bypass solenoid MFC set to  0.000000
11/19/2011	7:05:04 PM	Tube furnace set to 180
11/19/2011	7:05:34 PM	Helium valve closed
11/19/2011	7:05:34 PM	H2 valve closed
11/19/2011	7:05:34 PM	BCl3 valve closed
11/19/2011	7:05:34 PM	PH3 valve closed
11/19/2011	7:05:34 PM	SiCl4 pre valve closed
11/19/2011	7:05:34 PM	SiCl4 post valve closed
11/19/2011	7:05:34 PM	Bypass valve closed
11/19/2011	7:05:34 PM	Bubbler valve closed
11/19/2011	7:05:34 PM	Main Vac valve opened
11/19/2011	7:05:34 PM	Helium MFC set to  0.000000
11/19/2011	7:05:34 PM	H2 MFC set to  0.000000
11/19/2011	7:05:34 PM	BCl3 MFC set to  0.000000
11/19/2011	7:05:34 PM	PHl3 MFC set to  0.000000
11/19/2011	7:05:34 PM	SiCl4 MFC set to  0.000000
11/19/2011	7:05:34 PM	Bypass solenoid MFC set to  0.000000
11/19/2011	7:05:35 PM	Tube furnace set to 150
11/19/2011	7:06:05 PM	H2 valve closed
11/19/2011	7:06:05 PM	BCl3 valve closed
11/19/2011	7:06:05 PM	PH3 valve closed
11/19/2011	7:06:05 PM	SiCl4 pre valve closed
11/19/2011	7:06:05 PM	SiCl4 post valve closed
11/19/2011	7:06:05 PM	Bypass valve closed
11/19/2011	7:06:05 PM	Bubbler valve closed
11/19/2011	7:06:05 PM	Helium valve opened
11/19/2011	7:06:05 PM	Main Vac valve opened
11/19/2011	7:06:05 PM	Helium MFC set to  20.000000
11/19/2011	7:06:05 PM	H2 MFC set to  0.000000
11/19/2011	7:06:05 PM	BCl3 MFC set to  0.000000
11/19/2011	7:06:05 PM	PHl3 MFC set to  0.000000
11/19/2011	7:06:05 PM	SiCl4 MFC set to  0.000000
11/19/2011	7:06:05 PM	Bypass solenoid MFC set to  0.000000
11/19/2011	7:06:05 PM	Tube furnace set to 150
11/19/2011	7:06:35 PM	Helium valve closed
11/19/2011	7:06:35 PM	H2 valve closed
11/19/2011	7:06:35 PM	BCl3 valve closed
11/19/2011	7:06:35 PM	PH3 valve closed
11/19/2011	7:06:35 PM	SiCl4 pre valve closed
11/19/2011	7:06:35 PM	SiCl4 post valve closed
11/19/2011	7:06:35 PM	Bypass valve closed
11/19/2011	7:06:35 PM	Bubbler valve closed
11/19/2011	7:06:35 PM	Main Vac valve opened
11/19/2011	7:06:35 PM	Helium MFC set to  0.000000
11/19/2011	7:06:35 PM	H2 MFC set to  0.000000
11/19/2011	7:06:35 PM	BCl3 MFC set to  0.000000
11/19/2011	7:06:35 PM	PHl3 MFC set to  0.000000
11/19/2011	7:06:35 PM	SiCl4 MFC set to  0.000000
11/19/2011	7:06:35 PM	Bypass solenoid MFC set to  0.000000
11/19/2011	7:06:35 PM	Tube furnace set to 150
11/19/2011	7:07:05 PM	H2 valve closed
11/19/2011	7:07:05 PM	BCl3 valve closed
11/19/2011	7:07:05 PM	PH3 valve closed
11/19/2011	7:07:05 PM	SiCl4 pre valve closed
11/19/2011	7:07:05 PM	SiCl4 post valve closed
11/19/2011	7:07:05 PM	Bypass valve closed
11/19/2011	7:07:05 PM	Bubbler valve closed
11/19/2011	7:07:05 PM	Helium valve opened
11/19/2011	7:07:05 PM	Main Vac valve opened
11/19/2011	7:07:05 PM	Helium MFC set to  20.000000
11/19/2011	7:07:05 PM	H2 MFC set to  0.000000
11/19/2011	7:07:05 PM	BCl3 MFC set to  0.000000
11/19/2011	7:07:05 PM	PHl3 MFC set to  0.000000
11/19/2011	7:07:05 PM	SiCl4 MFC set to  0.000000
11/19/2011	7:07:05 PM	Bypass solenoid MFC set to  0.000000
11/19/2011	7:07:05 PM	Tube furnace set to 150
11/19/2011	7:07:35 PM	Helium valve closed
11/19/2011	7:07:35 PM	H2 valve closed
11/19/2011	7:07:35 PM	BCl3 valve closed
11/19/2011	7:07:35 PM	PH3 valve closed
11/19/2011	7:07:35 PM	SiCl4 pre valve closed
11/19/2011	7:07:35 PM	SiCl4 post valve closed
11/19/2011	7:07:35 PM	Bypass valve closed
11/19/2011	7:07:35 PM	Bubbler valve closed
11/19/2011	7:07:35 PM	Main Vac valve opened
11/19/2011	7:07:35 PM	Helium MFC set to  0.000000
11/19/2011	7:07:35 PM	H2 MFC set to  0.000000
11/19/2011	7:07:35 PM	BCl3 MFC set to  0.000000
11/19/2011	7:07:35 PM	PHl3 MFC set to  0.000000
11/19/2011	7:07:35 PM	SiCl4 MFC set to  0.000000
11/19/2011	7:07:35 PM	Bypass solenoid MFC set to  0.000000
11/19/2011	7:07:35 PM	Tube furnace set to 150
11/19/2011	7:08:05 PM	H2 valve closed
11/19/2011	7:08:05 PM	BCl3 valve closed
11/19/2011	7:08:05 PM	PH3 valve closed
11/19/2011	7:08:05 PM	SiCl4 pre valve closed
11/19/2011	7:08:05 PM	SiCl4 post valve closed
11/19/2011	7:08:05 PM	Bypass valve closed
11/19/2011	7:08:05 PM	Bubbler valve closed
11/19/2011	7:08:06 PM	Helium valve opened
11/19/2011	7:08:06 PM	Main Vac valve opened
11/19/2011	7:08:06 PM	Helium MFC set to  20.000000
11/19/2011	7:08:06 PM	H2 MFC set to  0.000000
11/19/2011	7:08:06 PM	BCl3 MFC set to  0.000000
11/19/2011	7:08:06 PM	PHl3 MFC set to  0.000000
11/19/2011	7:08:06 PM	SiCl4 MFC set to  0.000000
11/19/2011	7:08:06 PM	Bypass solenoid MFC set to  0.000000
11/19/2011	7:08:06 PM	Tube furnace set to 150
11/19/2011	7:08:36 PM	Helium valve closed
11/19/2011	7:08:36 PM	H2 valve closed
11/19/2011	7:08:36 PM	BCl3 valve closed
11/19/2011	7:08:36 PM	PH3 valve closed
11/19/2011	7:08:36 PM	SiCl4 pre valve closed
11/19/2011	7:08:36 PM	SiCl4 post valve closed
11/19/2011	7:08:36 PM	Bypass valve closed
11/19/2011	7:08:36 PM	Bubbler valve closed
11/19/2011	7:08:36 PM	Main Vac valve opened
11/19/2011	7:08:36 PM	Helium MFC set to  0.000000
11/19/2011	7:08:36 PM	H2 MFC set to  0.000000
11/19/2011	7:08:36 PM	BCl3 MFC set to  0.000000
11/19/2011	7:08:36 PM	PHl3 MFC set to  0.000000
11/19/2011	7:08:36 PM	SiCl4 MFC set to  0.000000
11/19/2011	7:08:36 PM	Bypass solenoid MFC set to  0.000000
11/19/2011	7:08:36 PM	Tube furnace set to 150
11/19/2011	7:09:06 PM	H2 valve closed
11/19/2011	7:09:06 PM	BCl3 valve closed
11/19/2011	7:09:06 PM	PH3 valve closed
11/19/2011	7:09:06 PM	SiCl4 pre valve closed
11/19/2011	7:09:06 PM	SiCl4 post valve closed
11/19/2011	7:09:06 PM	Bypass valve closed
11/19/2011	7:09:06 PM	Bubbler valve closed
11/19/2011	7:09:06 PM	Helium valve opened
11/19/2011	7:09:06 PM	Main Vac valve opened
11/19/2011	7:09:06 PM	Helium MFC set to  20.000000
11/19/2011	7:09:06 PM	H2 MFC set to  0.000000
11/19/2011	7:09:06 PM	BCl3 MFC set to  0.000000
11/19/2011	7:09:06 PM	PHl3 MFC set to  0.000000
11/19/2011	7:09:06 PM	SiCl4 MFC set to  0.000000
11/19/2011	7:09:06 PM	Bypass solenoid MFC set to  0.000000
11/19/2011	7:09:06 PM	Tube furnace set to 150
11/19/2011	7:09:36 PM	Helium valve closed
11/19/2011	7:09:36 PM	H2 valve closed
11/19/2011	7:09:36 PM	BCl3 valve closed
11/19/2011	7:09:36 PM	PH3 valve closed
11/19/2011	7:09:36 PM	SiCl4 pre valve closed
11/19/2011	7:09:36 PM	SiCl4 post valve closed
11/19/2011	7:09:36 PM	Bypass valve closed
11/19/2011	7:09:36 PM	Bubbler valve closed
11/19/2011	7:09:36 PM	Main Vac valve opened
11/19/2011	7:09:36 PM	Helium MFC set to  0.000000
11/19/2011	7:09:36 PM	H2 MFC set to  0.000000
11/19/2011	7:09:36 PM	BCl3 MFC set to  0.000000
11/19/2011	7:09:36 PM	PHl3 MFC set to  0.000000
11/19/2011	7:09:36 PM	SiCl4 MFC set to  0.000000
11/19/2011	7:09:36 PM	Bypass solenoid MFC set to  0.000000
11/19/2011	7:09:36 PM	Tube furnace set to 150
11/19/2011	7:10:06 PM	H2 valve closed
11/19/2011	7:10:06 PM	BCl3 valve closed
11/19/2011	7:10:06 PM	PH3 valve closed
11/19/2011	7:10:06 PM	SiCl4 pre valve closed
11/19/2011	7:10:06 PM	SiCl4 post valve closed
11/19/2011	7:10:06 PM	Bypass valve closed
11/19/2011	7:10:06 PM	Bubbler valve closed
11/19/2011	7:10:06 PM	Helium valve opened
11/19/2011	7:10:06 PM	Main Vac valve opened
11/19/2011	7:10:06 PM	Helium MFC set to  20.000000
11/19/2011	7:10:06 PM	H2 MFC set to  0.000000
11/19/2011	7:10:06 PM	BCl3 MFC set to  0.000000
11/19/2011	7:10:06 PM	PHl3 MFC set to  0.000000
11/19/2011	7:10:06 PM	SiCl4 MFC set to  0.000000
11/19/2011	7:10:06 PM	Bypass solenoid MFC set to  0.000000
11/19/2011	7:10:07 PM	Tube furnace set to 150
11/19/2011	7:10:37 PM	Helium valve closed
11/19/2011	7:10:37 PM	H2 valve closed
11/19/2011	7:10:37 PM	BCl3 valve closed
11/19/2011	7:10:37 PM	PH3 valve closed
11/19/2011	7:10:37 PM	SiCl4 pre valve closed
11/19/2011	7:10:37 PM	SiCl4 post valve closed
11/19/2011	7:10:37 PM	Bypass valve closed
11/19/2011	7:10:37 PM	Bubbler valve closed
11/19/2011	7:10:37 PM	Main Vac valve opened
11/19/2011	7:10:37 PM	Helium MFC set to  0.000000
11/19/2011	7:10:37 PM	H2 MFC set to  0.000000
11/19/2011	7:10:37 PM	BCl3 MFC set to  0.000000
11/19/2011	7:10:37 PM	PHl3 MFC set to  0.000000
11/19/2011	7:10:37 PM	SiCl4 MFC set to  0.000000
11/19/2011	7:10:37 PM	Bypass solenoid MFC set to  0.000000
11/19/2011	7:10:37 PM	Tube furnace set to 150
11/19/2011	7:11:07 PM	H2 valve closed
11/19/2011	7:11:07 PM	BCl3 valve closed
11/19/2011	7:11:07 PM	PH3 valve closed
11/19/2011	7:11:07 PM	SiCl4 pre valve closed
11/19/2011	7:11:07 PM	SiCl4 post valve closed
11/19/2011	7:11:07 PM	Bypass valve closed
11/19/2011	7:11:07 PM	Bubbler valve closed
11/19/2011	7:11:07 PM	Helium valve opened
11/19/2011	7:11:07 PM	Main Vac valve opened
11/19/2011	7:11:07 PM	Helium MFC set to  20.000000
11/19/2011	7:11:07 PM	H2 MFC set to  0.000000
11/19/2011	7:11:07 PM	BCl3 MFC set to  0.000000
11/19/2011	7:11:07 PM	PHl3 MFC set to  0.000000
11/19/2011	7:11:07 PM	SiCl4 MFC set to  0.000000
11/19/2011	7:11:07 PM	Bypass solenoid MFC set to  0.000000
11/19/2011	7:11:07 PM	Tube furnace set to 150
11/19/2011	7:11:37 PM	Helium valve closed
11/19/2011	7:11:37 PM	H2 valve closed
11/19/2011	7:11:37 PM	BCl3 valve closed
11/19/2011	7:11:37 PM	PH3 valve closed
11/19/2011	7:11:37 PM	SiCl4 pre valve closed
11/19/2011	7:11:37 PM	SiCl4 post valve closed
11/19/2011	7:11:37 PM	Bypass valve closed
11/19/2011	7:11:37 PM	Bubbler valve closed
11/19/2011	7:11:37 PM	Main Vac valve opened
11/19/2011	7:11:37 PM	Helium MFC set to  0.000000
11/19/2011	7:11:37 PM	H2 MFC set to  0.000000
11/19/2011	7:11:37 PM	BCl3 MFC set to  0.000000
11/19/2011	7:11:37 PM	PHl3 MFC set to  0.000000
11/19/2011	7:11:37 PM	SiCl4 MFC set to  0.000000
11/19/2011	7:11:37 PM	Bypass solenoid MFC set to  0.000000
11/19/2011	7:11:37 PM	Tube furnace set to 150
11/19/2011	7:12:07 PM	H2 valve closed
11/19/2011	7:12:07 PM	BCl3 valve closed
11/19/2011	7:12:07 PM	PH3 valve closed
11/19/2011	7:12:07 PM	SiCl4 pre valve closed
11/19/2011	7:12:07 PM	SiCl4 post valve closed
11/19/2011	7:12:07 PM	Bypass valve closed
11/19/2011	7:12:07 PM	Bubbler valve closed
11/19/2011	7:12:07 PM	Helium valve opened
11/19/2011	7:12:07 PM	Main Vac valve opened
11/19/2011	7:12:07 PM	Helium MFC set to  20.000000
11/19/2011	7:12:07 PM	H2 MFC set to  0.000000
11/19/2011	7:12:07 PM	BCl3 MFC set to  0.000000
11/19/2011	7:12:07 PM	PHl3 MFC set to  0.000000
11/19/2011	7:12:07 PM	SiCl4 MFC set to  0.000000
11/19/2011	7:12:07 PM	Bypass solenoid MFC set to  0.000000
11/19/2011	7:12:07 PM	Tube furnace set to 150
11/19/2011	7:12:37 PM	Helium valve closed
11/19/2011	7:12:37 PM	H2 valve closed
11/19/2011	7:12:37 PM	BCl3 valve closed
11/19/2011	7:12:37 PM	PH3 valve closed
11/19/2011	7:12:37 PM	SiCl4 pre valve closed
11/19/2011	7:12:37 PM	SiCl4 post valve closed
11/19/2011	7:12:37 PM	Bypass valve closed
11/19/2011	7:12:37 PM	Bubbler valve closed
11/19/2011	7:12:37 PM	Main Vac valve opened
11/19/2011	7:12:37 PM	Helium MFC set to  0.000000
11/19/2011	7:12:37 PM	H2 MFC set to  0.000000
11/19/2011	7:12:37 PM	BCl3 MFC set to  0.000000
11/19/2011	7:12:37 PM	PHl3 MFC set to  0.000000
11/19/2011	7:12:37 PM	SiCl4 MFC set to  0.000000
11/19/2011	7:12:37 PM	Bypass solenoid MFC set to  0.000000
11/19/2011	7:12:38 PM	Tube furnace set to 150
11/19/2011	7:13:08 PM	H2 valve closed
11/19/2011	7:13:08 PM	BCl3 valve closed
11/19/2011	7:13:08 PM	PH3 valve closed
11/19/2011	7:13:08 PM	SiCl4 pre valve closed
11/19/2011	7:13:08 PM	SiCl4 post valve closed
11/19/2011	7:13:08 PM	Bypass valve closed
11/19/2011	7:13:08 PM	Bubbler valve closed
11/19/2011	7:13:08 PM	Helium valve opened
11/19/2011	7:13:08 PM	Main Vac valve opened
11/19/2011	7:13:08 PM	Helium MFC set to  20.000000
11/19/2011	7:13:08 PM	H2 MFC set to  0.000000
11/19/2011	7:13:08 PM	BCl3 MFC set to  0.000000
11/19/2011	7:13:08 PM	PHl3 MFC set to  0.000000
11/19/2011	7:13:08 PM	SiCl4 MFC set to  0.000000
11/19/2011	7:13:08 PM	Bypass solenoid MFC set to  0.000000
11/19/2011	7:13:08 PM	Tube furnace set to 150
11/19/2011	7:13:38 PM	Helium valve closed
11/19/2011	7:13:38 PM	H2 valve closed
11/19/2011	7:13:38 PM	BCl3 valve closed
11/19/2011	7:13:38 PM	PH3 valve closed
11/19/2011	7:13:38 PM	SiCl4 pre valve closed
11/19/2011	7:13:38 PM	SiCl4 post valve closed
11/19/2011	7:13:38 PM	Bypass valve closed
11/19/2011	7:13:38 PM	Bubbler valve closed
11/19/2011	7:13:38 PM	Main Vac valve opened
11/19/2011	7:13:38 PM	Helium MFC set to  0.000000
11/19/2011	7:13:38 PM	H2 MFC set to  0.000000
11/19/2011	7:13:38 PM	BCl3 MFC set to  0.000000
11/19/2011	7:13:38 PM	PHl3 MFC set to  0.000000
11/19/2011	7:13:38 PM	SiCl4 MFC set to  0.000000
11/19/2011	7:13:38 PM	Bypass solenoid MFC set to  0.000000
11/19/2011	7:13:38 PM	Tube furnace set to 150
11/19/2011	7:14:08 PM	H2 valve closed
11/19/2011	7:14:08 PM	BCl3 valve closed
11/19/2011	7:14:08 PM	PH3 valve closed
11/19/2011	7:14:08 PM	SiCl4 pre valve closed
11/19/2011	7:14:08 PM	SiCl4 post valve closed
11/19/2011	7:14:08 PM	Bypass valve closed
11/19/2011	7:14:08 PM	Bubbler valve closed
11/19/2011	7:14:08 PM	Helium valve opened
11/19/2011	7:14:08 PM	Main Vac valve opened
11/19/2011	7:14:08 PM	Helium MFC set to  20.000000
11/19/2011	7:14:08 PM	H2 MFC set to  0.000000
11/19/2011	7:14:08 PM	BCl3 MFC set to  0.000000
11/19/2011	7:14:08 PM	PHl3 MFC set to  0.000000
11/19/2011	7:14:08 PM	SiCl4 MFC set to  0.000000
11/19/2011	7:14:08 PM	Bypass solenoid MFC set to  0.000000
11/19/2011	7:14:08 PM	Tube furnace set to 150
11/19/2011	7:14:38 PM	Helium valve closed
11/19/2011	7:14:38 PM	H2 valve closed
11/19/2011	7:14:38 PM	BCl3 valve closed
11/19/2011	7:14:38 PM	PH3 valve closed
11/19/2011	7:14:38 PM	SiCl4 pre valve closed
11/19/2011	7:14:38 PM	SiCl4 post valve closed
11/19/2011	7:14:38 PM	Bypass valve closed
11/19/2011	7:14:38 PM	Bubbler valve closed
11/19/2011	7:14:38 PM	Main Vac valve opened
11/19/2011	7:14:38 PM	Helium MFC set to  0.000000
11/19/2011	7:14:38 PM	H2 MFC set to  0.000000
11/19/2011	7:14:38 PM	BCl3 MFC set to  0.000000
11/19/2011	7:14:38 PM	PHl3 MFC set to  0.000000
11/19/2011	7:14:38 PM	SiCl4 MFC set to  0.000000
11/19/2011	7:14:38 PM	Bypass solenoid MFC set to  0.000000
11/19/2011	7:14:38 PM	Tube furnace set to 150
11/19/2011	7:15:08 PM	H2 valve closed
11/19/2011	7:15:08 PM	BCl3 valve closed
11/19/2011	7:15:08 PM	PH3 valve closed
11/19/2011	7:15:08 PM	SiCl4 pre valve closed
11/19/2011	7:15:08 PM	SiCl4 post valve closed
11/19/2011	7:15:08 PM	Bypass valve closed
11/19/2011	7:15:09 PM	Bubbler valve closed
11/19/2011	7:15:09 PM	Helium valve opened
11/19/2011	7:15:09 PM	Main Vac valve opened
11/19/2011	7:15:09 PM	Helium MFC set to  20.000000
11/19/2011	7:15:09 PM	H2 MFC set to  0.000000
11/19/2011	7:15:09 PM	BCl3 MFC set to  0.000000
11/19/2011	7:15:09 PM	PHl3 MFC set to  0.000000
11/19/2011	7:15:09 PM	SiCl4 MFC set to  0.000000
11/19/2011	7:15:09 PM	Bypass solenoid MFC set to  0.000000
11/19/2011	7:15:09 PM	Tube furnace set to 150
11/19/2011	7:15:39 PM	Helium valve closed
11/19/2011	7:15:39 PM	H2 valve closed
11/19/2011	7:15:39 PM	BCl3 valve closed
11/19/2011	7:15:39 PM	PH3 valve closed
11/19/2011	7:15:39 PM	SiCl4 pre valve closed
11/19/2011	7:15:39 PM	SiCl4 post valve closed
11/19/2011	7:15:39 PM	Bypass valve closed
11/19/2011	7:15:39 PM	Bubbler valve closed
11/19/2011	7:15:39 PM	Main Vac valve opened
11/19/2011	7:15:39 PM	Helium MFC set to  0.000000
11/19/2011	7:15:39 PM	H2 MFC set to  0.000000
11/19/2011	7:15:39 PM	BCl3 MFC set to  0.000000
11/19/2011	7:15:39 PM	PHl3 MFC set to  0.000000
11/19/2011	7:15:39 PM	SiCl4 MFC set to  0.000000
11/19/2011	7:15:39 PM	Bypass solenoid MFC set to  0.000000
11/19/2011	7:15:39 PM	Tube furnace set to 150
11/19/2011	7:16:09 PM	H2 valve closed
11/19/2011	7:16:09 PM	BCl3 valve closed
11/19/2011	7:16:09 PM	PH3 valve closed
11/19/2011	7:16:09 PM	SiCl4 pre valve closed
11/19/2011	7:16:09 PM	SiCl4 post valve closed
11/19/2011	7:16:09 PM	Bypass valve closed
11/19/2011	7:16:09 PM	Bubbler valve closed
11/19/2011	7:16:09 PM	Helium valve opened
11/19/2011	7:16:09 PM	Main Vac valve opened
11/19/2011	7:16:09 PM	Helium MFC set to  20.000000
11/19/2011	7:16:09 PM	H2 MFC set to  0.000000
11/19/2011	7:16:09 PM	BCl3 MFC set to  0.000000
11/19/2011	7:16:09 PM	PHl3 MFC set to  0.000000
11/19/2011	7:16:09 PM	SiCl4 MFC set to  0.000000
11/19/2011	7:16:09 PM	Bypass solenoid MFC set to  0.000000
11/19/2011	7:16:09 PM	Tube furnace set to 150
11/19/2011	7:16:39 PM	Helium valve closed
11/19/2011	7:16:39 PM	H2 valve closed
11/19/2011	7:16:39 PM	BCl3 valve closed
11/19/2011	7:16:39 PM	PH3 valve closed
11/19/2011	7:16:39 PM	SiCl4 pre valve closed
11/19/2011	7:16:39 PM	SiCl4 post valve closed
11/19/2011	7:16:39 PM	Bypass valve closed
11/19/2011	7:16:39 PM	Bubbler valve closed
11/19/2011	7:16:39 PM	Main Vac valve opened
11/19/2011	7:16:39 PM	Helium MFC set to  0.000000
11/19/2011	7:16:39 PM	H2 MFC set to  0.000000
11/19/2011	7:16:39 PM	BCl3 MFC set to  0.000000
11/19/2011	7:16:39 PM	PHl3 MFC set to  0.000000
11/19/2011	7:16:39 PM	SiCl4 MFC set to  0.000000
11/19/2011	7:16:39 PM	Bypass solenoid MFC set to  0.000000
11/19/2011	7:16:39 PM	Tube furnace set to 150
11/19/2011	7:17:09 PM	H2 valve closed
11/19/2011	7:17:09 PM	BCl3 valve closed
11/19/2011	7:17:09 PM	PH3 valve closed
11/19/2011	7:17:09 PM	SiCl4 pre valve closed
11/19/2011	7:17:09 PM	SiCl4 post valve closed
11/19/2011	7:17:09 PM	Bypass valve closed
11/19/2011	7:17:09 PM	Bubbler valve closed
11/19/2011	7:17:09 PM	Helium valve opened
11/19/2011	7:17:09 PM	Main Vac valve opened
11/19/2011	7:17:09 PM	Helium MFC set to  20.000000
11/19/2011	7:17:09 PM	H2 MFC set to  0.000000
11/19/2011	7:17:09 PM	BCl3 MFC set to  0.000000
11/19/2011	7:17:09 PM	PHl3 MFC set to  0.000000
11/19/2011	7:17:09 PM	SiCl4 MFC set to  0.000000
11/19/2011	7:17:09 PM	Bypass solenoid MFC set to  0.000000
11/19/2011	7:17:10 PM	Tube furnace set to 150
11/19/2011	7:17:40 PM	Helium valve closed
11/19/2011	7:17:40 PM	H2 valve closed
11/19/2011	7:17:40 PM	BCl3 valve closed
11/19/2011	7:17:40 PM	PH3 valve closed
11/19/2011	7:17:40 PM	SiCl4 pre valve closed
11/19/2011	7:17:40 PM	SiCl4 post valve closed
11/19/2011	7:17:40 PM	Bypass valve closed
11/19/2011	7:17:40 PM	Bubbler valve closed
11/19/2011	7:17:40 PM	Main Vac valve opened
11/19/2011	7:17:40 PM	Helium MFC set to  0.000000
11/19/2011	7:17:40 PM	H2 MFC set to  0.000000
11/19/2011	7:17:40 PM	BCl3 MFC set to  0.000000
11/19/2011	7:17:40 PM	PHl3 MFC set to  0.000000
11/19/2011	7:17:40 PM	SiCl4 MFC set to  0.000000
11/19/2011	7:17:40 PM	Bypass solenoid MFC set to  0.000000
11/19/2011	7:17:40 PM	Tube furnace set to 150
11/19/2011	7:18:10 PM	H2 valve closed
11/19/2011	7:18:10 PM	BCl3 valve closed
11/19/2011	7:18:10 PM	PH3 valve closed
11/19/2011	7:18:10 PM	SiCl4 pre valve closed
11/19/2011	7:18:10 PM	SiCl4 post valve closed
11/19/2011	7:18:10 PM	Bypass valve closed
11/19/2011	7:18:10 PM	Bubbler valve closed
11/19/2011	7:18:10 PM	Helium valve opened
11/19/2011	7:18:10 PM	Main Vac valve opened
11/19/2011	7:18:10 PM	Helium MFC set to  20.000000
11/19/2011	7:18:10 PM	H2 MFC set to  0.000000
11/19/2011	7:18:10 PM	BCl3 MFC set to  0.000000
11/19/2011	7:18:10 PM	PHl3 MFC set to  0.000000
11/19/2011	7:18:10 PM	SiCl4 MFC set to  0.000000
11/19/2011	7:18:10 PM	Bypass solenoid MFC set to  0.000000
11/19/2011	7:18:10 PM	Tube furnace set to 150
11/19/2011	7:18:40 PM	Helium valve closed
11/19/2011	7:18:40 PM	H2 valve closed
11/19/2011	7:18:40 PM	BCl3 valve closed
11/19/2011	7:18:40 PM	PH3 valve closed
11/19/2011	7:18:40 PM	SiCl4 pre valve closed
11/19/2011	7:18:40 PM	SiCl4 post valve closed
11/19/2011	7:18:40 PM	Bypass valve closed
11/19/2011	7:18:40 PM	Bubbler valve closed
11/19/2011	7:18:40 PM	Main Vac valve opened
11/19/2011	7:18:40 PM	Helium MFC set to  0.000000
11/19/2011	7:18:40 PM	H2 MFC set to  0.000000
11/19/2011	7:18:40 PM	BCl3 MFC set to  0.000000
11/19/2011	7:18:40 PM	PHl3 MFC set to  0.000000
11/19/2011	7:18:40 PM	SiCl4 MFC set to  0.000000
11/19/2011	7:18:40 PM	Bypass solenoid MFC set to  0.000000
11/19/2011	7:18:40 PM	Tube furnace set to 150
11/19/2011	7:19:10 PM	H2 valve closed
11/19/2011	7:19:10 PM	BCl3 valve closed
11/19/2011	7:19:10 PM	PH3 valve closed
11/19/2011	7:19:10 PM	SiCl4 pre valve closed
11/19/2011	7:19:10 PM	SiCl4 post valve closed
11/19/2011	7:19:10 PM	Bypass valve closed
11/19/2011	7:19:10 PM	Bubbler valve closed
11/19/2011	7:19:10 PM	Helium valve opened
11/19/2011	7:19:10 PM	Main Vac valve opened
11/19/2011	7:19:10 PM	Helium MFC set to  20.000000
11/19/2011	7:19:10 PM	H2 MFC set to  0.000000
11/19/2011	7:19:10 PM	BCl3 MFC set to  0.000000
11/19/2011	7:19:10 PM	PHl3 MFC set to  0.000000
11/19/2011	7:19:10 PM	SiCl4 MFC set to  0.000000
11/19/2011	7:19:10 PM	Bypass solenoid MFC set to  0.000000
11/19/2011	7:19:10 PM	Tube furnace set to 150
11/19/2011	7:19:40 PM	Helium valve closed
11/19/2011	7:19:40 PM	H2 valve closed
11/19/2011	7:19:40 PM	BCl3 valve closed
11/19/2011	7:19:40 PM	PH3 valve closed
11/19/2011	7:19:40 PM	SiCl4 pre valve closed
11/19/2011	7:19:40 PM	SiCl4 post valve closed
11/19/2011	7:19:40 PM	Bypass valve closed
11/19/2011	7:19:40 PM	Bubbler valve closed
11/19/2011	7:19:40 PM	Main Vac valve opened
11/19/2011	7:19:40 PM	Helium MFC set to  0.000000
11/19/2011	7:19:40 PM	H2 MFC set to  0.000000
11/19/2011	7:19:40 PM	BCl3 MFC set to  0.000000
11/19/2011	7:19:40 PM	PHl3 MFC set to  0.000000
11/19/2011	7:19:40 PM	SiCl4 MFC set to  0.000000
11/19/2011	7:19:40 PM	Bypass solenoid MFC set to  0.000000
11/19/2011	7:19:41 PM	Tube furnace set to 150
11/19/2011	7:20:11 PM	H2 valve closed
11/19/2011	7:20:11 PM	BCl3 valve closed
11/19/2011	7:20:11 PM	PH3 valve closed
11/19/2011	7:20:11 PM	SiCl4 pre valve closed
11/19/2011	7:20:11 PM	SiCl4 post valve closed
11/19/2011	7:20:11 PM	Bypass valve closed
11/19/2011	7:20:11 PM	Bubbler valve closed
11/19/2011	7:20:11 PM	Helium valve opened
11/19/2011	7:20:11 PM	Main Vac valve opened
11/19/2011	7:20:11 PM	Helium MFC set to  20.000000
11/19/2011	7:20:11 PM	H2 MFC set to  0.000000
11/19/2011	7:20:11 PM	BCl3 MFC set to  0.000000
11/19/2011	7:20:11 PM	PHl3 MFC set to  0.000000
11/19/2011	7:20:11 PM	SiCl4 MFC set to  0.000000
11/19/2011	7:20:11 PM	Bypass solenoid MFC set to  0.000000
11/19/2011	7:20:11 PM	Tube furnace set to 150
11/19/2011	7:20:41 PM	Helium valve closed
11/19/2011	7:20:41 PM	H2 valve closed
11/19/2011	7:20:41 PM	BCl3 valve closed
11/19/2011	7:20:41 PM	PH3 valve closed
11/19/2011	7:20:41 PM	SiCl4 pre valve closed
11/19/2011	7:20:41 PM	SiCl4 post valve closed
11/19/2011	7:20:41 PM	Bypass valve closed
11/19/2011	7:20:41 PM	Bubbler valve closed
11/19/2011	7:20:41 PM	Main Vac valve opened
11/19/2011	7:20:41 PM	Helium MFC set to  0.000000
11/19/2011	7:20:41 PM	H2 MFC set to  0.000000
11/19/2011	7:20:41 PM	BCl3 MFC set to  0.000000
11/19/2011	7:20:41 PM	PHl3 MFC set to  0.000000
11/19/2011	7:20:41 PM	SiCl4 MFC set to  0.000000
11/19/2011	7:20:41 PM	Bypass solenoid MFC set to  0.000000
11/19/2011	7:20:41 PM	Tube furnace set to 150
11/19/2011	7:21:11 PM	H2 valve closed
11/19/2011	7:21:11 PM	BCl3 valve closed
11/19/2011	7:21:11 PM	PH3 valve closed
11/19/2011	7:21:11 PM	SiCl4 pre valve closed
11/19/2011	7:21:11 PM	SiCl4 post valve closed
11/19/2011	7:21:11 PM	Bypass valve closed
11/19/2011	7:21:11 PM	Bubbler valve closed
11/19/2011	7:21:11 PM	Helium valve opened
11/19/2011	7:21:11 PM	Main Vac valve opened
11/19/2011	7:21:11 PM	Helium MFC set to  20.000000
11/19/2011	7:21:11 PM	H2 MFC set to  0.000000
11/19/2011	7:21:11 PM	BCl3 MFC set to  0.000000
11/19/2011	7:21:11 PM	PHl3 MFC set to  0.000000
11/19/2011	7:21:11 PM	SiCl4 MFC set to  0.000000
11/19/2011	7:21:11 PM	Bypass solenoid MFC set to  0.000000
11/19/2011	7:21:11 PM	Tube furnace set to 150
11/19/2011	7:21:41 PM	Helium valve closed
11/19/2011	7:21:41 PM	H2 valve closed
11/19/2011	7:21:41 PM	BCl3 valve closed
11/19/2011	7:21:41 PM	PH3 valve closed
11/19/2011	7:21:41 PM	SiCl4 pre valve closed
11/19/2011	7:21:41 PM	SiCl4 post valve closed
11/19/2011	7:21:41 PM	Bypass valve closed
11/19/2011	7:21:41 PM	Bubbler valve closed
11/19/2011	7:21:41 PM	Main Vac valve opened
11/19/2011	7:21:41 PM	Helium MFC set to  0.000000
11/19/2011	7:21:41 PM	H2 MFC set to  0.000000
11/19/2011	7:21:41 PM	BCl3 MFC set to  0.000000
11/19/2011	7:21:41 PM	PHl3 MFC set to  0.000000
11/19/2011	7:21:41 PM	SiCl4 MFC set to  0.000000
11/19/2011	7:21:41 PM	Bypass solenoid MFC set to  0.000000
11/19/2011	7:21:41 PM	Tube furnace set to 180
11/19/2011	7:21:46 PM	Run finished at 7:21 PM
11/19/2011	7:22:30 PM	Recipe started at 7:22 PM
11/19/2011	7:22:30 PM	Helium valve closed
11/19/2011	7:22:30 PM	H2 valve closed
11/19/2011	7:22:30 PM	BCl3 valve closed
11/19/2011	7:22:30 PM	PH3 valve closed
11/19/2011	7:22:30 PM	SiCl4 pre valve closed
11/19/2011	7:22:30 PM	SiCl4 post valve closed
11/19/2011	7:22:30 PM	Main Vac valve closed
11/19/2011	7:22:30 PM	Bubbler valve closed
11/19/2011	7:22:30 PM	Bypass valve opened
11/19/2011	7:22:30 PM	Helium MFC set to  0.000000
11/19/2011	7:22:30 PM	H2 MFC set to  0.000000
11/19/2011	7:22:30 PM	BCl3 MFC set to  0.000000
11/19/2011	7:22:30 PM	PHl3 MFC set to  0.000000
11/19/2011	7:22:30 PM	SiCl4 MFC set to  0.000000
11/19/2011	7:22:30 PM	Bypass solenoid MFC set to  0.000000
11/19/2011	7:22:30 PM	Tube furnace set to 180
11/19/2011	7:22:33 PM	Helium valve closed
11/19/2011	7:22:33 PM	H2 valve closed
11/19/2011	7:22:33 PM	BCl3 valve closed
11/19/2011	7:22:33 PM	PH3 valve closed
11/19/2011	7:22:33 PM	SiCl4 pre valve closed
11/19/2011	7:22:33 PM	SiCl4 post valve closed
11/19/2011	7:22:33 PM	Main Vac valve closed
11/19/2011	7:22:33 PM	Bubbler valve closed
11/19/2011	7:22:33 PM	Bypass valve opened
11/19/2011	7:22:33 PM	Helium MFC set to  0.000000
11/19/2011	7:22:33 PM	H2 MFC set to  0.000000
11/19/2011	7:22:33 PM	BCl3 MFC set to  0.000000
11/19/2011	7:22:33 PM	PHl3 MFC set to  0.000000
11/19/2011	7:22:33 PM	SiCl4 MFC set to  0.000000
11/19/2011	7:22:33 PM	Bypass solenoid MFC set to  0.000000
11/19/2011	7:22:33 PM	Tube furnace set to 150
11/19/2011	7:22:41 PM	Helium valve closed
11/19/2011	7:22:41 PM	H2 valve closed
11/19/2011	7:22:41 PM	BCl3 valve closed
11/19/2011	7:22:41 PM	PH3 valve closed
11/19/2011	7:22:41 PM	SiCl4 pre valve closed
11/19/2011	7:22:41 PM	SiCl4 post valve closed
11/19/2011	7:22:41 PM	Bypass valve closed
11/19/2011	7:22:41 PM	Bubbler valve closed
11/19/2011	7:22:41 PM	Main Vac valve opened
11/19/2011	7:22:41 PM	Helium MFC set to  0.000000
11/19/2011	7:22:41 PM	H2 MFC set to  0.000000
11/19/2011	7:22:41 PM	BCl3 MFC set to  0.000000
11/19/2011	7:22:41 PM	PHl3 MFC set to  0.000000
11/19/2011	7:22:41 PM	SiCl4 MFC set to  0.000000
11/19/2011	7:22:41 PM	Bypass solenoid MFC set to  0.000000
11/19/2011	7:22:41 PM	Tube furnace set to 180
11/19/2011	7:23:11 PM	H2 valve closed
11/19/2011	7:23:11 PM	BCl3 valve closed
11/19/2011	7:23:11 PM	PH3 valve closed
11/19/2011	7:23:11 PM	SiCl4 pre valve closed
11/19/2011	7:23:11 PM	SiCl4 post valve closed
11/19/2011	7:23:11 PM	Bypass valve closed
11/19/2011	7:23:11 PM	Bubbler valve closed
11/19/2011	7:23:11 PM	Helium valve opened
11/19/2011	7:23:11 PM	Main Vac valve opened
11/19/2011	7:23:11 PM	Helium MFC set to  20.000000
11/19/2011	7:23:11 PM	H2 MFC set to  0.000000
11/19/2011	7:23:11 PM	BCl3 MFC set to  0.000000
11/19/2011	7:23:11 PM	PHl3 MFC set to  0.000000
11/19/2011	7:23:11 PM	SiCl4 MFC set to  0.000000
11/19/2011	7:23:11 PM	Bypass solenoid MFC set to  0.000000
11/19/2011	7:23:11 PM	Tube furnace set to 180
11/19/2011	7:23:41 PM	Helium valve closed
11/19/2011	7:23:41 PM	H2 valve closed
11/19/2011	7:23:41 PM	BCl3 valve closed
11/19/2011	7:23:41 PM	PH3 valve closed
11/19/2011	7:23:41 PM	SiCl4 pre valve closed
11/19/2011	7:23:41 PM	SiCl4 post valve closed
11/19/2011	7:23:41 PM	Bypass valve closed
11/19/2011	7:23:41 PM	Bubbler valve closed
11/19/2011	7:23:41 PM	Main Vac valve opened
11/19/2011	7:23:41 PM	Helium MFC set to  0.000000
11/19/2011	7:23:41 PM	H2 MFC set to  0.000000
11/19/2011	7:23:41 PM	BCl3 MFC set to  0.000000
11/19/2011	7:23:41 PM	PHl3 MFC set to  0.000000
11/19/2011	7:23:41 PM	SiCl4 MFC set to  0.000000
11/19/2011	7:23:41 PM	Bypass solenoid MFC set to  0.000000
11/19/2011	7:23:42 PM	Tube furnace set to 150
11/19/2011	7:24:12 PM	H2 valve closed
11/19/2011	7:24:12 PM	BCl3 valve closed
11/19/2011	7:24:12 PM	PH3 valve closed
11/19/2011	7:24:12 PM	SiCl4 pre valve closed
11/19/2011	7:24:12 PM	SiCl4 post valve closed
11/19/2011	7:24:12 PM	Bypass valve closed
11/19/2011	7:24:12 PM	Bubbler valve closed
11/19/2011	7:24:12 PM	Helium valve opened
11/19/2011	7:24:12 PM	Main Vac valve opened
11/19/2011	7:24:12 PM	Helium MFC set to  20.000000
11/19/2011	7:24:12 PM	H2 MFC set to  0.000000
11/19/2011	7:24:12 PM	BCl3 MFC set to  0.000000
11/19/2011	7:24:12 PM	PHl3 MFC set to  0.000000
11/19/2011	7:24:12 PM	SiCl4 MFC set to  0.000000
11/19/2011	7:24:12 PM	Bypass solenoid MFC set to  0.000000
11/19/2011	7:24:12 PM	Tube furnace set to 180
11/19/2011	7:24:42 PM	Helium valve closed
11/19/2011	7:24:42 PM	H2 valve closed
11/19/2011	7:24:42 PM	BCl3 valve closed
11/19/2011	7:24:42 PM	PH3 valve closed
11/19/2011	7:24:42 PM	SiCl4 pre valve closed
11/19/2011	7:24:42 PM	SiCl4 post valve closed
11/19/2011	7:24:42 PM	Bypass valve closed
11/19/2011	7:24:42 PM	Bubbler valve closed
11/19/2011	7:24:42 PM	Main Vac valve opened
11/19/2011	7:24:42 PM	Helium MFC set to  0.000000
11/19/2011	7:24:42 PM	H2 MFC set to  0.000000
11/19/2011	7:24:42 PM	BCl3 MFC set to  0.000000
11/19/2011	7:24:42 PM	PHl3 MFC set to  0.000000
11/19/2011	7:24:42 PM	SiCl4 MFC set to  0.000000
11/19/2011	7:24:42 PM	Bypass solenoid MFC set to  0.000000
11/19/2011	7:24:42 PM	Tube furnace set to 150
11/19/2011	7:25:12 PM	H2 valve closed
11/19/2011	7:25:12 PM	BCl3 valve closed
11/19/2011	7:25:12 PM	PH3 valve closed
11/19/2011	7:25:12 PM	SiCl4 pre valve closed
11/19/2011	7:25:12 PM	SiCl4 post valve closed
11/19/2011	7:25:12 PM	Bypass valve closed
11/19/2011	7:25:12 PM	Bubbler valve closed
11/19/2011	7:25:12 PM	Helium valve opened
11/19/2011	7:25:12 PM	Main Vac valve opened
11/19/2011	7:25:12 PM	Helium MFC set to  20.000000
11/19/2011	7:25:12 PM	H2 MFC set to  0.000000
11/19/2011	7:25:12 PM	BCl3 MFC set to  0.000000
11/19/2011	7:25:12 PM	PHl3 MFC set to  0.000000
11/19/2011	7:25:12 PM	SiCl4 MFC set to  0.000000
11/19/2011	7:25:12 PM	Bypass solenoid MFC set to  0.000000
11/19/2011	7:25:12 PM	Tube furnace set to 150
11/19/2011	7:25:42 PM	Helium valve closed
11/19/2011	7:25:42 PM	H2 valve closed
11/19/2011	7:25:42 PM	BCl3 valve closed
11/19/2011	7:25:42 PM	PH3 valve closed
11/19/2011	7:25:42 PM	SiCl4 pre valve closed
11/19/2011	7:25:42 PM	SiCl4 post valve closed
11/19/2011	7:25:42 PM	Bypass valve closed
11/19/2011	7:25:42 PM	Bubbler valve closed
11/19/2011	7:25:42 PM	Main Vac valve opened
11/19/2011	7:25:42 PM	Helium MFC set to  0.000000
11/19/2011	7:25:42 PM	H2 MFC set to  0.000000
11/19/2011	7:25:42 PM	BCl3 MFC set to  0.000000
11/19/2011	7:25:42 PM	PHl3 MFC set to  0.000000
11/19/2011	7:25:42 PM	SiCl4 MFC set to  0.000000
11/19/2011	7:25:42 PM	Bypass solenoid MFC set to  0.000000
11/19/2011	7:25:42 PM	Tube furnace set to 150
11/19/2011	7:26:12 PM	H2 valve closed
11/19/2011	7:26:12 PM	BCl3 valve closed
11/19/2011	7:26:12 PM	PH3 valve closed
11/19/2011	7:26:12 PM	SiCl4 pre valve closed
11/19/2011	7:26:12 PM	SiCl4 post valve closed
11/19/2011	7:26:12 PM	Bypass valve closed
11/19/2011	7:26:12 PM	Bubbler valve closed
11/19/2011	7:26:12 PM	Helium valve opened
11/19/2011	7:26:12 PM	Main Vac valve opened
11/19/2011	7:26:12 PM	Helium MFC set to  20.000000
11/19/2011	7:26:12 PM	H2 MFC set to  0.000000
11/19/2011	7:26:12 PM	BCl3 MFC set to  0.000000
11/19/2011	7:26:12 PM	PHl3 MFC set to  0.000000
11/19/2011	7:26:12 PM	SiCl4 MFC set to  0.000000
11/19/2011	7:26:12 PM	Bypass solenoid MFC set to  0.000000
11/19/2011	7:26:13 PM	Tube furnace set to 180
11/19/2011	7:26:43 PM	Helium valve closed
11/19/2011	7:26:43 PM	H2 valve closed
11/19/2011	7:26:43 PM	BCl3 valve closed
11/19/2011	7:26:43 PM	PH3 valve closed
11/19/2011	7:26:43 PM	SiCl4 pre valve closed
11/19/2011	7:26:43 PM	SiCl4 post valve closed
11/19/2011	7:26:43 PM	Bypass valve closed
11/19/2011	7:26:43 PM	Bubbler valve closed
11/19/2011	7:26:43 PM	Main Vac valve opened
11/19/2011	7:26:43 PM	Helium MFC set to  0.000000
11/19/2011	7:26:43 PM	H2 MFC set to  0.000000
11/19/2011	7:26:43 PM	BCl3 MFC set to  0.000000
11/19/2011	7:26:43 PM	PHl3 MFC set to  0.000000
11/19/2011	7:26:43 PM	SiCl4 MFC set to  0.000000
11/19/2011	7:26:43 PM	Bypass solenoid MFC set to  0.000000
11/19/2011	7:26:43 PM	Tube furnace set to 150
11/19/2011	7:27:13 PM	H2 valve closed
11/19/2011	7:27:13 PM	BCl3 valve closed
11/19/2011	7:27:13 PM	PH3 valve closed
11/19/2011	7:27:13 PM	SiCl4 pre valve closed
11/19/2011	7:27:13 PM	SiCl4 post valve closed
11/19/2011	7:27:13 PM	Bypass valve closed
11/19/2011	7:27:13 PM	Bubbler valve closed
11/19/2011	7:27:13 PM	Helium valve opened
11/19/2011	7:27:13 PM	Main Vac valve opened
11/19/2011	7:27:13 PM	Helium MFC set to  20.000000
11/19/2011	7:27:13 PM	H2 MFC set to  0.000000
11/19/2011	7:27:13 PM	BCl3 MFC set to  0.000000
11/19/2011	7:27:13 PM	PHl3 MFC set to  0.000000
11/19/2011	7:27:13 PM	SiCl4 MFC set to  0.000000
11/19/2011	7:27:13 PM	Bypass solenoid MFC set to  0.000000
11/19/2011	7:27:13 PM	Tube furnace set to 150
11/19/2011	7:27:43 PM	Helium valve closed
11/19/2011	7:27:43 PM	H2 valve closed
11/19/2011	7:27:43 PM	BCl3 valve closed
11/19/2011	7:27:43 PM	PH3 valve closed
11/19/2011	7:27:43 PM	SiCl4 pre valve closed
11/19/2011	7:27:43 PM	SiCl4 post valve closed
11/19/2011	7:27:43 PM	Bypass valve closed
11/19/2011	7:27:43 PM	Bubbler valve closed
11/19/2011	7:27:43 PM	Main Vac valve opened
11/19/2011	7:27:43 PM	Helium MFC set to  0.000000
11/19/2011	7:27:43 PM	H2 MFC set to  0.000000
11/19/2011	7:27:43 PM	BCl3 MFC set to  0.000000
11/19/2011	7:27:43 PM	PHl3 MFC set to  0.000000
11/19/2011	7:27:43 PM	SiCl4 MFC set to  0.000000
11/19/2011	7:27:43 PM	Bypass solenoid MFC set to  0.000000
11/19/2011	7:27:43 PM	Tube furnace set to 150
11/19/2011	7:28:13 PM	H2 valve closed
11/19/2011	7:28:13 PM	BCl3 valve closed
11/19/2011	7:28:13 PM	PH3 valve closed
11/19/2011	7:28:13 PM	SiCl4 pre valve closed
11/19/2011	7:28:13 PM	SiCl4 post valve closed
11/19/2011	7:28:13 PM	Bypass valve closed
11/19/2011	7:28:13 PM	Bubbler valve closed
11/19/2011	7:28:13 PM	Helium valve opened
11/19/2011	7:28:13 PM	Main Vac valve opened
11/19/2011	7:28:13 PM	Helium MFC set to  20.000000
11/19/2011	7:28:13 PM	H2 MFC set to  0.000000
11/19/2011	7:28:13 PM	BCl3 MFC set to  0.000000
11/19/2011	7:28:13 PM	PHl3 MFC set to  0.000000
11/19/2011	7:28:13 PM	SiCl4 MFC set to  0.000000
11/19/2011	7:28:13 PM	Bypass solenoid MFC set to  0.000000
11/19/2011	7:28:13 PM	Tube furnace set to 150
11/19/2011	7:28:43 PM	Helium valve closed
11/19/2011	7:28:43 PM	H2 valve closed
11/19/2011	7:28:43 PM	BCl3 valve closed
11/19/2011	7:28:43 PM	PH3 valve closed
11/19/2011	7:28:43 PM	SiCl4 pre valve closed
11/19/2011	7:28:43 PM	SiCl4 post valve closed
11/19/2011	7:28:43 PM	Bypass valve closed
11/19/2011	7:28:43 PM	Bubbler valve closed
11/19/2011	7:28:43 PM	Main Vac valve opened
11/19/2011	7:28:43 PM	Helium MFC set to  0.000000
11/19/2011	7:28:43 PM	H2 MFC set to  0.000000
11/19/2011	7:28:43 PM	BCl3 MFC set to  0.000000
11/19/2011	7:28:43 PM	PHl3 MFC set to  0.000000
11/19/2011	7:28:43 PM	SiCl4 MFC set to  0.000000
11/19/2011	7:28:43 PM	Bypass solenoid MFC set to  0.000000
11/19/2011	7:28:44 PM	Tube furnace set to 150
11/19/2011	7:29:14 PM	H2 valve closed
11/19/2011	7:29:14 PM	BCl3 valve closed
11/19/2011	7:29:14 PM	PH3 valve closed
11/19/2011	7:29:14 PM	SiCl4 pre valve closed
11/19/2011	7:29:14 PM	SiCl4 post valve closed
11/19/2011	7:29:14 PM	Bypass valve closed
11/19/2011	7:29:14 PM	Bubbler valve closed
11/19/2011	7:29:14 PM	Helium valve opened
11/19/2011	7:29:14 PM	Main Vac valve opened
11/19/2011	7:29:14 PM	Helium MFC set to  20.000000
11/19/2011	7:29:14 PM	H2 MFC set to  0.000000
11/19/2011	7:29:14 PM	BCl3 MFC set to  0.000000
11/19/2011	7:29:14 PM	PHl3 MFC set to  0.000000
11/19/2011	7:29:14 PM	SiCl4 MFC set to  0.000000
11/19/2011	7:29:14 PM	Bypass solenoid MFC set to  0.000000
11/19/2011	7:29:14 PM	Tube furnace set to 150
11/19/2011	7:29:44 PM	Helium valve closed
11/19/2011	7:29:44 PM	H2 valve closed
11/19/2011	7:29:44 PM	BCl3 valve closed
11/19/2011	7:29:44 PM	PH3 valve closed
11/19/2011	7:29:44 PM	SiCl4 pre valve closed
11/19/2011	7:29:44 PM	SiCl4 post valve closed
11/19/2011	7:29:44 PM	Bypass valve closed
11/19/2011	7:29:44 PM	Bubbler valve closed
11/19/2011	7:29:44 PM	Main Vac valve opened
11/19/2011	7:29:44 PM	Helium MFC set to  0.000000
11/19/2011	7:29:44 PM	H2 MFC set to  0.000000
11/19/2011	7:29:44 PM	BCl3 MFC set to  0.000000
11/19/2011	7:29:44 PM	PHl3 MFC set to  0.000000
11/19/2011	7:29:44 PM	SiCl4 MFC set to  0.000000
11/19/2011	7:29:44 PM	Bypass solenoid MFC set to  0.000000
11/19/2011	7:29:44 PM	Tube furnace set to 150
11/19/2011	7:30:14 PM	H2 valve closed
11/19/2011	7:30:14 PM	BCl3 valve closed
11/19/2011	7:30:14 PM	PH3 valve closed
11/19/2011	7:30:14 PM	SiCl4 pre valve closed
11/19/2011	7:30:14 PM	SiCl4 post valve closed
11/19/2011	7:30:14 PM	Bypass valve closed
11/19/2011	7:30:14 PM	Bubbler valve closed
11/19/2011	7:30:14 PM	Helium valve opened
11/19/2011	7:30:14 PM	Main Vac valve opened
11/19/2011	7:30:14 PM	Helium MFC set to  20.000000
11/19/2011	7:30:14 PM	H2 MFC set to  0.000000
11/19/2011	7:30:14 PM	BCl3 MFC set to  0.000000
11/19/2011	7:30:14 PM	PHl3 MFC set to  0.000000
11/19/2011	7:30:14 PM	SiCl4 MFC set to  0.000000
11/19/2011	7:30:14 PM	Bypass solenoid MFC set to  0.000000
11/19/2011	7:30:14 PM	Tube furnace set to 150
11/19/2011	7:30:44 PM	Helium valve closed
11/19/2011	7:30:44 PM	H2 valve closed
11/19/2011	7:30:44 PM	BCl3 valve closed
11/19/2011	7:30:44 PM	PH3 valve closed
11/19/2011	7:30:44 PM	SiCl4 pre valve closed
11/19/2011	7:30:44 PM	SiCl4 post valve closed
11/19/2011	7:30:44 PM	Bypass valve closed
11/19/2011	7:30:44 PM	Bubbler valve closed
11/19/2011	7:30:44 PM	Main Vac valve opened
11/19/2011	7:30:44 PM	Helium MFC set to  0.000000
11/19/2011	7:30:44 PM	H2 MFC set to  0.000000
11/19/2011	7:30:44 PM	BCl3 MFC set to  0.000000
11/19/2011	7:30:44 PM	PHl3 MFC set to  0.000000
11/19/2011	7:30:44 PM	SiCl4 MFC set to  0.000000
11/19/2011	7:30:44 PM	Bypass solenoid MFC set to  0.000000
11/19/2011	7:30:44 PM	Tube furnace set to 150
11/19/2011	7:31:14 PM	H2 valve closed
11/19/2011	7:31:14 PM	BCl3 valve closed
11/19/2011	7:31:14 PM	PH3 valve closed
11/19/2011	7:31:14 PM	SiCl4 pre valve closed
11/19/2011	7:31:14 PM	SiCl4 post valve closed
11/19/2011	7:31:15 PM	Bypass valve closed
11/19/2011	7:31:15 PM	Bubbler valve closed
11/19/2011	7:31:15 PM	Helium valve opened
11/19/2011	7:31:15 PM	Main Vac valve opened
11/19/2011	7:31:15 PM	Helium MFC set to  20.000000
11/19/2011	7:31:15 PM	H2 MFC set to  0.000000
11/19/2011	7:31:15 PM	BCl3 MFC set to  0.000000
11/19/2011	7:31:15 PM	PHl3 MFC set to  0.000000
11/19/2011	7:31:15 PM	SiCl4 MFC set to  0.000000
11/19/2011	7:31:15 PM	Bypass solenoid MFC set to  0.000000
11/19/2011	7:31:15 PM	Tube furnace set to 150
11/19/2011	7:31:45 PM	Helium valve closed
11/19/2011	7:31:45 PM	H2 valve closed
11/19/2011	7:31:45 PM	BCl3 valve closed
11/19/2011	7:31:45 PM	PH3 valve closed
11/19/2011	7:31:45 PM	SiCl4 pre valve closed
11/19/2011	7:31:45 PM	SiCl4 post valve closed
11/19/2011	7:31:45 PM	Bypass valve closed
11/19/2011	7:31:45 PM	Bubbler valve closed
11/19/2011	7:31:45 PM	Main Vac valve opened
11/19/2011	7:31:45 PM	Helium MFC set to  0.000000
11/19/2011	7:31:45 PM	H2 MFC set to  0.000000
11/19/2011	7:31:45 PM	BCl3 MFC set to  0.000000
11/19/2011	7:31:45 PM	PHl3 MFC set to  0.000000
11/19/2011	7:31:45 PM	SiCl4 MFC set to  0.000000
11/19/2011	7:31:45 PM	Bypass solenoid MFC set to  0.000000
11/19/2011	7:31:45 PM	Tube furnace set to 150
11/19/2011	7:32:15 PM	H2 valve closed
11/19/2011	7:32:15 PM	BCl3 valve closed
11/19/2011	7:32:15 PM	PH3 valve closed
11/19/2011	7:32:15 PM	SiCl4 pre valve closed
11/19/2011	7:32:15 PM	SiCl4 post valve closed
11/19/2011	7:32:15 PM	Bypass valve closed
11/19/2011	7:32:15 PM	Bubbler valve closed
11/19/2011	7:32:15 PM	Helium valve opened
11/19/2011	7:32:15 PM	Main Vac valve opened
11/19/2011	7:32:15 PM	Helium MFC set to  20.000000
11/19/2011	7:32:15 PM	H2 MFC set to  0.000000
11/19/2011	7:32:15 PM	BCl3 MFC set to  0.000000
11/19/2011	7:32:15 PM	PHl3 MFC set to  0.000000
11/19/2011	7:32:15 PM	SiCl4 MFC set to  0.000000
11/19/2011	7:32:15 PM	Bypass solenoid MFC set to  0.000000
11/19/2011	7:32:15 PM	Tube furnace set to 150
11/19/2011	7:32:45 PM	Helium valve closed
11/19/2011	7:32:45 PM	H2 valve closed
11/19/2011	7:32:45 PM	BCl3 valve closed
11/19/2011	7:32:45 PM	PH3 valve closed
11/19/2011	7:32:45 PM	SiCl4 pre valve closed
11/19/2011	7:32:45 PM	SiCl4 post valve closed
11/19/2011	7:32:45 PM	Bypass valve closed
11/19/2011	7:32:45 PM	Bubbler valve closed
11/19/2011	7:32:45 PM	Main Vac valve opened
11/19/2011	7:32:45 PM	Helium MFC set to  0.000000
11/19/2011	7:32:45 PM	H2 MFC set to  0.000000
11/19/2011	7:32:45 PM	BCl3 MFC set to  0.000000
11/19/2011	7:32:45 PM	PHl3 MFC set to  0.000000
11/19/2011	7:32:45 PM	SiCl4 MFC set to  0.000000
11/19/2011	7:32:45 PM	Bypass solenoid MFC set to  0.000000
11/19/2011	7:32:45 PM	Tube furnace set to 150
11/19/2011	7:33:15 PM	H2 valve closed
11/19/2011	7:33:15 PM	BCl3 valve closed
11/19/2011	7:33:15 PM	PH3 valve closed
11/19/2011	7:33:15 PM	SiCl4 pre valve closed
11/19/2011	7:33:15 PM	SiCl4 post valve closed
11/19/2011	7:33:15 PM	Bypass valve closed
11/19/2011	7:33:15 PM	Bubbler valve closed
11/19/2011	7:33:15 PM	Helium valve opened
11/19/2011	7:33:15 PM	Main Vac valve opened
11/19/2011	7:33:15 PM	Helium MFC set to  20.000000
11/19/2011	7:33:15 PM	H2 MFC set to  0.000000
11/19/2011	7:33:15 PM	BCl3 MFC set to  0.000000
11/19/2011	7:33:15 PM	PHl3 MFC set to  0.000000
11/19/2011	7:33:15 PM	SiCl4 MFC set to  0.000000
11/19/2011	7:33:15 PM	Bypass solenoid MFC set to  0.000000
11/19/2011	7:33:15 PM	Tube furnace set to 150
11/19/2011	7:33:46 PM	Helium valve closed
11/19/2011	7:33:46 PM	H2 valve closed
11/19/2011	7:33:46 PM	BCl3 valve closed
11/19/2011	7:33:46 PM	PH3 valve closed
11/19/2011	7:33:46 PM	SiCl4 pre valve closed
11/19/2011	7:33:46 PM	SiCl4 post valve closed
11/19/2011	7:33:46 PM	Bypass valve closed
11/19/2011	7:33:46 PM	Bubbler valve closed
11/19/2011	7:33:46 PM	Main Vac valve opened
11/19/2011	7:33:46 PM	Helium MFC set to  0.000000
11/19/2011	7:33:46 PM	H2 MFC set to  0.000000
11/19/2011	7:33:46 PM	BCl3 MFC set to  0.000000
11/19/2011	7:33:46 PM	PHl3 MFC set to  0.000000
11/19/2011	7:33:46 PM	SiCl4 MFC set to  0.000000
11/19/2011	7:33:46 PM	Bypass solenoid MFC set to  0.000000
11/19/2011	7:33:46 PM	Tube furnace set to 150
11/19/2011	7:34:16 PM	H2 valve closed
11/19/2011	7:34:16 PM	BCl3 valve closed
11/19/2011	7:34:16 PM	PH3 valve closed
11/19/2011	7:34:16 PM	SiCl4 pre valve closed
11/19/2011	7:34:16 PM	SiCl4 post valve closed
11/19/2011	7:34:16 PM	Bypass valve closed
11/19/2011	7:34:16 PM	Bubbler valve closed
11/19/2011	7:34:16 PM	Helium valve opened
11/19/2011	7:34:16 PM	Main Vac valve opened
11/19/2011	7:34:16 PM	Helium MFC set to  20.000000
11/19/2011	7:34:16 PM	H2 MFC set to  0.000000
11/19/2011	7:34:16 PM	BCl3 MFC set to  0.000000
11/19/2011	7:34:16 PM	PHl3 MFC set to  0.000000
11/19/2011	7:34:16 PM	SiCl4 MFC set to  0.000000
11/19/2011	7:34:16 PM	Bypass solenoid MFC set to  0.000000
11/19/2011	7:34:16 PM	Tube furnace set to 150
11/19/2011	7:34:46 PM	Helium valve closed
11/19/2011	7:34:46 PM	H2 valve closed
11/19/2011	7:34:46 PM	BCl3 valve closed
11/19/2011	7:34:46 PM	PH3 valve closed
11/19/2011	7:34:46 PM	SiCl4 pre valve closed
11/19/2011	7:34:46 PM	SiCl4 post valve closed
11/19/2011	7:34:46 PM	Bypass valve closed
11/19/2011	7:34:46 PM	Bubbler valve closed
11/19/2011	7:34:46 PM	Main Vac valve opened
11/19/2011	7:34:46 PM	Helium MFC set to  0.000000
11/19/2011	7:34:46 PM	H2 MFC set to  0.000000
11/19/2011	7:34:46 PM	BCl3 MFC set to  0.000000
11/19/2011	7:34:46 PM	PHl3 MFC set to  0.000000
11/19/2011	7:34:46 PM	SiCl4 MFC set to  0.000000
11/19/2011	7:34:46 PM	Bypass solenoid MFC set to  0.000000
11/19/2011	7:34:46 PM	Tube furnace set to 150
11/19/2011	7:35:16 PM	H2 valve closed
11/19/2011	7:35:16 PM	BCl3 valve closed
11/19/2011	7:35:16 PM	PH3 valve closed
11/19/2011	7:35:16 PM	SiCl4 pre valve closed
11/19/2011	7:35:16 PM	SiCl4 post valve closed
11/19/2011	7:35:16 PM	Bypass valve closed
11/19/2011	7:35:16 PM	Bubbler valve closed
11/19/2011	7:35:16 PM	Helium valve opened
11/19/2011	7:35:16 PM	Main Vac valve opened
11/19/2011	7:35:16 PM	Helium MFC set to  20.000000
11/19/2011	7:35:16 PM	H2 MFC set to  0.000000
11/19/2011	7:35:16 PM	BCl3 MFC set to  0.000000
11/19/2011	7:35:16 PM	PHl3 MFC set to  0.000000
11/19/2011	7:35:16 PM	SiCl4 MFC set to  0.000000
11/19/2011	7:35:16 PM	Bypass solenoid MFC set to  0.000000
11/19/2011	7:35:16 PM	Tube furnace set to 150
11/19/2011	7:35:46 PM	Helium valve closed
11/19/2011	7:35:46 PM	H2 valve closed
11/19/2011	7:35:46 PM	BCl3 valve closed
11/19/2011	7:35:46 PM	PH3 valve closed
11/19/2011	7:35:46 PM	SiCl4 pre valve closed
11/19/2011	7:35:46 PM	SiCl4 post valve closed
11/19/2011	7:35:46 PM	Bypass valve closed
11/19/2011	7:35:46 PM	Bubbler valve closed
11/19/2011	7:35:46 PM	Main Vac valve opened
11/19/2011	7:35:46 PM	Helium MFC set to  0.000000
11/19/2011	7:35:46 PM	H2 MFC set to  0.000000
11/19/2011	7:35:46 PM	BCl3 MFC set to  0.000000
11/19/2011	7:35:46 PM	PHl3 MFC set to  0.000000
11/19/2011	7:35:46 PM	SiCl4 MFC set to  0.000000
11/19/2011	7:35:46 PM	Bypass solenoid MFC set to  0.000000
11/19/2011	7:35:47 PM	Tube furnace set to 150
11/19/2011	7:36:17 PM	H2 valve closed
11/19/2011	7:36:17 PM	BCl3 valve closed
11/19/2011	7:36:17 PM	PH3 valve closed
11/19/2011	7:36:17 PM	SiCl4 pre valve closed
11/19/2011	7:36:17 PM	SiCl4 post valve closed
11/19/2011	7:36:17 PM	Bypass valve closed
11/19/2011	7:36:17 PM	Bubbler valve closed
11/19/2011	7:36:17 PM	Helium valve opened
11/19/2011	7:36:17 PM	Main Vac valve opened
11/19/2011	7:36:17 PM	Helium MFC set to  20.000000
11/19/2011	7:36:17 PM	H2 MFC set to  0.000000
11/19/2011	7:36:17 PM	BCl3 MFC set to  0.000000
11/19/2011	7:36:17 PM	PHl3 MFC set to  0.000000
11/19/2011	7:36:17 PM	SiCl4 MFC set to  0.000000
11/19/2011	7:36:17 PM	Bypass solenoid MFC set to  0.000000
11/19/2011	7:36:17 PM	Tube furnace set to 150
11/19/2011	7:36:47 PM	Helium valve closed
11/19/2011	7:36:47 PM	H2 valve closed
11/19/2011	7:36:47 PM	BCl3 valve closed
11/19/2011	7:36:47 PM	PH3 valve closed
11/19/2011	7:36:47 PM	SiCl4 pre valve closed
11/19/2011	7:36:47 PM	SiCl4 post valve closed
11/19/2011	7:36:47 PM	Bypass valve closed
11/19/2011	7:36:47 PM	Bubbler valve closed
11/19/2011	7:36:47 PM	Main Vac valve opened
11/19/2011	7:36:47 PM	Helium MFC set to  0.000000
11/19/2011	7:36:47 PM	H2 MFC set to  0.000000
11/19/2011	7:36:47 PM	BCl3 MFC set to  0.000000
11/19/2011	7:36:47 PM	PHl3 MFC set to  0.000000
11/19/2011	7:36:47 PM	SiCl4 MFC set to  0.000000
11/19/2011	7:36:47 PM	Bypass solenoid MFC set to  0.000000
11/19/2011	7:36:47 PM	Tube furnace set to 150
11/19/2011	7:37:17 PM	H2 valve closed
11/19/2011	7:37:17 PM	BCl3 valve closed
11/19/2011	7:37:17 PM	PH3 valve closed
11/19/2011	7:37:17 PM	SiCl4 pre valve closed
11/19/2011	7:37:17 PM	SiCl4 post valve closed
11/19/2011	7:37:17 PM	Bypass valve closed
11/19/2011	7:37:17 PM	Bubbler valve closed
11/19/2011	7:37:17 PM	Helium valve opened
11/19/2011	7:37:17 PM	Main Vac valve opened
11/19/2011	7:37:17 PM	Helium MFC set to  20.000000
11/19/2011	7:37:17 PM	H2 MFC set to  0.000000
11/19/2011	7:37:17 PM	BCl3 MFC set to  0.000000
11/19/2011	7:37:17 PM	PHl3 MFC set to  0.000000
11/19/2011	7:37:17 PM	SiCl4 MFC set to  0.000000
11/19/2011	7:37:17 PM	Bypass solenoid MFC set to  0.000000
11/19/2011	7:37:17 PM	Tube furnace set to 150
11/19/2011	7:37:47 PM	Helium valve closed
11/19/2011	7:37:47 PM	H2 valve closed
11/19/2011	7:37:47 PM	BCl3 valve closed
11/19/2011	7:37:47 PM	PH3 valve closed
11/19/2011	7:37:47 PM	SiCl4 pre valve closed
11/19/2011	7:37:47 PM	SiCl4 post valve closed
11/19/2011	7:37:47 PM	Bypass valve closed
11/19/2011	7:37:47 PM	Bubbler valve closed
11/19/2011	7:37:47 PM	Main Vac valve opened
11/19/2011	7:37:47 PM	Helium MFC set to  0.000000
11/19/2011	7:37:47 PM	H2 MFC set to  0.000000
11/19/2011	7:37:47 PM	BCl3 MFC set to  0.000000
11/19/2011	7:37:47 PM	PHl3 MFC set to  0.000000
11/19/2011	7:37:47 PM	SiCl4 MFC set to  0.000000
11/19/2011	7:37:47 PM	Bypass solenoid MFC set to  0.000000
11/19/2011	7:37:47 PM	Tube furnace set to 150
11/19/2011	7:38:17 PM	H2 valve closed
11/19/2011	7:38:17 PM	BCl3 valve closed
11/19/2011	7:38:17 PM	PH3 valve closed
11/19/2011	7:38:17 PM	SiCl4 pre valve closed
11/19/2011	7:38:17 PM	SiCl4 post valve closed
11/19/2011	7:38:17 PM	Bypass valve closed
11/19/2011	7:38:17 PM	Bubbler valve closed
11/19/2011	7:38:17 PM	Helium valve opened
11/19/2011	7:38:17 PM	Main Vac valve opened
11/19/2011	7:38:17 PM	Helium MFC set to  20.000000
11/19/2011	7:38:17 PM	H2 MFC set to  0.000000
11/19/2011	7:38:17 PM	BCl3 MFC set to  0.000000
11/19/2011	7:38:17 PM	PHl3 MFC set to  0.000000
11/19/2011	7:38:17 PM	SiCl4 MFC set to  0.000000
11/19/2011	7:38:17 PM	Bypass solenoid MFC set to  0.000000
11/19/2011	7:38:18 PM	Tube furnace set to 150
11/19/2011	7:38:48 PM	Helium valve closed
11/19/2011	7:38:48 PM	H2 valve closed
11/19/2011	7:38:48 PM	BCl3 valve closed
11/19/2011	7:38:48 PM	PH3 valve closed
11/19/2011	7:38:48 PM	SiCl4 pre valve closed
11/19/2011	7:38:48 PM	SiCl4 post valve closed
11/19/2011	7:38:48 PM	Bypass valve closed
11/19/2011	7:38:48 PM	Bubbler valve closed
11/19/2011	7:38:48 PM	Main Vac valve opened
11/19/2011	7:38:48 PM	Helium MFC set to  0.000000
11/19/2011	7:38:48 PM	H2 MFC set to  0.000000
11/19/2011	7:38:48 PM	BCl3 MFC set to  0.000000
11/19/2011	7:38:48 PM	PHl3 MFC set to  0.000000
11/19/2011	7:38:48 PM	SiCl4 MFC set to  0.000000
11/19/2011	7:38:48 PM	Bypass solenoid MFC set to  0.000000
11/19/2011	7:38:48 PM	Tube furnace set to 150
11/19/2011	7:39:18 PM	Run aborted at 7:39 PM
11/19/2011	7:39:18 PM	Helium valve closed
11/19/2011	7:39:18 PM	H2 valve closed
11/19/2011	7:39:18 PM	BCl3 valve closed
11/19/2011	7:39:18 PM	PH3 valve closed
11/19/2011	7:39:18 PM	SiCl4 pre valve closed
11/19/2011	7:39:18 PM	SiCl4 post valve closed
11/19/2011	7:39:18 PM	Bypass valve closed
11/19/2011	7:39:18 PM	Main Vac valve closed
11/19/2011	7:39:18 PM	Bubbler valve closed
11/19/2011	7:39:18 PM	Helium MFC set to  0.000000
11/19/2011	7:39:18 PM	H2 MFC set to  0.000000
11/19/2011	7:39:18 PM	BCl3 MFC set to  0.000000
11/19/2011	7:39:18 PM	PHl3 MFC set to  0.000000
11/19/2011	7:39:18 PM	SiCl4 MFC set to  0.000000
11/19/2011	7:39:18 PM	Tube furnace set to 0
11/19/2011	7:39:20 PM	Main Vac valve opened
11/19/2011	7:41:46 PM	Main Vac valve closed
11/19/2011	7:41:58 PM	Main Vac valve opened
11/19/2011	7:42:44 PM	Recipe started at 7:42 PM
11/19/2011	7:42:44 PM	Helium valve closed
11/19/2011	7:42:44 PM	H2 valve closed
11/19/2011	7:42:44 PM	BCl3 valve closed
11/19/2011	7:42:44 PM	PH3 valve closed
11/19/2011	7:42:44 PM	SiCl4 pre valve closed
11/19/2011	7:42:44 PM	SiCl4 post valve closed
11/19/2011	7:42:44 PM	Main Vac valve closed
11/19/2011	7:42:44 PM	Bypass valve closed
11/19/2011	7:42:44 PM	Bubbler valve closed
11/19/2011	7:42:44 PM	Helium MFC set to  0.000000
11/19/2011	7:42:44 PM	H2 MFC set to  0.000000
11/19/2011	7:42:44 PM	BCl3 MFC set to  0.000000
11/19/2011	7:42:44 PM	PHl3 MFC set to  0.000000
11/19/2011	7:42:44 PM	SiCl4 MFC set to  0.000000
11/19/2011	7:42:44 PM	Bypass solenoid MFC set to  0.000000
11/19/2011	7:42:45 PM	Tube furnace set to 0
11/19/2011	7:42:48 PM	Helium valve closed
11/19/2011	7:42:48 PM	BCl3 valve closed
11/19/2011	7:42:48 PM	PH3 valve closed
11/19/2011	7:42:48 PM	SiCl4 pre valve closed
11/19/2011	7:42:48 PM	SiCl4 post valve closed
11/19/2011	7:42:48 PM	Main Vac valve closed
11/19/2011	7:42:48 PM	Bypass valve closed
11/19/2011	7:42:48 PM	Bubbler valve closed
11/19/2011	7:42:48 PM	H2 valve opened
11/19/2011	7:42:48 PM	Helium MFC set to  0.000000
11/19/2011	7:42:48 PM	H2 MFC set to  500.000000
11/19/2011	7:42:48 PM	BCl3 MFC set to  0.000000
11/19/2011	7:42:48 PM	PHl3 MFC set to  0.000000
11/19/2011	7:42:48 PM	SiCl4 MFC set to  0.000000
11/19/2011	7:42:48 PM	Bypass solenoid MFC set to  0.000000
11/19/2011	7:42:48 PM	Tube furnace set to 50
11/19/2011	7:43:49 PM	Helium valve closed
11/19/2011	7:43:49 PM	BCl3 valve closed
11/19/2011	7:43:49 PM	PH3 valve closed
11/19/2011	7:43:49 PM	SiCl4 pre valve closed
11/19/2011	7:43:49 PM	SiCl4 post valve closed
11/19/2011	7:43:49 PM	Main Vac valve closed
11/19/2011	7:43:49 PM	Bypass valve closed
11/19/2011	7:43:49 PM	H2 valve opened
11/19/2011	7:43:49 PM	Bubbler valve opened
11/19/2011	7:43:49 PM	Helium MFC set to  0.000000
11/19/2011	7:43:49 PM	H2 MFC set to  500.000000
11/19/2011	7:43:49 PM	BCl3 MFC set to  0.000000
11/19/2011	7:43:49 PM	PHl3 MFC set to  0.000000
11/19/2011	7:43:49 PM	SiCl4 MFC set to  0.000000
11/19/2011	7:43:49 PM	Bypass solenoid MFC set to  0.000000
11/19/2011	7:43:49 PM	Tube furnace set to 50
11/19/2011	7:43:50 PM	Helium valve closed
11/19/2011	7:43:50 PM	BCl3 valve closed
11/19/2011	7:43:50 PM	PH3 valve closed
11/19/2011	7:43:51 PM	SiCl4 pre valve closed
11/19/2011	7:43:51 PM	SiCl4 post valve closed
11/19/2011	7:43:51 PM	Main Vac valve closed
11/19/2011	7:43:51 PM	Bypass valve closed
11/19/2011	7:43:51 PM	H2 valve opened
11/19/2011	7:43:51 PM	Bubbler valve opened
11/19/2011	7:43:51 PM	Helium MFC set to  0.000000
11/19/2011	7:43:51 PM	H2 MFC set to  495.000000
11/19/2011	7:43:51 PM	BCl3 MFC set to  0.000000
11/19/2011	7:43:51 PM	PHl3 MFC set to  0.000000
11/19/2011	7:43:51 PM	SiCl4 MFC set to  0.000000
11/19/2011	7:43:51 PM	Bypass solenoid MFC set to  0.000000
11/19/2011	7:43:51 PM	Tube furnace set to 1000
11/19/2011	8:03:51 PM	Helium valve closed
11/19/2011	8:03:51 PM	BCl3 valve closed
11/19/2011	8:03:51 PM	PH3 valve closed
11/19/2011	8:03:51 PM	Main Vac valve closed
11/19/2011	8:03:51 PM	Bypass valve closed
11/19/2011	8:03:51 PM	H2 valve opened
11/19/2011	8:03:51 PM	SiCl4 pre valve opened
11/19/2011	8:03:51 PM	SiCl4 post valve opened
11/19/2011	8:03:51 PM	Bubbler valve opened
11/19/2011	8:03:51 PM	Helium MFC set to  0.000000
11/19/2011	8:03:51 PM	H2 MFC set to  495.000000
11/19/2011	8:03:51 PM	BCl3 MFC set to  0.000000
11/19/2011	8:03:51 PM	PHl3 MFC set to  0.000000
11/19/2011	8:03:51 PM	SiCl4 MFC set to  24.000000
11/19/2011	8:03:51 PM	Bypass solenoid MFC set to  0.000000
11/19/2011	8:03:51 PM	Tube furnace set to 1000
11/19/2011	8:24:51 PM	Helium valve closed
11/19/2011	8:24:51 PM	BCl3 valve closed
11/19/2011	8:24:51 PM	PH3 valve closed
11/19/2011	8:24:51 PM	SiCl4 pre valve closed
11/19/2011	8:24:51 PM	SiCl4 post valve closed
11/19/2011	8:24:51 PM	Main Vac valve closed
11/19/2011	8:24:51 PM	Bypass valve closed
11/19/2011	8:24:51 PM	H2 valve opened
11/19/2011	8:24:51 PM	Bubbler valve opened
11/19/2011	8:24:51 PM	Helium MFC set to  0.000000
11/19/2011	8:24:51 PM	H2 MFC set to  480.000000
11/19/2011	8:24:51 PM	BCl3 MFC set to  0.000000
11/19/2011	8:24:51 PM	PHl3 MFC set to  0.000000
11/19/2011	8:24:51 PM	SiCl4 MFC set to  0.000000
11/19/2011	8:24:51 PM	Bypass solenoid MFC set to  0.000000
11/19/2011	8:24:51 PM	Tube furnace set to 750
11/19/2011	8:32:08 PM	H2 valve closed
11/19/2011	8:32:08 PM	BCl3 valve closed
11/19/2011	8:32:08 PM	PH3 valve closed
11/19/2011	8:32:08 PM	SiCl4 pre valve closed
11/19/2011	8:32:08 PM	SiCl4 post valve closed
11/19/2011	8:32:08 PM	Main Vac valve closed
11/19/2011	8:32:08 PM	Bypass valve closed
11/19/2011	8:32:08 PM	Helium valve opened
11/19/2011	8:32:08 PM	Bubbler valve opened
11/19/2011	8:32:08 PM	Helium MFC set to  400.000000
11/19/2011	8:32:08 PM	H2 MFC set to  0.000000
11/19/2011	8:32:08 PM	BCl3 MFC set to  0.000000
11/19/2011	8:32:08 PM	PHl3 MFC set to  0.000000
11/19/2011	8:32:08 PM	SiCl4 MFC set to  0.000000
11/19/2011	8:32:08 PM	Bypass solenoid MFC set to  0.000000
11/19/2011	8:32:08 PM	Tube furnace set to 0
11/19/2011	8:36:08 PM	Run aborted at 8:36 PM
11/19/2011	8:36:08 PM	Helium valve closed
11/19/2011	8:36:08 PM	H2 valve closed
11/19/2011	8:36:08 PM	BCl3 valve closed
11/19/2011	8:36:08 PM	PH3 valve closed
11/19/2011	8:36:08 PM	SiCl4 pre valve closed
11/19/2011	8:36:08 PM	SiCl4 post valve closed
11/19/2011	8:36:08 PM	Bypass valve closed
11/19/2011	8:36:08 PM	Main Vac valve closed
11/19/2011	8:36:08 PM	Bubbler valve closed
11/19/2011	8:36:08 PM	Helium MFC set to  0.000000
11/19/2011	8:36:08 PM	H2 MFC set to  0.000000
11/19/2011	8:36:08 PM	BCl3 MFC set to  0.000000
11/19/2011	8:36:08 PM	PHl3 MFC set to  0.000000
11/19/2011	8:36:08 PM	SiCl4 MFC set to  0.000000
11/19/2011	8:36:08 PM	Tube furnace set to 0
11/19/2011	8:36:10 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/19/2011	8:36:11 PM	Recipe started at 8:36 PM
11/19/2011	8:36:11 PM	Helium valve closed
11/19/2011	8:36:11 PM	H2 valve closed
11/19/2011	8:36:11 PM	BCl3 valve closed
11/19/2011	8:36:11 PM	PH3 valve closed
11/19/2011	8:36:11 PM	SiCl4 pre valve closed
11/19/2011	8:36:11 PM	SiCl4 post valve closed
11/19/2011	8:36:11 PM	Main Vac valve closed
11/19/2011	8:36:11 PM	Bypass valve closed
11/19/2011	8:36:11 PM	Bubbler valve closed
11/19/2011	8:36:11 PM	Helium MFC set to  0.000000
11/19/2011	8:36:11 PM	H2 MFC set to  0.000000
11/19/2011	8:36:11 PM	BCl3 MFC set to  0.000000
11/19/2011	8:36:11 PM	PHl3 MFC set to  0.000000
11/19/2011	8:36:11 PM	SiCl4 MFC set to  0.000000
11/19/2011	8:36:11 PM	Bypass solenoid MFC set to  0.000000
11/19/2011	8:36:11 PM	Tube furnace set to 0
11/19/2011	8:36:14 PM	H2 valve closed
11/19/2011	8:36:14 PM	BCl3 valve closed
11/19/2011	8:36:14 PM	PH3 valve closed
11/19/2011	8:36:14 PM	SiCl4 pre valve closed
11/19/2011	8:36:14 PM	SiCl4 post valve closed
11/19/2011	8:36:14 PM	Main Vac valve closed
11/19/2011	8:36:14 PM	Bypass valve closed
11/19/2011	8:36:14 PM	Bubbler valve closed
11/19/2011	8:36:14 PM	Helium valve opened
11/19/2011	8:36:14 PM	Helium MFC set to  500.000000
11/19/2011	8:36:14 PM	H2 MFC set to  0.000000
11/19/2011	8:36:14 PM	BCl3 MFC set to  0.000000
11/19/2011	8:36:14 PM	PHl3 MFC set to  0.000000
11/19/2011	8:36:14 PM	SiCl4 MFC set to  0.000000
11/19/2011	8:36:14 PM	Bypass solenoid MFC set to  0.000000
11/19/2011	8:36:14 PM	Tube furnace set to 0
11/19/2011	8:36:14 PM	Helium valve closed
11/19/2011	8:36:14 PM	H2 valve closed
11/19/2011	8:36:14 PM	BCl3 valve closed
11/19/2011	8:36:14 PM	PH3 valve closed
11/19/2011	8:36:14 PM	SiCl4 pre valve closed
11/19/2011	8:36:14 PM	SiCl4 post valve closed
11/19/2011	8:36:14 PM	Main Vac valve closed
11/19/2011	8:36:14 PM	Bypass valve closed
11/19/2011	8:36:14 PM	Bubbler valve closed
11/19/2011	8:36:14 PM	Helium MFC set to  0.000000
11/19/2011	8:36:14 PM	H2 MFC set to  0.000000
11/19/2011	8:36:14 PM	BCl3 MFC set to  0.000000
11/19/2011	8:36:14 PM	PHl3 MFC set to  0.000000
11/19/2011	8:36:14 PM	SiCl4 MFC set to  0.000000
11/19/2011	8:36:14 PM	Bypass solenoid MFC set to  0.000000
11/19/2011	8:36:15 PM	Tube furnace set to 0
11/19/2011	8:36:16 PM	Run finished at 8:36 PM
11/19/2011	8:36:16 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/19/2011	8:40:28 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/19/2011	8:40:29 PM	Recipe started at 8:40 PM
11/19/2011	8:40:29 PM	Helium valve closed
11/19/2011	8:40:29 PM	H2 valve closed
11/19/2011	8:40:29 PM	BCl3 valve closed
11/19/2011	8:40:29 PM	PH3 valve closed
11/19/2011	8:40:29 PM	SiCl4 pre valve closed
11/19/2011	8:40:29 PM	SiCl4 post valve closed
11/19/2011	8:40:29 PM	Main Vac valve closed
11/19/2011	8:40:29 PM	Bubbler valve closed
11/19/2011	8:40:29 PM	Bypass valve opened
11/19/2011	8:40:29 PM	Helium MFC set to  0.000000
11/19/2011	8:40:29 PM	H2 MFC set to  0.000000
11/19/2011	8:40:29 PM	BCl3 MFC set to  0.000000
11/19/2011	8:40:29 PM	PHl3 MFC set to  0.000000
11/19/2011	8:40:29 PM	SiCl4 MFC set to  0.000000
11/19/2011	8:40:29 PM	Bypass solenoid MFC set to  0.000000
11/19/2011	8:40:29 PM	Tube furnace set to 0
11/19/2011	8:42:04 PM	Helium valve closed
11/19/2011	8:42:04 PM	H2 valve closed
11/19/2011	8:42:04 PM	BCl3 valve closed
11/19/2011	8:42:04 PM	PH3 valve closed
11/19/2011	8:42:04 PM	SiCl4 pre valve closed
11/19/2011	8:42:04 PM	SiCl4 post valve closed
11/19/2011	8:42:04 PM	Main Vac valve closed
11/19/2011	8:42:04 PM	Bubbler valve closed
11/19/2011	8:42:04 PM	Bypass valve opened
11/19/2011	8:42:04 PM	Helium MFC set to  0.000000
11/19/2011	8:42:04 PM	H2 MFC set to  0.000000
11/19/2011	8:42:04 PM	BCl3 MFC set to  0.000000
11/19/2011	8:42:04 PM	PHl3 MFC set to  0.000000
11/19/2011	8:42:04 PM	SiCl4 MFC set to  0.000000
11/19/2011	8:42:04 PM	Bypass solenoid MFC set to  0.000000
11/19/2011	8:42:04 PM	Tube furnace set to 0
11/19/2011	8:43:04 PM	Helium valve closed
11/19/2011	8:43:04 PM	H2 valve closed
11/19/2011	8:43:04 PM	BCl3 valve closed
11/19/2011	8:43:04 PM	PH3 valve closed
11/19/2011	8:43:04 PM	SiCl4 pre valve closed
11/19/2011	8:43:04 PM	SiCl4 post valve closed
11/19/2011	8:43:04 PM	Bypass valve closed
11/19/2011	8:43:04 PM	Bubbler valve closed
11/19/2011	8:43:04 PM	Main Vac valve opened
11/19/2011	8:43:04 PM	Helium MFC set to  0.000000
11/19/2011	8:43:04 PM	H2 MFC set to  0.000000
11/19/2011	8:43:04 PM	BCl3 MFC set to  0.000000
11/19/2011	8:43:04 PM	PHl3 MFC set to  0.000000
11/19/2011	8:43:04 PM	SiCl4 MFC set to  0.000000
11/19/2011	8:43:04 PM	Bypass solenoid MFC set to  0.000000
11/19/2011	8:43:04 PM	Tube furnace set to 0
11/19/2011	8:43:05 PM	Run finished at 8:43 PM
11/19/2011	8:43:05 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/19/2011	8:55:04 PM	Recipe started at 8:54 PM
11/19/2011	8:55:04 PM	Helium valve closed
11/19/2011	8:55:04 PM	H2 valve closed
11/19/2011	8:55:04 PM	BCl3 valve closed
11/19/2011	8:55:04 PM	PH3 valve closed
11/19/2011	8:55:04 PM	SiCl4 pre valve closed
11/19/2011	8:55:04 PM	SiCl4 post valve closed
11/19/2011	8:55:04 PM	Main Vac valve closed
11/19/2011	8:55:04 PM	Bubbler valve closed
11/19/2011	8:55:04 PM	Bypass valve opened
11/19/2011	8:55:04 PM	Helium MFC set to  0.000000
11/19/2011	8:55:04 PM	H2 MFC set to  0.000000
11/19/2011	8:55:04 PM	BCl3 MFC set to  0.000000
11/19/2011	8:55:04 PM	PHl3 MFC set to  0.000000
11/19/2011	8:55:04 PM	SiCl4 MFC set to  0.000000
11/19/2011	8:55:04 PM	Bypass solenoid MFC set to  0.000000
11/19/2011	8:55:04 PM	Tube furnace set to 180
11/19/2011	8:55:04 PM	Helium valve closed
11/19/2011	8:55:04 PM	H2 valve closed
11/19/2011	8:55:04 PM	BCl3 valve closed
11/19/2011	8:55:04 PM	PH3 valve closed
11/19/2011	8:55:04 PM	SiCl4 pre valve closed
11/19/2011	8:55:04 PM	SiCl4 post valve closed
11/19/2011	8:55:04 PM	Main Vac valve closed
11/19/2011	8:55:04 PM	Bubbler valve closed
11/19/2011	8:55:04 PM	Bypass valve opened
11/19/2011	8:55:04 PM	Helium MFC set to  0.000000
11/19/2011	8:55:04 PM	H2 MFC set to  0.000000
11/19/2011	8:55:04 PM	BCl3 MFC set to  0.000000
11/19/2011	8:55:04 PM	PHl3 MFC set to  0.000000
11/19/2011	8:55:04 PM	SiCl4 MFC set to  0.000000
11/19/2011	8:55:04 PM	Bypass solenoid MFC set to  0.000000
11/19/2011	8:55:04 PM	Tube furnace set to 150
11/19/2011	8:55:07 PM	Helium valve closed
11/19/2011	8:55:07 PM	H2 valve closed
11/19/2011	8:55:07 PM	BCl3 valve closed
11/19/2011	8:55:07 PM	PH3 valve closed
11/19/2011	8:55:07 PM	SiCl4 pre valve closed
11/19/2011	8:55:07 PM	SiCl4 post valve closed
11/19/2011	8:55:07 PM	Bypass valve closed
11/19/2011	8:55:07 PM	Bubbler valve closed
11/19/2011	8:55:07 PM	Main Vac valve opened
11/19/2011	8:55:07 PM	Helium MFC set to  0.000000
11/19/2011	8:55:07 PM	H2 MFC set to  0.000000
11/19/2011	8:55:07 PM	BCl3 MFC set to  0.000000
11/19/2011	8:55:07 PM	PHl3 MFC set to  0.000000
11/19/2011	8:55:07 PM	SiCl4 MFC set to  0.000000
11/19/2011	8:55:07 PM	Bypass solenoid MFC set to  0.000000
11/19/2011	8:55:07 PM	Tube furnace set to 180
11/19/2011	8:55:37 PM	H2 valve closed
11/19/2011	8:55:37 PM	BCl3 valve closed
11/19/2011	8:55:37 PM	PH3 valve closed
11/19/2011	8:55:37 PM	SiCl4 pre valve closed
11/19/2011	8:55:37 PM	SiCl4 post valve closed
11/19/2011	8:55:37 PM	Bypass valve closed
11/19/2011	8:55:37 PM	Bubbler valve closed
11/19/2011	8:55:37 PM	Helium valve opened
11/19/2011	8:55:37 PM	Main Vac valve opened
11/19/2011	8:55:37 PM	Helium MFC set to  20.000000
11/19/2011	8:55:38 PM	H2 MFC set to  0.000000
11/19/2011	8:55:38 PM	BCl3 MFC set to  0.000000
11/19/2011	8:55:38 PM	PHl3 MFC set to  0.000000
11/19/2011	8:55:38 PM	SiCl4 MFC set to  0.000000
11/19/2011	8:55:38 PM	Bypass solenoid MFC set to  0.000000
11/19/2011	8:55:38 PM	Tube furnace set to 180
11/19/2011	8:56:08 PM	Helium valve closed
11/19/2011	8:56:08 PM	H2 valve closed
11/19/2011	8:56:08 PM	BCl3 valve closed
11/19/2011	8:56:08 PM	PH3 valve closed
11/19/2011	8:56:08 PM	SiCl4 pre valve closed
11/19/2011	8:56:08 PM	SiCl4 post valve closed
11/19/2011	8:56:08 PM	Bypass valve closed
11/19/2011	8:56:08 PM	Bubbler valve closed
11/19/2011	8:56:08 PM	Main Vac valve opened
11/19/2011	8:56:08 PM	Helium MFC set to  0.000000
11/19/2011	8:56:08 PM	H2 MFC set to  0.000000
11/19/2011	8:56:08 PM	BCl3 MFC set to  0.000000
11/19/2011	8:56:08 PM	PHl3 MFC set to  0.000000
11/19/2011	8:56:08 PM	SiCl4 MFC set to  0.000000
11/19/2011	8:56:08 PM	Bypass solenoid MFC set to  0.000000
11/19/2011	8:56:08 PM	Tube furnace set to 150
11/19/2011	8:56:38 PM	H2 valve closed
11/19/2011	8:56:38 PM	BCl3 valve closed
11/19/2011	8:56:38 PM	PH3 valve closed
11/19/2011	8:56:38 PM	SiCl4 pre valve closed
11/19/2011	8:56:38 PM	SiCl4 post valve closed
11/19/2011	8:56:38 PM	Bypass valve closed
11/19/2011	8:56:38 PM	Bubbler valve closed
11/19/2011	8:56:38 PM	Helium valve opened
11/19/2011	8:56:38 PM	Main Vac valve opened
11/19/2011	8:56:38 PM	Helium MFC set to  20.000000
11/19/2011	8:56:38 PM	H2 MFC set to  0.000000
11/19/2011	8:56:38 PM	BCl3 MFC set to  0.000000
11/19/2011	8:56:38 PM	PHl3 MFC set to  0.000000
11/19/2011	8:56:38 PM	SiCl4 MFC set to  0.000000
11/19/2011	8:56:38 PM	Bypass solenoid MFC set to  0.000000
11/19/2011	8:56:38 PM	Tube furnace set to 180
11/19/2011	8:57:08 PM	Helium valve closed
11/19/2011	8:57:08 PM	H2 valve closed
11/19/2011	8:57:08 PM	BCl3 valve closed
11/19/2011	8:57:08 PM	PH3 valve closed
11/19/2011	8:57:08 PM	SiCl4 pre valve closed
11/19/2011	8:57:08 PM	SiCl4 post valve closed
11/19/2011	8:57:08 PM	Bypass valve closed
11/19/2011	8:57:08 PM	Bubbler valve closed
11/19/2011	8:57:08 PM	Main Vac valve opened
11/19/2011	8:57:08 PM	Helium MFC set to  0.000000
11/19/2011	8:57:08 PM	H2 MFC set to  0.000000
11/19/2011	8:57:08 PM	BCl3 MFC set to  0.000000
11/19/2011	8:57:08 PM	PHl3 MFC set to  0.000000
11/19/2011	8:57:08 PM	SiCl4 MFC set to  0.000000
11/19/2011	8:57:08 PM	Bypass solenoid MFC set to  0.000000
11/19/2011	8:57:08 PM	Tube furnace set to 150
11/19/2011	8:57:38 PM	H2 valve closed
11/19/2011	8:57:38 PM	BCl3 valve closed
11/19/2011	8:57:38 PM	PH3 valve closed
11/19/2011	8:57:38 PM	SiCl4 pre valve closed
11/19/2011	8:57:38 PM	SiCl4 post valve closed
11/19/2011	8:57:38 PM	Bypass valve closed
11/19/2011	8:57:38 PM	Bubbler valve closed
11/19/2011	8:57:38 PM	Helium valve opened
11/19/2011	8:57:38 PM	Main Vac valve opened
11/19/2011	8:57:38 PM	Helium MFC set to  20.000000
11/19/2011	8:57:38 PM	H2 MFC set to  0.000000
11/19/2011	8:57:38 PM	BCl3 MFC set to  0.000000
11/19/2011	8:57:38 PM	PHl3 MFC set to  0.000000
11/19/2011	8:57:38 PM	SiCl4 MFC set to  0.000000
11/19/2011	8:57:38 PM	Bypass solenoid MFC set to  0.000000
11/19/2011	8:57:38 PM	Tube furnace set to 150
11/19/2011	8:58:09 PM	Helium valve closed
11/19/2011	8:58:09 PM	H2 valve closed
11/19/2011	8:58:09 PM	BCl3 valve closed
11/19/2011	8:58:09 PM	PH3 valve closed
11/19/2011	8:58:09 PM	SiCl4 pre valve closed
11/19/2011	8:58:09 PM	SiCl4 post valve closed
11/19/2011	8:58:09 PM	Bypass valve closed
11/19/2011	8:58:09 PM	Bubbler valve closed
11/19/2011	8:58:09 PM	Main Vac valve opened
11/19/2011	8:58:09 PM	Helium MFC set to  0.000000
11/19/2011	8:58:09 PM	H2 MFC set to  0.000000
11/19/2011	8:58:09 PM	BCl3 MFC set to  0.000000
11/19/2011	8:58:09 PM	PHl3 MFC set to  0.000000
11/19/2011	8:58:09 PM	SiCl4 MFC set to  0.000000
11/19/2011	8:58:09 PM	Bypass solenoid MFC set to  0.000000
11/19/2011	8:58:09 PM	Tube furnace set to 150
11/19/2011	8:58:39 PM	H2 valve closed
11/19/2011	8:58:39 PM	BCl3 valve closed
11/19/2011	8:58:39 PM	PH3 valve closed
11/19/2011	8:58:39 PM	SiCl4 pre valve closed
11/19/2011	8:58:39 PM	SiCl4 post valve closed
11/19/2011	8:58:39 PM	Bypass valve closed
11/19/2011	8:58:39 PM	Bubbler valve closed
11/19/2011	8:58:39 PM	Helium valve opened
11/19/2011	8:58:39 PM	Main Vac valve opened
11/19/2011	8:58:39 PM	Helium MFC set to  20.000000
11/19/2011	8:58:39 PM	H2 MFC set to  0.000000
11/19/2011	8:58:39 PM	BCl3 MFC set to  0.000000
11/19/2011	8:58:39 PM	PHl3 MFC set to  0.000000
11/19/2011	8:58:39 PM	SiCl4 MFC set to  0.000000
11/19/2011	8:58:39 PM	Bypass solenoid MFC set to  0.000000
11/19/2011	8:58:39 PM	Tube furnace set to 180
11/19/2011	8:59:09 PM	Helium valve closed
11/19/2011	8:59:09 PM	H2 valve closed
11/19/2011	8:59:09 PM	BCl3 valve closed
11/19/2011	8:59:09 PM	PH3 valve closed
11/19/2011	8:59:09 PM	SiCl4 pre valve closed
11/19/2011	8:59:09 PM	SiCl4 post valve closed
11/19/2011	8:59:09 PM	Bypass valve closed
11/19/2011	8:59:09 PM	Bubbler valve closed
11/19/2011	8:59:09 PM	Main Vac valve opened
11/19/2011	8:59:09 PM	Helium MFC set to  0.000000
11/19/2011	8:59:09 PM	H2 MFC set to  0.000000
11/19/2011	8:59:09 PM	BCl3 MFC set to  0.000000
11/19/2011	8:59:09 PM	PHl3 MFC set to  0.000000
11/19/2011	8:59:09 PM	SiCl4 MFC set to  0.000000
11/19/2011	8:59:09 PM	Bypass solenoid MFC set to  0.000000
11/19/2011	8:59:09 PM	Tube furnace set to 150
11/19/2011	8:59:39 PM	H2 valve closed
11/19/2011	8:59:39 PM	BCl3 valve closed
11/19/2011	8:59:39 PM	PH3 valve closed
11/19/2011	8:59:39 PM	SiCl4 pre valve closed
11/19/2011	8:59:39 PM	SiCl4 post valve closed
11/19/2011	8:59:39 PM	Bypass valve closed
11/19/2011	8:59:39 PM	Bubbler valve closed
11/19/2011	8:59:39 PM	Helium valve opened
11/19/2011	8:59:39 PM	Main Vac valve opened
11/19/2011	8:59:39 PM	Helium MFC set to  20.000000
11/19/2011	8:59:39 PM	H2 MFC set to  0.000000
11/19/2011	8:59:39 PM	BCl3 MFC set to  0.000000
11/19/2011	8:59:39 PM	PHl3 MFC set to  0.000000
11/19/2011	8:59:39 PM	SiCl4 MFC set to  0.000000
11/19/2011	8:59:39 PM	Bypass solenoid MFC set to  0.000000
11/19/2011	8:59:39 PM	Tube furnace set to 150
11/19/2011	9:00:09 PM	Helium valve closed
11/19/2011	9:00:09 PM	H2 valve closed
11/19/2011	9:00:09 PM	BCl3 valve closed
11/19/2011	9:00:09 PM	PH3 valve closed
11/19/2011	9:00:09 PM	SiCl4 pre valve closed
11/19/2011	9:00:09 PM	SiCl4 post valve closed
11/19/2011	9:00:09 PM	Bypass valve closed
11/19/2011	9:00:09 PM	Bubbler valve closed
11/19/2011	9:00:09 PM	Main Vac valve opened
11/19/2011	9:00:09 PM	Helium MFC set to  0.000000
11/19/2011	9:00:09 PM	H2 MFC set to  0.000000
11/19/2011	9:00:09 PM	BCl3 MFC set to  0.000000
11/19/2011	9:00:09 PM	PHl3 MFC set to  0.000000
11/19/2011	9:00:09 PM	SiCl4 MFC set to  0.000000
11/19/2011	9:00:09 PM	Bypass solenoid MFC set to  0.000000
11/19/2011	9:00:10 PM	Tube furnace set to 150
11/19/2011	9:00:40 PM	H2 valve closed
11/19/2011	9:00:40 PM	BCl3 valve closed
11/19/2011	9:00:40 PM	PH3 valve closed
11/19/2011	9:00:40 PM	SiCl4 pre valve closed
11/19/2011	9:00:40 PM	SiCl4 post valve closed
11/19/2011	9:00:40 PM	Bypass valve closed
11/19/2011	9:00:40 PM	Bubbler valve closed
11/19/2011	9:00:40 PM	Helium valve opened
11/19/2011	9:00:40 PM	Main Vac valve opened
11/19/2011	9:00:40 PM	Helium MFC set to  20.000000
11/19/2011	9:00:40 PM	H2 MFC set to  0.000000
11/19/2011	9:00:40 PM	BCl3 MFC set to  0.000000
11/19/2011	9:00:40 PM	PHl3 MFC set to  0.000000
11/19/2011	9:00:40 PM	SiCl4 MFC set to  0.000000
11/19/2011	9:00:40 PM	Bypass solenoid MFC set to  0.000000
11/19/2011	9:00:40 PM	Tube furnace set to 150
11/19/2011	9:01:10 PM	Helium valve closed
11/19/2011	9:01:10 PM	H2 valve closed
11/19/2011	9:01:10 PM	BCl3 valve closed
11/19/2011	9:01:10 PM	PH3 valve closed
11/19/2011	9:01:10 PM	SiCl4 pre valve closed
11/19/2011	9:01:10 PM	SiCl4 post valve closed
11/19/2011	9:01:10 PM	Bypass valve closed
11/19/2011	9:01:10 PM	Bubbler valve closed
11/19/2011	9:01:10 PM	Main Vac valve opened
11/19/2011	9:01:10 PM	Helium MFC set to  0.000000
11/19/2011	9:01:10 PM	H2 MFC set to  0.000000
11/19/2011	9:01:10 PM	BCl3 MFC set to  0.000000
11/19/2011	9:01:10 PM	PHl3 MFC set to  0.000000
11/19/2011	9:01:10 PM	SiCl4 MFC set to  0.000000
11/19/2011	9:01:10 PM	Bypass solenoid MFC set to  0.000000
11/19/2011	9:01:10 PM	Tube furnace set to 150
11/19/2011	9:01:40 PM	H2 valve closed
11/19/2011	9:01:40 PM	BCl3 valve closed
11/19/2011	9:01:40 PM	PH3 valve closed
11/19/2011	9:01:40 PM	SiCl4 pre valve closed
11/19/2011	9:01:40 PM	SiCl4 post valve closed
11/19/2011	9:01:40 PM	Bypass valve closed
11/19/2011	9:01:40 PM	Bubbler valve closed
11/19/2011	9:01:40 PM	Helium valve opened
11/19/2011	9:01:40 PM	Main Vac valve opened
11/19/2011	9:01:40 PM	Helium MFC set to  20.000000
11/19/2011	9:01:40 PM	H2 MFC set to  0.000000
11/19/2011	9:01:40 PM	BCl3 MFC set to  0.000000
11/19/2011	9:01:40 PM	PHl3 MFC set to  0.000000
11/19/2011	9:01:40 PM	SiCl4 MFC set to  0.000000
11/19/2011	9:01:40 PM	Bypass solenoid MFC set to  0.000000
11/19/2011	9:01:40 PM	Tube furnace set to 150
11/19/2011	9:02:10 PM	Helium valve closed
11/19/2011	9:02:10 PM	H2 valve closed
11/19/2011	9:02:10 PM	BCl3 valve closed
11/19/2011	9:02:10 PM	PH3 valve closed
11/19/2011	9:02:10 PM	SiCl4 pre valve closed
11/19/2011	9:02:10 PM	SiCl4 post valve closed
11/19/2011	9:02:10 PM	Bypass valve closed
11/19/2011	9:02:10 PM	Bubbler valve closed
11/19/2011	9:02:10 PM	Main Vac valve opened
11/19/2011	9:02:10 PM	Helium MFC set to  0.000000
11/19/2011	9:02:10 PM	H2 MFC set to  0.000000
11/19/2011	9:02:10 PM	BCl3 MFC set to  0.000000
11/19/2011	9:02:10 PM	PHl3 MFC set to  0.000000
11/19/2011	9:02:10 PM	SiCl4 MFC set to  0.000000
11/19/2011	9:02:10 PM	Bypass solenoid MFC set to  0.000000
11/19/2011	9:02:10 PM	Tube furnace set to 150
11/19/2011	9:02:40 PM	H2 valve closed
11/19/2011	9:02:40 PM	BCl3 valve closed
11/19/2011	9:02:40 PM	PH3 valve closed
11/19/2011	9:02:40 PM	SiCl4 pre valve closed
11/19/2011	9:02:40 PM	SiCl4 post valve closed
11/19/2011	9:02:40 PM	Bypass valve closed
11/19/2011	9:02:40 PM	Bubbler valve closed
11/19/2011	9:02:40 PM	Helium valve opened
11/19/2011	9:02:40 PM	Main Vac valve opened
11/19/2011	9:02:40 PM	Helium MFC set to  20.000000
11/19/2011	9:02:40 PM	H2 MFC set to  0.000000
11/19/2011	9:02:40 PM	BCl3 MFC set to  0.000000
11/19/2011	9:02:40 PM	PHl3 MFC set to  0.000000
11/19/2011	9:02:40 PM	SiCl4 MFC set to  0.000000
11/19/2011	9:02:40 PM	Bypass solenoid MFC set to  0.000000
11/19/2011	9:02:41 PM	Tube furnace set to 150
11/19/2011	9:03:11 PM	Helium valve closed
11/19/2011	9:03:11 PM	H2 valve closed
11/19/2011	9:03:11 PM	BCl3 valve closed
11/19/2011	9:03:11 PM	PH3 valve closed
11/19/2011	9:03:11 PM	SiCl4 pre valve closed
11/19/2011	9:03:11 PM	SiCl4 post valve closed
11/19/2011	9:03:11 PM	Bypass valve closed
11/19/2011	9:03:11 PM	Bubbler valve closed
11/19/2011	9:03:11 PM	Main Vac valve opened
11/19/2011	9:03:11 PM	Helium MFC set to  0.000000
11/19/2011	9:03:11 PM	H2 MFC set to  0.000000
11/19/2011	9:03:11 PM	BCl3 MFC set to  0.000000
11/19/2011	9:03:11 PM	PHl3 MFC set to  0.000000
11/19/2011	9:03:11 PM	SiCl4 MFC set to  0.000000
11/19/2011	9:03:11 PM	Bypass solenoid MFC set to  0.000000
11/19/2011	9:03:11 PM	Tube furnace set to 150
11/19/2011	9:03:41 PM	H2 valve closed
11/19/2011	9:03:41 PM	BCl3 valve closed
11/19/2011	9:03:41 PM	PH3 valve closed
11/19/2011	9:03:41 PM	SiCl4 pre valve closed
11/19/2011	9:03:41 PM	SiCl4 post valve closed
11/19/2011	9:03:41 PM	Bypass valve closed
11/19/2011	9:03:41 PM	Bubbler valve closed
11/19/2011	9:03:41 PM	Helium valve opened
11/19/2011	9:03:41 PM	Main Vac valve opened
11/19/2011	9:03:41 PM	Helium MFC set to  20.000000
11/19/2011	9:03:41 PM	H2 MFC set to  0.000000
11/19/2011	9:03:41 PM	BCl3 MFC set to  0.000000
11/19/2011	9:03:41 PM	PHl3 MFC set to  0.000000
11/19/2011	9:03:41 PM	SiCl4 MFC set to  0.000000
11/19/2011	9:03:41 PM	Bypass solenoid MFC set to  0.000000
11/19/2011	9:03:41 PM	Tube furnace set to 150
11/19/2011	9:04:11 PM	Helium valve closed
11/19/2011	9:04:11 PM	H2 valve closed
11/19/2011	9:04:11 PM	BCl3 valve closed
11/19/2011	9:04:11 PM	PH3 valve closed
11/19/2011	9:04:11 PM	SiCl4 pre valve closed
11/19/2011	9:04:11 PM	SiCl4 post valve closed
11/19/2011	9:04:11 PM	Bypass valve closed
11/19/2011	9:04:11 PM	Bubbler valve closed
11/19/2011	9:04:11 PM	Main Vac valve opened
11/19/2011	9:04:11 PM	Helium MFC set to  0.000000
11/19/2011	9:04:11 PM	H2 MFC set to  0.000000
11/19/2011	9:04:11 PM	BCl3 MFC set to  0.000000
11/19/2011	9:04:11 PM	PHl3 MFC set to  0.000000
11/19/2011	9:04:11 PM	SiCl4 MFC set to  0.000000
11/19/2011	9:04:11 PM	Bypass solenoid MFC set to  0.000000
11/19/2011	9:04:11 PM	Tube furnace set to 150
11/19/2011	9:04:41 PM	H2 valve closed
11/19/2011	9:04:41 PM	BCl3 valve closed
11/19/2011	9:04:41 PM	PH3 valve closed
11/19/2011	9:04:41 PM	SiCl4 pre valve closed
11/19/2011	9:04:41 PM	SiCl4 post valve closed
11/19/2011	9:04:41 PM	Bypass valve closed
11/19/2011	9:04:41 PM	Bubbler valve closed
11/19/2011	9:04:41 PM	Helium valve opened
11/19/2011	9:04:41 PM	Main Vac valve opened
11/19/2011	9:04:41 PM	Helium MFC set to  20.000000
11/19/2011	9:04:41 PM	H2 MFC set to  0.000000
11/19/2011	9:04:41 PM	BCl3 MFC set to  0.000000
11/19/2011	9:04:41 PM	PHl3 MFC set to  0.000000
11/19/2011	9:04:41 PM	SiCl4 MFC set to  0.000000
11/19/2011	9:04:41 PM	Bypass solenoid MFC set to  0.000000
11/19/2011	9:04:41 PM	Tube furnace set to 150
11/19/2011	9:05:11 PM	Helium valve closed
11/19/2011	9:05:11 PM	H2 valve closed
11/19/2011	9:05:11 PM	BCl3 valve closed
11/19/2011	9:05:11 PM	PH3 valve closed
11/19/2011	9:05:11 PM	SiCl4 pre valve closed
11/19/2011	9:05:11 PM	SiCl4 post valve closed
11/19/2011	9:05:11 PM	Bypass valve closed
11/19/2011	9:05:11 PM	Bubbler valve closed
11/19/2011	9:05:11 PM	Main Vac valve opened
11/19/2011	9:05:11 PM	Helium MFC set to  0.000000
11/19/2011	9:05:11 PM	H2 MFC set to  0.000000
11/19/2011	9:05:11 PM	BCl3 MFC set to  0.000000
11/19/2011	9:05:11 PM	PHl3 MFC set to  0.000000
11/19/2011	9:05:11 PM	SiCl4 MFC set to  0.000000
11/19/2011	9:05:11 PM	Bypass solenoid MFC set to  0.000000
11/19/2011	9:05:12 PM	Tube furnace set to 150
11/19/2011	9:05:42 PM	H2 valve closed
11/19/2011	9:05:42 PM	BCl3 valve closed
11/19/2011	9:05:42 PM	PH3 valve closed
11/19/2011	9:05:42 PM	SiCl4 pre valve closed
11/19/2011	9:05:42 PM	SiCl4 post valve closed
11/19/2011	9:05:42 PM	Bypass valve closed
11/19/2011	9:05:42 PM	Bubbler valve closed
11/19/2011	9:05:42 PM	Helium valve opened
11/19/2011	9:05:42 PM	Main Vac valve opened
11/19/2011	9:05:42 PM	Helium MFC set to  20.000000
11/19/2011	9:05:42 PM	H2 MFC set to  0.000000
11/19/2011	9:05:42 PM	BCl3 MFC set to  0.000000
11/19/2011	9:05:42 PM	PHl3 MFC set to  0.000000
11/19/2011	9:05:42 PM	SiCl4 MFC set to  0.000000
11/19/2011	9:05:42 PM	Bypass solenoid MFC set to  0.000000
11/19/2011	9:05:42 PM	Tube furnace set to 150
11/19/2011	9:06:12 PM	Helium valve closed
11/19/2011	9:06:12 PM	H2 valve closed
11/19/2011	9:06:12 PM	BCl3 valve closed
11/19/2011	9:06:12 PM	PH3 valve closed
11/19/2011	9:06:12 PM	SiCl4 pre valve closed
11/19/2011	9:06:12 PM	SiCl4 post valve closed
11/19/2011	9:06:12 PM	Bypass valve closed
11/19/2011	9:06:12 PM	Bubbler valve closed
11/19/2011	9:06:12 PM	Main Vac valve opened
11/19/2011	9:06:12 PM	Helium MFC set to  0.000000
11/19/2011	9:06:12 PM	H2 MFC set to  0.000000
11/19/2011	9:06:12 PM	BCl3 MFC set to  0.000000
11/19/2011	9:06:12 PM	PHl3 MFC set to  0.000000
11/19/2011	9:06:12 PM	SiCl4 MFC set to  0.000000
11/19/2011	9:06:12 PM	Bypass solenoid MFC set to  0.000000
11/19/2011	9:06:12 PM	Tube furnace set to 150
11/19/2011	9:06:42 PM	H2 valve closed
11/19/2011	9:06:42 PM	BCl3 valve closed
11/19/2011	9:06:42 PM	PH3 valve closed
11/19/2011	9:06:42 PM	SiCl4 pre valve closed
11/19/2011	9:06:42 PM	SiCl4 post valve closed
11/19/2011	9:06:42 PM	Bypass valve closed
11/19/2011	9:06:42 PM	Bubbler valve closed
11/19/2011	9:06:42 PM	Helium valve opened
11/19/2011	9:06:42 PM	Main Vac valve opened
11/19/2011	9:06:42 PM	Helium MFC set to  20.000000
11/19/2011	9:06:42 PM	H2 MFC set to  0.000000
11/19/2011	9:06:42 PM	BCl3 MFC set to  0.000000
11/19/2011	9:06:42 PM	PHl3 MFC set to  0.000000
11/19/2011	9:06:42 PM	SiCl4 MFC set to  0.000000
11/19/2011	9:06:42 PM	Bypass solenoid MFC set to  0.000000
11/19/2011	9:06:42 PM	Tube furnace set to 150
11/19/2011	9:07:12 PM	Helium valve closed
11/19/2011	9:07:12 PM	H2 valve closed
11/19/2011	9:07:12 PM	BCl3 valve closed
11/19/2011	9:07:12 PM	PH3 valve closed
11/19/2011	9:07:12 PM	SiCl4 pre valve closed
11/19/2011	9:07:12 PM	SiCl4 post valve closed
11/19/2011	9:07:12 PM	Bypass valve closed
11/19/2011	9:07:12 PM	Bubbler valve closed
11/19/2011	9:07:12 PM	Main Vac valve opened
11/19/2011	9:07:12 PM	Helium MFC set to  0.000000
11/19/2011	9:07:12 PM	H2 MFC set to  0.000000
11/19/2011	9:07:12 PM	BCl3 MFC set to  0.000000
11/19/2011	9:07:12 PM	PHl3 MFC set to  0.000000
11/19/2011	9:07:12 PM	SiCl4 MFC set to  0.000000
11/19/2011	9:07:12 PM	Bypass solenoid MFC set to  0.000000
11/19/2011	9:07:12 PM	Tube furnace set to 150
11/19/2011	9:07:42 PM	H2 valve closed
11/19/2011	9:07:42 PM	BCl3 valve closed
11/19/2011	9:07:42 PM	PH3 valve closed
11/19/2011	9:07:42 PM	SiCl4 pre valve closed
11/19/2011	9:07:42 PM	SiCl4 post valve closed
11/19/2011	9:07:42 PM	Bypass valve closed
11/19/2011	9:07:42 PM	Bubbler valve closed
11/19/2011	9:07:42 PM	Helium valve opened
11/19/2011	9:07:42 PM	Main Vac valve opened
11/19/2011	9:07:42 PM	Helium MFC set to  20.000000
11/19/2011	9:07:42 PM	H2 MFC set to  0.000000
11/19/2011	9:07:42 PM	BCl3 MFC set to  0.000000
11/19/2011	9:07:42 PM	PHl3 MFC set to  0.000000
11/19/2011	9:07:42 PM	SiCl4 MFC set to  0.000000
11/19/2011	9:07:42 PM	Bypass solenoid MFC set to  0.000000
11/19/2011	9:07:43 PM	Tube furnace set to 150
11/19/2011	9:08:13 PM	Helium valve closed
11/19/2011	9:08:13 PM	H2 valve closed
11/19/2011	9:08:13 PM	BCl3 valve closed
11/19/2011	9:08:13 PM	PH3 valve closed
11/19/2011	9:08:13 PM	SiCl4 pre valve closed
11/19/2011	9:08:13 PM	SiCl4 post valve closed
11/19/2011	9:08:13 PM	Bypass valve closed
11/19/2011	9:08:13 PM	Bubbler valve closed
11/19/2011	9:08:13 PM	Main Vac valve opened
11/19/2011	9:08:13 PM	Helium MFC set to  0.000000
11/19/2011	9:08:13 PM	H2 MFC set to  0.000000
11/19/2011	9:08:13 PM	BCl3 MFC set to  0.000000
11/19/2011	9:08:13 PM	PHl3 MFC set to  0.000000
11/19/2011	9:08:13 PM	SiCl4 MFC set to  0.000000
11/19/2011	9:08:13 PM	Bypass solenoid MFC set to  0.000000
11/19/2011	9:08:13 PM	Tube furnace set to 150
11/19/2011	9:08:43 PM	H2 valve closed
11/19/2011	9:08:43 PM	BCl3 valve closed
11/19/2011	9:08:43 PM	PH3 valve closed
11/19/2011	9:08:43 PM	SiCl4 pre valve closed
11/19/2011	9:08:43 PM	SiCl4 post valve closed
11/19/2011	9:08:43 PM	Bypass valve closed
11/19/2011	9:08:43 PM	Bubbler valve closed
11/19/2011	9:08:43 PM	Helium valve opened
11/19/2011	9:08:43 PM	Main Vac valve opened
11/19/2011	9:08:43 PM	Helium MFC set to  20.000000
11/19/2011	9:08:43 PM	H2 MFC set to  0.000000
11/19/2011	9:08:43 PM	BCl3 MFC set to  0.000000
11/19/2011	9:08:43 PM	PHl3 MFC set to  0.000000
11/19/2011	9:08:43 PM	SiCl4 MFC set to  0.000000
11/19/2011	9:08:43 PM	Bypass solenoid MFC set to  0.000000
11/19/2011	9:08:43 PM	Tube furnace set to 150
11/19/2011	9:09:13 PM	Helium valve closed
11/19/2011	9:09:13 PM	H2 valve closed
11/19/2011	9:09:13 PM	BCl3 valve closed
11/19/2011	9:09:13 PM	PH3 valve closed
11/19/2011	9:09:13 PM	SiCl4 pre valve closed
11/19/2011	9:09:13 PM	SiCl4 post valve closed
11/19/2011	9:09:13 PM	Bypass valve closed
11/19/2011	9:09:13 PM	Bubbler valve closed
11/19/2011	9:09:13 PM	Main Vac valve opened
11/19/2011	9:09:13 PM	Helium MFC set to  0.000000
11/19/2011	9:09:13 PM	H2 MFC set to  0.000000
11/19/2011	9:09:13 PM	BCl3 MFC set to  0.000000
11/19/2011	9:09:13 PM	PHl3 MFC set to  0.000000
11/19/2011	9:09:13 PM	SiCl4 MFC set to  0.000000
11/19/2011	9:09:13 PM	Bypass solenoid MFC set to  0.000000
11/19/2011	9:09:13 PM	Tube furnace set to 150
11/19/2011	9:09:43 PM	H2 valve closed
11/19/2011	9:09:43 PM	BCl3 valve closed
11/19/2011	9:09:43 PM	PH3 valve closed
11/19/2011	9:09:43 PM	SiCl4 pre valve closed
11/19/2011	9:09:43 PM	SiCl4 post valve closed
11/19/2011	9:09:43 PM	Bypass valve closed
11/19/2011	9:09:43 PM	Bubbler valve closed
11/19/2011	9:09:43 PM	Helium valve opened
11/19/2011	9:09:43 PM	Main Vac valve opened
11/19/2011	9:09:43 PM	Helium MFC set to  20.000000
11/19/2011	9:09:43 PM	H2 MFC set to  0.000000
11/19/2011	9:09:43 PM	BCl3 MFC set to  0.000000
11/19/2011	9:09:43 PM	PHl3 MFC set to  0.000000
11/19/2011	9:09:43 PM	SiCl4 MFC set to  0.000000
11/19/2011	9:09:43 PM	Bypass solenoid MFC set to  0.000000
11/19/2011	9:09:43 PM	Tube furnace set to 150
11/19/2011	9:10:13 PM	Helium valve closed
11/19/2011	9:10:13 PM	H2 valve closed
11/19/2011	9:10:13 PM	BCl3 valve closed
11/19/2011	9:10:13 PM	PH3 valve closed
11/19/2011	9:10:13 PM	SiCl4 pre valve closed
11/19/2011	9:10:13 PM	SiCl4 post valve closed
11/19/2011	9:10:13 PM	Bypass valve closed
11/19/2011	9:10:13 PM	Bubbler valve closed
11/19/2011	9:10:13 PM	Main Vac valve opened
11/19/2011	9:10:13 PM	Helium MFC set to  0.000000
11/19/2011	9:10:13 PM	H2 MFC set to  0.000000
11/19/2011	9:10:13 PM	BCl3 MFC set to  0.000000
11/19/2011	9:10:13 PM	PHl3 MFC set to  0.000000
11/19/2011	9:10:14 PM	SiCl4 MFC set to  0.000000
11/19/2011	9:10:14 PM	Bypass solenoid MFC set to  0.000000
11/19/2011	9:10:14 PM	Tube furnace set to 150
11/19/2011	9:10:44 PM	H2 valve closed
11/19/2011	9:10:44 PM	BCl3 valve closed
11/19/2011	9:10:44 PM	PH3 valve closed
11/19/2011	9:10:44 PM	SiCl4 pre valve closed
11/19/2011	9:10:44 PM	SiCl4 post valve closed
11/19/2011	9:10:44 PM	Bypass valve closed
11/19/2011	9:10:44 PM	Bubbler valve closed
11/19/2011	9:10:44 PM	Helium valve opened
11/19/2011	9:10:44 PM	Main Vac valve opened
11/19/2011	9:10:44 PM	Helium MFC set to  20.000000
11/19/2011	9:10:44 PM	H2 MFC set to  0.000000
11/19/2011	9:10:44 PM	BCl3 MFC set to  0.000000
11/19/2011	9:10:44 PM	PHl3 MFC set to  0.000000
11/19/2011	9:10:44 PM	SiCl4 MFC set to  0.000000
11/19/2011	9:10:44 PM	Bypass solenoid MFC set to  0.000000
11/19/2011	9:10:44 PM	Tube furnace set to 150
11/19/2011	9:11:14 PM	Helium valve closed
11/19/2011	9:11:14 PM	H2 valve closed
11/19/2011	9:11:14 PM	BCl3 valve closed
11/19/2011	9:11:14 PM	PH3 valve closed
11/19/2011	9:11:14 PM	SiCl4 pre valve closed
11/19/2011	9:11:14 PM	SiCl4 post valve closed
11/19/2011	9:11:14 PM	Bypass valve closed
11/19/2011	9:11:14 PM	Bubbler valve closed
11/19/2011	9:11:14 PM	Main Vac valve opened
11/19/2011	9:11:14 PM	Helium MFC set to  0.000000
11/19/2011	9:11:14 PM	H2 MFC set to  0.000000
11/19/2011	9:11:14 PM	BCl3 MFC set to  0.000000
11/19/2011	9:11:14 PM	PHl3 MFC set to  0.000000
11/19/2011	9:11:14 PM	SiCl4 MFC set to  0.000000
11/19/2011	9:11:14 PM	Bypass solenoid MFC set to  0.000000
11/19/2011	9:11:14 PM	Tube furnace set to 150
11/19/2011	9:11:44 PM	H2 valve closed
11/19/2011	9:11:44 PM	BCl3 valve closed
11/19/2011	9:11:44 PM	PH3 valve closed
11/19/2011	9:11:44 PM	SiCl4 pre valve closed
11/19/2011	9:11:44 PM	SiCl4 post valve closed
11/19/2011	9:11:44 PM	Bypass valve closed
11/19/2011	9:11:44 PM	Bubbler valve closed
11/19/2011	9:11:44 PM	Helium valve opened
11/19/2011	9:11:44 PM	Main Vac valve opened
11/19/2011	9:11:44 PM	Helium MFC set to  20.000000
11/19/2011	9:11:44 PM	H2 MFC set to  0.000000
11/19/2011	9:11:44 PM	BCl3 MFC set to  0.000000
11/19/2011	9:11:44 PM	PHl3 MFC set to  0.000000
11/19/2011	9:11:44 PM	SiCl4 MFC set to  0.000000
11/19/2011	9:11:44 PM	Bypass solenoid MFC set to  0.000000
11/19/2011	9:11:44 PM	Tube furnace set to 150
11/19/2011	9:12:14 PM	Helium valve closed
11/19/2011	9:12:14 PM	H2 valve closed
11/19/2011	9:12:14 PM	BCl3 valve closed
11/19/2011	9:12:14 PM	PH3 valve closed
11/19/2011	9:12:14 PM	SiCl4 pre valve closed
11/19/2011	9:12:14 PM	SiCl4 post valve closed
11/19/2011	9:12:14 PM	Bypass valve closed
11/19/2011	9:12:14 PM	Bubbler valve closed
11/19/2011	9:12:14 PM	Main Vac valve opened
11/19/2011	9:12:14 PM	Helium MFC set to  0.000000
11/19/2011	9:12:14 PM	H2 MFC set to  0.000000
11/19/2011	9:12:14 PM	BCl3 MFC set to  0.000000
11/19/2011	9:12:14 PM	PHl3 MFC set to  0.000000
11/19/2011	9:12:14 PM	SiCl4 MFC set to  0.000000
11/19/2011	9:12:14 PM	Bypass solenoid MFC set to  0.000000
11/19/2011	9:12:14 PM	Tube furnace set to 150
11/19/2011	9:12:45 PM	H2 valve closed
11/19/2011	9:12:45 PM	BCl3 valve closed
11/19/2011	9:12:45 PM	PH3 valve closed
11/19/2011	9:12:45 PM	SiCl4 pre valve closed
11/19/2011	9:12:45 PM	SiCl4 post valve closed
11/19/2011	9:12:45 PM	Bypass valve closed
11/19/2011	9:12:45 PM	Bubbler valve closed
11/19/2011	9:12:45 PM	Helium valve opened
11/19/2011	9:12:45 PM	Main Vac valve opened
11/19/2011	9:12:45 PM	Helium MFC set to  20.000000
11/19/2011	9:12:45 PM	H2 MFC set to  0.000000
11/19/2011	9:12:45 PM	BCl3 MFC set to  0.000000
11/19/2011	9:12:45 PM	PHl3 MFC set to  0.000000
11/19/2011	9:12:45 PM	SiCl4 MFC set to  0.000000
11/19/2011	9:12:45 PM	Bypass solenoid MFC set to  0.000000
11/19/2011	9:12:45 PM	Tube furnace set to 150
11/19/2011	9:13:15 PM	Helium valve closed
11/19/2011	9:13:15 PM	H2 valve closed
11/19/2011	9:13:15 PM	BCl3 valve closed
11/19/2011	9:13:15 PM	PH3 valve closed
11/19/2011	9:13:15 PM	SiCl4 pre valve closed
11/19/2011	9:13:15 PM	SiCl4 post valve closed
11/19/2011	9:13:15 PM	Bypass valve closed
11/19/2011	9:13:15 PM	Bubbler valve closed
11/19/2011	9:13:15 PM	Main Vac valve opened
11/19/2011	9:13:15 PM	Helium MFC set to  0.000000
11/19/2011	9:13:15 PM	H2 MFC set to  0.000000
11/19/2011	9:13:15 PM	BCl3 MFC set to  0.000000
11/19/2011	9:13:15 PM	PHl3 MFC set to  0.000000
11/19/2011	9:13:15 PM	SiCl4 MFC set to  0.000000
11/19/2011	9:13:15 PM	Bypass solenoid MFC set to  0.000000
11/19/2011	9:13:15 PM	Tube furnace set to 150
11/19/2011	9:13:16 PM	Run aborted at 9:13 PM
11/19/2011	9:13:16 PM	Helium valve closed
11/19/2011	9:13:16 PM	H2 valve closed
11/19/2011	9:13:16 PM	BCl3 valve closed
11/19/2011	9:13:16 PM	PH3 valve closed
11/19/2011	9:13:16 PM	SiCl4 pre valve closed
11/19/2011	9:13:16 PM	SiCl4 post valve closed
11/19/2011	9:13:16 PM	Bypass valve closed
11/19/2011	9:13:16 PM	Main Vac valve closed
11/19/2011	9:13:16 PM	Bubbler valve closed
11/19/2011	9:13:16 PM	Helium MFC set to  0.000000
11/19/2011	9:13:16 PM	H2 MFC set to  0.000000
11/19/2011	9:13:16 PM	BCl3 MFC set to  0.000000
11/19/2011	9:13:16 PM	PHl3 MFC set to  0.000000
11/19/2011	9:13:16 PM	SiCl4 MFC set to  0.000000
11/19/2011	9:13:16 PM	Tube furnace set to 0
11/19/2011	9:13:19 PM	Main Vac valve opened
11/19/2011	9:13:36 PM	Recipe started at 9:13 PM
11/19/2011	9:13:36 PM	Helium valve closed
11/19/2011	9:13:36 PM	H2 valve closed
11/19/2011	9:13:36 PM	BCl3 valve closed
11/19/2011	9:13:36 PM	PH3 valve closed
11/19/2011	9:13:36 PM	SiCl4 pre valve closed
11/19/2011	9:13:36 PM	SiCl4 post valve closed
11/19/2011	9:13:36 PM	Main Vac valve closed
11/19/2011	9:13:36 PM	Bubbler valve closed
11/19/2011	9:13:36 PM	Bypass valve opened
11/19/2011	9:13:36 PM	Helium MFC set to  0.000000
11/19/2011	9:13:36 PM	H2 MFC set to  0.000000
11/19/2011	9:13:36 PM	BCl3 MFC set to  0.000000
11/19/2011	9:13:36 PM	PHl3 MFC set to  0.000000
11/19/2011	9:13:36 PM	SiCl4 MFC set to  0.000000
11/19/2011	9:13:36 PM	Bypass solenoid MFC set to  0.000000
11/19/2011	9:13:36 PM	Tube furnace set to 180
11/19/2011	9:13:37 PM	Helium valve closed
11/19/2011	9:13:37 PM	H2 valve closed
11/19/2011	9:13:37 PM	BCl3 valve closed
11/19/2011	9:13:37 PM	PH3 valve closed
11/19/2011	9:13:37 PM	SiCl4 pre valve closed
11/19/2011	9:13:37 PM	SiCl4 post valve closed
11/19/2011	9:13:37 PM	Main Vac valve closed
11/19/2011	9:13:37 PM	Bubbler valve closed
11/19/2011	9:13:37 PM	Bypass valve opened
11/19/2011	9:13:37 PM	Helium MFC set to  0.000000
11/19/2011	9:13:37 PM	H2 MFC set to  0.000000
11/19/2011	9:13:37 PM	BCl3 MFC set to  0.000000
11/19/2011	9:13:37 PM	PHl3 MFC set to  0.000000
11/19/2011	9:13:37 PM	SiCl4 MFC set to  0.000000
11/19/2011	9:13:37 PM	Bypass solenoid MFC set to  0.000000
11/19/2011	9:13:37 PM	Tube furnace set to 150
11/19/2011	9:13:52 PM	Helium valve closed
11/19/2011	9:13:52 PM	H2 valve closed
11/19/2011	9:13:52 PM	BCl3 valve closed
11/19/2011	9:13:52 PM	PH3 valve closed
11/19/2011	9:13:52 PM	SiCl4 pre valve closed
11/19/2011	9:13:52 PM	SiCl4 post valve closed
11/19/2011	9:13:52 PM	Bypass valve closed
11/19/2011	9:13:52 PM	Bubbler valve closed
11/19/2011	9:13:52 PM	Main Vac valve opened
11/19/2011	9:13:52 PM	Helium MFC set to  0.000000
11/19/2011	9:13:52 PM	H2 MFC set to  0.000000
11/19/2011	9:13:52 PM	BCl3 MFC set to  0.000000
11/19/2011	9:13:52 PM	PHl3 MFC set to  0.000000
11/19/2011	9:13:52 PM	SiCl4 MFC set to  0.000000
11/19/2011	9:13:52 PM	Bypass solenoid MFC set to  0.000000
11/19/2011	9:13:52 PM	Tube furnace set to 180
11/19/2011	9:14:22 PM	H2 valve closed
11/19/2011	9:14:22 PM	BCl3 valve closed
11/19/2011	9:14:22 PM	PH3 valve closed
11/19/2011	9:14:22 PM	SiCl4 pre valve closed
11/19/2011	9:14:22 PM	SiCl4 post valve closed
11/19/2011	9:14:22 PM	Bypass valve closed
11/19/2011	9:14:22 PM	Bubbler valve closed
11/19/2011	9:14:22 PM	Helium valve opened
11/19/2011	9:14:22 PM	Main Vac valve opened
11/19/2011	9:14:22 PM	Helium MFC set to  20.000000
11/19/2011	9:14:22 PM	H2 MFC set to  0.000000
11/19/2011	9:14:22 PM	BCl3 MFC set to  0.000000
11/19/2011	9:14:22 PM	PHl3 MFC set to  0.000000
11/19/2011	9:14:22 PM	SiCl4 MFC set to  0.000000
11/19/2011	9:14:22 PM	Bypass solenoid MFC set to  0.000000
11/19/2011	9:14:22 PM	Tube furnace set to 180
11/19/2011	9:14:52 PM	Helium valve closed
11/19/2011	9:14:52 PM	H2 valve closed
11/19/2011	9:14:52 PM	BCl3 valve closed
11/19/2011	9:14:52 PM	PH3 valve closed
11/19/2011	9:14:52 PM	SiCl4 pre valve closed
11/19/2011	9:14:52 PM	SiCl4 post valve closed
11/19/2011	9:14:52 PM	Bypass valve closed
11/19/2011	9:14:52 PM	Bubbler valve closed
11/19/2011	9:14:52 PM	Main Vac valve opened
11/19/2011	9:14:52 PM	Helium MFC set to  0.000000
11/19/2011	9:14:52 PM	H2 MFC set to  0.000000
11/19/2011	9:14:52 PM	BCl3 MFC set to  0.000000
11/19/2011	9:14:52 PM	PHl3 MFC set to  0.000000
11/19/2011	9:14:52 PM	SiCl4 MFC set to  0.000000
11/19/2011	9:14:52 PM	Bypass solenoid MFC set to  0.000000
11/19/2011	9:14:52 PM	Tube furnace set to 150
11/19/2011	9:15:22 PM	H2 valve closed
11/19/2011	9:15:22 PM	BCl3 valve closed
11/19/2011	9:15:22 PM	PH3 valve closed
11/19/2011	9:15:22 PM	SiCl4 pre valve closed
11/19/2011	9:15:22 PM	SiCl4 post valve closed
11/19/2011	9:15:22 PM	Bypass valve closed
11/19/2011	9:15:22 PM	Bubbler valve closed
11/19/2011	9:15:22 PM	Helium valve opened
11/19/2011	9:15:22 PM	Main Vac valve opened
11/19/2011	9:15:22 PM	Helium MFC set to  20.000000
11/19/2011	9:15:22 PM	H2 MFC set to  0.000000
11/19/2011	9:15:22 PM	BCl3 MFC set to  0.000000
11/19/2011	9:15:22 PM	PHl3 MFC set to  0.000000
11/19/2011	9:15:22 PM	SiCl4 MFC set to  0.000000
11/19/2011	9:15:22 PM	Bypass solenoid MFC set to  0.000000
11/19/2011	9:15:22 PM	Tube furnace set to 180
11/19/2011	9:15:52 PM	Helium valve closed
11/19/2011	9:15:52 PM	H2 valve closed
11/19/2011	9:15:52 PM	BCl3 valve closed
11/19/2011	9:15:52 PM	PH3 valve closed
11/19/2011	9:15:52 PM	SiCl4 pre valve closed
11/19/2011	9:15:52 PM	SiCl4 post valve closed
11/19/2011	9:15:52 PM	Bypass valve closed
11/19/2011	9:15:52 PM	Bubbler valve closed
11/19/2011	9:15:52 PM	Main Vac valve opened
11/19/2011	9:15:52 PM	Helium MFC set to  0.000000
11/19/2011	9:15:52 PM	H2 MFC set to  0.000000
11/19/2011	9:15:52 PM	BCl3 MFC set to  0.000000
11/19/2011	9:15:52 PM	PHl3 MFC set to  0.000000
11/19/2011	9:15:52 PM	SiCl4 MFC set to  0.000000
11/19/2011	9:15:52 PM	Bypass solenoid MFC set to  0.000000
11/19/2011	9:15:53 PM	Tube furnace set to 150
11/19/2011	9:16:23 PM	H2 valve closed
11/19/2011	9:16:23 PM	BCl3 valve closed
11/19/2011	9:16:23 PM	PH3 valve closed
11/19/2011	9:16:23 PM	SiCl4 pre valve closed
11/19/2011	9:16:23 PM	SiCl4 post valve closed
11/19/2011	9:16:23 PM	Bypass valve closed
11/19/2011	9:16:23 PM	Bubbler valve closed
11/19/2011	9:16:23 PM	Helium valve opened
11/19/2011	9:16:23 PM	Main Vac valve opened
11/19/2011	9:16:23 PM	Helium MFC set to  20.000000
11/19/2011	9:16:23 PM	H2 MFC set to  0.000000
11/19/2011	9:16:23 PM	BCl3 MFC set to  0.000000
11/19/2011	9:16:23 PM	PHl3 MFC set to  0.000000
11/19/2011	9:16:23 PM	SiCl4 MFC set to  0.000000
11/19/2011	9:16:23 PM	Bypass solenoid MFC set to  0.000000
11/19/2011	9:16:23 PM	Tube furnace set to 150
11/19/2011	9:16:53 PM	Helium valve closed
11/19/2011	9:16:53 PM	H2 valve closed
11/19/2011	9:16:53 PM	BCl3 valve closed
11/19/2011	9:16:53 PM	PH3 valve closed
11/19/2011	9:16:53 PM	SiCl4 pre valve closed
11/19/2011	9:16:53 PM	SiCl4 post valve closed
11/19/2011	9:16:53 PM	Bypass valve closed
11/19/2011	9:16:53 PM	Bubbler valve closed
11/19/2011	9:16:53 PM	Main Vac valve opened
11/19/2011	9:16:53 PM	Helium MFC set to  0.000000
11/19/2011	9:16:53 PM	H2 MFC set to  0.000000
11/19/2011	9:16:53 PM	BCl3 MFC set to  0.000000
11/19/2011	9:16:53 PM	PHl3 MFC set to  0.000000
11/19/2011	9:16:53 PM	SiCl4 MFC set to  0.000000
11/19/2011	9:16:53 PM	Bypass solenoid MFC set to  0.000000
11/19/2011	9:16:53 PM	Tube furnace set to 150
11/19/2011	9:17:23 PM	H2 valve closed
11/19/2011	9:17:23 PM	BCl3 valve closed
11/19/2011	9:17:23 PM	PH3 valve closed
11/19/2011	9:17:23 PM	SiCl4 pre valve closed
11/19/2011	9:17:23 PM	SiCl4 post valve closed
11/19/2011	9:17:23 PM	Bypass valve closed
11/19/2011	9:17:23 PM	Bubbler valve closed
11/19/2011	9:17:23 PM	Helium valve opened
11/19/2011	9:17:23 PM	Main Vac valve opened
11/19/2011	9:17:23 PM	Helium MFC set to  20.000000
11/19/2011	9:17:23 PM	H2 MFC set to  0.000000
11/19/2011	9:17:23 PM	BCl3 MFC set to  0.000000
11/19/2011	9:17:23 PM	PHl3 MFC set to  0.000000
11/19/2011	9:17:23 PM	SiCl4 MFC set to  0.000000
11/19/2011	9:17:23 PM	Bypass solenoid MFC set to  0.000000
11/19/2011	9:17:23 PM	Tube furnace set to 180
11/19/2011	9:17:53 PM	Helium valve closed
11/19/2011	9:17:53 PM	H2 valve closed
11/19/2011	9:17:53 PM	BCl3 valve closed
11/19/2011	9:17:53 PM	PH3 valve closed
11/19/2011	9:17:53 PM	SiCl4 pre valve closed
11/19/2011	9:17:53 PM	SiCl4 post valve closed
11/19/2011	9:17:53 PM	Bypass valve closed
11/19/2011	9:17:53 PM	Bubbler valve closed
11/19/2011	9:17:53 PM	Main Vac valve opened
11/19/2011	9:17:53 PM	Helium MFC set to  0.000000
11/19/2011	9:17:53 PM	H2 MFC set to  0.000000
11/19/2011	9:17:53 PM	BCl3 MFC set to  0.000000
11/19/2011	9:17:53 PM	PHl3 MFC set to  0.000000
11/19/2011	9:17:53 PM	SiCl4 MFC set to  0.000000
11/19/2011	9:17:53 PM	Bypass solenoid MFC set to  0.000000
11/19/2011	9:17:53 PM	Tube furnace set to 150
11/19/2011	9:18:23 PM	H2 valve closed
11/19/2011	9:18:23 PM	BCl3 valve closed
11/19/2011	9:18:23 PM	PH3 valve closed
11/19/2011	9:18:23 PM	SiCl4 pre valve closed
11/19/2011	9:18:23 PM	SiCl4 post valve closed
11/19/2011	9:18:23 PM	Bypass valve closed
11/19/2011	9:18:23 PM	Bubbler valve closed
11/19/2011	9:18:23 PM	Helium valve opened
11/19/2011	9:18:23 PM	Main Vac valve opened
11/19/2011	9:18:23 PM	Helium MFC set to  20.000000
11/19/2011	9:18:23 PM	H2 MFC set to  0.000000
11/19/2011	9:18:23 PM	BCl3 MFC set to  0.000000
11/19/2011	9:18:23 PM	PHl3 MFC set to  0.000000
11/19/2011	9:18:23 PM	SiCl4 MFC set to  0.000000
11/19/2011	9:18:23 PM	Bypass solenoid MFC set to  0.000000
11/19/2011	9:18:24 PM	Tube furnace set to 150
11/19/2011	9:18:54 PM	Helium valve closed
11/19/2011	9:18:54 PM	H2 valve closed
11/19/2011	9:18:54 PM	BCl3 valve closed
11/19/2011	9:18:54 PM	PH3 valve closed
11/19/2011	9:18:54 PM	SiCl4 pre valve closed
11/19/2011	9:18:54 PM	SiCl4 post valve closed
11/19/2011	9:18:54 PM	Bypass valve closed
11/19/2011	9:18:54 PM	Bubbler valve closed
11/19/2011	9:18:54 PM	Main Vac valve opened
11/19/2011	9:18:54 PM	Helium MFC set to  0.000000
11/19/2011	9:18:54 PM	H2 MFC set to  0.000000
11/19/2011	9:18:54 PM	BCl3 MFC set to  0.000000
11/19/2011	9:18:54 PM	PHl3 MFC set to  0.000000
11/19/2011	9:18:54 PM	SiCl4 MFC set to  0.000000
11/19/2011	9:18:54 PM	Bypass solenoid MFC set to  0.000000
11/19/2011	9:18:54 PM	Tube furnace set to 150
11/19/2011	9:19:24 PM	H2 valve closed
11/19/2011	9:19:24 PM	BCl3 valve closed
11/19/2011	9:19:24 PM	PH3 valve closed
11/19/2011	9:19:24 PM	SiCl4 pre valve closed
11/19/2011	9:19:24 PM	SiCl4 post valve closed
11/19/2011	9:19:24 PM	Bypass valve closed
11/19/2011	9:19:24 PM	Bubbler valve closed
11/19/2011	9:19:24 PM	Helium valve opened
11/19/2011	9:19:24 PM	Main Vac valve opened
11/19/2011	9:19:24 PM	Helium MFC set to  20.000000
11/19/2011	9:19:24 PM	H2 MFC set to  0.000000
11/19/2011	9:19:24 PM	BCl3 MFC set to  0.000000
11/19/2011	9:19:24 PM	PHl3 MFC set to  0.000000
11/19/2011	9:19:24 PM	SiCl4 MFC set to  0.000000
11/19/2011	9:19:24 PM	Bypass solenoid MFC set to  0.000000
11/19/2011	9:19:24 PM	Tube furnace set to 150
11/19/2011	9:19:54 PM	Helium valve closed
11/19/2011	9:19:54 PM	H2 valve closed
11/19/2011	9:19:54 PM	BCl3 valve closed
11/19/2011	9:19:54 PM	PH3 valve closed
11/19/2011	9:19:54 PM	SiCl4 pre valve closed
11/19/2011	9:19:54 PM	SiCl4 post valve closed
11/19/2011	9:19:54 PM	Bypass valve closed
11/19/2011	9:19:54 PM	Bubbler valve closed
11/19/2011	9:19:54 PM	Main Vac valve opened
11/19/2011	9:19:54 PM	Helium MFC set to  0.000000
11/19/2011	9:19:54 PM	H2 MFC set to  0.000000
11/19/2011	9:19:54 PM	BCl3 MFC set to  0.000000
11/19/2011	9:19:54 PM	PHl3 MFC set to  0.000000
11/19/2011	9:19:54 PM	SiCl4 MFC set to  0.000000
11/19/2011	9:19:54 PM	Bypass solenoid MFC set to  0.000000
11/19/2011	9:19:54 PM	Tube furnace set to 150
11/19/2011	9:20:24 PM	H2 valve closed
11/19/2011	9:20:24 PM	BCl3 valve closed
11/19/2011	9:20:24 PM	PH3 valve closed
11/19/2011	9:20:24 PM	SiCl4 pre valve closed
11/19/2011	9:20:24 PM	SiCl4 post valve closed
11/19/2011	9:20:24 PM	Bypass valve closed
11/19/2011	9:20:24 PM	Bubbler valve closed
11/19/2011	9:20:24 PM	Helium valve opened
11/19/2011	9:20:24 PM	Main Vac valve opened
11/19/2011	9:20:24 PM	Helium MFC set to  20.000000
11/19/2011	9:20:24 PM	H2 MFC set to  0.000000
11/19/2011	9:20:24 PM	BCl3 MFC set to  0.000000
11/19/2011	9:20:24 PM	PHl3 MFC set to  0.000000
11/19/2011	9:20:24 PM	SiCl4 MFC set to  0.000000
11/19/2011	9:20:24 PM	Bypass solenoid MFC set to  0.000000
11/19/2011	9:20:24 PM	Tube furnace set to 150
11/19/2011	9:20:54 PM	Helium valve closed
11/19/2011	9:20:54 PM	H2 valve closed
11/19/2011	9:20:54 PM	BCl3 valve closed
11/19/2011	9:20:54 PM	PH3 valve closed
11/19/2011	9:20:54 PM	SiCl4 pre valve closed
11/19/2011	9:20:54 PM	SiCl4 post valve closed
11/19/2011	9:20:54 PM	Bypass valve closed
11/19/2011	9:20:54 PM	Bubbler valve closed
11/19/2011	9:20:54 PM	Main Vac valve opened
11/19/2011	9:20:54 PM	Helium MFC set to  0.000000
11/19/2011	9:20:54 PM	H2 MFC set to  0.000000
11/19/2011	9:20:54 PM	BCl3 MFC set to  0.000000
11/19/2011	9:20:54 PM	PHl3 MFC set to  0.000000
11/19/2011	9:20:54 PM	SiCl4 MFC set to  0.000000
11/19/2011	9:20:54 PM	Bypass solenoid MFC set to  0.000000
11/19/2011	9:20:55 PM	Tube furnace set to 150
11/19/2011	9:21:25 PM	H2 valve closed
11/19/2011	9:21:25 PM	BCl3 valve closed
11/19/2011	9:21:25 PM	PH3 valve closed
11/19/2011	9:21:25 PM	SiCl4 pre valve closed
11/19/2011	9:21:25 PM	SiCl4 post valve closed
11/19/2011	9:21:25 PM	Bypass valve closed
11/19/2011	9:21:25 PM	Bubbler valve closed
11/19/2011	9:21:25 PM	Helium valve opened
11/19/2011	9:21:25 PM	Main Vac valve opened
11/19/2011	9:21:25 PM	Helium MFC set to  20.000000
11/19/2011	9:21:25 PM	H2 MFC set to  0.000000
11/19/2011	9:21:25 PM	BCl3 MFC set to  0.000000
11/19/2011	9:21:25 PM	PHl3 MFC set to  0.000000
11/19/2011	9:21:25 PM	SiCl4 MFC set to  0.000000
11/19/2011	9:21:25 PM	Bypass solenoid MFC set to  0.000000
11/19/2011	9:21:25 PM	Tube furnace set to 150
11/19/2011	9:21:55 PM	Helium valve closed
11/19/2011	9:21:55 PM	H2 valve closed
11/19/2011	9:21:55 PM	BCl3 valve closed
11/19/2011	9:21:55 PM	PH3 valve closed
11/19/2011	9:21:55 PM	SiCl4 pre valve closed
11/19/2011	9:21:55 PM	SiCl4 post valve closed
11/19/2011	9:21:55 PM	Bypass valve closed
11/19/2011	9:21:55 PM	Bubbler valve closed
11/19/2011	9:21:55 PM	Main Vac valve opened
11/19/2011	9:21:55 PM	Helium MFC set to  0.000000
11/19/2011	9:21:55 PM	H2 MFC set to  0.000000
11/19/2011	9:21:55 PM	BCl3 MFC set to  0.000000
11/19/2011	9:21:55 PM	PHl3 MFC set to  0.000000
11/19/2011	9:21:55 PM	SiCl4 MFC set to  0.000000
11/19/2011	9:21:55 PM	Bypass solenoid MFC set to  0.000000
11/19/2011	9:21:55 PM	Tube furnace set to 150
11/19/2011	9:22:25 PM	H2 valve closed
11/19/2011	9:22:25 PM	BCl3 valve closed
11/19/2011	9:22:25 PM	PH3 valve closed
11/19/2011	9:22:25 PM	SiCl4 pre valve closed
11/19/2011	9:22:25 PM	SiCl4 post valve closed
11/19/2011	9:22:25 PM	Bypass valve closed
11/19/2011	9:22:25 PM	Bubbler valve closed
11/19/2011	9:22:25 PM	Helium valve opened
11/19/2011	9:22:25 PM	Main Vac valve opened
11/19/2011	9:22:25 PM	Helium MFC set to  20.000000
11/19/2011	9:22:25 PM	H2 MFC set to  0.000000
11/19/2011	9:22:25 PM	BCl3 MFC set to  0.000000
11/19/2011	9:22:25 PM	PHl3 MFC set to  0.000000
11/19/2011	9:22:25 PM	SiCl4 MFC set to  0.000000
11/19/2011	9:22:25 PM	Bypass solenoid MFC set to  0.000000
11/19/2011	9:22:25 PM	Tube furnace set to 150
11/19/2011	9:22:55 PM	Helium valve closed
11/19/2011	9:22:55 PM	H2 valve closed
11/19/2011	9:22:55 PM	BCl3 valve closed
11/19/2011	9:22:55 PM	PH3 valve closed
11/19/2011	9:22:55 PM	SiCl4 pre valve closed
11/19/2011	9:22:55 PM	SiCl4 post valve closed
11/19/2011	9:22:55 PM	Bypass valve closed
11/19/2011	9:22:55 PM	Bubbler valve closed
11/19/2011	9:22:55 PM	Main Vac valve opened
11/19/2011	9:22:55 PM	Helium MFC set to  0.000000
11/19/2011	9:22:55 PM	H2 MFC set to  0.000000
11/19/2011	9:22:55 PM	BCl3 MFC set to  0.000000
11/19/2011	9:22:55 PM	PHl3 MFC set to  0.000000
11/19/2011	9:22:55 PM	SiCl4 MFC set to  0.000000
11/19/2011	9:22:55 PM	Bypass solenoid MFC set to  0.000000
11/19/2011	9:22:55 PM	Tube furnace set to 150
11/19/2011	9:23:25 PM	H2 valve closed
11/19/2011	9:23:25 PM	BCl3 valve closed
11/19/2011	9:23:25 PM	PH3 valve closed
11/19/2011	9:23:25 PM	SiCl4 pre valve closed
11/19/2011	9:23:25 PM	SiCl4 post valve closed
11/19/2011	9:23:25 PM	Bypass valve closed
11/19/2011	9:23:25 PM	Bubbler valve closed
11/19/2011	9:23:25 PM	Helium valve opened
11/19/2011	9:23:25 PM	Main Vac valve opened
11/19/2011	9:23:25 PM	Helium MFC set to  20.000000
11/19/2011	9:23:25 PM	H2 MFC set to  0.000000
11/19/2011	9:23:25 PM	BCl3 MFC set to  0.000000
11/19/2011	9:23:25 PM	PHl3 MFC set to  0.000000
11/19/2011	9:23:25 PM	SiCl4 MFC set to  0.000000
11/19/2011	9:23:26 PM	Bypass solenoid MFC set to  0.000000
11/19/2011	9:23:26 PM	Tube furnace set to 150
11/19/2011	9:23:56 PM	Helium valve closed
11/19/2011	9:23:56 PM	H2 valve closed
11/19/2011	9:23:56 PM	BCl3 valve closed
11/19/2011	9:23:56 PM	PH3 valve closed
11/19/2011	9:23:56 PM	SiCl4 pre valve closed
11/19/2011	9:23:56 PM	SiCl4 post valve closed
11/19/2011	9:23:56 PM	Bypass valve closed
11/19/2011	9:23:56 PM	Bubbler valve closed
11/19/2011	9:23:56 PM	Main Vac valve opened
11/19/2011	9:23:56 PM	Helium MFC set to  0.000000
11/19/2011	9:23:56 PM	H2 MFC set to  0.000000
11/19/2011	9:23:56 PM	BCl3 MFC set to  0.000000
11/19/2011	9:23:56 PM	PHl3 MFC set to  0.000000
11/19/2011	9:23:56 PM	SiCl4 MFC set to  0.000000
11/19/2011	9:23:56 PM	Bypass solenoid MFC set to  0.000000
11/19/2011	9:23:56 PM	Tube furnace set to 150
11/19/2011	9:24:26 PM	H2 valve closed
11/19/2011	9:24:26 PM	BCl3 valve closed
11/19/2011	9:24:26 PM	PH3 valve closed
11/19/2011	9:24:26 PM	SiCl4 pre valve closed
11/19/2011	9:24:26 PM	SiCl4 post valve closed
11/19/2011	9:24:26 PM	Bypass valve closed
11/19/2011	9:24:26 PM	Bubbler valve closed
11/19/2011	9:24:26 PM	Helium valve opened
11/19/2011	9:24:26 PM	Main Vac valve opened
11/19/2011	9:24:26 PM	Helium MFC set to  20.000000
11/19/2011	9:24:26 PM	H2 MFC set to  0.000000
11/19/2011	9:24:26 PM	BCl3 MFC set to  0.000000
11/19/2011	9:24:26 PM	PHl3 MFC set to  0.000000
11/19/2011	9:24:26 PM	SiCl4 MFC set to  0.000000
11/19/2011	9:24:26 PM	Bypass solenoid MFC set to  0.000000
11/19/2011	9:24:26 PM	Tube furnace set to 150
11/19/2011	9:24:56 PM	Helium valve closed
11/19/2011	9:24:56 PM	H2 valve closed
11/19/2011	9:24:56 PM	BCl3 valve closed
11/19/2011	9:24:56 PM	PH3 valve closed
11/19/2011	9:24:56 PM	SiCl4 pre valve closed
11/19/2011	9:24:56 PM	SiCl4 post valve closed
11/19/2011	9:24:56 PM	Bypass valve closed
11/19/2011	9:24:56 PM	Bubbler valve closed
11/19/2011	9:24:56 PM	Main Vac valve opened
11/19/2011	9:24:56 PM	Helium MFC set to  0.000000
11/19/2011	9:24:56 PM	H2 MFC set to  0.000000
11/19/2011	9:24:56 PM	BCl3 MFC set to  0.000000
11/19/2011	9:24:56 PM	PHl3 MFC set to  0.000000
11/19/2011	9:24:56 PM	SiCl4 MFC set to  0.000000
11/19/2011	9:24:56 PM	Bypass solenoid MFC set to  0.000000
11/19/2011	9:24:56 PM	Tube furnace set to 150
11/19/2011	9:25:26 PM	H2 valve closed
11/19/2011	9:25:26 PM	BCl3 valve closed
11/19/2011	9:25:26 PM	PH3 valve closed
11/19/2011	9:25:26 PM	SiCl4 pre valve closed
11/19/2011	9:25:26 PM	SiCl4 post valve closed
11/19/2011	9:25:26 PM	Bypass valve closed
11/19/2011	9:25:26 PM	Bubbler valve closed
11/19/2011	9:25:26 PM	Helium valve opened
11/19/2011	9:25:26 PM	Main Vac valve opened
11/19/2011	9:25:26 PM	Helium MFC set to  20.000000
11/19/2011	9:25:26 PM	H2 MFC set to  0.000000
11/19/2011	9:25:26 PM	BCl3 MFC set to  0.000000
11/19/2011	9:25:26 PM	PHl3 MFC set to  0.000000
11/19/2011	9:25:26 PM	SiCl4 MFC set to  0.000000
11/19/2011	9:25:26 PM	Bypass solenoid MFC set to  0.000000
11/19/2011	9:25:27 PM	Tube furnace set to 150
11/19/2011	9:25:57 PM	Helium valve closed
11/19/2011	9:25:57 PM	H2 valve closed
11/19/2011	9:25:57 PM	BCl3 valve closed
11/19/2011	9:25:57 PM	PH3 valve closed
11/19/2011	9:25:57 PM	SiCl4 pre valve closed
11/19/2011	9:25:57 PM	SiCl4 post valve closed
11/19/2011	9:25:57 PM	Bypass valve closed
11/19/2011	9:25:57 PM	Bubbler valve closed
11/19/2011	9:25:57 PM	Main Vac valve opened
11/19/2011	9:25:57 PM	Helium MFC set to  0.000000
11/19/2011	9:25:57 PM	H2 MFC set to  0.000000
11/19/2011	9:25:57 PM	BCl3 MFC set to  0.000000
11/19/2011	9:25:57 PM	PHl3 MFC set to  0.000000
11/19/2011	9:25:57 PM	SiCl4 MFC set to  0.000000
11/19/2011	9:25:57 PM	Bypass solenoid MFC set to  0.000000
11/19/2011	9:25:57 PM	Tube furnace set to 150
11/19/2011	9:26:27 PM	H2 valve closed
11/19/2011	9:26:27 PM	BCl3 valve closed
11/19/2011	9:26:27 PM	PH3 valve closed
11/19/2011	9:26:27 PM	SiCl4 pre valve closed
11/19/2011	9:26:27 PM	SiCl4 post valve closed
11/19/2011	9:26:27 PM	Bypass valve closed
11/19/2011	9:26:27 PM	Bubbler valve closed
11/19/2011	9:26:27 PM	Helium valve opened
11/19/2011	9:26:27 PM	Main Vac valve opened
11/19/2011	9:26:27 PM	Helium MFC set to  20.000000
11/19/2011	9:26:27 PM	H2 MFC set to  0.000000
11/19/2011	9:26:27 PM	BCl3 MFC set to  0.000000
11/19/2011	9:26:27 PM	PHl3 MFC set to  0.000000
11/19/2011	9:26:27 PM	SiCl4 MFC set to  0.000000
11/19/2011	9:26:27 PM	Bypass solenoid MFC set to  0.000000
11/19/2011	9:26:27 PM	Tube furnace set to 150
11/19/2011	9:26:57 PM	Helium valve closed
11/19/2011	9:26:57 PM	H2 valve closed
11/19/2011	9:26:57 PM	BCl3 valve closed
11/19/2011	9:26:57 PM	PH3 valve closed
11/19/2011	9:26:57 PM	SiCl4 pre valve closed
11/19/2011	9:26:57 PM	SiCl4 post valve closed
11/19/2011	9:26:57 PM	Bypass valve closed
11/19/2011	9:26:57 PM	Bubbler valve closed
11/19/2011	9:26:57 PM	Main Vac valve opened
11/19/2011	9:26:57 PM	Helium MFC set to  0.000000
11/19/2011	9:26:57 PM	H2 MFC set to  0.000000
11/19/2011	9:26:57 PM	BCl3 MFC set to  0.000000
11/19/2011	9:26:57 PM	PHl3 MFC set to  0.000000
11/19/2011	9:26:57 PM	SiCl4 MFC set to  0.000000
11/19/2011	9:26:57 PM	Bypass solenoid MFC set to  0.000000
11/19/2011	9:26:57 PM	Tube furnace set to 150
11/19/2011	9:27:27 PM	H2 valve closed
11/19/2011	9:27:27 PM	BCl3 valve closed
11/19/2011	9:27:27 PM	PH3 valve closed
11/19/2011	9:27:27 PM	SiCl4 pre valve closed
11/19/2011	9:27:27 PM	SiCl4 post valve closed
11/19/2011	9:27:27 PM	Bypass valve closed
11/19/2011	9:27:27 PM	Bubbler valve closed
11/19/2011	9:27:27 PM	Helium valve opened
11/19/2011	9:27:27 PM	Main Vac valve opened
11/19/2011	9:27:27 PM	Helium MFC set to  20.000000
11/19/2011	9:27:27 PM	H2 MFC set to  0.000000
11/19/2011	9:27:27 PM	BCl3 MFC set to  0.000000
11/19/2011	9:27:27 PM	PHl3 MFC set to  0.000000
11/19/2011	9:27:27 PM	SiCl4 MFC set to  0.000000
11/19/2011	9:27:27 PM	Bypass solenoid MFC set to  0.000000
11/19/2011	9:27:27 PM	Tube furnace set to 150
11/19/2011	9:27:57 PM	Helium valve closed
11/19/2011	9:27:57 PM	H2 valve closed
11/19/2011	9:27:57 PM	BCl3 valve closed
11/19/2011	9:27:57 PM	PH3 valve closed
11/19/2011	9:27:57 PM	SiCl4 pre valve closed
11/19/2011	9:27:57 PM	SiCl4 post valve closed
11/19/2011	9:27:57 PM	Bypass valve closed
11/19/2011	9:27:57 PM	Bubbler valve closed
11/19/2011	9:27:57 PM	Main Vac valve opened
11/19/2011	9:27:57 PM	Helium MFC set to  0.000000
11/19/2011	9:27:57 PM	H2 MFC set to  0.000000
11/19/2011	9:27:57 PM	BCl3 MFC set to  0.000000
11/19/2011	9:27:57 PM	PHl3 MFC set to  0.000000
11/19/2011	9:27:57 PM	SiCl4 MFC set to  0.000000
11/19/2011	9:27:57 PM	Bypass solenoid MFC set to  0.000000
11/19/2011	9:27:58 PM	Tube furnace set to 150
11/19/2011	9:28:28 PM	H2 valve closed
11/19/2011	9:28:28 PM	BCl3 valve closed
11/19/2011	9:28:28 PM	PH3 valve closed
11/19/2011	9:28:28 PM	SiCl4 pre valve closed
11/19/2011	9:28:28 PM	SiCl4 post valve closed
11/19/2011	9:28:28 PM	Bypass valve closed
11/19/2011	9:28:28 PM	Bubbler valve closed
11/19/2011	9:28:28 PM	Helium valve opened
11/19/2011	9:28:28 PM	Main Vac valve opened
11/19/2011	9:28:28 PM	Helium MFC set to  20.000000
11/19/2011	9:28:28 PM	H2 MFC set to  0.000000
11/19/2011	9:28:28 PM	BCl3 MFC set to  0.000000
11/19/2011	9:28:28 PM	PHl3 MFC set to  0.000000
11/19/2011	9:28:28 PM	SiCl4 MFC set to  0.000000
11/19/2011	9:28:28 PM	Bypass solenoid MFC set to  0.000000
11/19/2011	9:28:28 PM	Tube furnace set to 150
11/19/2011	9:28:58 PM	Helium valve closed
11/19/2011	9:28:58 PM	H2 valve closed
11/19/2011	9:28:58 PM	BCl3 valve closed
11/19/2011	9:28:58 PM	PH3 valve closed
11/19/2011	9:28:58 PM	SiCl4 pre valve closed
11/19/2011	9:28:58 PM	SiCl4 post valve closed
11/19/2011	9:28:58 PM	Bypass valve closed
11/19/2011	9:28:58 PM	Bubbler valve closed
11/19/2011	9:28:58 PM	Main Vac valve opened
11/19/2011	9:28:58 PM	Helium MFC set to  0.000000
11/19/2011	9:28:58 PM	H2 MFC set to  0.000000
11/19/2011	9:28:58 PM	BCl3 MFC set to  0.000000
11/19/2011	9:28:58 PM	PHl3 MFC set to  0.000000
11/19/2011	9:28:58 PM	SiCl4 MFC set to  0.000000
11/19/2011	9:28:58 PM	Bypass solenoid MFC set to  0.000000
11/19/2011	9:28:58 PM	Tube furnace set to 150
11/19/2011	9:29:28 PM	H2 valve closed
11/19/2011	9:29:28 PM	BCl3 valve closed
11/19/2011	9:29:28 PM	PH3 valve closed
11/19/2011	9:29:28 PM	SiCl4 pre valve closed
11/19/2011	9:29:28 PM	SiCl4 post valve closed
11/19/2011	9:29:28 PM	Bypass valve closed
11/19/2011	9:29:28 PM	Bubbler valve closed
11/19/2011	9:29:28 PM	Helium valve opened
11/19/2011	9:29:28 PM	Main Vac valve opened
11/19/2011	9:29:28 PM	Helium MFC set to  20.000000
11/19/2011	9:29:28 PM	H2 MFC set to  0.000000
11/19/2011	9:29:28 PM	BCl3 MFC set to  0.000000
11/19/2011	9:29:28 PM	PHl3 MFC set to  0.000000
11/19/2011	9:29:28 PM	SiCl4 MFC set to  0.000000
11/19/2011	9:29:28 PM	Bypass solenoid MFC set to  0.000000
11/19/2011	9:29:28 PM	Tube furnace set to 150
11/19/2011	9:29:58 PM	Helium valve closed
11/19/2011	9:29:58 PM	H2 valve closed
11/19/2011	9:29:58 PM	BCl3 valve closed
11/19/2011	9:29:58 PM	PH3 valve closed
11/19/2011	9:29:58 PM	SiCl4 pre valve closed
11/19/2011	9:29:58 PM	SiCl4 post valve closed
11/19/2011	9:29:58 PM	Bypass valve closed
11/19/2011	9:29:58 PM	Bubbler valve closed
11/19/2011	9:29:58 PM	Main Vac valve opened
11/19/2011	9:29:58 PM	Helium MFC set to  0.000000
11/19/2011	9:29:58 PM	H2 MFC set to  0.000000
11/19/2011	9:29:58 PM	BCl3 MFC set to  0.000000
11/19/2011	9:29:58 PM	PHl3 MFC set to  0.000000
11/19/2011	9:29:58 PM	SiCl4 MFC set to  0.000000
11/19/2011	9:29:58 PM	Bypass solenoid MFC set to  0.000000
11/19/2011	9:29:58 PM	Tube furnace set to 150
11/19/2011	9:30:28 PM	H2 valve closed
11/19/2011	9:30:28 PM	BCl3 valve closed
11/19/2011	9:30:28 PM	PH3 valve closed
11/19/2011	9:30:28 PM	SiCl4 pre valve closed
11/19/2011	9:30:28 PM	SiCl4 post valve closed
11/19/2011	9:30:28 PM	Bypass valve closed
11/19/2011	9:30:28 PM	Bubbler valve closed
11/19/2011	9:30:29 PM	Helium valve opened
11/19/2011	9:30:29 PM	Main Vac valve opened
11/19/2011	9:30:29 PM	Helium MFC set to  20.000000
11/19/2011	9:30:29 PM	H2 MFC set to  0.000000
11/19/2011	9:30:29 PM	BCl3 MFC set to  0.000000
11/19/2011	9:30:29 PM	PHl3 MFC set to  0.000000
11/19/2011	9:30:29 PM	SiCl4 MFC set to  0.000000
11/19/2011	9:30:29 PM	Bypass solenoid MFC set to  0.000000
11/19/2011	9:30:29 PM	Tube furnace set to 150
11/19/2011	9:30:59 PM	Helium valve closed
11/19/2011	9:30:59 PM	H2 valve closed
11/19/2011	9:30:59 PM	BCl3 valve closed
11/19/2011	9:30:59 PM	PH3 valve closed
11/19/2011	9:30:59 PM	SiCl4 pre valve closed
11/19/2011	9:30:59 PM	SiCl4 post valve closed
11/19/2011	9:30:59 PM	Bypass valve closed
11/19/2011	9:30:59 PM	Bubbler valve closed
11/19/2011	9:30:59 PM	Main Vac valve opened
11/19/2011	9:30:59 PM	Helium MFC set to  0.000000
11/19/2011	9:30:59 PM	H2 MFC set to  0.000000
11/19/2011	9:30:59 PM	BCl3 MFC set to  0.000000
11/19/2011	9:30:59 PM	PHl3 MFC set to  0.000000
11/19/2011	9:30:59 PM	SiCl4 MFC set to  0.000000
11/19/2011	9:30:59 PM	Bypass solenoid MFC set to  0.000000
11/19/2011	9:30:59 PM	Tube furnace set to 150
11/19/2011	9:31:29 PM	H2 valve closed
11/19/2011	9:31:29 PM	BCl3 valve closed
11/19/2011	9:31:29 PM	PH3 valve closed
11/19/2011	9:31:29 PM	SiCl4 pre valve closed
11/19/2011	9:31:29 PM	SiCl4 post valve closed
11/19/2011	9:31:29 PM	Bypass valve closed
11/19/2011	9:31:29 PM	Bubbler valve closed
11/19/2011	9:31:29 PM	Helium valve opened
11/19/2011	9:31:29 PM	Main Vac valve opened
11/19/2011	9:31:29 PM	Helium MFC set to  20.000000
11/19/2011	9:31:29 PM	H2 MFC set to  0.000000
11/19/2011	9:31:29 PM	BCl3 MFC set to  0.000000
11/19/2011	9:31:29 PM	PHl3 MFC set to  0.000000
11/19/2011	9:31:29 PM	SiCl4 MFC set to  0.000000
11/19/2011	9:31:29 PM	Bypass solenoid MFC set to  0.000000
11/19/2011	9:31:29 PM	Tube furnace set to 150
11/19/2011	9:31:59 PM	Helium valve closed
11/19/2011	9:31:59 PM	H2 valve closed
11/19/2011	9:31:59 PM	BCl3 valve closed
11/19/2011	9:31:59 PM	PH3 valve closed
11/19/2011	9:31:59 PM	SiCl4 pre valve closed
11/19/2011	9:31:59 PM	SiCl4 post valve closed
11/19/2011	9:31:59 PM	Bypass valve closed
11/19/2011	9:31:59 PM	Bubbler valve closed
11/19/2011	9:31:59 PM	Main Vac valve opened
11/19/2011	9:31:59 PM	Helium MFC set to  0.000000
11/19/2011	9:31:59 PM	H2 MFC set to  0.000000
11/19/2011	9:31:59 PM	BCl3 MFC set to  0.000000
11/19/2011	9:31:59 PM	PHl3 MFC set to  0.000000
11/19/2011	9:31:59 PM	SiCl4 MFC set to  0.000000
11/19/2011	9:31:59 PM	Bypass solenoid MFC set to  0.000000
11/19/2011	9:31:59 PM	Tube furnace set to 150
11/19/2011	9:32:29 PM	H2 valve closed
11/19/2011	9:32:29 PM	BCl3 valve closed
11/19/2011	9:32:29 PM	PH3 valve closed
11/19/2011	9:32:29 PM	SiCl4 pre valve closed
11/19/2011	9:32:29 PM	SiCl4 post valve closed
11/19/2011	9:32:29 PM	Bypass valve closed
11/19/2011	9:32:29 PM	Bubbler valve closed
11/19/2011	9:32:29 PM	Helium valve opened
11/19/2011	9:32:29 PM	Main Vac valve opened
11/19/2011	9:32:29 PM	Helium MFC set to  20.000000
11/19/2011	9:32:29 PM	H2 MFC set to  0.000000
11/19/2011	9:32:29 PM	BCl3 MFC set to  0.000000
11/19/2011	9:32:29 PM	PHl3 MFC set to  0.000000
11/19/2011	9:32:29 PM	SiCl4 MFC set to  0.000000
11/19/2011	9:32:29 PM	Bypass solenoid MFC set to  0.000000
11/19/2011	9:32:30 PM	Tube furnace set to 150
11/19/2011	9:33:00 PM	Helium valve closed
11/19/2011	9:33:00 PM	H2 valve closed
11/19/2011	9:33:00 PM	BCl3 valve closed
11/19/2011	9:33:00 PM	PH3 valve closed
11/19/2011	9:33:00 PM	SiCl4 pre valve closed
11/19/2011	9:33:00 PM	SiCl4 post valve closed
11/19/2011	9:33:00 PM	Bypass valve closed
11/19/2011	9:33:00 PM	Bubbler valve closed
11/19/2011	9:33:00 PM	Main Vac valve opened
11/19/2011	9:33:00 PM	Helium MFC set to  0.000000
11/19/2011	9:33:00 PM	H2 MFC set to  0.000000
11/19/2011	9:33:00 PM	BCl3 MFC set to  0.000000
11/19/2011	9:33:00 PM	PHl3 MFC set to  0.000000
11/19/2011	9:33:00 PM	SiCl4 MFC set to  0.000000
11/19/2011	9:33:00 PM	Bypass solenoid MFC set to  0.000000
11/19/2011	9:33:00 PM	Tube furnace set to 150
11/19/2011	9:33:30 PM	H2 valve closed
11/19/2011	9:33:30 PM	BCl3 valve closed
11/19/2011	9:33:30 PM	PH3 valve closed
11/19/2011	9:33:30 PM	SiCl4 pre valve closed
11/19/2011	9:33:30 PM	SiCl4 post valve closed
11/19/2011	9:33:30 PM	Bypass valve closed
11/19/2011	9:33:30 PM	Bubbler valve closed
11/19/2011	9:33:30 PM	Helium valve opened
11/19/2011	9:33:30 PM	Main Vac valve opened
11/19/2011	9:33:30 PM	Helium MFC set to  20.000000
11/19/2011	9:33:30 PM	H2 MFC set to  0.000000
11/19/2011	9:33:30 PM	BCl3 MFC set to  0.000000
11/19/2011	9:33:30 PM	PHl3 MFC set to  0.000000
11/19/2011	9:33:30 PM	SiCl4 MFC set to  0.000000
11/19/2011	9:33:30 PM	Bypass solenoid MFC set to  0.000000
11/19/2011	9:33:30 PM	Tube furnace set to 150
11/19/2011	9:34:00 PM	Helium valve closed
11/19/2011	9:34:00 PM	H2 valve closed
11/19/2011	9:34:00 PM	BCl3 valve closed
11/19/2011	9:34:00 PM	PH3 valve closed
11/19/2011	9:34:00 PM	SiCl4 pre valve closed
11/19/2011	9:34:00 PM	SiCl4 post valve closed
11/19/2011	9:34:00 PM	Bypass valve closed
11/19/2011	9:34:00 PM	Bubbler valve closed
11/19/2011	9:34:00 PM	Main Vac valve opened
11/19/2011	9:34:00 PM	Helium MFC set to  0.000000
11/19/2011	9:34:00 PM	H2 MFC set to  0.000000
11/19/2011	9:34:00 PM	BCl3 MFC set to  0.000000
11/19/2011	9:34:00 PM	PHl3 MFC set to  0.000000
11/19/2011	9:34:00 PM	SiCl4 MFC set to  0.000000
11/19/2011	9:34:00 PM	Bypass solenoid MFC set to  0.000000
11/19/2011	9:34:00 PM	Tube furnace set to 180
11/19/2011	9:34:05 PM	Run finished at 9:34 PM
11/19/2011	9:35:31 PM	Main Vac valve closed
11/19/2011	9:35:41 PM	Main Vac valve opened
11/19/2011	9:36:28 PM	Recipe started at 9:36 PM
11/19/2011	9:36:28 PM	Helium valve closed
11/19/2011	9:36:28 PM	H2 valve closed
11/19/2011	9:36:28 PM	BCl3 valve closed
11/19/2011	9:36:28 PM	PH3 valve closed
11/19/2011	9:36:28 PM	SiCl4 pre valve closed
11/19/2011	9:36:28 PM	SiCl4 post valve closed
11/19/2011	9:36:28 PM	Main Vac valve closed
11/19/2011	9:36:28 PM	Bypass valve closed
11/19/2011	9:36:28 PM	Bubbler valve closed
11/19/2011	9:36:28 PM	Helium MFC set to  0.000000
11/19/2011	9:36:28 PM	H2 MFC set to  0.000000
11/19/2011	9:36:28 PM	BCl3 MFC set to  0.000000
11/19/2011	9:36:28 PM	PHl3 MFC set to  0.000000
11/19/2011	9:36:28 PM	SiCl4 MFC set to  0.000000
11/19/2011	9:36:28 PM	Bypass solenoid MFC set to  0.000000
11/19/2011	9:36:29 PM	Tube furnace set to 0
11/19/2011	9:36:32 PM	Helium valve closed
11/19/2011	9:36:32 PM	BCl3 valve closed
11/19/2011	9:36:32 PM	PH3 valve closed
11/19/2011	9:36:32 PM	SiCl4 pre valve closed
11/19/2011	9:36:32 PM	SiCl4 post valve closed
11/19/2011	9:36:32 PM	Main Vac valve closed
11/19/2011	9:36:32 PM	Bypass valve closed
11/19/2011	9:36:32 PM	Bubbler valve closed
11/19/2011	9:36:32 PM	H2 valve opened
11/19/2011	9:36:32 PM	Helium MFC set to  0.000000
11/19/2011	9:36:32 PM	H2 MFC set to  500.000000
11/19/2011	9:36:32 PM	BCl3 MFC set to  0.000000
11/19/2011	9:36:32 PM	PHl3 MFC set to  0.000000
11/19/2011	9:36:32 PM	SiCl4 MFC set to  0.000000
11/19/2011	9:36:32 PM	Bypass solenoid MFC set to  0.000000
11/19/2011	9:36:32 PM	Tube furnace set to 50
11/19/2011	9:37:33 PM	Helium valve closed
11/19/2011	9:37:33 PM	BCl3 valve closed
11/19/2011	9:37:33 PM	PH3 valve closed
11/19/2011	9:37:33 PM	SiCl4 pre valve closed
11/19/2011	9:37:33 PM	SiCl4 post valve closed
11/19/2011	9:37:33 PM	Main Vac valve closed
11/19/2011	9:37:33 PM	Bypass valve closed
11/19/2011	9:37:33 PM	H2 valve opened
11/19/2011	9:37:33 PM	Bubbler valve opened
11/19/2011	9:37:33 PM	Helium MFC set to  0.000000
11/19/2011	9:37:33 PM	H2 MFC set to  500.000000
11/19/2011	9:37:33 PM	BCl3 MFC set to  0.000000
11/19/2011	9:37:33 PM	PHl3 MFC set to  0.000000
11/19/2011	9:37:33 PM	SiCl4 MFC set to  0.000000
11/19/2011	9:37:33 PM	Bypass solenoid MFC set to  0.000000
11/19/2011	9:37:33 PM	Tube furnace set to 50
11/19/2011	9:37:34 PM	Helium valve closed
11/19/2011	9:37:34 PM	BCl3 valve closed
11/19/2011	9:37:34 PM	PH3 valve closed
11/19/2011	9:37:34 PM	SiCl4 pre valve closed
11/19/2011	9:37:34 PM	SiCl4 post valve closed
11/19/2011	9:37:34 PM	Main Vac valve closed
11/19/2011	9:37:34 PM	Bypass valve closed
11/19/2011	9:37:34 PM	H2 valve opened
11/19/2011	9:37:34 PM	Bubbler valve opened
11/19/2011	9:37:34 PM	Helium MFC set to  0.000000
11/19/2011	9:37:34 PM	H2 MFC set to  495.000000
11/19/2011	9:37:34 PM	BCl3 MFC set to  0.000000
11/19/2011	9:37:34 PM	PHl3 MFC set to  0.000000
11/19/2011	9:37:34 PM	SiCl4 MFC set to  0.000000
11/19/2011	9:37:34 PM	Bypass solenoid MFC set to  0.000000
11/19/2011	9:37:35 PM	Tube furnace set to 1000
11/19/2011	9:57:35 PM	Helium valve closed
11/19/2011	9:57:35 PM	BCl3 valve closed
11/19/2011	9:57:35 PM	PH3 valve closed
11/19/2011	9:57:35 PM	Main Vac valve closed
11/19/2011	9:57:35 PM	Bypass valve closed
11/19/2011	9:57:35 PM	H2 valve opened
11/19/2011	9:57:35 PM	SiCl4 pre valve opened
11/19/2011	9:57:35 PM	SiCl4 post valve opened
11/19/2011	9:57:35 PM	Bubbler valve opened
11/19/2011	9:57:35 PM	Helium MFC set to  0.000000
11/19/2011	9:57:35 PM	H2 MFC set to  495.000000
11/19/2011	9:57:35 PM	BCl3 MFC set to  0.000000
11/19/2011	9:57:35 PM	PHl3 MFC set to  0.000000
11/19/2011	9:57:35 PM	SiCl4 MFC set to  24.000000
11/19/2011	9:57:35 PM	Bypass solenoid MFC set to  0.000000
11/19/2011	9:57:35 PM	Tube furnace set to 1000
11/19/2011	10:17:35 PM	Helium valve closed
11/19/2011	10:17:35 PM	BCl3 valve closed
11/19/2011	10:17:35 PM	PH3 valve closed
11/19/2011	10:17:35 PM	SiCl4 pre valve closed
11/19/2011	10:17:35 PM	SiCl4 post valve closed
11/19/2011	10:17:35 PM	Main Vac valve closed
11/19/2011	10:17:35 PM	Bypass valve closed
11/19/2011	10:17:35 PM	H2 valve opened
11/19/2011	10:17:35 PM	Bubbler valve opened
11/19/2011	10:17:35 PM	Helium MFC set to  0.000000
11/19/2011	10:17:35 PM	H2 MFC set to  480.000000
11/19/2011	10:17:35 PM	BCl3 MFC set to  0.000000
11/19/2011	10:17:35 PM	PHl3 MFC set to  0.000000
11/19/2011	10:17:35 PM	SiCl4 MFC set to  0.000000
11/19/2011	10:17:35 PM	Bypass solenoid MFC set to  0.000000
11/19/2011	10:17:35 PM	Tube furnace set to 750
11/19/2011	10:27:35 PM	H2 valve closed
11/19/2011	10:27:35 PM	BCl3 valve closed
11/19/2011	10:27:35 PM	PH3 valve closed
11/19/2011	10:27:35 PM	SiCl4 pre valve closed
11/19/2011	10:27:35 PM	SiCl4 post valve closed
11/19/2011	10:27:35 PM	Main Vac valve closed
11/19/2011	10:27:35 PM	Bypass valve closed
11/19/2011	10:27:35 PM	Helium valve opened
11/19/2011	10:27:35 PM	Bubbler valve opened
11/19/2011	10:27:35 PM	Helium MFC set to  400.000000
11/19/2011	10:27:35 PM	H2 MFC set to  0.000000
11/19/2011	10:27:35 PM	BCl3 MFC set to  0.000000
11/19/2011	10:27:35 PM	PHl3 MFC set to  0.000000
11/19/2011	10:27:35 PM	SiCl4 MFC set to  0.000000
11/19/2011	10:27:35 PM	Bypass solenoid MFC set to  0.000000
11/19/2011	10:27:35 PM	Tube furnace set to 0
11/19/2011	10:30:11 PM	Run aborted at 10:30 PM
11/19/2011	10:30:11 PM	Helium valve closed
11/19/2011	10:30:11 PM	H2 valve closed
11/19/2011	10:30:11 PM	BCl3 valve closed
11/19/2011	10:30:11 PM	PH3 valve closed
11/19/2011	10:30:11 PM	SiCl4 pre valve closed
11/19/2011	10:30:11 PM	SiCl4 post valve closed
11/19/2011	10:30:11 PM	Bypass valve closed
11/19/2011	10:30:11 PM	Main Vac valve closed
11/19/2011	10:30:11 PM	Bubbler valve closed
11/19/2011	10:30:11 PM	Helium MFC set to  0.000000
11/19/2011	10:30:11 PM	H2 MFC set to  0.000000
11/19/2011	10:30:11 PM	BCl3 MFC set to  0.000000
11/19/2011	10:30:11 PM	PHl3 MFC set to  0.000000
11/19/2011	10:30:11 PM	SiCl4 MFC set to  0.000000
11/19/2011	10:30:11 PM	Tube furnace set to 0
11/19/2011	10:30:14 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/19/2011	10:30:15 PM	Recipe started at 10:30 PM
11/19/2011	10:30:15 PM	Helium valve closed
11/19/2011	10:30:15 PM	H2 valve closed
11/19/2011	10:30:15 PM	BCl3 valve closed
11/19/2011	10:30:15 PM	PH3 valve closed
11/19/2011	10:30:15 PM	SiCl4 pre valve closed
11/19/2011	10:30:15 PM	SiCl4 post valve closed
11/19/2011	10:30:15 PM	Main Vac valve closed
11/19/2011	10:30:15 PM	Bypass valve closed
11/19/2011	10:30:15 PM	Bubbler valve closed
11/19/2011	10:30:15 PM	Helium MFC set to  0.000000
11/19/2011	10:30:15 PM	H2 MFC set to  0.000000
11/19/2011	10:30:15 PM	BCl3 MFC set to  0.000000
11/19/2011	10:30:15 PM	PHl3 MFC set to  0.000000
11/19/2011	10:30:15 PM	SiCl4 MFC set to  0.000000
11/19/2011	10:30:15 PM	Bypass solenoid MFC set to  0.000000
11/19/2011	10:30:15 PM	Tube furnace set to 0
11/19/2011	10:30:18 PM	H2 valve closed
11/19/2011	10:30:18 PM	BCl3 valve closed
11/19/2011	10:30:18 PM	PH3 valve closed
11/19/2011	10:30:18 PM	SiCl4 pre valve closed
11/19/2011	10:30:18 PM	SiCl4 post valve closed
11/19/2011	10:30:18 PM	Main Vac valve closed
11/19/2011	10:30:18 PM	Bypass valve closed
11/19/2011	10:30:18 PM	Bubbler valve closed
11/19/2011	10:30:18 PM	Helium valve opened
11/19/2011	10:30:18 PM	Helium MFC set to  500.000000
11/19/2011	10:30:18 PM	H2 MFC set to  0.000000
11/19/2011	10:30:18 PM	BCl3 MFC set to  0.000000
11/19/2011	10:30:18 PM	PHl3 MFC set to  0.000000
11/19/2011	10:30:18 PM	SiCl4 MFC set to  0.000000
11/19/2011	10:30:18 PM	Bypass solenoid MFC set to  0.000000
11/19/2011	10:30:18 PM	Tube furnace set to 0
11/19/2011	10:30:18 PM	Helium valve closed
11/19/2011	10:30:18 PM	H2 valve closed
11/19/2011	10:30:18 PM	BCl3 valve closed
11/19/2011	10:30:18 PM	PH3 valve closed
11/19/2011	10:30:18 PM	SiCl4 pre valve closed
11/19/2011	10:30:18 PM	SiCl4 post valve closed
11/19/2011	10:30:18 PM	Main Vac valve closed
11/19/2011	10:30:18 PM	Bypass valve closed
11/19/2011	10:30:18 PM	Bubbler valve closed
11/19/2011	10:30:18 PM	Helium MFC set to  0.000000
11/19/2011	10:30:18 PM	H2 MFC set to  0.000000
11/19/2011	10:30:18 PM	BCl3 MFC set to  0.000000
11/19/2011	10:30:18 PM	PHl3 MFC set to  0.000000
11/19/2011	10:30:18 PM	SiCl4 MFC set to  0.000000
11/19/2011	10:30:18 PM	Bypass solenoid MFC set to  0.000000
11/19/2011	10:30:19 PM	Tube furnace set to 0
11/19/2011	10:30:20 PM	Run finished at 10:30 PM
11/19/2011	10:30:20 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/19/2011	10:33:01 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/19/2011	10:33:02 PM	Recipe started at 10:33 PM
11/19/2011	10:33:02 PM	Helium valve closed
11/19/2011	10:33:02 PM	H2 valve closed
11/19/2011	10:33:02 PM	BCl3 valve closed
11/19/2011	10:33:02 PM	PH3 valve closed
11/19/2011	10:33:02 PM	SiCl4 pre valve closed
11/19/2011	10:33:02 PM	SiCl4 post valve closed
11/19/2011	10:33:02 PM	Main Vac valve closed
11/19/2011	10:33:02 PM	Bubbler valve closed
11/19/2011	10:33:02 PM	Bypass valve opened
11/19/2011	10:33:02 PM	Helium MFC set to  0.000000
11/19/2011	10:33:02 PM	H2 MFC set to  0.000000
11/19/2011	10:33:02 PM	BCl3 MFC set to  0.000000
11/19/2011	10:33:02 PM	PHl3 MFC set to  0.000000
11/19/2011	10:33:02 PM	SiCl4 MFC set to  0.000000
11/19/2011	10:33:02 PM	Bypass solenoid MFC set to  0.000000
11/19/2011	10:33:02 PM	Tube furnace set to 0
11/19/2011	10:34:54 PM	Helium valve closed
11/19/2011	10:34:54 PM	H2 valve closed
11/19/2011	10:34:54 PM	BCl3 valve closed
11/19/2011	10:34:54 PM	PH3 valve closed
11/19/2011	10:34:54 PM	SiCl4 pre valve closed
11/19/2011	10:34:54 PM	SiCl4 post valve closed
11/19/2011	10:34:54 PM	Main Vac valve closed
11/19/2011	10:34:54 PM	Bubbler valve closed
11/19/2011	10:34:54 PM	Bypass valve opened
11/19/2011	10:34:54 PM	Helium MFC set to  0.000000
11/19/2011	10:34:54 PM	H2 MFC set to  0.000000
11/19/2011	10:34:54 PM	BCl3 MFC set to  0.000000
11/19/2011	10:34:54 PM	PHl3 MFC set to  0.000000
11/19/2011	10:34:54 PM	SiCl4 MFC set to  0.000000
11/19/2011	10:34:54 PM	Bypass solenoid MFC set to  0.000000
11/19/2011	10:34:55 PM	Tube furnace set to 0
11/19/2011	10:35:55 PM	Helium valve closed
11/19/2011	10:35:55 PM	H2 valve closed
11/19/2011	10:35:55 PM	BCl3 valve closed
11/19/2011	10:35:55 PM	PH3 valve closed
11/19/2011	10:35:55 PM	SiCl4 pre valve closed
11/19/2011	10:35:55 PM	SiCl4 post valve closed
11/19/2011	10:35:55 PM	Bypass valve closed
11/19/2011	10:35:55 PM	Bubbler valve closed
11/19/2011	10:35:55 PM	Main Vac valve opened
11/19/2011	10:35:55 PM	Helium MFC set to  0.000000
11/19/2011	10:35:55 PM	H2 MFC set to  0.000000
11/19/2011	10:35:55 PM	BCl3 MFC set to  0.000000
11/19/2011	10:35:55 PM	PHl3 MFC set to  0.000000
11/19/2011	10:35:55 PM	SiCl4 MFC set to  0.000000
11/19/2011	10:35:55 PM	Bypass solenoid MFC set to  0.000000
11/19/2011	10:35:55 PM	Tube furnace set to 0
11/19/2011	10:35:56 PM	Run finished at 10:35 PM
11/19/2011	10:35:56 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
